CN102621732A - System for treating web - Google Patents

System for treating web Download PDF

Info

Publication number
CN102621732A
CN102621732A CN2012100203187A CN201210020318A CN102621732A CN 102621732 A CN102621732 A CN 102621732A CN 2012100203187 A CN2012100203187 A CN 2012100203187A CN 201210020318 A CN201210020318 A CN 201210020318A CN 102621732 A CN102621732 A CN 102621732A
Authority
CN
China
Prior art keywords
nethike embrane
disposal system
grip block
nethike
embrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012100203187A
Other languages
Chinese (zh)
Other versions
CN102621732B (en
Inventor
李镇焕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AP Systems Inc
AP Cells Inc
Original Assignee
AP Cells Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AP Cells Inc filed Critical AP Cells Inc
Publication of CN102621732A publication Critical patent/CN102621732A/en
Application granted granted Critical
Publication of CN102621732B publication Critical patent/CN102621732B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H19/00—Changing the web roll
    • B65H19/22—Changing the web roll in winding mechanisms or in connection with winding operations
    • B65H19/30—Lifting, transporting, or removing the web roll; Inserting core
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates
    • H10K77/111—Flexible substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Advancing Webs (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)

Abstract

The invention discloses a system for treating a web. The system comprises a clamping plate for attracting or enabling the other side of the web to float; and a clamping unit having a clamping housing, which surrounds the side surface and the bottom surface of the porous clamping plate and is provided with air holes connected to the porous clamping plate.

Description

The nethike embrane disposal system
Technical field
The present invention relates to a kind of nethike embrane (web) disposal system, more particularly, relate to a kind of nethike embrane disposal system of being convenient to transmission, clamping and the guiding of nethike embrane.
Background technology
Flexible display refers to the flat-panel monitor of forming by such as the flexible substrate of plastic base.Because flexible display can be crooked, roll or twine rolling and its display characteristic is worsened, therefore, flexible display is more and more paid close attention to as follow-on flat-panel monitor.
This type of flat-panel monitor uses thin and pliable and tough substrate manufacturing, but that this substrate sensitive paper is opened is equally rolled-up, crooked or be wound in several centimetres and display characteristic is worsened.Unlike the hard display that adopts the typical glass substrate to process, flexible display is very thin, has very light weight and very high impact resistance and bending freely.According to using and function, flexible display can be divided into reinforcing (rugged) display, flexible (bendable) display and soft (rollable) display.This type of lightweight, rigidity can be used for multiple mobile device with bendable display, such as DMB phone, WiBro unit, PDA or the like, and can predict this class display and will develop into flexible display.
For through roll-to-roll technology manufacturing flexible liquid crystal display, under static state on the one side of nethike embrane, carry out the multiple tracks technology that comprises such as the formation of the oriented film of Kapton, (spacer) distribution at interval, the distribution of sealing/weak point, liquid crystal distribution or liquid crystal injection or the like.Because this type of technology is carried out on the one side of nethike embrane to make flexible liquid crystal display; So during these technologies; Typical conveyer is prevented from simultaneously contacting with this of nethike embrane basically, and the roll that is used to support the fringe region of nethike embrane can cause nethike embrane to rise and fall or tilts.Therefore, typical conveyer or roll are not suitable for the transmission of nethike embrane.In addition, when applying between tension period when carrying out technology, be difficult to obtain the accurate aligning of upper and lower plates.Therefore, need be convenient to the modified nethike embrane disposal system of transmission, clamping and the guiding of nethike embrane.
Summary of the invention
The present invention provides a kind of nethike embrane disposal system that is applicable to roll-to-roll technology.
The present invention also provides a kind of nethike embrane disposal system of being convenient to transmission, clamping and the guiding of nethike embrane.
The present invention also provides a kind of permission under static state to carry out the nethike embrane disposal system of special process like a cork on a surface of nethike embrane.
The present invention also provides a kind of roll-to-roll type nethike embrane disposal system of being convenient to make flexible liquid crystal display.
According to an aspect of the present invention, a kind of nethike embrane disposal system that is used to handle nethike embrane is provided, this nethike embrane comprises one side respect to one another and another side.The porous grip block that this system comprises the said another side that attracts said nethike embrane or the said another side of said nethike embrane is floated; And clamping device, it comprises the clamping shell, this clamping shell surrounds the side and the bottom surface of said porous grip block, and is formed with the air vent that is connected to said porous grip block in this clamping shell.
Said grip block can comprise a plurality of sub-grip blocks, and said air vent can comprise a plurality of sub-air vent that is connected respectively to said a plurality of sub-grip blocks.Further, said a plurality of sub-grip block can separate each other through the compartment that is limited between this a little grip block.
Said clamping shell can further comprise: the dividing plate of filling the said compartment; And said clamping shell can further comprise: be formed on the many substreams pipe with the corresponding position of said a plurality of sub-grip blocks, be used for through said a plurality of sub-grip block vacuum exhausts or air blowing.
Said grip block can comprise at least a in porous carbon materials, porous ceramic film material and the porous metal material.
Said clamping device can further comprise the electrostatic chuck on the local surfaces that is formed on said grip block and be used to be filled in the dividing plate of the compartment that limits between said electrostatic chuck and the said grip block.
Said grip block can be made up of single grip block, and said air vent can be made up of a plurality of sub-air vent that is connected to said single clamping plate.
Said nethike embrane disposal system can further comprise: the tension regulator of regulating the tension force of said nethike embrane.Said tension regulator can comprise: the jockey pulley that applies tension force to said nethike embrane; Support is by the backing roll of the said nethike embrane of said jockey pulley extruding; Be connected to jockey pulley is applied to the tension force of said nethike embrane with adjusting load cell.
Said nethike embrane disposal system can further comprise the nethike embrane conveyer, and said nethike embrane conveyer comprises: the nethike embrane holding unit, and its edge or non-processing region at said nethike embrane during transmitting said nethike embrane keeps said nethike embrane; Survey the sensor of the position of said nethike embrane; And motor, it moves or rotates the said nethike embrane that is kept by said nethike embrane holding unit.
Said nethike embrane holding unit can be anchor clamps, roller or vacuum chuck.
Said nethike embrane disposal system can further comprise the nethike embrane holding device, and this nethike embrane holding device comprises: the driven roller that supports the said another side of said nethike embrane; And stationary roll, it is positioned at the top of the said one side of said nethike embrane, but and in the vertical direction move.
Said nethike embrane holding device can further comprise the right side that is positioned at said nethike embrane and left side first guide reel with the position of regulating said nethike embrane.
Said nethike embrane disposal system can further comprise: right side and the left side that is positioned at said nethike embrane is with second guide reel of the direction of transfer that guides said nethike embrane, and said second guide reel can be formed by teflon or PEEK.
Said nethike embrane disposal system can further comprise: the vacuum chuck, its said another side that attracts said nethike embrane is to regulate the position of said nethike embrane.
Said nethike embrane can be the flexible base, board that is used for flexible display.
Description of drawings
The present invention is above-mentioned will to become obviously in the description through the embodiment that provides below in conjunction with accompanying drawing with others, feature and advantage, in the accompanying drawings:
Fig. 1 is the planimetric map that is used for the nethike embrane of nethike embrane disposal system according to an embodiment of the invention;
Fig. 2 and Fig. 3 are the schematic side sectional figure of nethike embrane disposal system according to this embodiment of the invention, have shown remaining static and be in the nethike embrane of delivery status on the nethike embrane disposal system respectively;
Fig. 4 is the cross-sectional view of nethike embrane holding device according to an embodiment of the invention;
Fig. 5 and Fig. 6 are respectively the planimetric map and the side cross-sectional view of clamping device according to an embodiment of the invention;
Fig. 7 is the side cross-sectional view of clamping device according to another embodiment of the invention;
Fig. 8 is the skeleton view of clamping shell according to an embodiment of the invention;
Fig. 9 is the planimetric map of clamping shell according to another embodiment of the invention;
Figure 10 and Figure 11 are respectively the schematic side sectional figure and the front elevations of nethike embrane conveyer according to an embodiment of the invention;
Figure 12 is the schematic side sectional figure of nethike embrane conveyer according to another embodiment of the invention;
Figure 13 is the schematic side sectional figure of nethike embrane conveyer according to still another embodiment of the invention;
Figure 14 is the schematic side sectional figure of tension regulator according to an embodiment of the invention;
Figure 15 is the schematic side sectional figure of tension regulator according to another embodiment of the invention; With
Figure 16 and Figure 17 are respectively the planimetric map and the side cross-sectional view of nethike embrane guiding device according to an embodiment of the invention (technology).
Embodiment
Specify embodiments of the invention referring now to accompanying drawing.It should be noted that accompanying drawing accurately draws in proportion, but can be merely be convenient to describe and know for the purpose of and exaggerate the rugosity of lines or the size of parts.In addition, term used herein considers that function of the present invention defines, and can change according to user or operator's custom or intention.Therefore, term is to define according to whole disclosure described herein.
Fig. 1 is the planimetric map that is used for the nethike embrane of nethike embrane disposal system according to an embodiment of the invention.
With reference to Fig. 1; Nethike embrane W has two respect to one another, and carry out in the one side of nethike embrane W comprise the applying of oriented film, distribute at interval, sealing distributes, shortly distribute, TFT (thin film transistor (TFT)) forms, the multiple tracks technology of the formation of color filter or the like to be to form flexible liquid crystal display.Alternately, flexible printed circuit board (FPCB) can be through twining flexible copper-clad thin laminate (FCCL) around the rotation roller and not cutting off the flexible copper-clad thin laminate and make.Alternately, can carry out multiple tracks technology to make Electronic Paper.
Nethike embrane W can be processed by any flexible material.For example, nethike embrane W can be made up of plastics, metal, paper, rubber or their combination.The example of plastic material comprises polyethylene terephthalate (PET), gathers naphthalenedicarboxylic acid (PEN), polyethersulfone (PES), polypropylene (PAR), polycarbonate (PC), cyclic olefine copolymer (COC) and polyimide (PI), and is not limited to this.
Stand the above-mentioned zone of the multiple tracks technology that oriented film applies or the like that comprises in the nethike embrane here, and will be called as processing region W P, at processing region W PBetween the space will be called as non-processing region W QParticularly, in Fig. 1, processing region WP can be limited and non-processing region W rectangle ABCD QCan limit rectangle EFGH.On the other hand, the edge of nethike embrane on its longitudinal direction is called fringe region WE.Non-processing region W QWith fringe region W ECan overlap each other.For example, rectangle DIGH can be defined as non-processing region W simultaneously QWith fringe region W E
Fig. 2 and Fig. 3 are the schematic side sectional figure according to the nethike embrane disposal system of present embodiment of the present invention, have shown the nethike embrane that remains static on the nethike embrane disposal system and be in delivery status respectively.It should be noted that these sectional views have also shown the parts that can not in sectional view, show on the stricti jurise (device) here.With reference to Fig. 2 and Fig. 3, comprise clamping device 200 according to the nethike embrane disposal system of present embodiment, and can further comprise nethike embrane holding device 100, nethike embrane conveyer 300 and tension regulator 400.Further, this system can comprise the guide reel (not shown) on the direction of transfer that is positioned at nethike embrane.
Nethike embrane W comprises one side W 1(end face among the figure) and another side W 2(bottom surface among the figure), two faces against each other.The one side W of nethike embrane 1To stand multiple tracks technology.Further, the nethike embrane disposal system of being made up of clamping device 200, nethike embrane holding device 100, nethike embrane conveyer 300 and tension regulator 400 can be installed in each processing unit.For example, the nethike embrane disposal system of being made up of clamping device 200, nethike embrane holding device 100, nethike embrane conveyer 300 and tension regulator 400 can be installed in the inboard or the outside of oriented film applicator.Further, the nethike embrane disposal system of being made up of clamping device 200, nethike embrane holding device 100, nethike embrane conveyer 300 and tension regulator 400 can be installed in the inside/outside side of sealing divider.Obviously, all clamping device 200, nethike embrane holding device 100, nethike embrane conveyer 300 and tension regulator 400 there is no need to be present in each processing unit and in the said apparatus at least one can omit.
As one side W at nethike embrane 1When carrying out technology, nethike embrane W is kept by nethike embrane holding device 100 and attracts on clamping device 200, and tension regulator 400 applies tension force to nethike embrane W.
When transmitting nethike embrane W, nethike embrane holding device 100 discharges nethike embrane W, and nethike embrane conveyer 300 keeps the fringe region W of (hold) nethike embrane EOr non-processing region W QSo that nethike embrane moves predetermined distance.At this moment, clamping device 200 can blow air or inert gas so that nethike embrane floats, and tension regulator 400 can separate with nethike embrane W to avoid applying tension force to nethike embrane.
Fig. 4 is the cross-sectional view according to the nethike embrane holding device of an embodiment.Nethike embrane holding device 100 in the present embodiment can comprise driven roller 110, and it supports the another side (bottom surface) and the stationary roll 120 of nethike embrane, its be positioned at nethike embrane one side (end face) but top and in the vertical direction move.The nethike embrane holding device can further comprise first guide reel 130, and the side surface of its guiding nethike embrane W is with the direction of transfer or the position of control nethike embrane.
Driven roller 110 is connected to the motor (not shown) with rotation when nethike embrane W moves.Alternately, driven roller 110 is configurable on bearing, rotating (being used for unloaded rotation) to replace being connected to motor.Certainly, driven roller is configurable for not rotating.Yet in the case, friction force is stood in the bottom surface of nethike embrane W, and this can damage nethike embrane W or cause direction of transfer or the control of position failure to nethike embrane.Therefore, preferably driven roller 110 is configured to rotate.
Stationary roll 120 is configurable to be moved in the vertical direction.When nethike embrane W stopped, stationary roll 120 moved down with extruding and fixing nethike embrane W.When nethike embrane W transmitted, stationary roll 120 moved up to allow nethike embrane W to move more efficiently.When stationary roll 120 extruding with fixedly during nethike embrane W, the fringe region W of nethike embrane EOr non-processing region W QTherefore will be extruded (see figure 1).
Nethike embrane holding device 100 can further comprise the right side of guiding nethike embrane W and first guide reel 130 in left side.First guide reel 130 provides the accurate control to the position of nethike embrane W during being used in and transmitting nethike embrane W.First guide reel 130 can be made up of teflon or polyetheretherketone (PEEK), but is not limited to this.
Adopt roller to fix nethike embrane although nethike embrane holding device 100 is shown as, it will be appreciated that the present invention is not limited to this.For example, stationary roll 120 can be the bar shaped roller, and it has oval-shaped, rectangle or leg-of-mutton xsect and replaces circular xsect, and first guide reel 130 also possibly be the bar shaped roller.
Fig. 5 and Fig. 6 are respectively according to the planimetric map of the clamping device of an embodiment and side cross-sectional view.Clamping device 200 according to present embodiment can comprise: porous grip block 210, and it attracts the another side (bottom surface) of nethike embrane or the another side (bottom surface) of nethike embrane is floated; And clamping shell 220, it surrounds the side and the bottom surface of porous grip block 210, and is formed with air vent H in the clamping shell 220, is used to connect porous grip block 210.
Porous grip block 210 can be the single grip block that is not divided into piece.Alternately, porous grip block 210 can by a plurality of sub-grip block 210a that is divided into piece, 210b ... 210i forms, and is as shown in Figure 5.When grip block 210 by a plurality of sub-grip block 210a, 210b ... thereby 210i form can to attract and blow control respectively a plurality of sub-grip block 210a, 210b ... during 210i, can accurately carry out the fixing of flexible nethike embrane.
Grip block 210 can be formed by any porosint with gas penetration potential.For example, grip block can comprise at least a in porous carbon sheet, porous ceramic plate and the expanded metal.In one embodiment, grip block 120 can be ceramic grip block, its by, for example process such as the hot pressing and the sintered ceramic powder of aluminium oxide (Al2O3), titania (TiO2), silicon dioxide (SiO2), zirconia (ZrO2) and zeolite.In another embodiment, grip block 120 can be the porous carbon graphite cake, and it is through forming and the main material of burning such as petroleum coke or the pitch coke that extracts from coal prepares with bonding agent such as coal tar, pitch, phenolics or the like.
Air vent H can in clamping shell 220, form and correspond respectively to sub-grip block 210a, 210b ... a plurality of sub-air vent H of 210i a, H b... H iForm.Among Fig. 6, only show three sub-air vent H b, H e, H hHowever, because the Reference numeral of several individual sub-air vents of other that in this figure, do not show can obtain easily, thus will state it as required, and will describe miscellaneous part in the same way.
Sub-air vent H a, H b... H iCan be connected to sub-ventilation duct 230a, 230b ..., 230i and shut-off valve 240a, 240b ... 240i can be provided for sub-ventilation duct 230a, 230b ..., 230i to be automatically to open or to close through the controller (not shown) respectively.When nethike embrane is formed by flexible material, attract or float sequentially carrying out.For this purpose, shut-off valve 240a, 240b ... sequentially open or close but 240i Be Controlled device (not shown) is controlled to be.The degree of opening or closing shut-off valve here, can be controlled to regulate pressure.
Sub-air vent H a, H b... H iCan be connected to non-return valve 250, vacuum pump 260 and hair-dryer 270 through single pipeline.When nethike embrane was attracted to grip block, vacuum pump 260 can be operating as air can be inhaled into through the stream pipe in ventilation duct 230, air vent H and porous grip block 210.During transmitting nethike embrane, hair-dryer 270 is operating as and blows air or inert gas so that nethike embrane floats.Non-return valve 250 can be used for selecting vacuum pump 260 and one of hair-dryer 270, and is automatically controlled by the controller (not shown).
Clamping shell 220 can further comprise dividing plate 222.Particularly, dividing plate 222 can integrally form to form the part of clamping shell 220 with clamping shell 220.Alternately, dividing plate 222 can be prepared into independent parts, and it will be assembled to or be attached on the clamping shell 220.As stated, sub-grip block 210a, 210b ... 210i can separate each other through the compartment that between them, limits.Here, the compartment can be a dividing plate 222 empty or that have the filling compartment.Dividing plate 222 can stop air flow into sub-grip block 210a adjacent one another are, 210b ... 210i, thus be convenient to each sub-grip block 210a, 210b ... the attraction of 210i or float operation and control.
Fig. 7 is the side cross-sectional view according to the clamping device of this another embodiment.In with reference to the description of Fig. 7, with omitting or briefly provide description to duplicate components to the clamping device of present embodiment.In the clamping device 200 in the present embodiment; The porous grip block 210 that is used to attract the another side (bottom surface) of nethike embrane or the another side (bottom surface) of nethike embrane is floated can be made up of single grip block; And the air vent H that is connected to porous grip block 210 can be made up of to allow the carrying out vacuum exhaust or the operation of blowing in each zone a plurality of sub-air vents.
In other words, the air vent H in the clamping shell 220 can be by a plurality of sub-air vent H a, H b... H iForm.Although only show three air vent H among Fig. 7 b, H e, H h, but the present invention is not limited to this.
Fig. 8 is the skeleton view of clamping shell according to an embodiment of the invention.Among Fig. 8, clamping shell 220 does not comprise dividing plate.Grip block 210 can by a plurality of sub-grip block 210a, 210b ... 210i forms, and perhaps can be single grip block.Air vent H can be by a plurality of sub-air vent H a, H b... H iForm, and clamping shell 220 can have many substreams of comprising pipe R a, R b... R iThe stream pipe, to be used for through sub-air vent H a, H b... H iCarry out vacuum exhaust efficiently or the operation of blowing.
Should be understood that the son stream pipe R shown in Fig. 8 a, R b... R iShape only provide with illustrative mode, also can use the stream pipe of other shape.For example, the sub-air vent H of stream Guan Kecong a, H b... H iRadially extend but not the formation rectangle.Further, the shape of stream pipe can be modified as the multiple shape that comprises polygon, such as triangle and pentalpha, circle, ellipse or the like, and non-rectangle.
Fig. 9 is the skeleton view according to the clamping shell of another embodiment.Under vacuum condition, be used on the one side of nethike embrane, forming the technology of a plurality of structures or specific pattern.In the case, nethike embrane can be held and fixed deficiently through vacuum exhaust.As shown in Figure 9, system can further comprise electrostatic chuck (ESC) 280, is used for when carrying out this technology in vacuum or under normal pressure, carrying out clamping more accurately.
Electrostatic chuck 280 is the devices that are configured to keep with electrostatic force (that is the attractive force that, produces between the charged flat board in plate capacitor) nethike embrane.Electrostatic chuck 280 can be one pole or bipolar electrostatic chuck.Bipolar electrostatic chuck comprises two electrodes that separate with nethike embrane through dielectric layer, thereby when to two electrode application voltage, between each electrode and nethike embrane, produces electrostatic attraction.Because nethike embrane is not a circuit block, so bipolar electrostatic chuck has the advantage of the medium that plasma need not be electrically connected.
Although grip block 210 shown in Fig. 9 for comprising 9 electrostatic chuck 280, the present invention is not limited to above-mentioned quantity, shape and the position of electrostatic chuck.Further, can between each electrostatic chuck 280 and porous grip block 210, limit the compartment, and fill this compartment with dividing plate.Dividing plate is filled the compartment and is out of shape during clamping to suppress nethike embrane.
Figure 10 and Figure 11 are respectively schematic side sectional figure and the front elevations according to the nethike embrane conveyer of an embodiment.With reference to Figure 10 and Figure 11, can comprise sensor 310, nethike embrane holding unit 320 and motor 330 according to the nethike embrane conveyer 300 of present embodiment.
In the nethike embrane conveyer 300 according to present embodiment, sensor 310 is surveyed the fringe region W of nethike embrane W or nethike embrane E, nethike embrane holding unit 320 edge region W EOr non-processing region W QKeep or fixing nethike embrane, and motor 330 produces and moves or the power of rotation nethike embrane.In Figure 10 and Figure 11, be configured to through clamping fringe region W EOr non-processing region W QThe anchor clamps that fix nethike embrane are shown as an example of nethike embrane holding unit 320.
When by nethike embrane fixed cell 320 fixedly the time, nethike embrane W is through being transmitted by the nethike embrane delivery unit 340 that track is realized.Nethike embrane delivery unit 340 can move under the effect of motor 330 or rotate.Therefore, when nethike embrane breaks away from the track of expectation, nethike embrane delivery unit 340 will proofread and correct or control the position of nethike embrane when transmitting nethike embrane.
Figure 12 is the schematic side sectional figure according to the nethike embrane conveyer of another embodiment, and Figure 13 is the schematic side sectional figure according to the nethike embrane conveyer of another embodiment.With reference to Figure 12 and Figure 13 to description according to the nethike embrane conveyer of these embodiment in, with omitting or briefly provide description to duplicate components.
In the nethike embrane conveyer 300 according to present embodiment, nethike embrane holding unit 320 can be roller (seeing Figure 12).Particularly, nethike embrane holding unit 320 can be realized through the pair of rolls that comprises top roll and lower roll.Because on the one side of nethike embrane W or another side, carry out multiple tracks technology, so roller can be set to the non-processing region W with nethike embrane W QContact but not with its of nethike embrane W on accomplished technology and maybe will carry out the zone of technology and contact.Alternately, roller only can be set to the edge contact with nethike embrane.Therefore, when when the one side of nethike embrane or another side form specific structure or pattern, roller can not contact with the processing region of nethike embrane.Here, when moving under the situation that the fringe region WE at nethike embrane is fixed by roll or transmitting nethike embrane, nethike embrane possibly risen and fallen or tilted.Therefore, the expectation roller is set to the non-processing region W with the crosscut nethike embrane QWhole surface carry out straight line (linear) contact.
The nethike embrane holding unit 320 of nethike embrane conveyer 300 can comprise vacuum chuck (seeing Figure 13).The vacuum chuck can comprise the porous grip block, and this porous grip block can be made up of single grip block or a plurality of sub-grip block.Nethike embrane holding unit 320 can further comprise electrostatic chuck and vacuum chuck.
Nethike embrane conveyer 300 can be installed in the treatment facility or can be used as independent device and provide.The nethike embrane conveyer can be through clamping or the white space (the for example edge of nethike embrane or non-processing region) of vacuum chuck nethike embrane transmits nethike embrane.System has a plurality of nethike embrane conveyers.In the case, all nethike embrane conveyers will carry out tension adjustment with permission synchronously or by independent control by single control program in treatment facility.
Figure 14 is the schematic side sectional figure according to the tension regulator of an embodiment.With reference to Figure 14, can comprise jockey pulley 410, backing roll 420, load cell (load cell) 430 and actuator 440 according to the tension regulator 400 of present embodiment.
Jockey pulley 410 can move by in the vertical direction under the effect of actuator 440.Particularly, when when the one side of the nethike embrane that remains static is carried out certain technology, actuator 440 moves up jockey pulley 410 to push the bottom surface of nethike embrane.Jockey pulley 410 and the backing roll that is positioned at the nethike embrane both sides 420 cooperations are applying tension force to nethike embrane, and tension force can be measured with control tension force by load cell 430.
Backing roll 420 is configurable in the vertical direction moves, or is fixed on ad-hoc location.Alternately, backing roll 420 is configurable for rotation or irrotational.Jockey pulley 420 is also configurable for rotation or irrotational.
Jockey pulley 410 and backing roll 420 can be realized but not structure through roller realizes through other structures.For example, jockey pulley 410 and backing roll 420 can be through realizing to the bar that nethike embrane applies tension force or supports nethike embrane.
Figure 15 is the schematic side sectional figure according to the tension regulator of another embodiment.With reference to Figure 15, can comprise jockey pulley 410, backing roll 420, load cell 430 and actuator 440 according to the tension regulator 400 of present embodiment.In the present embodiment, jockey pulley 410 can be positioned at the top of nethike embrane.
Can be basic identical according to jockey pulley 410, backing roll 420, load cell 430 and the actuator 440 of the tension regulator of present embodiment with jockey pulley 410, backing roll 420, load cell 430 and actuator 440 according to the tension regulator of the foregoing description.Yet in the present embodiment, when not when the another side (bottom surface) of nethike embrane is carried out technology, backing roll 420 can be rotated on ad-hoc location, and does not move up or down.
Figure 16 and Figure 17 are respectively planimetric map and the side cross-sectional view according to the nethike embrane guiding device (technology) of an embodiment.Usually, marginal position controller (EPC) or center controller (CPC) inclination that is used to proofread and correct nethike embrane.Yet although be favourable under the situation that EPC or CPC continue to move at nethike embrane, they are not supposed under the intermittent situation that moves or stop owing to special process at nethike embrane.Further, because burning process is carried out at the nethike embrane end face, therefore do not expect to contact and be difficult to adjustment of tonicity with the nethike embrane end face.Therefore, EPC or CPC can not be suitable for.
In one embodiment of the invention, system can further comprise second guide reel 500 that is used to guide nethike embrane.That is, the either side of a plurality of second guide reels 500 nethike embrane in the direction of transfer upper edge of nethike embrane is arranged to prevent that nethike embrane breaks away from the distance that preset track one is scheduled to.Second guide reel 500 can be formed by teflon or polyetheretherketone (PEEK), but is not limited thereto.
Further; At batch technology or during remaining static; Position or direction of transfer at nethike embrane seriously break away under the situation of desired trajectory, only are difficult to regulate the positions of nethike embranes through second guide reel 500, and native system can further comprise the vacuum chuck 510 of the position that is used to regulate nethike embrane.Vacuum chuck 510 can (θ direction) move on (y direction) or sense of rotation on (x direction), the direction of transfer in the vertical direction under the effect of motor 520 (z direction), the horizontal direction.Further, vacuum chuck 510 can be realized through porous grip block or other parts, and can comprise electrostatic chuck further.Here, grip block can be made up of single grip block or a plurality of sub-grip block.
In the nethike embrane disposal system according to present embodiment, because carry out clamping and air blowing through the porous grip block, foreign matter can be attached to nethike embrane, pollutes or the technology trouble source thereby provide.Therefore, the nethike embrane disposal system can further be included in the clearer of the pre-position in the inboard that is positioned at clamping device on the nethike embrane direction of transfer or the outside.The example of clearer comprises UV (or VUV) clearer, CO 2Clearer, contraction (contract) roller clearer, UV/O 3Clearer, or the like.
According to embodiment, the nethike embrane disposal system is convenient to transmission, clamping and the guiding of nethike embrane.Especially, roll-to-roll technology is convenient in this system, and wherein predetermined technology is carried out on a face of nethike embrane.Further, the manufacturing such as the flexible display of flexible liquid crystal display is convenient in this system.
Although provide some embodiment to set forth the present invention, should be understood that these embodiment only provide with illustrative mode, under the prerequisite that does not deviate from the spirit and scope of the present invention, can carry out multiple modification, distortion and replacement.Scope of the present invention is only limited the equivalent of appended claims and claim.

Claims (21)

1. nethike embrane disposal system is used to handle the nethike embrane that comprises one side respect to one another and another side, and this nethike embrane disposal system comprises:
The porous grip block, it attracts the said another side of said nethike embrane or the said another side of said nethike embrane is floated; And
Clamping device, it comprises the clamping shell, this clamping shell surrounds the side and the bottom surface of said porous grip block, and is formed with the air vent that is connected to said porous grip block in this clamping shell.
2. nethike embrane disposal system according to claim 1, wherein, said grip block comprises a plurality of sub-grip blocks.
3. nethike embrane disposal system according to claim 2, wherein, said air vent comprises a plurality of sub-air vent that is connected respectively to said a plurality of sub-grip blocks.
4. nethike embrane disposal system according to claim 2, wherein, said a plurality of sub-grip blocks separate each other through the compartment that between this a little grip block, limits.
5. nethike embrane disposal system according to claim 4, wherein, said clamping shell further comprises: the dividing plate of filling the said compartment.
6. nethike embrane disposal system according to claim 2, wherein, said clamping shell further comprises: be formed on the many substreams pipe with the corresponding position of said a plurality of sub-grip blocks, be used for through said a plurality of sub-grip block vacuum exhausts or air blowing.
7. nethike embrane disposal system according to claim 1, wherein, said grip block comprises at least a in porous carbon materials, porous ceramic film material and the porous metal material.
8. nethike embrane disposal system according to claim 1, wherein, said clamping device further comprises the electrostatic chuck on the local surfaces that is formed on said grip block.
9. nethike embrane disposal system according to claim 8, wherein, said clamping device further comprises the dividing plate that is used to be filled in the compartment that limits between said electrostatic chuck and the said grip block.
10. nethike embrane disposal system according to claim 1, wherein, said grip block is made up of single grip block.
11. nethike embrane disposal system according to claim 10, wherein, said air vent is made up of a plurality of sub-air vent that is connected to said single grip block.
12. nethike embrane disposal system according to claim 1 further comprises: the tension regulator of regulating the tension force of said nethike embrane.
13. nethike embrane disposal system according to claim 12, wherein, said tension regulator comprises:
Apply the jockey pulley of tension force to said nethike embrane;
Support is by the backing roll of the said nethike embrane of said jockey pulley extruding; With
Be connected to said jockey pulley to regulate the load cell of the tension force that applies to said nethike embrane.
14. nethike embrane disposal system according to claim 1 further comprises the nethike embrane conveyer, said nethike embrane conveyer comprises:
The nethike embrane holding unit, its edge or non-processing region at said nethike embrane during transmitting said nethike embrane keeps said nethike embrane;
Sensor, it surveys the position of said nethike embrane; With
Motor, it moves or rotates the said nethike embrane that is kept by said nethike embrane holding unit.
15. nethike embrane disposal system according to claim 11, wherein said nethike embrane holding unit are anchor clamps, roller or vacuum chuck.
16. nethike embrane disposal system according to claim 1 further comprises the nethike embrane holding device, this nethike embrane holding device comprises:
Support the driven roller of the said another side of said nethike embrane; With
Stationary roll, it is positioned at the top of the said one side of said nethike embrane, but and in the vertical direction move.
17. nethike embrane disposal system according to claim 16, wherein, said nethike embrane holding device further comprises: right side and the left side that is positioned at said nethike embrane is with first guide reel of the position of regulating said nethike embrane.
18. nethike embrane disposal system according to claim 1 further comprises: right side and the left side that is positioned at said nethike embrane is with second guide reel of the direction of transfer that guides said nethike embrane.
19. nethike embrane disposal system according to claim 18, wherein, said second guide reel is formed by teflon or polyetheretherketone (PEEK).
20. nethike embrane disposal system according to claim 1 further comprises: the vacuum chuck, its said another side that attracts said nethike embrane is to regulate the position of said nethike embrane.
21. nethike embrane disposal system according to claim 1, wherein, said nethike embrane is the flexible base, board that is used for flexible display.
CN201210020318.7A 2011-01-27 2012-01-29 System for treating web Expired - Fee Related CN102621732B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110008256A KR101255106B1 (en) 2011-01-27 2011-01-27 System for treating web
KR10-2011-0008256 2011-01-27

Publications (2)

Publication Number Publication Date
CN102621732A true CN102621732A (en) 2012-08-01
CN102621732B CN102621732B (en) 2014-10-22

Family

ID=46561738

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210020318.7A Expired - Fee Related CN102621732B (en) 2011-01-27 2012-01-29 System for treating web

Country Status (3)

Country Link
KR (1) KR101255106B1 (en)
CN (1) CN102621732B (en)
TW (1) TWI457651B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103950584A (en) * 2014-05-04 2014-07-30 安徽永成电子机械技术有限公司 Gas jetting device for automatic supplying of thin bags
CN104854490A (en) * 2012-12-13 2015-08-19 日东电工株式会社 Polarizing film production method
CN109061917A (en) * 2018-09-29 2018-12-21 武汉华星光电技术有限公司 Clamper and lighting jig
US11150704B2 (en) 2018-10-18 2021-10-19 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel and electronic apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102087234B1 (en) 2019-01-25 2020-03-10 박승만 Web cleaner system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007119322A (en) * 2005-10-31 2007-05-17 Matsushita Electric Ind Co Ltd Glass roll and manufacturing method of glass substrate with functional film using the same
CN101028894A (en) * 2006-03-02 2007-09-05 神钢电机株式会社 Air floating upward components and manufacturing method thereof
JP2009234779A (en) * 2008-03-28 2009-10-15 Toppan Printing Co Ltd Web carrying device and its carrying method
WO2010101060A1 (en) * 2009-03-03 2010-09-10 日立ビアメカニクス株式会社 Method of working thin layer on work and thin layor working apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111553A (en) * 1978-02-20 1979-08-31 Aichi Purasuchitsukusu Kougiyo Continuous processing apparatus for running film
JPH02288289A (en) * 1989-04-27 1990-11-28 Inoue Kinzoku Kogyo Kk Manufacture of flexible printed substrate
KR100302652B1 (en) * 1998-09-11 2001-11-30 구자홍 Method for manufacturing flexible printed circuit board and flexible printed circuit board manufactured by the same
JP2001072286A (en) 1999-09-03 2001-03-21 Dainippon Printing Co Ltd Automatic rewinding device in slitter device
JP2005314019A (en) * 2004-04-27 2005-11-10 Fuiisa Kk Sheet conveying roller, and equipment using the same
JP4378301B2 (en) * 2005-02-28 2009-12-02 東京エレクトロン株式会社 Substrate processing apparatus, substrate processing method, and substrate processing program
TWI297667B (en) * 2006-07-04 2008-06-11 Au Optronics Corp Roller assembly
JP5083524B2 (en) 2007-08-21 2012-11-28 凸版印刷株式会社 Web coating device
TWI428656B (en) * 2008-11-28 2014-03-01 Hon Hai Prec Ind Co Ltd Lens holding fixture

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007119322A (en) * 2005-10-31 2007-05-17 Matsushita Electric Ind Co Ltd Glass roll and manufacturing method of glass substrate with functional film using the same
CN101028894A (en) * 2006-03-02 2007-09-05 神钢电机株式会社 Air floating upward components and manufacturing method thereof
JP2009234779A (en) * 2008-03-28 2009-10-15 Toppan Printing Co Ltd Web carrying device and its carrying method
WO2010101060A1 (en) * 2009-03-03 2010-09-10 日立ビアメカニクス株式会社 Method of working thin layer on work and thin layor working apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
陈建魁: "柔性卷绕传动张力控制机构分析与设计", 《现代制造工程》 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104854490A (en) * 2012-12-13 2015-08-19 日东电工株式会社 Polarizing film production method
CN103950584A (en) * 2014-05-04 2014-07-30 安徽永成电子机械技术有限公司 Gas jetting device for automatic supplying of thin bags
CN109061917A (en) * 2018-09-29 2018-12-21 武汉华星光电技术有限公司 Clamper and lighting jig
WO2020062412A1 (en) * 2018-09-29 2020-04-02 武汉华星光电技术有限公司 Gripper and lighting jig
US11328636B2 (en) 2018-09-29 2022-05-10 Wuhan China Star Optoelectronics Technology Co., Ltd. Clamper and lighting fixture
US11150704B2 (en) 2018-10-18 2021-10-19 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Display panel and electronic apparatus

Also Published As

Publication number Publication date
TWI457651B (en) 2014-10-21
KR101255106B1 (en) 2013-04-19
KR20120086913A (en) 2012-08-06
TW201247510A (en) 2012-12-01
CN102621732B (en) 2014-10-22

Similar Documents

Publication Publication Date Title
CN102621732B (en) System for treating web
JP4344755B2 (en) Roller unit for thin plate material conveyance and thin plate material conveyance device
KR101879162B1 (en) Substrate processing device
JP5092627B2 (en) Substrate transfer device and substrate inspection device
TW200823138A (en) An apparatus and method for enhencing conveying performance of conveyers
CN103381965A (en) Air floating type guide wheel transmission device for liquid crystal panel
JP2012091122A (en) Coating system
CN102402067B (en) System for manufacturing flexible liquid crystal display and method of manufacturing flexible display
KR101738184B1 (en) Bonded member manufacturing apparatus and method of manufacturing bonded member
CN105683076B (en) Tension control device and continuous web processing method using the same
CN103224152A (en) Transmission and transportation air floatation device
CN104549896A (en) Processing system
WO2017163887A1 (en) Substrate floating transport device
KR102474519B1 (en) Substrate processing apparatus
KR102506047B1 (en) Substrate procesing apparatus
JP2008041989A (en) Air table for transferring sheet material, and apparatus for transferring the sheet material
JP2007298680A (en) Rubbing device and rubbing method
KR102461287B1 (en) Transfer apparatus and method of transfer
JP2011207606A (en) Substrate reversing device and substrate reversing method
JP2014144386A (en) Coating device and coating method
JP2004307152A (en) Reclinable non-contact carrier
JP5929324B2 (en) Transport device
KR102680577B1 (en) Uv curing apparatus
JP2021011383A (en) Substrate transport device and substrate processing device
KR102597763B1 (en) Substrate processing apparatus

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20141022

Termination date: 20190129

CF01 Termination of patent right due to non-payment of annual fee