CN102680407A - Imaging method and device for inducing surface thermal deformation effect based on laser array - Google Patents
Imaging method and device for inducing surface thermal deformation effect based on laser array Download PDFInfo
- Publication number
- CN102680407A CN102680407A CN2012101981388A CN201210198138A CN102680407A CN 102680407 A CN102680407 A CN 102680407A CN 2012101981388 A CN2012101981388 A CN 2012101981388A CN 201210198138 A CN201210198138 A CN 201210198138A CN 102680407 A CN102680407 A CN 102680407A
- Authority
- CN
- China
- Prior art keywords
- light
- pump
- sample
- beam group
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses an imaging method and an imaging device for inducing a surface thermal deformation effect based on a laser array. The method comprises the following steps of: dividing pump light into pump light beam groups which have equal light intensity and are distributed in an array mode at equal intervals, and irradiating the surface of a sample to be detected by using the pump light beam groups to induce the local surface deformation of the sample to be detected; dividing detection light into detection light beam groups which have equal light intensity and are distributed in an array mode at equal intervals, and irradiating the surface of the sample to be detected by using the detection light beam groups, wherein each detection light beam is correspondingly overlapped with one pump light beam; and ensuring that the detection light beam groups which are emergent from the sample to be detected finally enter a photoelectric detector, and acquiring a two-dimensional image about the surface characteristic of a material by measuring the change of the propagation characteristic of the detection light beams, which is caused by surface thermal deformation. Imaging speed can be greatly improved compared with that of the traditional point-by-point sample scanning method; and in addition, point-by-point scanning is not needed, so that moving parts can be avoided in a specific detection and imaging instrument design, the stability of an instrument is improved, cost is reduced, the instrument is further miniaturized, and the application field is broadened.
Description
Technical field
The present invention relates to photo-thermal detection technique field, specifically is a kind of formation method and device based on laser array induced surface thermal deformation effect.
Background technology
The ultimate principle of utilizing induced with laser surface heat deformation effect to detect is based on material and raises because of the absorbing light energy causes local temperature at the effect lower surface of light (to call pump light in the following text), thereby deformation takes place.The space distribution of this thermal deformation and being closely related with pump light parameter and material behavior over time.And because this surface heat deformation, the propagation characteristic of the light that reflects out from material surface can change, and produces and assembles or effect weakening, just as having increased lens newly.Therefore, this surface heat deformation effect is called the surface thermal lens effect again.
The most common method of utilizing the surface heat deformation effect to carry out material behavior detection and analysis is to utilize a branch of amplitude to produce thermal deformation through the pump light irradiation sample spatial induction of ovennodulation, utilizes another bundle detection light process sample surfaces thermal deformation zone to survey the surface heat deformation that pump light causes simultaneously.During measurement, in the detection light light path that reflects, add a spatial filter, can be through the detection luminous energy that arrives photodetector behind the spatial filter because surface heat deformation changes the convergence of surveying light or effect weakening.In the actual measurement,, need utilize phaselock technique usually for improving response.Two-dimensional imaging to sample then is to obtain through sample is carried out point by point scanning.This two-dimensional scan formation method can obtain higher resolution, under the far-field measurement condition, is similar to and is subject to pump light/detection diffraction of light limit, than being easier to reach sub-micrometer scale.
But this two-dimensional scan formation method is very limited in practical application.Main cause is that image taking speed is too slow.On the one hand since signal a little less than, all to carry out the lock phase integral of certain hour to each sample spot; On the other hand, sample moves at every turn and all need spend certain moving and the stand-by period, and the latter is in order to make total system from the mechanical shock to the local temperature, can both reach new balance.The image that obtains 500 microns of 500 microns x of 5 microns lateral resolutions so generally speaking needs nearly one hour time.If absorption of sample is faint, then to increase integral time, imaging time will be longer.This shortcoming has greatly limited this The Application of Technology.
Summary of the invention
The technical matters that the present invention will solve provides a kind of formation method and device based on laser array induced surface thermal deformation effect, solves to utilize the surface thermal lens effect to carry out needing point by point scanning in the two-dimensional imaging process, thus long problem consuming time.
Technical scheme of the present invention is:
A kind of formation method based on laser array induced surface thermal deformation effect may further comprise the steps:
(1), the pump light that pump light source is sent is divided into aplanatic, as to be equidistant array distribution pump beam group; The pump beam group is shone the sample surface after assembling, each bundle pump light of pump beam group has caused corresponding local surfaces deformation at the sample irradiation area;
(2), the detection light that probe source is sent is divided into aplanatic, as to be equidistant array distribution detecting light beam group; The detecting light beam group is shone sample surface after assembling, and each bundle of detecting light beam group is surveyed light and restrainted with each of pump beam group all that pump light is corresponding spatially to be overlapped;
The variation of the detecting light beam propagation characteristic that (3), get into photodetector by the detecting light beam group of sample outgoing, causes through the surface measurements thermal deformation obtains the two dimensional image of material surface characteristic.
After the pump beam group that obtains behind the pump light diffraction light-dividing device was passed through modulator again, the modulating frequency of each bundle pump beam had nothing in common with each other in the described step 1, and this pump beam group is irradiation sample surface after assembling again; It is described that to be used to detect the photodetector of surveying light be photodetector array or a photodetector.
Detection to through the detecting light beam of spatial filter can have two kinds of diverse ways, specifically describes as follows:
Method one: the detecting light beam group to through spatial filter detects with a photodetector.Like this on single photodetector or signal be the stack of whole detecting light beam group signal, be the mixing of a plurality of area informations simultaneously tested on the sample.Want to utilize a photodetector to realize two-dimensional imaging, the signal that needs each bundle to survey the light generation is distinguishable on detector.。This can be through applying the modulation of different frequency to each bundle pump light; Again in end of probe; Utilize lock to detect mutually and frequency-scan technique; Just can restraint the surface heat deformation signal (pixel) that pump light causes to each and differentiate, thereby just can not obtain two-dimensional surface thermal deformation signal pattern through point by point scanning.
Method two: the detecting light beam array to from the outgoing of spatial filter array detects with photodetector array, and promptly each bundle is surveyed photodetector of the corresponding respectively entering of light.Every bit on the signal counter sample on each photodetector so just can obtain two-dimensional surface thermal deformation signal pattern thereby need not sample scanned.The modulating frequency of pump light can be identical in this case, also can be different.Surveying the terminal, utilize parallel processing circuit to handle, just can restraint surface heat deformation signal (pixel) resolution that pump light causes to each and come out.
Described pump light source emission light path is different with the radiative path of probe source; Described pump beam group is all exported through the dichronic mirror output terminal after another input end input of dichronic mirror with described detecting light beam group after dichronic mirror one input end is imported, and after same focal imaging lens are assembled, shines in sample surperficial.
Shone in the described step 3 detecting light beam group behind the sample reflex to survey behind the light condenser lens again through spatial filter with survey the light optical filter, get into photodetector at last.
A kind of imaging device based on laser array induced surface thermal deformation effect includes pump light source and probe source, is positioned at the sample stage of pump light source and probe source rear end and the spatial filter that is provided with in order, surveys light optical filter and photodetector; From being provided with pump light diffraction light-dividing device, dichronic mirror and focal imaging lens between described pump light source to the sample stage in order; Survey optical diffraction light-dividing device, polarization spectroscope, quarter-wave plate, dichronic mirror and focal imaging lens from being provided with in order between described probe source to the sample stage; Described quarter-wave plate is arranged at the rear end of polarization spectroscope one output terminal; Described spatial filter is arranged at the rear end of another output terminal of polarization spectroscope; Described photodetector is a photodetector array.
Be provided with the array photomodulator between described pump light diffraction light-dividing device and the dichronic mirror, described photodetector is photodetector array or a photodetector.
Described imaging device based on laser array induced surface thermal deformation effect also includes surveys the light condenser lens, and described detection light condenser lens is arranged between polarization spectroscope and the spatial filter or is arranged at the rear end of spatial filter.
Advantage of the present invention:
The present invention carries out the point by point scanning method to sample and can improve a lot than traditional on image taking speed; In addition owing to need not to carry out point by point scanning; Concrete detect and the Image-forming instrument design can avoid the use of moving-member, help improving instrument stability, reduce cost, further miniaturization and widen application.
Description of drawings
The structural representation of the embodiment of the invention.
Embodiment
See Fig. 1; A kind of imaging device based on laser array induced surface thermal deformation effect; Include pump light source 1 and probe source 2; Be positioned at the sample stage 3 of pump light source 1 and probe source 2 rear ends; Be arranged at pump light diffraction light-dividing device 4, array photomodulator 5, dichronic mirror 6 and focal imaging lens 7 between pump light source 1 to the sample stage 3 in order; Be arranged at detection optical diffraction light-dividing device 8, polarization spectroscope 9, quarter-wave plate 10, dichronic mirror 6 and focal imaging lens 7 between probe source 2 to the sample stage 3 in order, be arranged at detection light condenser lens 11, spatial filter 12, detection light optical filter 13 and the photodetector 14 of the rear end of polarization dichronic mirror 9 in order; Wherein, quarter-wave plate 10 is arranged at the rear end of polarization dichronic mirror 9 transmission output terminals; Survey the rear end that light condenser lens 11 is arranged at polarization spectroscope 9 reflection output terminals.Survey acting as of light optical filter 13 and block parasitic light, have only the light of detection to pass through in theory.
See Fig. 1, a kind of formation method: may further comprise the steps based on laser array induced surface thermal deformation effect:
(1), with sample 15 as on the sample stage 3;
(2), the pump light that sends of pump light source 1 is divided into aplanatic, as to be equidistant array distribution pump beam group through pump light diffraction light-dividing device 4; The pump beam group maybe must be modulated behind array photomodulator 5 again; The modulating frequency of each Shu Guang can be looked the concrete condition of surveying the terminal and confirmed: if use single electrooptic modulator, then the modulating frequency of each Shu Guang has nothing in common with each other; If the use photodetector array, then the modulating frequency of each Shu Guang can be identical; This pump beam group is again through dichronic mirror 6 reflections, and through irradiation sample 15 surfaces behind focal imaging lens 7 post-concentrations, each bundle pump light of pump beam group has caused corresponding local surfaces distortion at sample 15 irradiation areas;
(3), the detection light that sends of probe source 2 is divided into aplanatic, as to be equidistant array distribution detecting light beam group through surveying optical diffraction light-dividing device 8; The detecting light beam group is successively through polarization spectroscope 9, quarter-wave plate 10, dichronic mirror 6; Assemble irradiation sample 15 surfaces, back by focal imaging lens 7 then, and each bundle detection light of detecting light beam group overlaps spatially with each bundle pump light of pump beam group all;
The detecting light beam group of (4), coming out by sample 15 reflections; Pass through focal imaging lens 7, dichronic mirror 6, quarter-wave plate 10 again, assemble adjustment by polarization spectroscope 9 reflection and through surveying light condenser lens 11 then, through spatial filter 12, survey that light optical filter 13 is laggard goes into photodetector 14 and record and survey light two-dimensional surface thermal deformation signal pattern.The output signal utilization lock phase detection technique of photodetector 14 is surveyed.At this moment; The reference signal that detects mutually as lock with the AC signal identical with the modulating frequency of a certain modulated pump beam; Have only this pump beam to induce the surface heat deformation signal of generation to be measured by lock-in amplifier like this, other pump beam induces the signal of generation all to be filtered.Change the frequency of reference signal successively, just can obtain corresponding pump beam excited surface thermal deformation signal.According to the numbering and the corresponding signal that records of pump beam, obtain the two dimensional image of spatial discrimination again.
Also can utilize a plurality of analog to digital converters or lock-in amplifier that each bundle is surveyed light in actual the use and carry out parallel measurement, change the time that reference signal is measured successively, further improve image taking speed to save.
Claims (7)
1. formation method based on laser array induced surface thermal deformation effect is characterized in that: may further comprise the steps:
(1), the pump light that pump light source is sent is divided into aplanatic, as to be equidistant array distribution pump beam group; The pump beam group is shone the sample surface after assembling, each bundle pump light of pump beam group has caused corresponding local surfaces deformation at the sample irradiation area;
(2), the detection light that probe source is sent is divided into aplanatic, as to be equidistant array distribution detecting light beam group; The detecting light beam group is shone sample surface after assembling, and each bundle of detecting light beam group is surveyed light and restrainted with each of pump beam group all that pump light is corresponding spatially to be overlapped;
The variation of the detecting light beam propagation characteristic that (3), get into photodetector by the detecting light beam group of sample outgoing, causes through the surface measurements thermal deformation obtains the two dimensional image of material surface characteristic.
2. a kind of formation method according to claim 1 based on laser array induced surface thermal deformation effect; It is characterized in that: in the described step 1 after the pump beam group that obtains behind the pump light diffraction light-dividing device is passed through modulator again; The modulating frequency of each bundle pump beam has nothing in common with each other, and this pump beam group is irradiation sample surface after assembling again; It is described that to be used to detect the photodetector of surveying light be photodetector array or a photodetector.
3. a kind of formation method according to claim 1 based on laser array induced surface thermal deformation effect; It is characterized in that: described pump light source emission light path is different with the radiative path of probe source; Described pump beam group is all exported through the dichronic mirror output terminal after another input end input of dichronic mirror with described detecting light beam group after dichronic mirror one input end is imported, and after same focal imaging lens are assembled, shines in sample surperficial.
4. a kind of formation method according to claim 1 based on laser array induced surface thermal deformation effect; It is characterized in that: shone in the described step 3 detecting light beam group behind the sample reflex to survey behind the light condenser lens again through spatial filter with survey the light optical filter, get into photodetector at last.
5. the imaging device based on laser array induced surface thermal deformation effect includes pump light source and probe source, is positioned at the sample stage of pump light source and probe source rear end and the spatial filter that is provided with in order, surveys light optical filter and photodetector; It is characterized in that: from being provided with pump light diffraction light-dividing device, dichronic mirror and focal imaging lens between described pump light source to the sample stage in order; Survey optical diffraction light-dividing device, polarization spectroscope, quarter-wave plate, dichronic mirror and focal imaging lens from being provided with in order between described probe source to the sample stage; Described quarter-wave plate is arranged at the rear end of polarization spectroscope one output terminal; Described spatial filter is arranged at the rear end of another output terminal of polarization spectroscope; Described photodetector is a photodetector array.
6. a kind of imaging device according to claim 5 based on laser array induced surface thermal deformation effect; It is characterized in that: be provided with the array photomodulator between described pump light diffraction light-dividing device and the dichronic mirror, described photodetector is photodetector array or a photodetector.
7. a kind of imaging device according to claim 5 based on laser array induced surface thermal deformation effect; It is characterized in that: described imaging device based on laser array induced surface thermal deformation effect also includes surveys the light condenser lens, and described detection light condenser lens is arranged between polarization spectroscope and the spatial filter or is arranged at the rear end of spatial filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210198138.8A CN102680407B (en) | 2012-06-15 | 2012-06-15 | Imaging method and device for inducing surface thermal deformation effect based on laser array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210198138.8A CN102680407B (en) | 2012-06-15 | 2012-06-15 | Imaging method and device for inducing surface thermal deformation effect based on laser array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102680407A true CN102680407A (en) | 2012-09-19 |
| CN102680407B CN102680407B (en) | 2014-07-02 |
Family
ID=46812669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210198138.8A Active CN102680407B (en) | 2012-06-15 | 2012-06-15 | Imaging method and device for inducing surface thermal deformation effect based on laser array |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102680407B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102967445A (en) * | 2012-11-19 | 2013-03-13 | 核工业理化工程研究院 | Device and method for measuring thermal distortion of polarized beam splitter mirror |
| CN105954213A (en) * | 2016-04-22 | 2016-09-21 | 中国科学院理化技术研究所 | Device and method of detection time-resolved transient absorbance spectrum |
| CN109444166A (en) * | 2018-12-04 | 2019-03-08 | 电子科技大学 | A kind of method of optical elements of large caliber Surface absorption type defect distribution fast imaging |
| CN110470632A (en) * | 2019-08-22 | 2019-11-19 | 合肥利弗莫尔仪器科技有限公司 | Three-dimensional absorption characteristic detection device and method based on induced with laser photo-thermal effect |
| CN111089543A (en) * | 2020-01-22 | 2020-05-01 | 华南师范大学 | Material deformation detecting system based on laser shot blasting |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10153561A (en) * | 1996-11-22 | 1998-06-09 | Bunshi Baiohotonikusu Kenkyusho:Kk | Photothermal transduction spectral analyzer |
| JP2004286578A (en) * | 2003-03-20 | 2004-10-14 | Asahi Kasei Corp | Reflection type spectrum analyzer for hot lens |
| US20040233450A1 (en) * | 2001-06-13 | 2004-11-25 | Nippon Sheet Glass Co., Ltd. | Photothermal conversion spectroscopic analysis method, and photothermal conversion spectroscopic analysis apparatus for carrying out the method |
| CN2784920Y (en) * | 2005-04-29 | 2006-05-31 | 西北大学 | Near field laser thermal lens spectrometry instrument |
| CN1971233A (en) * | 2006-12-13 | 2007-05-30 | 中国科学院光电技术研究所 | Method for synchronous measurement of absorption loss and surface thermal deformation amount of optical element |
| CN101079530A (en) * | 2007-06-28 | 2007-11-28 | 中国科学院光电技术研究所 | Solid laser resonance cavity system with automated optimization laser mode |
| CN101196464A (en) * | 2007-12-14 | 2008-06-11 | 武汉大学 | Laser double-mode micro-volume sample analyzing method and its device |
| CN101196465A (en) * | 2007-12-14 | 2008-06-11 | 武汉大学 | Laser double-mode micro-volume sample analyzing method and its device |
| CN102414553A (en) * | 2009-03-06 | 2012-04-11 | 原子能与替代能源委员会 | Method and device for measuring the focal distance of a thermal lens |
| CN102721673A (en) * | 2012-04-25 | 2012-10-10 | 吴周令 | Multi-beam array light-induced reflectivity imaging device and method |
| CN202614667U (en) * | 2012-06-15 | 2012-12-19 | 合肥知常光电科技有限公司 | Imaging device based on surface heat deformation effect induced by laser array |
-
2012
- 2012-06-15 CN CN201210198138.8A patent/CN102680407B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10153561A (en) * | 1996-11-22 | 1998-06-09 | Bunshi Baiohotonikusu Kenkyusho:Kk | Photothermal transduction spectral analyzer |
| US20040233450A1 (en) * | 2001-06-13 | 2004-11-25 | Nippon Sheet Glass Co., Ltd. | Photothermal conversion spectroscopic analysis method, and photothermal conversion spectroscopic analysis apparatus for carrying out the method |
| JP2004286578A (en) * | 2003-03-20 | 2004-10-14 | Asahi Kasei Corp | Reflection type spectrum analyzer for hot lens |
| CN2784920Y (en) * | 2005-04-29 | 2006-05-31 | 西北大学 | Near field laser thermal lens spectrometry instrument |
| CN1971233A (en) * | 2006-12-13 | 2007-05-30 | 中国科学院光电技术研究所 | Method for synchronous measurement of absorption loss and surface thermal deformation amount of optical element |
| CN101079530A (en) * | 2007-06-28 | 2007-11-28 | 中国科学院光电技术研究所 | Solid laser resonance cavity system with automated optimization laser mode |
| CN101196464A (en) * | 2007-12-14 | 2008-06-11 | 武汉大学 | Laser double-mode micro-volume sample analyzing method and its device |
| CN101196465A (en) * | 2007-12-14 | 2008-06-11 | 武汉大学 | Laser double-mode micro-volume sample analyzing method and its device |
| CN102414553A (en) * | 2009-03-06 | 2012-04-11 | 原子能与替代能源委员会 | Method and device for measuring the focal distance of a thermal lens |
| CN102721673A (en) * | 2012-04-25 | 2012-10-10 | 吴周令 | Multi-beam array light-induced reflectivity imaging device and method |
| CN202614667U (en) * | 2012-06-15 | 2012-12-19 | 合肥知常光电科技有限公司 | Imaging device based on surface heat deformation effect induced by laser array |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102967445A (en) * | 2012-11-19 | 2013-03-13 | 核工业理化工程研究院 | Device and method for measuring thermal distortion of polarized beam splitter mirror |
| CN105954213A (en) * | 2016-04-22 | 2016-09-21 | 中国科学院理化技术研究所 | Device and method of detection time-resolved transient absorbance spectrum |
| CN105954213B (en) * | 2016-04-22 | 2018-11-23 | 中国科学院理化技术研究所 | A kind of device and method of detection time resolved transient absorption spectrum |
| CN109444166A (en) * | 2018-12-04 | 2019-03-08 | 电子科技大学 | A kind of method of optical elements of large caliber Surface absorption type defect distribution fast imaging |
| CN109444166B (en) * | 2018-12-04 | 2021-07-23 | 电子科技大学 | Method for quickly imaging surface absorption type defect distribution of large-caliber optical element |
| CN110470632A (en) * | 2019-08-22 | 2019-11-19 | 合肥利弗莫尔仪器科技有限公司 | Three-dimensional absorption characteristic detection device and method based on induced with laser photo-thermal effect |
| CN111089543A (en) * | 2020-01-22 | 2020-05-01 | 华南师范大学 | Material deformation detecting system based on laser shot blasting |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102680407B (en) | 2014-07-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102721673B (en) | Multi-beam array light-induced reflectivity imaging device and method | |
| CN102692394A (en) | Two-dimensional imaging method and device based on thermal lens effect | |
| EP3118608B1 (en) | Method and apparatus for measuring light-splitting pupil laser differential motion confocal brillouin-raman spectrums | |
| CN105784334B (en) | Optical-fiber laser beam quality measurement method based on photodetector and CCD camera | |
| CN102680213B (en) | Rapid detecting method and device for optical property of heavy-caliber optical element | |
| JP7422224B2 (en) | Single pixel imaging of electromagnetic fields | |
| CN102680407B (en) | Imaging method and device for inducing surface thermal deformation effect based on laser array | |
| KR100866038B1 (en) | Scanning micrometer using heterodyne interferometer | |
| CN110632045A (en) | Method and device for generating parallel super-resolution focal spots | |
| CN1662808B (en) | Optical technique for detecting buried defects in opaque films | |
| CN101031830A (en) | Optical sensor using low-coherence interferometry | |
| CN101806625A (en) | Static Fourier transform interference imaging spectrum full-polarization detector | |
| JP2014026194A (en) | Laser scanning type microscope | |
| CN102721664B (en) | A kind of multi-beam laser induction infrared radiation imaging device and method | |
| CN111665222A (en) | Femtosecond pumping detection system and method | |
| CN202676595U (en) | Two-dimensional imaging device based on thermal lens effect | |
| KR101955295B1 (en) | Apparatus for detecting hologram using optical scanning and method thereof | |
| CN202614667U (en) | Imaging device based on surface heat deformation effect induced by laser array | |
| CN104111243A (en) | Fluorescence ratio measuring system and method | |
| CN102621111A (en) | Method and device for scanning-microscopy imaging of a specimen | |
| US7061620B2 (en) | Method and apparatus for three-dimensional object detection | |
| CN101825435A (en) | All-fiber-optic displacement measuring method and device thereof | |
| CN202614676U (en) | Multi-beam array light-induction reflectivity imaging device | |
| CN211426269U (en) | Optical path device and OCT imaging system | |
| JP2005175919A (en) | Ultrasonic receiving sensor and device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: HEFEI LIFO MOER INSTRUMENT SCIENCE AND TECHNOLOGY Free format text: FORMER OWNER: HEFEI ZHICHANG PHOTOELECTRIC TECHNOLOGY CO., LTD. Effective date: 20150902 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150902 Address after: 230088, building C4, building 800, anime base, No. 206 Wangjiang West Road, Anhui, Hefei Patentee after: Hefei Zhichang Photoelectric Technology Co.,Ltd. Address before: 230031, two floor, C4 building, 800 Wangjiang West Road, Wangjiang hi tech Zone, Anhui, Hefei Patentee before: Hefei Zhichang Photoelectric Technology Co.,Ltd. |