CN102608172A - Film bulk acoustic galloping resonance biochemistry sensor with direct-current electrodes - Google Patents
Film bulk acoustic galloping resonance biochemistry sensor with direct-current electrodes Download PDFInfo
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- CN102608172A CN102608172A CN2012100708938A CN201210070893A CN102608172A CN 102608172 A CN102608172 A CN 102608172A CN 2012100708938 A CN2012100708938 A CN 2012100708938A CN 201210070893 A CN201210070893 A CN 201210070893A CN 102608172 A CN102608172 A CN 102608172A
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Abstract
The invention discloses a film bulk acoustic galloping resonance biochemistry sensor with a direct-current electrodes. The film bulk acoustic galloping resonance biochemistry sensor comprises the direct-current electrodes, a piezoelectric film stack, an acoustic wave reflecting layer stack and a chemistry sensitive coating. According to the sensor, the direct-current electrodes arranged on two sides of the chemistry sensitive coating are utilized to measure the variations of resistance after adsorption or reaction of a substance to be detected and the chemistry sensitive coating, and meanwhile, a radio frequency electrical signal is applied between an upper radio frequency electrode and a lower radio frequency electrode of the piezoelectric film stack, so that bulk acoustic wave resonance of a piezoelectric film is excited, and the frequency variation of the substance to be detected and the chemistry sensitive coating is measured. The sensor provides resistance variation information and frequency variation information simultaneously, so that different substances to be detected with the same frequency variation can be distinguished by utilizing the resistance variation, and the recognition capability of the film bulk acoustic galloping resonance biochemistry sensor on complex multicomponent detection substances is improved.
Description
Technical field
The present invention relates to the biochemical sensor technical field, specifically, relate to a kind of film bulk acoustic resonator biochemical sensor with DC electrode.
Background technology
Biochemical sensor is one type of very important senser element, is widely used in aspects such as Industry Control, environmental monitoring, chemical substance analysis and biological gene detection, protein analysis.Existing biochemical sensor mainly contains electrochemical sensor, Fibre Optical Sensor, surface plasma resonance sensor, semiconductor transducer, piezoeletric quartz sensor etc.The volume of these sensors itself or its signal analysis device is bigger, is difficult to carry out extensive integrated and array, and detection time is long, cost is higher.
The film bulk acoustic resonator biochemical sensor is a kind of sensor based on absorption mass-sensitive principle, and this sensor produces the high-frequency electrical acoustic resonance with piezoelectric membrane, with its resonance frequency, phase place or amplitude with the variation of detection material as sensor's response.Such sensor has been applied to multiple biochemistry detection field at present.Through being retrieved, existing literature finds that U.S. Pat 5936150 has been announced a kind of film bulk acoustic resonator biochemical sensor.This film bulk acoustic resonator sensor is made up of the piezoelectric membrane storehouse of sandwich structure, acoustic reflection layer stack and the chemical-sensitive coating that multilayer film constitute; When detection material is adsorbed in the chemical-sensitive coating; The additional mass of piezoelectric membrane storehouse increases, and causes the variation of sensor resonant frequency.This film bulk acoustic resonator biochemical sensor is highly sensitive, and can on silicon chip, adopt existing semiconductor technology to make, and device volume is little, is fit to extensive integrated formation sensor array.But; Above-mentioned film bulk acoustic resonator biochemical sensor only can provide the mass change of chemical-sensitive coating through change of frequency; Can't reflect the interaction information that detects thing and chemical-sensitive coating comprehensively, thereby limit the recognition capability of sensor the complex component detection material.
Summary of the invention
The present invention is directed to the deficiency and the defective of prior art, proposed a kind of film bulk acoustic resonator biochemical sensor with DC electrode.This sensor has the advantage that can pass through the resistance variations reaction detection material information of resonance frequency variation and chemical-sensitive coating simultaneously; Detection material identity to complex component is strong; And utilize existing microelectric technique to make, be easy to realize array and in semi-conductor chip, carry out integrated.
The present invention realizes through following technical scheme:
A kind of film bulk acoustic resonator biochemical sensor with DC electrode; Comprise DC electrode, piezoelectric membrane storehouse and chemical-sensitive coating harmony separation layer; It is characterized in that having first DC electrode and second DC electrode and carry out the detection that the chemical-sensitive coating resistance changes.
Described first DC electrode and second DC electrode are arranged at the upper surface of piezoelectric membrane in the piezoelectric membrane storehouse, and its vertical overlay area does not overlap with the radio frequency bottom electrode of piezoelectric membrane storehouse.
Described first DC electrode and second DC electrode are arranged at the both sides of chemical-sensitive coating below respectively; By zone, chemical-sensitive coating cover part, its preferred overlay area is respectively 1/2nd to 2/3rds of first DC electrode and the second DC electrode area.
Described first DC electrode and second DC electrode are gold, silver or aluminum, and its preferred thickness is 0.1 to 0.3 micron.
First DC electrode and the measurement of second DC electrode that utilization of the present invention is arranged at the both sides of chemical-sensitive coating need detection material and absorption of chemical-sensitive coating or reaction back changes in resistance; Simultaneously between the radio frequency top electrode of piezoelectric membrane storehouse and radio frequency bottom electrode, apply rf signal; Excite the bulk acoustic wave resonance of piezoelectric membrane, measure the change of frequency that needs detection material thing and absorption of chemical-sensitive coating or reaction back bulk acoustic wave resonance.Because sensor also has changes in resistance to the existing change of frequency of the response of need detection material, therefore can utilize resistance variations to differentiate the identical difference of change of frequency and need detection material, improve the recognition capability of sensor.Because the vertical overlay area of first DC electrode and second DC electrode does not overlap with the radio frequency bottom electrode of piezoelectric membrane storehouse, so two DC electrodes can not influence the bulk acoustic wave mode of resonance of piezoelectric membrane storehouse.
Compared with techniques with in the past the invention has the beneficial effects as follows: because resistance variations information and change of frequency information are provided simultaneously, the film bulk acoustic resonator biochemical sensor is improved to the recognition capability that complicated polycomponent detects thing.
Description of drawings
Accompanying drawing 1 is a plan structure synoptic diagram of the present invention;
Accompanying drawing 2 is a cross-sectional view of the present invention;
Accompanying drawing 3 is the specimen change of frequency figure of the embodiment of the invention 1;
Accompanying drawing 4 is the specimen resistance variations figure of the embodiment of the invention 1;
Accompanying drawing 5 is the specimen change of frequency figure of the embodiment of the invention 2;
Accompanying drawing 6 is the specimen resistance variations figure of the embodiment of the invention 2.
Drawing explanation: 1, first DC electrode; 2, second DC electrode; 3, piezoelectric membrane; 4, chemical-sensitive coating; 5, radio frequency top electrode; 6, radio frequency bottom electrode.
Embodiment
A kind of film bulk acoustic resonator biochemical sensor with DC electrode; Comprise DC electrode, piezoelectric membrane storehouse, chemical-sensitive coating harmony separation layer; It is characterized in that; Have first DC electrode 1 and second DC electrode 2 carries out the detection of chemical-sensitive coating 4 resistance variations, therefore resonant frequency response and the electrical response of film bulk acoustic resonator biochemical sensor to detection material can be provided simultaneously.
Above-mentioned device can be prepared on three kinds of typical case sound insulation layer structures: i.e. solid assembly type, air-gap type and diaphragm membranous type.All device preparations can be accomplished through technologies such as the photoetching in the general semiconductor technology, sputters.
The biochemical sensor of present embodiment for detecting to the volatile organic compounds sample, its device architecture is as depicted in figs. 1 and 2.
The sound separation layer is an air-gap type structure.The chemical-sensitive coating is to volatile organic compounds sensitive polymers coating.
During work, between the radio frequency top electrode 5 of piezoelectric membrane storehouse and radio frequency bottom electrode 6, apply rf signal, measure piezoelectric membrane storehouse change of resonance frequency.Simultaneously between first DC electrode 1 and second DC electrode 2, apply dc signal, measure the variation of chemical-sensitive coating 4 resistance values.
Shown in accompanying drawing 3, concerning five gaseous samples, the sensor resonant frequency variation that sample 2,3,5 causes is 210 KHzs, only changes and can't differentiate these three samples through resonance frequency.Shown in accompanying drawing 4, the resistance result that 5 gaseous samples are tested shows that the resistance change that sample 2,3,5 causes is respectively 2.1 ohm, 3.5 ohm and 1.7 ohm.Change and resistivity measurements in conjunction with resonance frequency, can discern gaseous sample better.
The biochemical sensor of present embodiment for detecting to the organophosphorus pesticide sample,, its device architecture is as depicted in figs. 1 and 2, and the sound separation layer is an air-gap type structure.The chemical-sensitive coating is the curing cholinesterase responsive to organophosphorus pesticide.
During work, between the radio frequency top electrode 5 of piezoelectric membrane storehouse and radio frequency bottom electrode 6, apply rf signal, measure piezoelectric membrane storehouse change of resonance frequency.Simultaneously between first DC electrode 1 and second DC electrode 2, apply dc signal, measure the variation of chemical-sensitive coating 4 resistance values.
Shown in accompanying drawing 5, concerning four organophosphorus pesticide samples, the sensor resonant frequency variation that sample 1,2 causes is 350 KHzs, only changes and can't differentiate these two samples through resonance frequency.Shown in accompanying drawing 6, the resistance result of four organophosphorus pesticide sample tests is shown that the resistance change that sample 1,2 causes is respectively 1.1 ohm, 2.6 ohm.Change and resistivity measurements in conjunction with resonance frequency, can discern the organophosphorus pesticide sample better.
Claims (4)
1. film bulk acoustic resonator biochemical sensor with DC electrode; Comprise DC electrode, piezoelectric membrane storehouse and chemical-sensitive coating harmony separation layer; It is characterized in that having first DC electrode (1) and second DC electrode (2) carries out the detection of chemical-sensitive coating (4) resistance variations.
2. the film bulk acoustic resonator biochemical sensor with DC electrode according to claim 1; It is characterized in that; Described first DC electrode (1) and second DC electrode (2) are arranged at the upper surface of piezoelectric membrane in the piezoelectric membrane storehouse (3), and its vertical overlay area does not overlap with the radio frequency bottom electrode (6) of piezoelectric membrane storehouse.
3. the film bulk acoustic resonator biochemical sensor with DC electrode according to claim 1; It is characterized in that; Described first DC electrode (1) and second DC electrode (2) are arranged at the both sides of chemical-sensitive coating (4) below respectively; By zone, chemical-sensitive coating (4) cover part, its preferred overlay area is respectively 1/2nd to 2/3rds of first DC electrode (1) and the second DC electrode area (2).
4. the film bulk acoustic resonator biochemical sensor with DC electrode according to claim 1 is characterized in that, described first DC electrode (1) and second DC electrode (2) are gold, silver or aluminum, and its preferred thickness is 0.1 to 0.3 micron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100708938A CN102608172A (en) | 2012-03-12 | 2012-03-12 | Film bulk acoustic galloping resonance biochemistry sensor with direct-current electrodes |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100708938A CN102608172A (en) | 2012-03-12 | 2012-03-12 | Film bulk acoustic galloping resonance biochemistry sensor with direct-current electrodes |
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| CN102608172A true CN102608172A (en) | 2012-07-25 |
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| CN2012100708938A Pending CN102608172A (en) | 2012-03-12 | 2012-03-12 | Film bulk acoustic galloping resonance biochemistry sensor with direct-current electrodes |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108474764A (en) * | 2015-11-06 | 2018-08-31 | Qorvo美国公司 | Acoustic resonator equipment and offer air-tightness and surface-functionalized manufacturing method |
| CN109155621A (en) * | 2016-06-30 | 2019-01-04 | 英特尔公司 | The resonance device of the integrated chemical species sensitivity of piezoelectric package |
| WO2021114493A1 (en) * | 2019-12-09 | 2021-06-17 | 山东科技大学 | Thin film bulk acoustic wave sensor for liquid testing |
| CN113080977A (en) * | 2021-03-25 | 2021-07-09 | 山东科技大学 | Preparation method of flexible electrode, flexible electrode and use method of flexible electrode |
-
2012
- 2012-03-12 CN CN2012100708938A patent/CN102608172A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108474764A (en) * | 2015-11-06 | 2018-08-31 | Qorvo美国公司 | Acoustic resonator equipment and offer air-tightness and surface-functionalized manufacturing method |
| CN108474764B (en) * | 2015-11-06 | 2021-12-10 | Qorvo美国公司 | Acoustic resonator device and manufacturing method providing gas tightness and surface functionalization |
| CN109155621A (en) * | 2016-06-30 | 2019-01-04 | 英特尔公司 | The resonance device of the integrated chemical species sensitivity of piezoelectric package |
| CN109155621B (en) * | 2016-06-30 | 2023-12-26 | 英特尔公司 | Piezoelectric package integrated chemical species sensitive resonant device |
| WO2021114493A1 (en) * | 2019-12-09 | 2021-06-17 | 山东科技大学 | Thin film bulk acoustic wave sensor for liquid testing |
| CN113080977A (en) * | 2021-03-25 | 2021-07-09 | 山东科技大学 | Preparation method of flexible electrode, flexible electrode and use method of flexible electrode |
| CN113080977B (en) * | 2021-03-25 | 2022-12-20 | 山东科技大学 | Preparation method of flexible electrode, flexible electrode and use method of flexible electrode |
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Addressee: Shandong Univ. of Science & Technology Document name: Notification of before Expiration of Request of Examination as to Substance |
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Application publication date: 20120725 |