CN102636281A - Vacuum temperature measuring thermocouple device - Google Patents
Vacuum temperature measuring thermocouple device Download PDFInfo
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- CN102636281A CN102636281A CN2012101020713A CN201210102071A CN102636281A CN 102636281 A CN102636281 A CN 102636281A CN 2012101020713 A CN2012101020713 A CN 2012101020713A CN 201210102071 A CN201210102071 A CN 201210102071A CN 102636281 A CN102636281 A CN 102636281A
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- thermopair
- thermocouple
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- vacuum temperature
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Abstract
The invention discloses a vacuum temperature measuring thermocouple device, which comprises a thermocouple and a corrugated pipe device. The corrugated pipe device is sleeved on the periphery of a cold end of the thermocouple. The vacuum temperature measuring thermocouple device has the advantages that characteristics of the common thermocouple and characteristics of a corrugated pipe are combined, the thermocouple is controlled by the corrugated pipe to contact with a detected article, the temperature of an elastic temperature measuring point can be accurately measured in a vacuum environment, and the vacuum temperature measuring thermocouple device is high in scalability and temperature measurement accuracy and applicable to vacuum conditions with elastic temperature measuring points.
Description
Technical field
The present invention relates to the temperature detection technical field, particularly a kind of vacuum temperature thermocouple device relates in particular to a kind of vacuum thermometric bellows-type thermopair.
Background technology
Thermopair is a temperature element commonly used in the temperature measuring instrument; It converts temperature signal to the thermopower signal; Used electric meter to convert the temperature of measured medium to, the ultimate principle of thermocouple temperature measurement is that the homogeneous conductor of two kinds of different components is formed the closed-loop path, when there is thermograde in two ends; Just have electric current in the loop and pass through, just exist Seebeck electromotive force-thermopower between the two ends this moment.Thermopair is that to utilize this principle to carry out thermometric, and wherein, directly the end as the measuring media temperature is called working end (being also referred to as measuring junction), and the other end is called cold junction (being also referred to as the compensation end); Cold junction is connected with Displaying Meter or matching instrument, and Displaying Meter can be pointed out the thermoelectrical potential that thermopair produces.At present; The profile of the various thermopairs that existed is often different because of needs; But their basic structure is roughly the same, and is as shown in Figure 1, and thermopair comprises thermode, insulation sleeve protection tube 1 and terminal box 2 usually; Wherein thermode is 1 li of insulation sleeve protection tube, and terminal box 2 is used for being connected with Displaying Meter or matching instrument.
In the technological process of reality; For accurately needing thermocouple junction usually, thermometric contacts with object under test; But object under test generally is not fixed in actual production, and owing to reasons such as object under test replacings, object under test often needs to move; This just need be when moving object under test, and thermocouple junction and object under test break away from protection thermopair and object under test (especially when the object under test moving direction is uneven with the thermopair placement direction).But because manufacturing process or material itself are limit, the thermopair in the practical application does not all have retractility, thereby the insertion depth when causing its measurement is immutable, is merely able to measure the temperature of fixing object.In practice; Usually can be owing to the installation site and the insertion depth of thermopair are unreasonable; The temperature that can not accurately reflect object under test, the thermal conductivity of generation and time lag equal error caused the decline of thermometric degree of accuracy, the precision of normal operation of the equipment that influences and production technology.To the elasticity point for measuring temperature; In order to guarantee that thermopair separates with the temporary of object under test when object under test moves; Then need be before and after the technology frequent loading and unloading thermocouple; Can cause shorten the serviceable life of thermopair, in the process of loading and unloading, also possibly cause the breakage of thermopair, and influence the process cycles time to a certain extent.Therefore, the non-telescoping property of thermopair is given and is selected rational installation site and suitable insertion depth to make troubles.
Summary of the invention
The technical matters that (one) will solve
The technical matters that the present invention will solve provides a kind of vacuum thermometric bellows-type thermopair, solves the non-telescoping property because of thermopair, and can't measure the problem of the temperature of elasticity point for measuring temperature in the vacuum.
(2) technical scheme
The present invention provides a kind of vacuum temperature thermocouple device, comprising: thermopair and bellows arrangement, said bellows arrangement is set in the periphery of thermocouple cold junction.
Better, said bellows arrangement comprises: corrugated tube, first flange and second flange, the two ends of said corrugated tube weld with first flange and second flange seal respectively.
Better, said bellows arrangement also comprises: make the gag lever post of the second flange axially-movable, said gag lever post and is fixedly connected with the first flange interference between said first flange and second flange, with the second flange clearance fit or directly run through and be connected.
Better, said gag lever post is at least two, becomes 180 ° between per two gag lever posts and is evenly distributed on around second flange.
Better, said corrugated tube is a metal material.
Better, said first flange is sheathed on said thermopair, is connected with thermopair is contactless; Said second flange and thermopair welding or grafting.
Better, said thermopair is an armoured thermocouple.
Better, the weld of said first flange and said corrugated tube is provided with a dial gauge that is used for measuring the second flange displacement.
(3) beneficial effect
Vacuum temperature thermocouple device of the present invention has combined the characteristic of ordinary hot galvanic couple and corrugated tube; Utilize corrugated tube to control contacting of thermopair and object under test; Can accurately measure the temperature of elasticity point for measuring temperature in the vacuum environment; Have very strong scalability and thermometric accuracy, be adapted at using under the situation of vacuum condition, elasticity point for measuring temperature.
Description of drawings
Fig. 1 is the thermocouple structure synoptic diagram of prior art;
Fig. 2 is the structural representation of vacuum temperature thermocouple device of the present invention;
Fig. 3 is the A-A face cut-open view of Fig. 2.
Embodiment
Fig. 2 is the structural representation of vacuum temperature thermocouple device of the present invention; Fig. 3 is the A-A face cut-open view of Fig. 2, shown in Fig. 2-3, and a kind of vacuum temperature thermocouple device; Comprise armoured thermocouple 1, bellows arrangement, said bellows arrangement is set in the periphery of armoured thermocouple 1 cold junction; Said armoured thermocouple 1 is pressed on the thermopair of processing in the protection metal pipe together for thermocouple wire and insulating material; Said bellows arrangement comprises: corrugated tube 3, first flange 2, second flange 5 and gag lever post 4; Weld with first flange 2 and 5 sealings of second flange respectively at the two ends of said corrugated tube 3; Said second flange 5 is used to make corrugated tube 3 to move axially along armoured thermocouple 1; Said gag lever post 4 is between said first flange 2 and second flange 5; And be fixedly connected with 2 interference of first flange, with second flange, 5 clearance fit or directly run through and be connected, said gag lever post 4 is used to make second flange 5 along armoured thermocouple 1 axially-movable.When gag lever post 4 and second flange, 5 clearance fit; Gag lever post 4 inserts from the through hole of the one side of second flange 5; Screw 6 inserts from this through hole of the another side of second flange 5, becomes clearance fit between said screw 6 and the gag lever post 4, is used for guaranteeing the stroke of vacuum temperature thermocouple device when thermometric; Keep correct position when making vacuum temperature thermocouple device busy, cause deformed damaged for other structures when avoiding corrugated tube 3 bendings.Said gag lever post 4 is at least two, and one-tenth is evenly distributed on around second flange for 180 ° between per two gag lever posts 4.
Said corrugated tube 3 is a metal material, and according to operating temperature range, the work shift amount of corrugated tube 3.Concrete material is selected in the character of working pressure, actuating medium and accuracy requirement.
Please refer again to Fig. 2-shown in Figure 3; Described armoured thermocouple 1 vertically passes the circular hole at first flange, 2 centers; And be welded on second flange 5; The radius of the radius ratio armoured thermocouple 1 of said first flange, 2 center holes is big, and in other words: no any contact is connected between described armoured thermocouple 1 and first flange 2.This armoured thermocouple 1 and 5 welding of second flange or grafting, the two is an one.
In addition, in vacuum temperature thermocouple device of the present invention, can a dial gauge that be used for measuring second flange, 5 displacements be set at the weld of first flange 2 and corrugated tube 3.
Principle of work:
The groundwork principle of vacuum temperature thermocouple device of the present invention is to change the displacement that thermopair makes progress at folk prescription along with the variation of pressure; Thereby the position of change thermopair and testee relation under different processes pressure; Contact thermography or away from testee is convenient to move or change testee.
Be example with ALD (ald) technology below, specifically describe the principle of work of this vacuum temperature thermocouple.In ALD technology, need measure the temperature of reaction boat in the vacuum chamber with thermopair.Under the normal pressure situation,, this vacuum temperature thermocouple device is installed on chamber sidewall and the front and back door, is used for measuring the reaction boat temperature of wall all around respectively through first flange 2 on the vacuum temperature thermocouple device.At first, send into chamber to the reaction boat that loads silicon chip, shut chamber door then with mechanical arm; Vacuumize to chamber, because the pressure of corrugated tube 3 is identical with cavity indoor pressure, along with the variation of chamber external and internal pressure; Corrugated tube 3 above the vacuum temperature thermocouple device can change along with the variation of chamber pressure; Gag lever post 4 upwards is subjected to displacement at folk prescription, promotes armoured thermocouple 1 and move, and touch the reaction boat to the direction of reaction boat.In whole technological process, the vacuum tightness in the chamber is constant, armoured thermocouple 1 just always with reaction boat contact thermography.When technological process finishes, need chamber is recovered normal pressure, armoured thermocouple 1 can move to the direction with reaction boat position opposite along with the variation of pressure, and armoured thermocouple 1 is separated with the reaction boat automatically, is convenient to mechanical arm and will reacts boat and in chamber, take out.Repeat above process during technology next time, just can realize thermopair automatically with the contact thermography that reacts boat with separate, conveniently to pick and place the reaction boat.
Above embodiment only is used to explain the present invention; And be not limitation of the present invention; The those of ordinary skill in relevant technologies field under the situation that does not break away from the spirit and scope of the present invention, can also be made various variations and modification; Therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (8)
1. a vacuum temperature thermocouple device is characterized in that, comprising: thermopair and bellows arrangement, said bellows arrangement is set in the periphery of thermocouple cold junction.
2. vacuum temperature thermocouple device as claimed in claim 1 is characterized in that said bellows arrangement comprises: corrugated tube, first flange and second flange, the two ends of said corrugated tube weld with first flange and second flange seal respectively.
3. vacuum temperature thermocouple device as claimed in claim 2; It is characterized in that; Said bellows arrangement also comprises: the gag lever post that makes the second flange axially-movable; Said gag lever post and is fixedly connected with the first flange interference between said first flange and second flange, with the second flange clearance fit or directly run through and be connected.
4. vacuum temperature thermocouple device as claimed in claim 3 is characterized in that said gag lever post is at least two, becomes 180 ° between per two gag lever posts and is evenly distributed on around second flange.
5. vacuum temperature thermocouple device as claimed in claim 2 is characterized in that said corrugated tube is a metal material.
6. like the described vacuum temperature thermocouple of claim 1-5 device, it is characterized in that said first flange is sheathed on said thermopair, be connected with thermopair is contactless; Said second flange and thermopair welding or grafting.
7. vacuum temperature thermocouple device as claimed in claim 6 is characterized in that said thermopair is an armoured thermocouple.
8. vacuum temperature thermocouple device as claimed in claim 2 is characterized in that the weld of said first flange and said corrugated tube is provided with a dial gauge that is used for measuring the second flange displacement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101020713A CN102636281A (en) | 2012-04-09 | 2012-04-09 | Vacuum temperature measuring thermocouple device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101020713A CN102636281A (en) | 2012-04-09 | 2012-04-09 | Vacuum temperature measuring thermocouple device |
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| CN102636281A true CN102636281A (en) | 2012-08-15 |
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| CN2012101020713A Pending CN102636281A (en) | 2012-04-09 | 2012-04-09 | Vacuum temperature measuring thermocouple device |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2199398Y (en) * | 1994-05-20 | 1995-05-31 | 青岛浮山钢管防腐保温厂 | Multi-dimensional space double-type bellow compensator |
| RU2104435C1 (en) * | 1996-07-10 | 1998-02-10 | Товарищество с ограниченной ответственностью Нефтяная инновационная компания "Петрос" | Method of transfer of heated liquid and thermosensitive bypass valve for realization of this method |
| CN2285510Y (en) * | 1997-01-27 | 1998-07-01 | 赵学文 | High-tension vacuum arc-extinguishing chamber |
| CN101487745A (en) * | 2009-02-18 | 2009-07-22 | 中冶赛迪工程技术股份有限公司 | Radiant panel thermometer detection apparatus and method for continuous annealing furnace |
| CN101839774A (en) * | 2010-04-22 | 2010-09-22 | 北京航天计量测试技术研究所 | Composite tube type high-temperature thermocouple |
| CN201748984U (en) * | 2010-08-23 | 2011-02-16 | 浙江伦特机电有限公司 | Thermometer for average temperature measurement of liquid in tank body |
| CN201875349U (en) * | 2010-12-10 | 2011-06-22 | 攀钢集团钢铁钒钛股份有限公司 | Metallic bellow expansion joint |
| CN102183313A (en) * | 2011-03-18 | 2011-09-14 | 清华大学 | Temperature measurement system and measurement method based on electro beam scanning microscope environment |
| CN102269629A (en) * | 2010-06-07 | 2011-12-07 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Temperature measuring device and temperature measuring system |
-
2012
- 2012-04-09 CN CN2012101020713A patent/CN102636281A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2199398Y (en) * | 1994-05-20 | 1995-05-31 | 青岛浮山钢管防腐保温厂 | Multi-dimensional space double-type bellow compensator |
| RU2104435C1 (en) * | 1996-07-10 | 1998-02-10 | Товарищество с ограниченной ответственностью Нефтяная инновационная компания "Петрос" | Method of transfer of heated liquid and thermosensitive bypass valve for realization of this method |
| CN2285510Y (en) * | 1997-01-27 | 1998-07-01 | 赵学文 | High-tension vacuum arc-extinguishing chamber |
| CN101487745A (en) * | 2009-02-18 | 2009-07-22 | 中冶赛迪工程技术股份有限公司 | Radiant panel thermometer detection apparatus and method for continuous annealing furnace |
| CN101839774A (en) * | 2010-04-22 | 2010-09-22 | 北京航天计量测试技术研究所 | Composite tube type high-temperature thermocouple |
| CN102269629A (en) * | 2010-06-07 | 2011-12-07 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Temperature measuring device and temperature measuring system |
| CN201748984U (en) * | 2010-08-23 | 2011-02-16 | 浙江伦特机电有限公司 | Thermometer for average temperature measurement of liquid in tank body |
| CN201875349U (en) * | 2010-12-10 | 2011-06-22 | 攀钢集团钢铁钒钛股份有限公司 | Metallic bellow expansion joint |
| CN102183313A (en) * | 2011-03-18 | 2011-09-14 | 清华大学 | Temperature measurement system and measurement method based on electro beam scanning microscope environment |
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Application publication date: 20120815 |