CN102651531A - Optical fiber laser device and output monitoring method - Google Patents
Optical fiber laser device and output monitoring method Download PDFInfo
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- CN102651531A CN102651531A CN2012100189758A CN201210018975A CN102651531A CN 102651531 A CN102651531 A CN 102651531A CN 2012100189758 A CN2012100189758 A CN 2012100189758A CN 201210018975 A CN201210018975 A CN 201210018975A CN 102651531 A CN102651531 A CN 102651531A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000012544 monitoring process Methods 0.000 title claims abstract description 11
- 230000003321 amplification Effects 0.000 claims abstract description 64
- 238000003199 nucleic acid amplification method Methods 0.000 claims abstract description 64
- 238000001514 detection method Methods 0.000 claims abstract description 47
- 238000006243 chemical reaction Methods 0.000 claims abstract description 9
- 239000000835 fiber Substances 0.000 claims description 64
- 239000000284 extract Substances 0.000 claims description 52
- 238000000605 extraction Methods 0.000 claims description 30
- 239000000203 mixture Substances 0.000 claims description 26
- 238000009499 grossing Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 abstract description 32
- 238000012545 processing Methods 0.000 description 44
- 238000012360 testing method Methods 0.000 description 20
- 230000014509 gene expression Effects 0.000 description 19
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- 238000010586 diagram Methods 0.000 description 13
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- 238000001228 spectrum Methods 0.000 description 6
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- 230000005856 abnormality Effects 0.000 description 3
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- 238000012935 Averaging Methods 0.000 description 2
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- 238000003860 storage Methods 0.000 description 2
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0064—Anti-reflection devices, e.g. optical isolaters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/127—Plural Q-switches
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- Nonlinear Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Lasers (AREA)
Abstract
The invention relates to an optical fiber laser device and an output monitoring method. According to the invention, the detection accuracy of signal amplification light and background light of the output light of the optical fiber laser device can be improved. A TAP connector (143) can be used to diverge a part of the output light emitted by the light amplification optical fiber in order to take the sample light. A light radiodetector (146) can use the sample light to perform the light-to-current conversion in order to generate the detection signal corresponding to the quantity of light of the sample light. A multiplexer(205) can be used to take a signal light taking signal, namely a detection signal during a first period of outputting the signal amplification light, and to remove a background taking signal, namely a detection signal during the first and the second periods. The invention can be used for the optical laser device.
Description
Technical field
The present invention relates to fiber laser device and output method for monitoring, particularly the signal that in the output light of fiber laser device, comprises of raising amplify light and bias light accuracy of detection fiber laser device and export method for monitoring.
Background technology
In with the fiber laser device of optical fiber as medium; The light of emitting naturally that in the fibre core of optical fiber, produces amplifies through the remaining gain that does not contribute to the signal that is used to process and amplify the amplification of light; Become bias light (ASE (amplified spontaneous emission: light Amplified Spontaneous Emission)), and sneak into from the output light of fiber laser device output.This bias light do not influence effect with peak value output be purpose laser processing (for example; Laser labelling, laser correction, laser drawing etc.); Therefore if the ratio of the bias light that in output light, comprises increases; Error between the mensuration result of the power (or intensity) of output light and the actual processing result becomes big, exists machining accuracy is brought dysgenic misgivings.
Therefore, in the past, reduced bias light through the pulse modulation exciting light.
Fig. 1 is illustrated in through exciting the signal that has amplified startup (seed) light time to amplify light and the routine diagram of the relation of bias light with continuous light as the CW of exciting light.On the other hand, Fig. 2 is illustrated in through exciting as the pulse modulation of exciting light with pulsed light to have amplified the signal that starts the light time and amplify light and the routine diagram of the relation of bias light.
In addition, the diagram of the top of Fig. 1 and Fig. 2 representes to start the waveform of light, the transverse axis express time, and the longitudinal axis is represented power.The waveform that the diagram of the centre of Fig. 1 and Fig. 2 is represented exciting light and passed through the gain amplifier that exciting light obtains, transverse axis express time, the longitudinal axis are represented power or gain.The diagram of below representes to amplify from the signal of fiber laser device output the waveform of light and bias light, the transverse axis express time, and the longitudinal axis is represented power.
No matter be the situation of which mode; All before the output signal amplifies light; Main export after amplifying bias light through the energy in exciting, and after having exported signal to amplify light and then, mainly the residual gain of the amplification through not contributing to flashlight amplifies bias light and exports.
In addition, when CW excited, exciting light incided optical fiber continuously, therefore to signal amplify that light amplifies during beyond during also become the state in exciting all the time, gain amplifier keeps high level.Thereby, do not contribute to the residual gain increase that signal amplifies the amplification of light, cause bias light to increase.On the other hand; When pulse modulation excites,, make that gain amplifier becomes peak value when startup light is input to optical fiber because exciting light is input to optical fiber; Therefore compare when exciting with CW, can the gain amplifier during beyond during signal being amplified light amplifies be suppressed for lower.Thereby comparison diagram 1 can know that with Fig. 2 excite with CW and compare, pulse modulation excites the minimizing bias light.
And, no matter be the situation of which mode, all be exciting light stronger (excitation energy is high more), residual gain is big more, and bias light is big more, exciting light more weak (excitation energy is low more), residual gain is few more, and bias light is few more.
In addition, no matter be the situation of which mode, all be the repetition rate of signal amplification light is high more, the excitation energy (gain) that is extracted in accumulation in the optical fiber is many more, and residual gain is few more, and bias light is few more.On the other hand, the repetition rate that signal amplifies light is low more, and the extracted amount of the excitation energy that in optical fiber, accumulates (gain) is few more, and bias light is big more.
Fig. 3 is that expression changes repetition rate on one side in the scope of 10kHz to 100kHz, has measured on one side through CW to excite from the result's of the spectrum of the output light of fiber laser device output one routine diagram.In addition, transverse axis is represented wavelength, and the longitudinal axis representes to export the logarithm value of light intensity.
When repetition rate is under the situation of 100kHz, comprises bias light hardly in the output light, and the centre wavelength that the spectrum of output light becomes with signal amplification light is the almost symmetrical waveform of peak value.On the other hand, along with repetition rate reduces, the bias light that comprises in the output light increases, and the wavelength components on every side that signal amplifies the centre wavelength of light increases, and the scope of spectrum also broadens.
This is also identical when pulse modulation excites, and for example, when repetition rate was a few kHz, the ratio that bias light accounts for output light reached tens % from several %.
Thereby the repetition rate that signal amplifies light is low more, and the ratio that bias light accounts for output light is big more, and the mensuration result who therefore exports the power of light increases the machining accuracy reduction with error between the actual processing result.
More particularly, for example, calculate the energy E and the peak power Pp of the output light that uses as machined parameters through following formula (1) and (2).
E＝Pave/f ...(1)
Pp＝E/Δt ...(2)
Here, the average power Pave of output light for example measures according to thermal conversion through measuring power meter and has carried out time averaging value.In addition, repetition rate f is known, and the optical detector of the light quantity of pulse duration Δ t through being used to detect output light is measured.
If bias light increases; The difference that measured value and the signal of then exporting the average power Pave of light amplifies between the average power of light becomes big; Its result; The energy E of output light and the measured value of peak power Pp deviate from energy and the peak power that actual contribution is amplified light in the signal of processing, and machining accuracy reduces.
The problems referred to above are for example replacing power meter, and also identical through having utilized the power monitor that generally is combined in the photodiode in the fiber laser device to measure under the situation of the average power of exporting light.
Thereby, in fiber laser device in the past, reduce in order to prevent machining accuracy, when the repetition rate of signal being amplified light is set under the lower situation, limit the power of output light.
Fig. 4 is the diagram of an example of the operating characteristics of the such fiber laser device of expression.The transverse axis expression signal amplifies the repetition rate of light, and the longitudinal axis representes to export the pulse energy of light.
The average power of solid line 11 expression output light becomes the line of 10W.Wherein, When the pulse duration that will export light (signal amplification light) is set under certain situation; Need (stimulated Raman scattering: Stimulated Raman Scattering) with below the value of peak power limitations for regulation through SRS; When the peak power that will export light is made as under certain situation, need (stimulated Brillouin scattering: stimulated Brilliouin scattering) with below the value of pulse-width restricting for regulation through SBS.Therefore, as shown in the drawing, when for example repetition rate was in the scope below the 10kHz, the pulse energy of output light was restricted to certain value, its result, and the average power of output light is restricted to less than 10W.
On the other hand, dotted line 12 expressions are from the pulse energy of the output light of the actual output of fiber laser device.Like this, the pulse energy of output light is limited, and makes when the for example average power minimizing of output light during the scope below about 20～30kHz of repetition rate.This is because as above-mentioned, and unwanted bias light increases under low-repetition-frequency.Its result, when repetition rate being set at than hang down, available machining energy reduces.
Therefore, following technology had been proposed in the past: utilize FBG (Fiber Bragg Grating FBG: Fiber Bragg Grating) amplify the light (for example, with reference to patent documentation 1) of light wavelength band from exporting light extraction and supervisory signal.
Patent documentation 1: (Japan) spy opens the 2000-183434 communique
But like before shown in Figure 3, it is approaching that the centre wavelength of the spectrum of bias light and signal amplify light, and the spectral region broad that amplifies light than signal is overlapping, therefore can not separate spectrum.
Thereby, be difficult to utilize above-mentioned FBG etc., based on wavelength, amplify light and bias light from output light extraction signal.
Summary of the invention
The present invention is in view of such situation and accomplishing, and can improve the accuracy of detection that the signal that in the output light of fiber laser device, comprises amplifies light and bias light.
The fiber laser device of one side of the present invention, output is amplified light through the startup light of pulse type is amplified the signal that obtains by optical fiber, comprising: furcation, a part of bifurcated of the laser that will penetrate from optical fiber, thereby extraction sampled light; Photoelectric conversion department carries out light-to-current inversion to sampled light, generates the signal of telecommunication; And extraction portion, extract comprise the output signal amplify light during the 1st during in the signal of telecommunication promptly the 1st extract signal and remove the 2nd during the 1st during in the signal of telecommunication promptly the 2nd extract in the signal at least one.
In the fiber laser device in one aspect of the invention; A part of bifurcated of the laser that will penetrate from optical fiber; Thereby extraction sampled light; Sampled light is carried out light-to-current inversion, generates the signal of telecommunication, extract comprise the output signal amplify light during the 1st during in the signal of telecommunication promptly the 1st extract signal and remove the 2nd during the 1st during in the signal of telecommunication promptly the 2nd extract in the signal at least one.
Thereby, can improve the accuracy of detection that the signal that in the output light of fiber laser device, comprises amplifies light and bias light.
This furcation for example is made up of the TAP connector.This photoelectricity change section for example is made up of the high speed PIN photodiode.This extraction portion for example is made up of the high speed simulation multiplexer.
In this extraction portion, can be according to the clock signal that is used to control from the output of the startup light of the light source of regulation, extract the 1st and extract signal and the 2nd and extract signal.
Thus, can control the timing that is used to extract the 1st extraction signal and the 2nd extraction signal simply.
Can finish after the 2nd time through regulation beginning after the 1st time through regulation during the 1st from clock signal.
Thus, separation and Extraction is amplified the composition of light and the composition of bias light at the signal that output comprises in the light more reliably.
This fiber laser device can also be provided with: smoothing portion, extract signal smoothingization with the 2nd; And wrong detection unit, when the 2nd extraction signal after smoothing has surpassed the threshold value of regulation, the output error signal.
A large amount of superfluous gains of STA representation that produce bias lights (ASE light) are accumulated in the state in the optical fiber, be the direct of travel of flashlight be easy to generate the state that light gushes (generation of the pulse of the needle pattern (spike) of strong peak value output) in the other direction.Thereby, through this wrong detection unit, can prevent in advance generation that light gushes with and the damage that causes to optics.
This smoothing portion for example is made up of the smoothing circuit that has utilized electric capacity etc.This wrong detection unit for example is made up of comparator.
In this fiber laser device, can also be as follows: the signal of telecommunication be bifurcated into the 1st signal of telecommunication and the 2nd signal of telecommunication, and fiber laser device comprises: restrictions, limit the level of the 2nd signal of telecommunication; And the enlarging section, confined the 2nd signal of amplification level, extraction portion extracts the 1st from the 1st signal of telecommunication and extracts signal, and the 2nd signal of telecommunication after being exaggerated extracts the 2nd extraction signal.
Thus, can amplify and detect the composition of the bias light that in output light, comprises.
This restrictions for example is made up of Zener diode.This enlarging section for example is made up of the high speed operation amplifier amplifying circuit.
In this fiber laser device, can also be provided with the portion of removing, remove the composition of the wavelength band that is used to amplify the exciting light that starts light from sampled light, photoelectric conversion department will have been removed the sampled light of composition of the wavelength band of exciting light and carry out light-to-current inversion.
Thus, can remove in being input to the exciting light of optical fiber does not have contribution and the residual excitation light of output to amplifying, thereby detection signal amplifies light and bias light.
This portion of removing for example is made up of optical filters such as band pass filter and ND filters.
In this fiber laser device, can also be provided with: output control part, according to based on the 1st extract signal detected value and based on the 2nd extract in the detected value of signal at least one, the output of control fiber laser device.
Thus, can improve machining accuracy.In addition, can realize the fiber laser device that carries out laser processing with the high machining energy of low-repetition-frequency.
This output control part for example is made up of processors such as CPU, MPU.
The output method for monitoring of one side of the present invention is used for fiber laser device; Fiber laser device output is amplified the signal amplification light that the back obtains through the startup light with pulse type in optical fiber; The output method for monitoring may further comprise the steps: a part of bifurcated of the laser that will penetrate from optical fiber, extraction sampled light; The sampled light light-to-current inversion is generated the signal of telecommunication; And extract comprise the output signal amplify light during the 1st during in the signal of telecommunication promptly the 1st extract signal and remove the 2nd during the 1st during in the signal of telecommunication promptly the 2nd extract in the signal at least one.
In the output method for monitoring in one aspect of the invention; A part of bifurcated of the laser that will penetrate from optical fiber; Thereby extraction sampled light; Sampled light is carried out light-to-current inversion, generates the signal of telecommunication, extract comprise the output signal amplify light during the 1st during in the signal of telecommunication promptly the 1st extract signal and remove the 2nd during the 1st during in the signal of telecommunication promptly the 2nd extract in the signal at least one.
Thereby, can improve the signal amplification light that in the output light of fiber laser device, comprises, the accuracy of detection of bias light.
The extraction of sampled light is for example undertaken by the TAP connector.Light-to-current inversion is for example undertaken by the neat photodiode of high speed PIN.The extraction that the 1st extraction signal and the 2nd extracts signal is for example undertaken by the high speed simulation multiplexer.
According to an aspect of the present invention, can improve the signal amplification light that in the output light of fiber laser device, comprises, the accuracy of detection of bias light.
Description of drawings
Fig. 1 is the diagram that startup light, exciting light, gain amplifier, the signal of expression CW when exciting amplifies the development of light and bias light.
Fig. 2 is the diagram that indicating impulse is modulated the development of startup light, exciting light, gain amplifier, signal amplification light and bias light when exciting.
Fig. 3 is the diagram of the relation of the signal of the expression fiber laser device repetition rate and the spectrum that amplify light.
Fig. 4 be represent fiber laser device in the past operating characteristics one the example diagram.
Fig. 5 is the block diagram that an execution mode of fiber laser device of the present invention has been used in expression.
Fig. 6 is the figure of structure example of the test section of expression fiber laser device.
Fig. 7 is the flow chart that is used to explain the output supervision processing of being carried out by fiber laser device.
Fig. 8 is the oscillogram that is used to explain the output supervision processing of being carried out by fiber laser device.
Label declaration
101 fiber laser devices
111 LASER Light Sources
112 laser control systems
113 machining cells
131 start LD
134 excite LD
136 light amplification optical fiber
139A to 139D excites LD
141 light amplification optical fiber
143TAP connector (coupler)
145 optical filters
146 optical detectors
161 drive control parts
162 pulse generators
163,164,165A to 165D driver
166 test sections
181 supervision portions
203 Zener diodes
204 amplifying circuits
205 multiplexers
206A, 206B signal processing part
208 comparators
Embodiment
Below, the mode that is used for embodiment of the present invention (below be called execution mode) is described.In addition, explain according to following order and carry out.
1. execution mode
2. variation
1. execution mode
Fig. 5 is the figure that an execution mode of fiber laser device 101 of the present invention has been used in expression.
Start LD131 based on the control of laser control system 112 and impulse hunting, thereby send the startup light of pulse type.In addition, starting light wavelength for example selects from the scope of 1000～1100nm.
The startup light that sends from startup LD131 passes through BPF132 and isolator 133.
BPF132 passes through the light of the wavelength band of the regulation that comprises the centre wavelength that starts light, and ends the light of the wavelength band that is different from this wavelength band.
Excite the control of LD134, send the exciting light that is used for exciting the rare earth element that the fibre core at light amplification optical fiber 136 adds based on laser control system 112.For example, be under the situation of Yb (ytterbium) when rare earth element, excite light wavelength for example to be set at 915～975nm.
The coating on every side that light amplification optical fiber 136 has fibre core and is arranged on this fibre core, fibre core is added the rare earth element as the light amplification composition.Add not special qualification of kind of the rare earth element in the fibre core to, Er (erbium), Yb (ytterbium), Nd (neodymium) etc. are for example arranged.
In addition, the rare earth element that comprises in the fibre core of light amplification optical fiber 136 absorbs exciting light, thereby this rare earth element is excited.Under this state, propagate in the fibre core of light amplification optical fiber 136 if start light, then produce the stimulated emission that the rare earth element that is excited causes.Through this stimulated emission, the startup light that is input in the light amplification optical fiber 136 is exaggerated.
In addition, below, will be called signal through the pulsed light that amplification startup light in light amplification optical fiber 136 obtains and amplify light.
BPF138 makes and comprises the light of wavelength band of regulation that the signal that penetrates from light amplification optical fiber 136 amplifies the centre wavelength of light and pass through, and by the light of the wavelength band that is different from this wavelength band.
Excite LD139A to 139D separately based on the control of laser control system 112, send the exciting light that is used for exciting the rare earth element that the fibre core at light amplification optical fiber 141 comprises.
In addition, in Fig. 5, light amplification optical fiber 141 is provided with four excites LD, but excite the number of LD not limit especially.
The signal of coupler 140 couplings having passed through BPF138 amplifies light and the light path of coming the exciting light of self-excitation LD139A to 139D, and it is incided light amplification optical fiber 141.
Light amplification optical fiber 141 has the structure same with light amplification optical fiber 136, is amplified light and exciting light by incoming signal, thereby further amplifying signal amplifies light and penetrates.
In addition, below will be called output light from the light that light amplification optical fiber 141 penetrates.Output comprises the remaining exciting light (below, be called residual excitation light) that signal after being amplified by light amplification optical fiber 136 and light amplification optical fiber 141 amplifies light and bias light and is not used in the amplification of signal amplification light and bias light in the light.
In addition, below, will be called sampled light by TAP connector 143 bifurcateds and the output light that incides optical filter 145.
Machining cell 113 is built-in with the processing optical system that for example comprises f θ lens, scanning mirror, crack etc., will be mapped to processing object thing 103 from the output illumination that LASER Light Source 111 penetrates, and in the enterprising line scanning of machined surface, with 103 processing of processing object thing.
On the other hand, the sampled light that incides optical filter 145 is ended the light of the wavelength band of regulation by optical filter 145, and the light of the wavelength band that is different from this wavelength band is passed through.More particularly, as stated, except signal amplifies light, comprise bias light and residual excitation light in the sampled light.In addition, as stated, for example in the scope of 1000～1100nm, excite light wavelength for example is 915～975nm to signal amplification light wavelength (=startup light wavelength), and disconnected from each other.Therefore, optical filter 145 is made up of band pass filter and ND filter, and band pass filter ends the light of the wavelength band of exciting light, and the light of wavelength band is in addition passed through, thereby from sampled light, removes residual excitation light, ND filter adjustment light quantity.
In addition, band pass filter for example is made up of the optical filter of dielectric vacuum plating.
The sampled light of having passed through optical filter 145 incides optical detector 146.Optical detector 147 for example is made up of the high speed PIN photodiode, and the sampled light of incident is carried out opto-electronic conversion, generates the signal of telecommunication based on the light quantity (intensity) of sampled light (below, be called detection signal), and offers the test section 166 of laser control system 112.
Drive control part 161 control fiber laser devices 101 integral body make and amplify light from the signal of the satisfied condition that provides from personal computer (PC) 103 of LASER Light Source 111 ejaculations (for example, the power of signal amplification light, ejaculation time etc.).More particularly; Drive control part 161 amplifies the power (or intensity) of light and bias light based on the signal that is detected by test section 166; Unified clamp-pulse generator 162, driver 164 and driver 165A to 165D, thereby the action of control LASER Light Source 111.
In addition, below be referred to as supervision portion 181 with keeping watch on relevant TAP connector 143, optical filter 145, optical detector 146 and test section 166 with the output of LASER Light Source 111.
[structure example of test section 166]
Fig. 6 representes the structure example of test section 166.
In addition, for the action of the each several part of test section 166, will narrate with reference to Fig. 7 and Fig. 8 in the back.
[output is kept watch on and is handled]
Then, with reference to the oscillogram of flow chart and Fig. 8 of Fig. 7, explain that the output of being carried out by fiber laser device 101 is kept watch on to handle.
In step S1, TAP connector 143 makes the sampled light bifurcated.That is, TAP connector 143 will penetrate and pass through a part (the being sampled light) bifurcated of the output light of isolator 142 from light amplification optical fiber 141, thereby make it incide optical filter 145.
Waveform 2 expressions of Fig. 8 are by the waveform of the sampled light behind TAP connector 143 bifurcateds.In addition, in waveform 2, the part of undermost hollow is represented the composition of residual excitation light, and oblique line is partly represented the composition of bias light, and the pulse type part expression signal with peak value amplifies the composition of light.
Signal amplifies light and LASER Light Source 111 in, transmits, therefore than after the startup light delay stipulated time shown in the waveform 1 from 141 ejaculations of light amplification optical fiber, and pass through optical filter 145.
Bias light amplifies the light smooth variation than signal, before signal amplifies the output of light and after the output, becomes the strongest.Wherein, bias light almost becomes 0 in the output procedure of signal amplification light.
Residual excitation light amplifies light with signal and irrespectively becomes almost certain intensity when CW excites.
In step S2, optical filter 145 is removed residual excitation light from sampled light.That is, optical filter 145 ends the light of the wavelength band of exciting light in the sampled light of incident, and the light of wavelength band is in addition passed through.Thus, remove residual excitation light from sampled light, the sampled light that almost only comprises signal amplification light and bias light is incided optical detector 146.
In step S3, optical detector 146 detects the sampling light intensity.That is, optical detector 146 carries out light-to-current inversion with the sampled light of incident, generates the detection signal that is made up of the electric current based on the light quantity (brightness) of sampled light, and it is offered pulse voltage translation circuit 201.
In step S4, pulse voltage translation circuit 201 will be transformed to voltage by the detection signal that the electric current that provides from optical detector 146 constitutes, and offer amplifying circuit 202.
In step S5, amplifying circuit 202 amplification detection signals.Amplifying circuit 202 for example is made up of the high speed operation amplifier circuit, and the amplification detection signal makes the level of detection signal become tractable value (for example, wave height value becomes several volts).
Thus, for example the S/N of detection signal than being that to amplify light component be 10 with respect to the ratio of bias light composition to signal
3～10
4, therefore being enlarged into wave height value when becoming a few volt when detection signal, the bias light signal components level of the detection signal after the amplification becomes several millivolts.
Waveform 3 expressions of Fig. 8 are from the waveform of the detection signal of amplifying circuit 202 outputs.Compare with waveform 2, removed the composition of residual excitation light, only the composition by signal amplification light and bias light constitutes.
In step S6, test section 166 is two with the detection signal bifurcated, and limits a signal level.Specifically, be bifurcated into the signal of two same level from the detection signal of amplifying circuit 202 output, one of them is imported into multiplexer 205, and another is input to amplifying circuit 204 via Zener diode 203.
In addition, the detection signal that below will be input to multiplexer 205 is called flashlight and detects and use signal, will be called the bias light detection via the detection signal that Zener diode 203 is input to amplifying circuit 204 and use signal.
The bias light detection signal was removed the composition more than the assigned voltage value by Zener diode 203 before being input to amplifying circuit 204.Thus, the bias light that is input to amplifying circuit 204 detects and to be restricted to below the magnitude of voltage of regulation with signal.In addition, the limits value of this voltage for example is set to the undersaturated level of magnitude of voltage when the bias light detection is amplified through amplifying circuit 204 with signal.
In step S7, the bias light composition of amplifying circuit 204 amplification detection signals.Specifically, amplifying circuit 204 for example is made up of the high speed operation amplifier amplifying circuit.In addition; The gain of amplifying circuit 204 for example is set to following value: bias light signal components level is amplified to hundreds of millivolt～several volts from several millivolts; Even and the background light intensity the regulation scope in change, bias light signal components level can be unsaturated yet.Then, amplifying circuit 204 amplifies the bias light detection that is transfused to and uses signal, thereby offer multiplexer 205 based on this gain.
Waveform 4 expressions of Fig. 8 detect the example with the waveform of signal from the bias light of amplifying circuit 204 outputs.Compare with waveform 3, the bias light composition is exaggerated, and signal amplification light component is restricted to below the voltage limit level L1 of regulation.
In step S8, multiplexer 205 extracts signal from detection signal and amplifies light component and bias light composition.
Specifically, multiplexer 205 for example is made up of the simulation multiplexer that responding ability is roughly the high speed below 20 nanoseconds.The clock internal circuit 221 of multiplexer 205 promptly is used to control the clock signal of output of the startup light of self-starting LD131, the selection signal of production burst shape according to the clock signal that provides from pulse generator 162.
Then, during the selection signal conduction, the switch 222A that the flashlight of multiplexer 205 detects with data side is switched on, and the switch 222B that bias light detects with data side is ended.Thus, only export the flashlight detection from multiplexer 205 and use signal, and be input to signal processing part 206A.
On the other hand, during selecting signal to be ended, the switch 222A that the flashlight of multiplexer 205 detects with data side is ended, and the switch 222B that bias light detects with data side is switched on.Thus, only export the bias light detection from multiplexer 205 and use signal, and be input to signal processing part 206B.
The example of the waveform of signal is selected in waveform 5 expressions of Fig. 8; Waveform 6 expressions detect the example with the waveform of signal from the flashlight that multiplexer 205 is input to signal processing part 206A, and waveform 7 expressions detect the example with the waveform of signal from the bias light that multiplexer 205 is input to signal processing part 206B.
Select signal beginning (conducting) after the clock signal that provides from pulse generator 162 is through the 1st time of regulation, through finishing (ending) after the 2nd time of regulation.More particularly, select signal sending the timing conducting that the timing (timing of clock signal conducting) that starts light has postponed the time of delay of regulation from starting LD131.For example be set to the required time of the spread fiber of laser in LASER Light Source 111 (for example,, then being about for 30 nanoseconds) this time of delay, perhaps lack the time of official hour than this time if the total length of optical fiber is 10m.
In addition; During selecting that signal is switched on (selecting the pulse duration of signal) be set to identical with the pulse duration (pulse duration of
startup light) of the drive signal that starts LD131, perhaps than during the long official hour of this width.
Thus, be included in the conduction period of selecting signal reliably during the output signal amplification light, shown in waveform 6, detect the composition that amplifies light with the signal extraction signal from flashlight.In addition, shown in waveform 7, detect the bias light composition of having removed the composition of signal amplification light with signal extraction from bias light.
In addition, below, will detect the composition that amplifies light with the signal extraction signal from flashlight through multiplexer 205, and the signal that is input to signal processing part 206A is called flashlight extraction signal.In addition, below, will detect composition from bias light through multiplexer 205, and the signal that is input to signal processing part 206B is called bias light extraction signal with the signal extraction bias light.
Here, bias light extract do not comprise in the signal select that signal is switched on during the composition of bias light.But, establish bias light influence crudy be signal amplify the repetition rate of light low in, for example, the repetition rate of amplifying light at signal is below the 50kHz and pulse duration is that 200 nanoseconds are when following.Thereby, select the duty ratio of signal to become below 1% approximately.In addition, conducting select signal during in, the output signal amplify light during, bias light almost becomes 0.Thereby, to compare with the composition of the bias light that by the selection signal time, extracts, the composition of the bias light that when signal is selected in conducting, can not extract is fully little, is insignificant degree.
In step S9, signal processing part 206A, 206B carry out signal processing.Specifically, signal processing part 206A extracts signal smoothingization through integrating circuit etc. with flashlight.Waveform 8 expression of Fig. 8 is extracted signal smoothingization with the flashlight of waveform 6 and the waveform of the signal that obtains.And, the flashlight of signal processing part 206A after with smoothing extracts signal carry out the A/D conversion after, average with the laggard line time of suitable periodic sampling.Thus, can detect the value (below, be called the flashlight detected value) of time average of amplifying the power (or intensity) of light corresponding to signal.Signal processing part 206A offers drive control part 161 with this flashlight detected value.
In addition, signal processing part 206B extracts signal smoothingization through integrating circuit etc. with bias light.Waveform 9 expressions of Fig. 8 are through extracting the bias light of waveform 7 example of the waveform of the signal that obtains after the signal smoothingization.And, the bias light of signal processing part 206B after with smoothing extracts signal carry out the A/D conversion after, average with the laggard line time of suitable periodic sampling, and the value that is obtained carried out division arithmetic with the gain of amplifying circuit 204.Thus, can detect the value (below, be called the bias light detected value) of the time average of power (or intensity) corresponding to bias light.Signal processing part 206B offers drive control part 161 with this bias light detected value.
And the bias light of signal processing part 206B after with smoothing extracts signal and offers comparator 208.
In step S10, comparator 208 detects unusual based on the background light intensity.Specifically; Bias light after the smoothing that comparator 208 relatively provides from signal processing part 206B extracts the voltage of signals value and from the magnitude of voltage of the abnormality detection level L2 (Fig. 8) of reference power supply 207 inputs; When bias light extracts the voltage of signals value above abnormality detection level L2, rub-out signal is exported to drive control part 161.
The bias light that the waveform 10 of Fig. 8 is illustrated in after the smoothing of waveform 9 extracts signal such passing shown in dotted line, and when having surpassed abnormality detection level L2, from the example of the waveform of the rub-out signal of comparator 208 outputs.
For example, under the situation of long-time use LASER Light Source 111, there is the possibility that becomes following state: when bias light significantly increases, start optical attenuation or stop the gain amplifier height of light amplification optical fiber 136,141.At this moment, exist generation light to gush, and damage the hidden danger of the optics of LASER Light Source 111.Thereby, the such as stated background light intensity of keeping watch on of comparator 208, and become threshold value output error signal when above at the background light intensity.
In step S11, drive control part 161 is exported control based on testing result.Promptly; Drive control part 161 is based on flashlight detected value that provides from signal processing part 206A, 206B and bias light detected value; Unified clamp-pulse generator 162, driver 164 and driver 165A to 165D, thereby the power of control signal amplification light and ejaculation time etc.
In addition, drive control part 161 is imported from comparator 208 under the situation of rub-out signal, and for example clamp-pulse generator 162, driver 164 and driver 165A to 165D perhaps stop output thereby reduce the power of exporting light.Thus, can prevent in advance that generation that light gushes and light from gushing the damage to the optics of LASER Light Source 111 that causes.
The processing of above step S1 to S11 is proceeded in the course of work of fiber laser device 101.
As previously discussed, the signal that comprises in the output light of detection fiber laser aid 101 in real time amplifies the power (or intensity) of light and bias light, and can improve its accuracy of detection.Thereby, sneak into easily under the low-repetition-frequency and highly excited condition of bias light in the light in output, also detection signal amplifies the average power, pulse energy, peak power etc. of light exactly, and based on this testing result, improves machining accuracy.Its result, lower even the repetition rate of for example signal being amplified light is set at, also can machining energy be set at higher.
In addition, supervision portion 181 can be realized by the electronic equipment of the cheapness of standard specification, therefore can realize low-cost and small-sized size.Thereby, can enroll fiber laser device 101 easily.
In addition, as described above, can prevent that light from gushing, can prevent the fault of LASER Light Source 111 in advance.
[the supervision method of correcting of supervision portion 181]
One example of the supervision method of correcting of supervision portion 181 then, is described.
Multiplexer 205 is switch 210 conductings of outside, the voltage of power supply 209 is applied to clock circuit 221, thereby can forces actuating switch 222A, and switch 222B is ended.Then, through continuous actuating switch 222A, can detect the power (or intensity) of the output light that comprises signal amplification light and bias light.
Further; Based on the average power of detected value (magnitude of voltage) with the output light of measuring at the power meter (not shown) of fiber laser device 101 operated by rotary motion of the signal processing part 206A of this moment, can obtain the corrected value of the dependency relation between the average power that is used to represent the detected value that detects by signal processing part 206A and the output light of reality.Then; This corrected value for example is stored in drive control part 161 or PC102; Utilize the corrected value of storage, can obtain the average power that signal amplifies light based on the flashlight detected value of signal processing part 206A; Perhaps, obtain the average power of bias light based on the bias light detected value of signal processing part 206B.
[method of removing of the noise of supervision portion 181]
The method of removing of the noise of supervision portion 181 then, is described.
As stated, because signal amplifies the S/N ratio of light and bias light is 10
3～10
4, therefore in order to improve the accuracy of detection of bias light, the noise of removing supervision portion 181 becomes important.
The method of the The noise of the dark current that is used to remove optical detector 146 and test section 166 is described here.For example; By exciting LD134 and exciting LD139A to 139D; And the detected value of signal processing part 206A will stop the state of output of output light time the and signal processing part 206B (below, be called corrected value) is stored in for example drive control part 161 or PC102 in advance.Then, actual in the output of output light, from signal processing part 206A and the detected value of signal processing part 206B, deduct the corrected value of storage, thereby can remove the The noise of the dark current and the test section 166 of optical detector 146.
In addition, in supervision portion 181, as stated, utilize optical filter 145, remove residual excitation light from keeping watch on light, thereby can remove the noise that residual excitation light causes.
2. variation
[variation 1]
In above explanation, having represented provides the example of digitized detected value from signal processing part 206A and 206B to drive control part 161, but also the signal of telecommunication of the such simulation of waveform 8 and the waveform 9 of Fig. 8 for example can be provided to drive control part 161.
[variation 2]
In addition, in signal processing part 206A and signal processing part 206B, the length during time averaging in the time of can being used to calculate flashlight detected value and bias light detected value according to purpose adjustment.For example, when identification is amplified the average power of light and bias light with respect to the signal of the lasing condition of having set (repetition rate, exciting power etc.), expectation be set at long during (for example 100 milliseconds of degree).In addition, when the monitoring value of signal being amplified the average power of light is used for the FEEDBACK CONTROL of stabilized lasers output, expectation be set at relatively shorter during (for example, about several milliseconds).
[variation 3]
And, also can be with the Zener diode 203 and the part of amplifying circuit 204 and the part front and back transposing of multiplexer 205 in the test section 166 of Fig. 6 by dotted line.
[variation 4]
In addition, in Fig. 6, having represented signal processing part 206A and signal processing part 206B are divided into two example, is one structure but also can be made as unification.
[variation 5]
And, in above explanation, represented that detection signal amplifies the two example of light and bias light, but as required, also can only detect one of them.In addition, when only detecting one, for example can only export flashlight and extract signal and the bias light extraction signal from multiplexer 205.And at this moment, for example drive control part 161 only utilizes in flashlight detected value and the bias light detected value, carries out the output control of fiber laser device 101.
In addition, execution mode of the present invention is not limited to above-mentioned execution mode, in the scope that does not break away from purport of the present invention, can carry out various changes.
Claims (8)
1. a fiber laser device is exported through the startup light with pulse type and is amplified the signal amplification light that obtains by optical fiber, it is characterized in that, comprising:
Furcation, a part of bifurcated of the laser that will penetrate from said optical fiber, thus extract sampled light;
Photoelectric conversion department carries out light-to-current inversion to said sampled light, generates the signal of telecommunication; And
Extraction portion, extract comprise the said signal of output amplify light during the 1st during in the said signal of telecommunication promptly the 1st extract signal and remove the 2nd during the said the 1st during in the said signal of telecommunication promptly the 2nd extract in the signal at least one.
2. fiber laser device as claimed in claim 1 is characterized in that,
Said extraction portion is according to the clock signal of the output of the said startup light that is used to control the self-starting light source, extracts the said the 1st and extracts signal and the said the 2nd and extract signal.
3. fiber laser device as claimed in claim 2 is characterized in that,
Beginning after the 1st time through regulation, finish after the 2nd time through regulation during the said the 1st from said clock signal.
4. like each described fiber laser device of claim 1 to 3, it is characterized in that, also comprise:
Smoothing portion extracts signal smoothingization with the said the 2nd; And
Wrong detection unit, when said the 2nd extraction signal after smoothing has surpassed the threshold value of regulation, the output error signal.
5. like each described fiber laser device of claim 1 to 3, it is characterized in that,
The said signal of telecommunication is bifurcated into the 1st signal of telecommunication and the 2nd signal of telecommunication,
Said fiber laser device also comprises:
Restrictions limits the level of said the 2nd signal of telecommunication; And
The enlarging section, confined said the 2nd signal of amplification level,
Said extraction portion extracts the said the 1st from said the 1st signal of telecommunication and extracts signal, and said the 2nd signal of telecommunication after be exaggerated extracts the said the 2nd and extracts signal.
6. like each described fiber laser device of claim 1 to 3, it is characterized in that,
Also comprise the portion of removing, remove the composition of the wavelength band of the exciting light that is used to amplify said startup light from said sampled light,
Said photoelectric conversion department will have been removed the said sampled light of composition of the wavelength band of said exciting light and carry out light-to-current inversion.
7. like each described fiber laser device of claim 1 to 3, it is characterized in that, also comprise:
Output control part, according to based on the said the 1st extract signal detected value and based on the said the 2nd extract in the detected value of signal at least one, control the output of said fiber laser device.
8. an output method for monitoring is used for fiber laser device, and said fiber laser device output is amplified the signal that obtains through the startup light with pulse type and amplified light in optical fiber, it is characterized in that said output method for monitoring may further comprise the steps:
A part of bifurcated of the laser that will penetrate from said optical fiber extracts sampled light;
Said sampled light light-to-current inversion is generated the signal of telecommunication; And
Extraction comprise the said signal of output amplify light during the 1st during in the said signal of telecommunication promptly the 1st extract signal and remove the 2nd during the said the 1st during in the said signal of telecommunication promptly the 2nd extract in the signal at least one.
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| CN106575848A (en) * | 2014-07-04 | 2017-04-19 | 古河电气工业株式会社 | Optical fiber laser device |
| CN106872027A (en) * | 2017-04-18 | 2017-06-20 | 中国电子科技集团公司第四十六研究所 | A kind of high-capacity optical fiber laser back-ray detection and its protection circuit |
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| KR101579558B1 (en) * | 2013-12-31 | 2015-12-22 | (주)엔에스 | Apparatus for sensing laser |
| JP6456250B2 (en) * | 2014-08-29 | 2019-01-23 | 三菱電機株式会社 | Laser apparatus and laser processing machine |
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| TW201236288A (en) | 2012-09-01 |
| KR101367452B1 (en) | 2014-02-25 |
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| JP5664913B2 (en) | 2015-02-04 |
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| KR20120098410A (en) | 2012-09-05 |
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