CN102677003B - Low-temperature deposition process of multi-arc ion plated nanometer multielement composite film - Google Patents
Low-temperature deposition process of multi-arc ion plated nanometer multielement composite film Download PDFInfo
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- CN102677003B CN102677003B CN 201210188913 CN201210188913A CN102677003B CN 102677003 B CN102677003 B CN 102677003B CN 201210188913 CN201210188913 CN 201210188913 CN 201210188913 A CN201210188913 A CN 201210188913A CN 102677003 B CN102677003 B CN 102677003B
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Abstract
The invention relates to a low-temperature deposition process of a multi-arc ion plated nanometer multielement composite film. In multi-arc ion plating technique, during the iron plating process, the temperature is high and the film coating is coarse, so the multi-arc ion plating technique is not suitable for steel products with low tempering temperature and makes a quenched metal base body soften during the tempering process. The low temperature deposition process is characterized in that a piece of multi-arc ion plating equipment is adopted and at least three kinds of metals are heated to gasify under vacuum condition so that the metals can compound under at least two kinds of gases; the rotating speed of a work piece is controlled so that the dimension of each kind of metal film coating on the surface of the work piece can be controlled within a certain nanometer range; and in such a way, the duty ratio and the negative bias are regulated. Under the process conditions of high voltage and low duty ratio, the deposition temperature in the deposition process can be controlled below 185 DEG C, and the heat processed and quenched material with low tempering temperature can be plated with a multielement composite film coating without changing the heat treatment property so as to increase the hardness and the abrasive resistance of the material. The low-temperature deposition process can be widely applied in the part manufacturing processes of aviation, automobiles, tools, cutters, moulds and thread spinners.
Description
Technical field
the present invention relates to a kind of vacuum coating surface treatment process, be specifically related to a kind of low temperature deposition process of multi-arc ion coating nanometer multielement composite membrane.
Background technology
The multi-arc ion coating membrane technique has been applied to the every field of metal finishing, its feature performance benefit also is proved to be by practice, but temperature during general ion plating is higher, rete is more coarse, the temperature of functional plated film is generally all more than 350 ℃, such temperature is not suitable for the steel of low tempering temperature, as high carbon steel, the tempering temperature of bearing steel is 195 ℃ of left and right, metallic matrix tempering deliquescing after working temperature more than 350 ℃ makes to quench, lost use value, the more coarse rete in surface has brought unfavorable factor to frictional behaviour.
Summary of the invention
The purpose of this invention is to provide a kind of multi-arc ion coating film device that utilizes the steel of low tempering temperature are carried out to functional rete is plated in surface treatment and the low temperature deposition process that do not change the multi-arc ion coating nanometer multielement composite membrane of its material property quenched.
The technical solution adopted in the present invention is:
The low temperature deposition process of multi-arc ion coating nanometer multielement composite membrane is characterized in that:
By following steps, realized:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 50min, 160 ℃ of Heating temperatures;
Step 2: workpiece chamber is evacuated to 3 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.1-0.2pa;
With titanium target bombardment 5min, target current 60-65A;
With chromium target bombardment 2min, target current 60-65A;
With aluminium target bombardment 3min, target current 60-65A;
The bias voltage of three kinds of metals is 1000V, and dutycycle is 50%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and three kinds of target currents are all at 50A-60A, and bias voltage is 400V-500V, and dutycycle is 60%-80%, and the time is 20min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, three kinds of metallic target electric currents are 60A-80A, and bias voltage is 150V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, flammable hydrocarbon gas 0.3pa, turn/min of workpiece rotational frequency 6;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
In step 5, flammable hydrocarbon gas is selected from methane, acetylene, propane.
The low temperature deposition process of described multi-arc ion coating nanometer multielement composite membrane is characterized in that:
By following steps, realized:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 60min, Heating temperature 140-150 ℃;
Step 2: workpiece chamber is evacuated to 6.6 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.2pa;
With titanium target bombardment 5min, target current 60A;
With chromium target bombardment 5min, target current 70A;
The bias voltage of two kinds of metals is 1000V, and dutycycle is 50-60%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and titanium target target current 65A, chromium target target current 70A, aluminium target target current 50A, bias voltage is 150V-200V, and dutycycle is 60%-70%, and the time is 25min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, titanium target target current 60A, chromium target target current 65A, aluminium target target current 45-50A, bias voltage is 200V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, flammable hydrocarbon gas 0.3pa, turn/min of workpiece rotational frequency 6;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
In step 5, flammable hydrocarbon gas is selected from methane, acetylene, propane.
The present invention has the following advantages:
The present invention can make the material of low tempering temperature in the situation that do not change quenching character, obtain nano level rete, and the realization of nanometer rete can change the frictional property of metallic substance, reduce frictional coefficient, weightless and intensification while reducing metal friction, improve the work-ing life of workpiece, this film hardness is high, crystal grain is fine and closely woven, quality is good, can be widely used in various metal material surfaces.
Embodiment
Below in conjunction with embodiment, the present invention will be described in detail.
The present invention utilizes multi-arc ion plating equipment, several metallic elements are evaporated simultaneously, in this process, add nitrogen, argon gas, flammable hydrocarbon gas to make its chemical reaction, turning of work piece, regulate the speed simultaneously, the rete deposited in the time that workpiece is stopped through every kind of metal targets the time reaches nanoscale, several like this metallic diaphragms are constantly overlapped, just obtained nano-composite film, adopt high-voltage simultaneously, the blast technique of low duty ratio, control the temperature rising and just can realize the low temperature plated film.The concrete technology flow process is: the workpiece oil removing is cleaned, and------working spaces vacuumizes, and---bombardment plating mixolimnion------the alloy plating bottom---is shut down cooling---and is taken out workpiece by the alloy plating upper strata to advance the stove heating.
Specifically comprise following two kinds of technical schemes:
1, the concrete steps of scheme one:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 50min, 160 ℃ of Heating temperatures;
Step 2: workpiece chamber is evacuated to 3 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.1-0.2pa;
With titanium target bombardment 5min, target current 60-65A;
With chromium target bombardment 2min, target current 60-65A;
With aluminium target bombardment 3min, target current 60-65A;
The bias voltage of three kinds of metals is 1000V, and dutycycle is 50%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and three kinds of target currents are all at 50A-60A, and bias voltage is 400V-500V, and dutycycle is 60%-80%, and the time is 20min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, three kinds of metallic target electric currents are 60A-80A, and bias voltage is 150V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, flammable hydrocarbon gas 0.3pa, turn/min of workpiece rotational frequency 6;
Wherein, flammable hydrocarbon gas is selected from methane, acetylene, propane
Step 6: reduce below temperature to 100 ℃, take out workpiece.
(1) embodiment mono-:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 50min, 160 ℃ of Heating temperatures;
Step 2: workpiece chamber is evacuated to 3 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.1pa;
With titanium target bombardment 5min, target current 65A;
With chromium target bombardment 2min, target current 65A;
With aluminium target bombardment 3min, target current 65A;
The bias voltage of three kinds of metals is 1000V, and dutycycle is 50%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and three kinds of target currents are all at 50A-60A, and bias voltage is 400V-500V, and dutycycle is 70%-80%, and the time is 20min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, three kinds of metallic target electric currents are 60A-70A, and bias voltage is 150V-250V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, acetylene 0.3pa, turn/min of workpiece rotational frequency 6;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
(2) embodiment bis-:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 50min, 160 ℃ of Heating temperatures;
Step 2: workpiece chamber is evacuated to 3 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.2pa;
With titanium target bombardment 5min, target current 60A;
With chromium target bombardment 2min, target current 60A;
With aluminium target bombardment 3min, target current 60A;
The bias voltage of three kinds of metals is 1000V, and dutycycle is 50%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and three kinds of target currents are all at 50A-60A, and bias voltage is 400V-500V, and dutycycle is 60%-80%, and the time is 20min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, three kinds of metallic target electric currents are 60A-80A, and bias voltage is 250V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, methane 0.3pa, turn/min of workpiece rotational frequency 6;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
2, the concrete steps of scheme two:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 60min, Heating temperature 140-150 ℃;
Step 2: workpiece chamber is evacuated to 6.6 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.2pa;
With titanium target bombardment 5min, target current 60A;
With chromium target bombardment 5min, target current 70A;
The bias voltage of two kinds of metals is 1000V, and dutycycle is 50-60%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and titanium target target current 65A, chromium target target current 70A, aluminium target target current 50A, bias voltage is 150V-200V, and dutycycle is 60%-70%, and the time is 25min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, titanium target target current 60A, chromium target target current 65A, aluminium target target current 45-50A, bias voltage is 200V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, flammable hydrocarbon gas 0.3pa, turn/min of workpiece rotational frequency 6;
Wherein, flammable hydrocarbon gas is selected from methane, acetylene, propane;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
(1) embodiment mono-:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 60min, 150 ℃ of Heating temperatures;
Step 2: workpiece chamber is evacuated to 6.6 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.2pa;
With titanium target bombardment 5min, target current 60A;
With chromium target bombardment 5min, target current 70A;
The bias voltage of two kinds of metals is 1000V, and dutycycle is 60%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and titanium target target current 65A, chromium target target current 70A, aluminium target target current 50A, bias voltage is 150V-200V, and dutycycle is 60%-70%, and the time is 25min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, titanium target target current 60A, chromium target target current 65A, aluminium target target current 45A, bias voltage is 200V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, acetylene 0.3pa, turn/min of workpiece rotational frequency 6;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
(1) embodiment bis-:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 60min, 140 ℃ of Heating temperatures;
Step 2: workpiece chamber is evacuated to 6.6 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.2pa;
With titanium target bombardment 5min, target current 60A;
With chromium target bombardment 5min, target current 70A;
The bias voltage of two kinds of metals is 1000V, and dutycycle is 50%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and titanium target target current 65A, chromium target target current 70A, aluminium target target current 50A, bias voltage is 150V-200V, and dutycycle is 60%-70%, and the time is 25min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, titanium target target current 60A, chromium target target current 65A, aluminium target target current 50A, bias voltage is 200V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, propane 0.3pa, turn/min of workpiece rotational frequency 6;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
Through experiment and test proof, plating CrAITiCN rete on the low tempering temperature material T8 lower than 190 ℃ and Gcr15 steel, its HV2850-3600, bonding force 65-72N, frictional coefficient 0.2-0.35, titanium, chromium, aluminum ratio reach 4:3:3, all reach design metering ratio.By this technique to low tempering temperature steel plated film, both can extend the work-ing life of workpiece, and can not make again workpiece lose heat treatment performance, its nano-structure structure is fine and closely woven, smooth surface, greatly improved frictional behaviour, the hardness ratio TiN Senior Two of CrAITiCN nanometer rete doubly, doubles than AITiN, than high nearly three times of CrN, can be as instrument, cutter, mould, aviation, automobile worn parts, the plated film of frame machinery rapid wear parts, purposes wide range.
Claims (4)
1. the low temperature deposition process of multi-arc ion coating nanometer multielement composite membrane is characterized in that:
By following steps, realized:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 50min, 160 ℃ of Heating temperatures;
Step 2: workpiece chamber is evacuated to 3 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.1-0.2pa;
With titanium target bombardment 5min, target current 60-65A;
With chromium target bombardment 2min, target current 60-65A;
With aluminium target bombardment 3min, target current 60-65A;
The bias voltage of three kinds of metals is 1000V, and dutycycle is 50%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and three kinds of target currents are all at 50A-60A, and bias voltage is 400V-500V, and dutycycle is 60%-80%, and the time is 20min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, three kinds of metallic target electric currents are 60A-80A, and bias voltage is 150V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, flammable hydrocarbon gas 0.3pa, turn/min of workpiece rotational frequency 6;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
2. the low temperature deposition process of multi-arc ion coating nanometer multielement composite membrane according to claim 1 is characterized in that:
In step 5, flammable hydrocarbon gas is selected from methane, acetylene, propane.
3. the low temperature deposition process of multi-arc ion coating nanometer multielement composite membrane is characterized in that:
By following steps, realized:
Step 1: the workpiece oil removing is cleaned to post-drying and enter stove, heated baking 60min, Heating temperature 140-150 ℃;
Step 2: workpiece chamber is evacuated to 6.6 * 10
-3pa;
Step 3: adopt the ion bombardment mixolimnion, pass into argon gas 0.2pa;
With titanium target bombardment 5min, target current 60A;
With chromium target bombardment 5min, target current 70A;
The bias voltage of two kinds of metals is 1000V, and dutycycle is 50-60%;
Step 4: titanium, chromium, three kinds of metallic targets of aluminium are all opened, plating bottom alloy layer, and titanium target target current 65A, chromium target target current 70A, aluminium target target current 50A, bias voltage is 150V-200V, and dutycycle is 60%-70%, and the time is 25min; Pass into argon gas 0.1pa, nitrogen 0.3pa, workpiece rotational frequency is 4 turn/min;
Step 5: keep titanium, chromium, three kinds of metallic target standard-sized sheets of aluminium, plate a layer alloy layer, titanium target target current 60A, chromium target target current 65A, aluminium target target current 45-50A, bias voltage is 200V-350V, and dutycycle is 25%-35%, and the time is 30min; Pass into argon gas 0.1pa, nitrogen 0.2pa, flammable hydrocarbon gas 0.3pa, turn/min of workpiece rotational frequency 6;
Step 6: reduce below temperature to 100 ℃, take out workpiece.
4. the low temperature deposition process of multi-arc ion coating nanometer multielement composite membrane according to claim 3 is characterized in that:
In step 5, flammable hydrocarbon gas is selected from methane, acetylene, propane.
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| CN104278237B (en) * | 2013-07-02 | 2017-02-08 | 中国兵器工业第五九研究所 | Preparation method of metal and metal carbide superimposed composite coating layer |
| CN104862643B (en) * | 2015-04-27 | 2017-08-22 | 大连理工大学 | Steel, titanium alloy low temperature pulse ionitrocarburizing and cathodic arc ion plating M/MN alternating coating thick film techniques |
| CN106555163B (en) * | 2015-09-28 | 2019-10-18 | 高雄第一科技大学 | Stamping die class bores the method for carbon Coating optimization parameter and the stamping die using it |
| CN105349950B (en) * | 2015-11-24 | 2018-04-10 | 厦门建霖工业有限公司 | A kind of method for improving vacuum multi sphere coated coating stability |
| CN108149199A (en) * | 2017-12-19 | 2018-06-12 | 环球传动泰州有限公司 | The processing method of chain axis pin peculiar to vessel |
| CN115568968B (en) * | 2022-11-15 | 2023-03-10 | 北京华钽生物科技开发有限公司 | Preparation method of dental implant with titanium-tantalum coating |
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