CN102654465B - Optical measuring device and optical measuring method - Google Patents
Optical measuring device and optical measuring method Download PDFInfo
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- CN102654465B CN102654465B CN201210105579.9A CN201210105579A CN102654465B CN 102654465 B CN102654465 B CN 102654465B CN 201210105579 A CN201210105579 A CN 201210105579A CN 102654465 B CN102654465 B CN 102654465B
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Abstract
The invention discloses an optical measuring device and an optical measuring method, being applied to measurement of a transparent substrate. The optical measuring device comprises a plurality of linear detectors, a plurality of data capturers and a plurality of data converters, wherein the plurality of linear detectors extend in a first direction parallel to the transparent substrate and are used for imaging and detecting the different positions of the transparent substrate in the thickness direction, respectively the plurality of linear detectors are capable of moving relative to the transparent substrate in a second direction parallel to the transparent substrate, the second direction is not parallel to the first direction, and in this way, the scanning of the transparent substrate is completed; the plurality of data capturers in one-to-one correspondence to the plurality of liner detectors and used for obtaining data detected by the linear detectors, thereby forming detection data related to time; and the plurality of data converters are connected to the plurality of data capturers and used for obtaining the defect information of the surface to be measured of the transparent substrate corresponding to different positions in the thickness direction by analyzing the detection data related to time. Accordingly, the invention also provides an optical measuring method. The device and the method disclosed by the invention are capable of improving measurement accuracy.
Description
Technical field
The present invention relates to technical field of optical instrument, particularly relate to a kind of optical measuring device and measuring method.
Background technology
Glass have transparent, intensity is high, air-locked feature, in chemical inertness in surroundings, also can not work with biology, therefore purposes is widely.Common glass comprises vehicle glass, sheet glass, heat insulation glass etc.
In glass manufacturing process, the defect of such as scuffing, stain, particle etc. can be formed unavoidably at inside glass or glass surface.How to check out that the above-mentioned defect of inside glass or glass surface becomes one of those skilled in the art's problem demanding prompt solution.
Usually automatic optical detecting system (Automatic OpticalInspection is adopted in the measurement mechanism of prior art, AOI) detect all defect of inside glass, but the measurement mechanism of prior art cannot be distinguished described defect and is positioned at inside glass or is positioned at glass surface.Thus defect information more accurately cannot be obtained, and then technology for making glass cannot be improved targetedly, to avoid the generation of glass surface defects.
The technical scheme of more optical measuring devices about measuring glass defect can be the Chinese patent of CN101652625B with reference to notification number, and technical scheme disclosed in described Chinese patent also fails to solve the problems of the technologies described above.
Summary of the invention
The technical matters that the present invention solves is to provide a kind of optical measuring device and measuring method, improves measuring accuracy by the defect information measuring the different tested surface of transparency carrier.
In order to solve the problem, the invention provides a kind of optical measuring device, for measuring transparency carrier, comprise: multiple line style detector, described multiple line style detector extends along the first direction being parallel to transparency carrier, is respectively used to carry out imaging and detection to the diverse location on transparency carrier thickness direction; Described multiple line style detector and transparency carrier can along the second direction relative motions being parallel to transparency carrier, described second direction and first direction not parallel, to complete the scanning to described transparency carrier; Multiple data obtainer, with described multiple line style detector one_to_one corresponding, for obtaining the data that line style detector detects, forms the detection data with time correlation; Multiple data converter, is connected with described multiple data obtainer respectively, by analyzing detection data that is described and time correlation, obtains the defect information of tested surface corresponding to the diverse location on transparency carrier thickness direction.
Alternatively, described multiple line style detector has identical focal length.
Alternatively, described second direction and described first direction perpendicular.
Alternatively, described data obtainer is used for the data detected according to prefixed time interval acquisition line style detector, forms the detection data with time correlation.
Alternatively, described multiple line style detector along described second direction laid out in parallel together.
Alternatively, described multiple line style detector is integrated in a time delay integration probe unit.
Alternatively, described time delay integration probe unit is time delay integration CMOS camera or time delay integration CCD camera.
Alternatively, the test surface of described time delay integration probe unit and the angle of transparency carrier opposite face are greater than 0 ° and are less than 90 °.
Alternatively, described optical measuring device also comprises lighting unit, and described lighting unit is positioned at the side that transparency carrier is not provided with line style detector, for illuminating transparency carrier.
Alternatively, described lighting unit is area source, and the region of described area source uniform illumination is at least greater than the area of described transparency carrier.
Alternatively, described lighting unit is the strip source extended along the first direction being parallel to transparency carrier, and described strip source is corresponding with the position of described multiple line style detector.
Alternatively, the line style detector being positioned at end position place in described multiple line style detector is respectively used to carry out imaging and detection to two surfaces of transparency carrier.
Alternatively, also comprising the scanning element be fixedly connected with described transparency carrier, moving along the second direction vertical with first direction for making described transparency carrier.
Alternatively, also comprising the scanning element be fixedly connected with described multiple line style detector, moving along second direction for making described multiple line style detector.
Alternatively, also comprising the scanning element be fixedly connected with strip source with described multiple line detector, synchronously, along second direction moving for making described multiple line style detector and strip source.
Alternatively, described data obtainer is sequential control circuit.
Correspondingly, the present invention also provides a kind of measuring method, comprising: provide transparency carrier; Multiple line style detector is provided, described multiple line style detector is extended along the first direction being parallel to transparency carrier, imaging and detection are carried out to the diverse location on transparency carrier thickness direction; Make described multiple line style detector and transparency carrier along the second direction relative motion being parallel to transparency carrier, described second direction and first direction not parallel; Obtain the data that each line style detector detects respectively, form the detection data with time correlation; By analyzing detection data that is described and time correlation, obtain the defect information of tested surface corresponding to the diverse location on transparency carrier thickness direction.
Alternatively, the step of multiple line style detector is provided to comprise described in: to provide multiple line style detector with the same focal length.
Alternatively, make described second direction vertical with described first direction.
Alternatively, describedly obtain in the step of the data that each line style detector detects respectively, obtain according to prefixed time interval the data that each line style detector detects.
Alternatively, the step of multiple line style detector is provided also to comprise described in: to make described multiple line style detector along described second direction laid out in parallel together.
Alternatively, the step of multiple line style detector is provided to comprise described in: provide a time delay integration probe unit, described multiple line style detector is integrated in described time delay integration probe unit.
Alternatively, the step of a time delay integration probe unit is provided to comprise described in: to provide time delay integration CMOS camera or time delay integration CCD camera.
Alternatively, the step of time delay integration probe unit is provided to comprise described in: to make the described test surface of time delay integration probe unit and the angle of transparency carrier be greater than 0 and be less than 90 °.
Alternatively, after the step that multiple line style detector is provided, before making the step of multiple line style detector and transparency carrier relative motion, also comprise: lighting unit is provided, described lighting unit is positioned at side that transparency carrier is not provided with line style detector, to illuminate transparency carrier.
Alternatively, provide the method for lighting unit to comprise described in area source to be provided, to make the region of described area source uniform illumination at least be greater than the area of described transparency carrier.
Alternatively, provide the method for lighting unit to comprise described in the strip source extended along the first direction being parallel to transparency carrier to be provided, to make described strip source corresponding with the position of described multiple line style detector.
Alternatively, there is provided multiple line style detector, the step of the diverse location on transparency carrier thickness direction being carried out to imaging and detection comprises: make the line style detector being positioned at end position place in described multiple line style detector carry out imaging and detection to two of transparency carrier surfaces.
Alternatively, the step of described multiple line style detector and transparency carrier relative motion is comprised: the position of described multiple line style detector is fixed, described transparency carrier is moved along the second direction being parallel to transparency carrier.
Alternatively, the step of described multiple line style detector and transparency carrier relative motion is comprised: the position of described transparency carrier is fixed, described multiple line style detector is moved along the second direction being parallel to transparency carrier.
Alternatively, obtain the data that each line style detector detects respectively, formed and comprise with the step of the detection data of time correlation: by the sequential control circuit data that detect of each line style detector of interval acquiring at preset timed intervals, form the detection data with time correlation.
Compared with prior art, the present invention has the following advantages:
1. be provided with respectively to multiple line style detectors that the different tested surface of transparency carrier scans in optical measuring device, in scanning process, described data obtainer can obtain corresponding from different tested surface with detection data that is time correlation, described data converter is based on the described situation taking line style detector and transparency carrier relative motion with the detection data of time correlation into consideration, the defect information at transparency carrier each tested surface diverse location place can be obtained, optical measuring device of the present invention can record the defect information of the different tested surface of transparency carrier, improve measuring accuracy.
2. in possibility, the line style detector being positioned at end position place in described multiple line style detector is respectively used to carry out imaging and detection to two surfaces of transparency carrier, on the one hand, using transparency carrier surface as reference by location face, thus the position calculating different tested surface can be convenient to; On the other hand, make full use of each line style detector and detect, can measuring accuracy be improved.
3. in possibility, being also provided with lighting unit, for illuminating transparency carrier, the signal intensity that multiple line style detector detects can being improved, to improve accuracy of measurement.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of optical measuring device one embodiment of the present invention;
Fig. 2 is the schematic diagram of another embodiment of optical measuring device of the present invention;
Fig. 3 is the schematic flow sheet of measuring method one embodiment of the present invention.
Embodiment
Set forth a lot of detail in the following description so that fully understand the present invention.But the present invention can be much different from alternate manner described here to implement, those skilled in the art can when without prejudice to doing similar popularization when intension of the present invention, therefore the present invention is by the restriction of following public concrete enforcement.
Secondly, the present invention utilizes schematic diagram to be described in detail, and when describing the embodiment of the present invention in detail, for ease of illustrating, described schematic diagram is example, and it should not limit the scope of protection of the invention at this.
In order to solve the problem of prior art, the invention provides a kind of optical measuring device, for measuring transparency carrier, comprise: multiple line style detector, described multiple line style detector extends along the first direction being parallel to transparency carrier, is respectively used to carry out imaging and detection to the diverse location on transparency carrier thickness direction; Described multiple line style detector and transparency carrier can along the second direction relative motions being parallel to transparency carrier, described second direction and first direction not parallel, to complete the scanning to described transparency carrier; Multiple data obtainer, with described multiple line style detector one_to_one corresponding, for obtaining the data that line style detector detects, forms the detection data with time correlation; Multiple data converter, is connected with described multiple data obtainer respectively, by analyzing detection data that is described and time correlation, obtains the defect information of tested surface corresponding to the diverse location on transparency carrier thickness direction.
Arrange in optical measuring device provided by the invention respectively to multiple line style detectors (tested surface described herein refers to the face that be positioned at transparency carrier inside parallel with transparency carrier surface and transparency carrier surface) that the different tested surface of transparency carrier scans.In scanning process, described data obtainer can obtain corresponding from different tested surface with detection data that is time correlation, described data converter is based on the described situation taking line style detector and transparency carrier relative motion with the detection data of time correlation into consideration, the defect information at transparency carrier each tested surface diverse location place can be obtained, the distribution of such as defect, quantity and relative size etc.Optical measuring device of the present invention can record the defect information of the different tested surface of transparency carrier, improves measuring accuracy, also improves measurement efficiency simultaneously.
Below in conjunction with specific embodiment, technical solution of the present invention is described further.
The schematic diagram of optical measuring device one embodiment of the present invention is shown with reference to figure 1.Described optical measuring device, for measuring transparency carrier 100 (such as: glass), comprising: time delay integration probe unit 200, data capture unit 300 and Date Conversion Unit 400.Wherein,
Described time delay integration probe unit 200 comprises multiple line style detector s0, s1, s2, s3, s4, described multiple line style detector s0, s1, s2, s3, s4, extends along the first direction being parallel to transparency carrier 100.In the present embodiment, described first direction is the direction perpendicular to drawing.It should be noted that, in order to illustrate each line style detector in Fig. 1, making the test surface of described time delay integration probe unit 200 slightly towards the direction of reader, the present invention can not be limited with this.
In the present embodiment, described multiple line style detector s0, s1, s2, s3, s4 are integrated in a time delay integration (Time Delay Integration, TDI) probe unit 200.Described time delay integration probe unit 200 comprises multiple linear array arranged in parallel, and described linear array is corresponding with line style detector.Such as, described time delay integration probe unit 200 is time delay integration CMOS camera or time delay integration CCD camera.
Because line detector is integrated in a probe unit, therefore each line style detector has identical structure.Specifically, described line detector comprises imaging moiety and imageing sensor (imageing sensor is CMOS or CCD) part.In described multiple line style detector s0, s1, s2, s3, s4, imaging moiety has identical focal length, and described multiple line style detector s0, s1, s2, s3, s4 are successively along second direction laid out in parallel together.Can the adjust the distance object plane of each line style detector same distance of described multiple line style detector s0, s1, s2, s3, s4 carries out imaging and detection.In the present embodiment, described second direction is the X-direction along being parallel to transparency carrier 100, vertical with described first direction, but the present invention does not limit this, and described in described second direction, first direction is not parallel.
In the present embodiment, described multiple line style detector s0, s1, s2, s3, s4 laid out in parallel forms test surface together, and the opposite face of described test surface and described transparency carrier 100 has certain angle α, wherein said angle α is greater than 0 ° and is less than 90 °.Therefore, described multiple line style detector s0, s1, s2, s3, s4 can in transparency carrier 100, not parallel with transparency carrier 100 dip plane 600 carries out imaging and detection, described dip plane 600 is also α with the angle of described transparency carrier 100.
Multiple line style detector s0, s1, s2, s3, s4 can detect the linear regions c0 along first direction on dip plane 600, c1, c2, c3, c4 respectively.And described linear regions c0, c1, c2, c3, c4 are respectively d0, d1, d2, d3, d4 at the projected position of transparency carrier 100 on thickness direction Z.
In the present invention, described multiple line style detector s0, s1, s2, s3, s4 and transparency carrier 100 energy edge are parallel to the second direction X relative motion of transparency carrier 100, to complete the scanning to described transparency carrier 100; In the process of described relative motion, described dip plane 600 can complete the scanning to transparency carrier 100 in X direction.That is, described multiple line style detector s0, s1, s2, s3, s4 can complete the scanning to the tested surface corresponding to projected position d0, d1, d2, d3, d4.
In the present embodiment, described optical measuring device is also provided with the scanning element (not shown) be fixedly connected with described multiple line style detector s0, s1, s2, s3, s4, moves (as shown in solid arrow in Fig. 1 direction) for making described multiple line style detector s0, s1, s2, s3, s4 along the X-direction being parallel to transparency carrier 100.In the process, the position of described transparency carrier 100 is motionless, thus makes described multiple line style detector s0, s1, s2, s3, s4 and described transparency carrier 100 relative motion occur, to complete scanning.
Particularly, as shown in Figure 1, move from left to right in described multiple line style detector s0, s1, s2, s3, s4.When the first moment, described multiple line style detector s0, s1, s2, s3, s4 are positioned at position A pair of transparency carrier 100 position corresponding with described position A and carry out imaging and detection.Afterwards when the second moment, described multiple line style detector s0, s1, s2, s3, s4 move to position B, carry out imaging and detection to transparency carrier 100 position corresponding with described position B.
In other embodiments, described optical measuring device is also provided with the scanning element (not shown) be fixedly connected with described transparency carrier 100, moves (as indicated by the dashed arrow in fig. 1 direction) in X direction for making described transparency carrier 100.In the process, the position of described multiple line style detector s0, s1, s2, s3, s4 is motionless, thus makes described transparency carrier and described multiple line style detector s0, s1, s2, s3, s4 relative motion occur, to complete scanning.
It should be noted that, for time delay integration probe unit 200, owing to arranging the limited amount of line style detector, therefore described time delay integration probe unit 200 is limited in the size of X-direction.Like this, the size of the described detectable dip plane of time delay integration probe unit 200 600 is also limited.In the present embodiment, based on the size of time delay integration probe unit 200, the test surface of integration probe unit 200 and the angle α of transparency carrier 100 is postponed by regulation time, line style detector s0 and s4 being positioned at end in time delay integration probe unit 200 is made to be respectively used to detect the bottom surface of transparency carrier 100 and upper surface, and line style detector s1, s2, the s3 between described line style detector s0 and s4, be respectively used to detect the tested surface between the bottom surface and upper surface of transparency carrier 100.
In the present embodiment, represent the thickness of transparency carrier 100 with D, represent the quantity of line style detector with n, so the measuring accuracy of optical measuring device is D/n, that is, described optical measuring device can be measured each tested surface that transparency carrier 100 spacing on thickness direction Z is D/n.Therefore, measuring accuracy can be increased by the quantity increasing line style detector, but this also can increase the cost of optical measuring device and the complexity of follow-up data process, can according to the design requirement of product measuring accuracy in practical application, the thickness based on transparency carrier 100 designs the quantity of line style detector.
In above-described embodiment, line style detector s0 and s4 being positioned at end in time delay integration probe unit 200 is respectively used to detect the bottom surface of transparency carrier 100 and upper surface, but the present invention does not limit this, in other embodiments, by the test surface of increase time delay integration probe unit 200 and the angle α of transparency carrier 100, line style detector s1 can also be made, s3 is respectively to for detecting the bottom surface of transparency carrier 100 and upper surface, but like this, s0, s4 will be not used in and measure transparency carrier 100, on the one hand, do not make full use of all line style detectors, measurable tested surface quantity also can decline (dropping to measurement 3 tested surfaces by measurement 5 tested surfaces) on the other hand, thus reduce measuring accuracy.
In addition, in other embodiments, line style detector s0, s4 can also be made to be respectively used to the face above to transparency carrier 100 bottom surface, the face below transparency carrier 100 upper surface detects, but, for optical measuring device, transparency carrier 100 thickness direction Z does not have reference plane, is not easy to calculate and the projected position corresponding to each line style detector, and then is not easy to the position calculating tested surface.
Continue with reference to figure 1, described optical measuring device also comprises data capture unit 300, described data capture unit 300 comprises multiple data obtainer r0......r4, respectively with described multiple line style detector s0......s4 one_to_one corresponding, obtain for prefixed time interval (namely by certain frequency) data that each line style detector detects, form the detection data with time correlation.
The frequency of data capture unit 300 can set based on the speed of relative motion, if the movement rate of described relative motion is comparatively large, correspondingly, adopts the data capture unit 300 of upper frequency; If the movement rate of described relative motion is less, correspondingly, the data capture unit 300 of lower frequency is adopted.
Particularly, described data obtainer r0......r4 can be sequential control circuit, can set the clock signal of described sequential control circuit based on product design specification (PDS).
Described optical measuring device also comprises Date Conversion Unit 400, comprises multiple data converter be connected with described multiple data obtainer r0......r4 respectively.Described each data converter is by analyzing detection data that is described and time correlation, take the movement rate of time delay integration probe unit 200 relative to transparency carrier 100 into consideration, the defect information of tested surface corresponding to the diverse location on transparency carrier thickness direction can be obtained.
It should be noted that, described data capture unit 300 and Date Conversion Unit 400 can be independent hardware devices, and also can be integrated in time delay integration probe unit 200, the present invention does not limit this.
It should be noted that, in the above-described embodiments, described multiple line style detector s0......s4 is integrated in time delay integration probe unit 200, but the present invention does not limit this.In other embodiments, described optical measuring device can also comprise multiple independently line style detector.Multiple line style detector can have different focal lengths, also can not laid out in parallel together, as long as each line style detector can scan the tested surface corresponding to projected position different on transparency carrier through-thickness respectively.
With reference to figure 2, show the schematic diagram of another embodiment of optical measuring device of the present invention.Originally the preferred embodiments of the present invention are embodied as, repeat no more with something in common embodiment illustrated in fig. 1, the present embodiment and difference embodiment illustrated in fig. 1 are, described optical measuring device can also comprise lighting unit 500, for illuminating transparency carrier 100, to increase the contrast of image in time delay integration probe unit 200, and then Enhanced time postpones the intensity of detectable signal in integration probe unit 200, increases accuracy of measurement.
It should be noted that, in order to prevent lighting unit 500 from affecting described multiple line style detector s0, s1, s2, s3, s4 to the scanning of transparency carrier 100, described lighting unit 500 need be arranged at the side that transparency carrier 100 is not provided with line style detector s0, s1, s2, s3, s4.As shown in Figure 2, described line style detector s0, s1, s2, s3, s4 are positioned at above transparency carrier 100, and lighting unit 500 is positioned at the below of transparency carrier 100.
In the present embodiment, described lighting unit 500 is the strip source extended along the first direction being parallel to transparency carrier 100, and described strip source is corresponding with the position of described multiple line style detector s0, s1, s2, s3, s4.Corresponding being meant in position of strip source described herein and described multiple line style detector s0, s1, s2, s3, s4, described strip source is arranged in that described multiple line style detector s0, s1, s2, s3, s4 are detectable, the below of the dip plane 600 that is positioned at transparency carrier 100.
Correspondingly, when multiple line style detector s0, s1, s2, s3, s4 move, described strip source also correspondingly moves.Therefore in the present embodiment, described scanning element is also fixed with described strip source, synchronously, along the X-direction being parallel to transparency carrier 100 moves for making described multiple line style detector s0, s1, s2, s3, s4 and described strip source.
In other embodiments, described lighting unit 500 can also be the area source parallel with transparency carrier 100, and the region of described area source uniform illumination is at least greater than the area of described transparency carrier 100, thus can illuminate whole transparency carrier 100.
Correspondingly, the present invention also provides a kind of measuring method, with reference to figure 3, shows the schematic flow sheet of measuring method one embodiment of the present invention.Described measuring method roughly comprises the following steps:
Step S1, provides transparency carrier;
Step S2, provides multiple line style detector, described multiple line style detector is extended along the first direction being parallel to transparency carrier, carries out imaging and detection to the diverse location on transparency carrier thickness direction; Make described multiple line style detector and transparency carrier along the second direction relative motion being parallel to transparency carrier, described second direction and first direction not parallel;
Step S3, obtains the data that each line style detector detects respectively, forms the detection data with time correlation;
Step S4, by analyzing detection data that is described and time correlation, obtains the defect information of tested surface corresponding to the diverse location on transparency carrier thickness direction.
Below in conjunction with specific embodiment, technical solution of the present invention is described further.
Perform step S1, transparency carrier is provided.In the present embodiment, described transparency carrier is glass, but the present invention does not limit this, and the substrate of light-permeable is all applicable to measuring method of the present invention.
Perform step S2, provide the step of multiple line style detector to comprise: to provide time delay integration probe unit.Be integrated with multiple linear array arranged in parallel in described time delay integration probe unit, described linear array is corresponding with described line detector.Each line style detector has the same focal length and laid out in parallel.
Described multiple line style detector is extended along the first direction being parallel to transparency carrier, and makes the laid out in parallel direction of line style detector be second direction.
In the present embodiment, second direction is the direction vertical with described first direction, but the present invention does not limit this, if described second direction and described first direction not parallel.
Described multiple line style detector laid out in parallel forms test surface together, makes the described test surface of time delay integration probe unit and the angle of transparency carrier be greater than 0 and be less than 90 °.Like this, described multiple line style detector can in transparency carrier, not parallel with transparency carrier dip plane carries out imaging and detection.Specifically, described multiple line style detector can detect the multiple linear regions along first direction on dip plane respectively.Described linear regions corresponds to projected positions different on transparency carrier thickness direction.
Preferably, the line style detector being positioned at end position place in described multiple line style detector is made to carry out imaging and detection to two of transparency carrier surfaces.On the one hand, can so that calculate the position of different tested surface; On the other hand, measuring accuracy can be improved.
After time delay integration probe unit is provided, make described multiple line style detector and transparency carrier along being parallel to transparency carrier and the second direction vertical with first direction carries out relative motion, like this, each line style detector can complete the scanning of tested surface corresponding to projected positions different on transparency carrier thickness direction.
Particularly, the position of described multiple line style detector can be made to fix, and make described transparency carrier along being parallel to transparency carrier and the second direction vertical with first direction moves.Also the position of described transparency carrier can be made to fix, and make described multiple line style detector along being parallel to transparency carrier and the second direction vertical with first direction moves.
In the present embodiment, described time delay integration probe unit is time delay integration CMOS camera or time delay integration CCD camera camera, but the present invention is not restricted to this.
In other embodiments, can also provide and not be integrated in a probe unit, multiple independently line style detector, described line style detector can have different focal lengths, also can not along second direction laid out in parallel, as long as each line style detector can scan the face corresponding to projected position different on transparency carrier through-thickness respectively.
Preferably, measuring method of the present invention also comprises provides lighting unit, described lighting unit is positioned at side that transparency carrier is not provided with line style detector, to illuminate transparency carrier.Thus the signal intensity that raising line style detector detects, to improve accuracy of measurement.
Particularly, provide the method for lighting unit to comprise described in the strip source extended along the first direction being parallel to transparency carrier to be provided, to make described strip source corresponding with the position of described multiple line style detector.Make corresponding being meant in position of described strip source and described multiple line style detector herein, described strip source is positioned at the position of described multiple detectable dip plane of line style detector.
Motionless at transparency carrier, and multiple line style detector moving is to realize in the embodiment of relative motion, described strip source need carry out synchronizing moving with described multiple line style detector.
In other embodiments, described in provide the method for lighting unit also to comprise to provide area source, the region of described area source uniform illumination is at least greater than the area of described transparency carrier, to illuminate whole transparency carrier.Described area source without the need to moving together with described multiple line style detector.
Perform step S3, interval obtains the data that each line style detector detects respectively at preset timed intervals, formed and comprise with the step of the detection data of time correlation: obtain the data that each line style detector detects in interval (namely according to certain frequency) at preset timed intervals by sequential control circuit, formed and the detection data of time correlation.
The frequency of described acquisition data can set based on the speed of relative motion, if the movement rate of described relative motion is comparatively large, correspondingly, adopts higher frequency to carry out data acquisition; If the movement rate of described relative motion is less, correspondingly, lower frequency is adopted to carry out data acquisition.
Particularly, described frequency can be set according to product design specification (PDS).For sequential control circuit, the clock signal of corresponding frequencies need be set.
Perform step S4, by analyzing detection data that is described and time correlation, take the information of the speed, direction etc. of multiple line style detector and transparency carrier relative motion into consideration, obtain the defect information of tested surface corresponding to the diverse location on transparency carrier thickness direction.Defect information described herein, comprises the quantity of defect on each tested surface, position and relative size etc.
Although the present invention with preferred embodiment openly as above; but it is not for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; the Method and Technology content of above-mentioned announcement can be utilized to make possible variation and amendment to technical solution of the present invention; therefore; every content not departing from technical solution of the present invention; the any simple modification done above embodiment according to technical spirit of the present invention, equivalent variations and modification, all belong to the protection domain of technical solution of the present invention.
Claims (27)
1. an optical measuring device, for measuring transparency carrier, is characterized in that, comprising:
Multiple line style detector, described multiple line style detector extends along the first direction being parallel to transparency carrier, described multiple line style detector laid out in parallel forms test surface together, the angle of described test surface and described transparency carrier opposite face is greater than 0 ° and is less than 90 °, for carrying out imaging and detection to dip plane not parallel with transparency carrier in transparency carrier, described multiple line detector is for carrying out imaging and detection to the multiple linear regions along first direction on described dip plane respectively, the projected position of described multiple linear regions on transparency carrier thickness direction is different,
Described multiple line style detector and transparency carrier can along the second direction relative motions being parallel to transparency carrier, described second direction and first direction not parallel, to complete the scanning to described transparency carrier;
Multiple data obtainer, with described multiple line style detector one_to_one corresponding, for obtaining the data that line style detector detects according to prefixed time interval, forms the detection data with time correlation;
Multiple data converter, is connected with described multiple data obtainer respectively, by analyzing detection data that is described and time correlation, obtains the defect information of tested surface corresponding to the diverse location on transparency carrier thickness direction.
2. optical measuring device as claimed in claim 1, it is characterized in that, described multiple line style detector has identical focal length.
3. optical measuring device as claimed in claim 1, is characterized in that, described second direction and described first direction perpendicular.
4. optical measuring device as claimed in claim 1, it is characterized in that, described multiple line style detector along described second direction laid out in parallel together.
5. optical measuring device as claimed in claim 1, it is characterized in that, described multiple line style detector is integrated in a time delay integration probe unit.
6. optical measuring device as claimed in claim 5, it is characterized in that, described time delay integration probe unit is time delay integration CMOS camera or time delay integration CCD camera.
7. optical measuring device as claimed in claim 1, it is characterized in that, described optical measuring device also comprises lighting unit, and described lighting unit is positioned at the side that transparency carrier is not provided with line style detector, for illuminating transparency carrier.
8. optical measuring device as claimed in claim 7, it is characterized in that, described lighting unit is area source, and the region of described area source uniform illumination is at least greater than the area of described transparency carrier.
9. optical measuring device as claimed in claim 7, is characterized in that, described lighting unit is the strip source extended along the first direction being parallel to transparency carrier, and described strip source is corresponding with the position of described multiple line style detector.
10. the optical measuring device as described in claim 4 or 5, is characterized in that, the line style detector being positioned at end position place in described multiple line style detector is respectively used to carry out imaging and detection to two surfaces of transparency carrier.
11. optical measuring devices as claimed in claim 1, is characterized in that, also comprise the scanning element be fixedly connected with described transparency carrier, move along the second direction vertical with first direction for making described transparency carrier.
12. optical measuring devices as claimed in claim 1, is characterized in that, also comprise the scanning element be fixedly connected with described multiple line style detector, move along second direction for making described multiple line style detector.
13. optical measuring devices as claimed in claim 9, is characterized in that, also comprise the scanning element be fixedly connected with strip source with described multiple line detector, synchronously, along second direction move for making described multiple line style detector and strip source.
14. optical measuring devices as claimed in claim 1, it is characterized in that, described data obtainer is sequential control circuit.
15. 1 kinds of measuring methods, is characterized in that, comprising:
Transparency carrier is provided;
Multiple line style detector is provided, described multiple line style detector is extended along the first direction being parallel to transparency carrier, make described multiple line style detector laid out in parallel form test surface together, the angle of described test surface and described transparency carrier opposite face is greater than 0 ° and is less than 90 °, for carrying out imaging and detection to dip plane not parallel with transparency carrier in transparency carrier, described multiple line detector is respectively used to carry out imaging detection to the multiple linear regions along first direction on described dip plane, the projected position of described multiple linear regions on transparency carrier thickness direction is different,
Make described multiple line style detector and transparency carrier along the second direction relative motion being parallel to transparency carrier, described second direction and first direction not parallel;
Obtain according to prefixed time interval the data that each line style detector detects respectively, form the detection data with time correlation;
By analyzing detection data that is described and time correlation, obtain the defect information of tested surface corresponding to the diverse location on transparency carrier thickness direction.
16. measuring methods as claimed in claim 15, is characterized in that, described in provide the step of multiple line style detector to comprise: multiple line style detector with the same focal length is provided.
17. measuring methods as claimed in claim 15, is characterized in that, make described second direction vertical with described first direction.
18. measuring methods as claimed in claim 15, is characterized in that, described in provide the step of multiple line style detector also to comprise: make described multiple line style detector along described second direction laid out in parallel together.
19. measuring methods as claimed in claim 15, is characterized in that, described in provide the step of multiple line style detector to comprise: provide a time delay integration probe unit, described multiple line style detector is integrated in described time delay integration probe unit.
20. measuring methods as claimed in claim 19, is characterized in that, described in provide the step of a time delay integration probe unit to comprise: time delay integration CMOS camera or time delay integration CCD camera are provided.
21. measuring methods as claimed in claim 15, is characterized in that, after the step providing multiple line style detector, before making the step of multiple line style detector and transparency carrier relative motion, also comprise:
There is provided lighting unit, described lighting unit is positioned at side that transparency carrier is not provided with line style detector, to illuminate transparency carrier.
22. measuring methods as claimed in claim 21, is characterized in that, described in provide the method for lighting unit to comprise area source to be provided, to make the region of described area source uniform illumination at least be greater than the area of described transparency carrier.
23. measuring methods as claimed in claim 21, it is characterized in that, describedly provide the method for lighting unit to comprise to provide the strip source extended along the first direction being parallel to transparency carrier, make described strip source corresponding with the position of described multiple line style detector.
24. measuring methods as described in claim 18 or 19, it is characterized in that, there is provided multiple line style detector, the step of the diverse location on transparency carrier thickness direction being carried out to imaging and detection comprises: make the line style detector being positioned at end position place in described multiple line style detector carry out imaging and detection to two of transparency carrier surfaces.
25. measuring methods as claimed in claim 15, is characterized in that, the step of described multiple line style detector and transparency carrier relative motion is comprised:
The position of described multiple line style detector is fixed, described transparency carrier is moved along the second direction being parallel to transparency carrier.
26. measuring methods as claimed in claim 15, is characterized in that, the step of described multiple line style detector and transparency carrier relative motion is comprised:
The position of described transparency carrier is fixed, described multiple line style detector is moved along the second direction being parallel to transparency carrier.
27. measuring methods as claimed in claim 15, is characterized in that, obtain the data that each line style detector detects respectively, are formed and comprise with the step of the detection data of time correlation:
By the sequential control circuit data that detect of each line style detector of interval acquiring at preset timed intervals, form the detection data with time correlation.
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| CN104880465B (en) * | 2014-02-27 | 2017-10-31 | 宝山钢铁股份有限公司 | For the online visible detection method of Varying-thickness sheet material surface quality |
| CN104949983B (en) * | 2014-03-28 | 2018-01-26 | 宝山钢铁股份有限公司 | The line scan camera imaging method of object thickness change |
| CN109959666B (en) * | 2019-04-11 | 2021-08-03 | 京东方科技集团股份有限公司 | Array substrate defect judgment method, processor and judgment system |
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| JP3278518B2 (en) * | 1993-12-27 | 2002-04-30 | 日本板硝子株式会社 | Method and apparatus for detecting structural and / or pattern defects of an object |
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| JPH08285789A (en) * | 1995-04-18 | 1996-11-01 | Nippon Sheet Glass Co Ltd | Method for determining binarization level in defect detection method |
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| JP3278518B2 (en) * | 1993-12-27 | 2002-04-30 | 日本板硝子株式会社 | Method and apparatus for detecting structural and / or pattern defects of an object |
| US7382457B2 (en) * | 2004-01-22 | 2008-06-03 | Wintriss Engineering Corporation | Illumination system for material inspection |
| CN101614680A (en) * | 2008-06-26 | 2009-12-30 | 株式会社阿迪泰克工程 | Defect detecting device and method |
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