CN102608098B - Confocal raman spectrometer and treatment method for laser path of confocal raman spectrometer - Google Patents
Confocal raman spectrometer and treatment method for laser path of confocal raman spectrometer Download PDFInfo
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- CN102608098B CN102608098B CN201210040336.1A CN201210040336A CN102608098B CN 102608098 B CN102608098 B CN 102608098B CN 201210040336 A CN201210040336 A CN 201210040336A CN 102608098 B CN102608098 B CN 102608098B
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Abstract
The invention relates to a confocal raman spectrometer and a treatment method for a laser path of the confocal raman spectrometer. The treatment method comprises the steps that: one laser is selected to emit laser light which enters a laser transmission device, the laser light is transmitted to a continuously adjustable laser attenuator by using a group of reflectors in a laser switching device in the laser transmission device, corresponding to the laser, the intensity of the laser light is attenuated, the laser light treated by the continuously adjustable laser attenuator is reflected to an edge light filter switching device, the laser light is reflected by the edge light filter switching device and irradiates a substance to be detected on a substance stage of a microscope device through an objective lens of the microscope device, raman signals, rayleigh scattering light and laser light generated by the substance to be detected after being excited by the laser light are collected by the objective lens of the microscope device and return to the edge light filter switching device; an edge light filter filters out the rayleigh scattering light and the laser light and leaves the raman signals, and finally, the raman signals form a raman spectrum through a signal confocal device and a spectrum detection device.
Description
Technical field
The present invention relates to a kind of Raman spectroscopy, more particularly, relate to the disposal route of laser optical path in a kind of confocal Raman spectrometer with better monitoring effect and this confocal Raman spectrometer.
Background technology
Light-matter interaction has various ways, and scattering is wherein a kind of.In light scattering, scattered light frequency is different with incident light frequency is called inelastic scattering, also cries Raman scattering.Raman spectrum is exactly a kind of spectral technique based on Raman scattering.In Raman spectrum, between scattered light and incident light, the difference of frequency is called as Raman shift, research Raman shift can obtain vibration and the rotation information of chemical bond in molecule, and the vibration information of lattice in crystal, so Raman spectrum is a kind of spectral technique of important research material microstructure.The equipment that utilizes at present Raman scattering technology to study microscopic species mainly contains the relatively high confocal Raman spectrometer that is combined with confocal microscopy device of sensitivity, but current confocal Raman spectrometer exists measured matter kind limited, the problem such as the wavelength band bulky and spectrum that detects is narrow.
Summary of the invention
The object of the present invention is to provide the disposal route of a kind of confocal Raman spectrometer and laser optical path thereof, utilize this confocal Raman spectrometer to select different laser according to different material, and select different laser light scattering light filters, when widening detected material scope, can effectively reduce overall volume.
Confocal Raman spectrometer in the present invention includes laser instrument, laser transmission apparatus, microscope equipment, switching device for edge optical filter, video and light path switching device, the confocal device of signal and spectrum detection device, the laser that described laser instrument sends enters the object lens of described microscope equipment after the transmission of described laser transmission apparatus, directly directive is placed on the measured matter on described microscope equipment objective table, the Raman signal that measured matter produces after by laser excitation, described switching device for edge optical filter is collected and transferred to Rayleigh scattering light and laser through the object lens of microscope equipment, after filtering Rayleigh scattering light and laser, only there is Raman signal to form Raman spectrum through the confocal device of signal and spectrum detection device,
A side in described confocal Raman spectrometer is parallel three groups of laser instruments, i.e. the first laser instrument, second laser and the 3rd laser instrument of being provided with up and down, described laser transmission apparatus includes laser switching device shifter and is arranged on the light barrier of described three laser instrument front ends, on light barrier, offer three light holes that pass with described three laser instruments laser corresponding and that can make three laser instruments send respectively, light hole place is separately installed with the laser rays wave filter of corresponding three laser instruments, at described light barrier opposite side, be provided with described laser switching device shifter, this laser switching device shifter comprises: three are separately fixed at the laser that three laser instruments can be sent in the shell holder of confocal Raman spectrometer by the first reflective mirror of fixed angle reflection, with three corresponding three the second reflective mirrors that are provided with for the laser vertical of the first reflective mirror reflection is upwards reflected of the first reflective mirror, three groups of laser instruments arranging above three the second reflective mirrors general for accepting the 3rd reflective mirror of the laser of three described the second reflective mirrors reflections, in the shell holder that is arranged on confocal Raman spectrometer that can move back and forth by Electric Machine Control with the first laser instrument, two the second reflective mirrors that second laser is corresponding in these three second reflective mirrors, second reflective mirror corresponding with the 3rd laser instrument is directly fixed in shell holder, separately in the shell holder of described confocal Raman spectrometer, is provided with for receiving the laser that external laser sends the 4th reflective mirror that reflexes to described the 3rd reflective mirror,
The extremely continuous tunable laser attenuating device of Laser Transmission through described the 3rd reflective mirror reflection, this continuous tunable laser attenuating device is the eyeglass of a continuous decay directly being driven by stepper motor, described laser through described continuous tunable laser attenuating device by the 5th reflective mirror by laser reflection to switching device for edge optical filter, the laser further edge optical filter in switching device for edge optical filter reflexes to the object lens of described microscope equipment;
Laser is irradiated to through the object lens of described microscope equipment the measured matter being placed on described microscope equipment objective table, the Raman signal that measured matter produces after by laser excitation, described switching device for edge optical filter is collected and be back to Rayleigh scattering light and laser through the object lens of microscope equipment, described switching device for edge optical filter includes four quadras that be arranged in parallel above, described quadra is fixedly connected with and is integral, pass through slide block, the mode of slide rail is fixed in the shell holder of described confocal Raman spectrometer, in described each quadra, be arranged with one or two edge optical filter, the slide block that connects described quadra by one independently motor drive.
Identical with the structure of described the first laser instrument, two the second reflective mirrors that second laser is corresponding, all the form with slide block, slide rail is fixed on described light barrier, and be equipped with independently motor, wherein said slide block and described the second reflective mirror are connected and fixed, described slide rail is directly fixed on described light barrier, described slide block is provided with tooth bar, this tooth bar with by described motor-driven gear, meshed.
Described laser switching device shifter is located in a casing, this casing is arranged in the shell holder of described confocal Raman spectrometer, and be positioned at the front end of described laser instrument, this casing is square, described three the first reflective mirrors are separately fixed on the two side that described casing is relative with described three the second reflective mirrors, below the second reflective mirror corresponding to described second laser, be provided with the laser that the laser instrument for accepting outside described confocal Raman spectrometer sends the 4th reflective mirror that reflexes to described the 3rd reflective mirror, being connected to of the shell holder of the 4th reflective mirror and described confocal Raman spectrometer can be done being connected and fixed of parallel, described the 4th reflective mirror is with slide block, the form of slide rail is fixed on described casing, and be equipped with independently motor, wherein said slide block and described the 4th reflective mirror are connected and fixed, described slide rail is directly fixed on described casing, described slide block is provided with tooth bar, this tooth bar with by described motor-driven gear, meshed.
Described three laser instruments are separately fixed on support, and described support is further fixed in the shell holder of described confocal Raman spectrometer.
Described edge optical filter is replaced by notch filtering light sheet.
Between described microscope equipment and described switching device for edge optical filter, be provided with described video and light path switching device, while is provided with a LED white light illumination device on the sidewall of the shell holder of described confocal Raman spectrometer, and this LED white light illumination device is connected with described video and light path switching device through light guide optical fiber.
The surface of described LED white light illumination device is provided with a square lighttight housing, in the centre of described housing, be provided with for the joint with described light guide optical fiber plug, the other end of described light guide optical fiber connects described video and light path switching device, described microscope equipment is provided with Halogen lamp LED white light transmission illuminator that can brightness adjusting below objective table, is provided with the through hole that the light for described Halogen lamp LED white light transmission illuminator passes through in the middle of the objective table of described microscope equipment.
Described continuous tunable laser attenuating device includes rounded periphery framework, in the centre of this rounded periphery framework, be embedded with the continuous adjustable laser decay of whole piece eyeglass, centre at continuous adjustable laser decay eyeglass is provided with the through hole being connected and fixed with stepper motor, surface at described rounded periphery framework is provided with identification point, is provided with the U-shaped optoelectronic switch for detection of the position of described identification point in described rounded periphery framework one side simultaneously.
In the present invention, in confocal Raman spectrometer, the disposal route of laser optical path includes following steps:
1) select one of them laser instrument to send laser, enter laser transmission apparatus;
2) select one group of reflective mirror corresponding with described laser instrument in the laser switching device shifter of laser transmission apparatus by the extremely continuous tunable laser attenuating device of Laser Transmission, to swashing light intensity, make attenuation processing, obtain and detect the required laser intensity of measured object;
3) by the laser reflection after described continuous tunable laser attenuating device is processed to switching device for edge optical filter, select the one group edge optical filter corresponding with described laser instrument in switching device for edge optical filter to reflect laser;
4) Laser Transmission after switching device for edge optical filter reflection is irradiated to through the object lens of microscope equipment the measured matter being placed on described microscope equipment objective table, described switching device for edge optical filter is collected and be back to the Raman signal that measured matter produces after by laser excitation and Rayleigh scattering light and laser through the object lens of microscope equipment, only have the confocal device of Raman signal entering signal after edge optical filter filtering Rayleigh scattering light and laser;
5) finally by spectrum detection device, Raman signal is formed to spectrum.
Also include the step to measured matter carries out video camera adjusting on described microscope equipment objective table.
Confocal Raman spectrometer in the present invention is by means of the setting of many group laser instruments, and the setting of laser switching device shifter and switching device for edge optical filter, can select different laser according to different measured matters, spectral detection wavelength band and detection material scope have been widened, and by the setting of LED white light illumination device, the overall volume of effectively having reduced spectrometer.
Accompanying drawing explanation
Fig. 1 is the schematic perspective view one of confocal Raman spectrometer in the present invention.
Fig. 2 is the schematic perspective view two of confocal Raman spectrometer in the present invention, and this there is shown laser instrument and the laser transmission apparatus of spectrometer.
Fig. 3 is the schematic perspective view three of confocal Raman spectrometer in the present invention, and this there is shown the continuous tunable laser attenuating device of spectrometer.
Fig. 4 is the enlarged diagram of switching device for edge optical filter in the present invention.
Fig. 5 is the enlarged diagram that in the present invention, the second reflective mirror is fixedly connected with.
Fig. 6 is the enlarged diagram of continuous tunable laser attenuating device in the present invention.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment in the present invention is described in further detail.
As shown in Figure 1, confocal Raman spectrometer in the present invention includes laser instrument, laser transmission apparatus, continuous tunable laser attenuating device, video and light path switching device, microscope equipment, switching device for edge optical filter, the confocal device of signal and spectrum detection device, wherein:
Laser instrument includes parallel the first laser instrument 10 arranging up and down, second laser 11 and the 3rd laser instrument 12, what these three laser instruments were arranged side by side is fixed on support 2, and support 2 is further fixed in the shell holder 1 of confocal Raman spectrometer, these three laser instruments are all fixedly mounted on a side of the shell holder 1 of confocal Raman spectrometer, rear three laser instruments of being combined with shell body are closed in one independently in casing, as shown in Figure 1, also can be that two second lasers 11 wherein and the 3rd laser instrument 12 are closed in one independently in casing, as long as make three laser instruments can independently send parallel three beams of laser, what the present invention selected is three kinds of conventional red lasers, green (light) laser and infrared light laser instrument, certainly not as limit, kind for laser instrument can be installed fixing different laser instrument according to the demand of spectrometer.
Laser transmission apparatus includes laser switching device shifter and is provided with light barrier 3 with the front end that is positioned at three laser instruments, on light barrier 3, offer three light holes 4 that the laser that should be able to make three laser instruments send passed with three laser instruments respectively, and the laser rays wave filter of corresponding different wave length laser instrument is installed at light hole 4 places, the laser that three laser instruments send enters laser switching device shifter after the laser rays wave filter in light hole 4.As shown in Figure 2, laser switching device shifter includes three the first reflective mirrors 6 in the shell holder 1 that is separately fixed at confocal Raman spectrometer, and be upper and lower parallel arrangement setting, respectively corresponding three the laser instrument settings of these three the first reflective mirrors 6, the laser that three laser instruments can be sent reflects by fixed angle, concrete angle is by artificially adjusting, and this is easily to realize for a person skilled in the art, no longer describes in detail.As shown in Figure 2, with three corresponding the second reflective mirrors 100,110,120 that are provided with for the laser vertical of the first reflective mirror 6 reflections is upwards reflected of the first reflective mirror 6, two the second reflective mirrors 100,110 corresponding with the first laser instrument 10, the second laser 11 that are positioned at top in three the second reflective mirrors are arranged in the shell holder 1 of confocal Raman spectrometer movably, and second reflective mirror 120 corresponding with the 3rd laser instrument 12 is directly fixed in the shell holder 1 of confocal Raman spectrometer.All with the form of slide block 8, slide rail 9, be fixed on light barrier 3 with the first laser instrument 10, two the second reflective mirrors 100,110 that second laser 11 is corresponding, as shown in Figure 2 and Figure 5, second reflective mirror 100 of take is example, slide block 8 and the second reflective mirror 100 are connected and fixed, slide rail 9 is directly fixed on light barrier 3, and slide block 8 is provided with tooth bar 22, this tooth bar 22 and gear 23 engagements that driven by motor 20, when motor 20 rotates, can drive the slide block 8 that is provided with tooth bar 22 to move left and right along slide rail 9.Because two the second reflective mirrors 100,110 are driven by different motor 20 respectively, therefore can control respectively and move to desired location according to demand.Detailed process is as follows, when using the first laser instrument 10, by controlling software, independently control, make the laser that the first laser instrument 10 sends directly pass the laser rays wave filter of light hole 4 to the first reflective mirror 6 of the top, laser to the second reflective mirror 100 after the first reflective mirror 6 reflections of the top, the laser vertical of after the second reflective mirror 100 reflections, the first laser instrument 10 being sent transfers to the 3rd reflective mirror 7, and laser is done to further transmission.The shell holder 1 of confocal Raman spectrometer be positioned at three the second reflective mirrors 100,110,120 above be provided with the 3rd reflective mirror 7 that can accept the laser that three the second reflective mirrors 100,110,120 transmit respectively.In the time of need to using second laser 11, by controlling software, independently control, make laser that second laser 11 sends directly through the laser rays wave filter of light hole 4 to the first reflective mirror 6 that is positioned at centre position, laser to the second reflective mirror 110 after first reflective mirror 6 reflections in centre position, Laser Transmission to the three reflective mirrors 7 that after the second reflective mirror 110 reflections, second laser 11 sent again, further transmit laser.Now, the second reflective mirror 110 is moved to the desired location that can reflect laser, the second reflective mirror 100 is moved to the position that does not affect the second reflective mirror 110 reflection Laser Transmission simultaneously.When using the 3rd laser instrument 12, identical with the use of above-mentioned laser instrument, each laser instrument is by independently controlling software control, and opened by independent switch, make laser that the 3rd laser instrument 12 sends directly through the laser rays wave filter of light hole 4 to the first reflective mirror 6 that is positioned at lower position, laser to the second reflective mirror 120 after the first reflective mirror 6 reflections of below, Laser Transmission to the three reflective mirrors 7 that after the second reflective mirror 120 reflections, the 3rd laser instrument 12 sent, further transmit laser.Now by control system, control respectively the second reflective mirror 100,110 and all move to the position that does not affect the second reflective mirror 120 reflection Laser Transmission.That is to say, for different measured matters, can choice for use various lasers, and owing to using different laser instruments, select any one group of reflective mirror in the laser switching device shifter of laser transmission apparatus by Laser Transmission to the three reflective mirrors 7, then by the 3rd reflective mirror 7 by selected Laser Transmission to laser attenuation device.
The shell holder that is located at confocal Raman spectrometer due to laser transmission apparatus is for arranging in a casing of laser instrument front end, this casing is square, and three the first reflective mirrors 6 and three the second reflective mirrors 100, 110, 120 are separately fixed on the two side that casing is relative, as shown in Figure 2, in casing shell holder 1, be positioned at the second reflective mirror 110 below be provided with the 4th reflective mirror 21, the 4th reflective mirror 21 is identical with the structure of the second reflective mirror 100 with the connected mode of the shell holder 1 of confocal Raman spectrometer, and driven by motor independently, laser reflection to the three reflective mirrors 7 that the laser instrument that utilizes the 4th reflective mirror 21 that confocal Raman spectrometer of the present invention is set separately sends, when three laser instruments that confocal Raman spectrometer is equipped with in the present invention are also not enough to use, can be by means of outside laser instrument, the laser that external laser is sent reflexes to the 3rd reflective mirror 7 through the 4th reflective mirror 21, reflex to the laser instrument being just equipped with confocal Raman spectrometer itself after the 3rd reflective mirror 7 identical, now also by control system, control respectively the second reflective mirror 100, 110 all move to the position that does not affect the 4th reflective mirror 21 reflection Laser Transmission.For this reason, can select different laser according to the difference of measured matter.
Laser enters continuous tunable laser attenuating device after the 3rd reflective mirror 7 in laser transmission apparatus, as shown in Figure 3 and Figure 6, tunable laser attenuating device includes a rounded periphery framework 203 continuously, in the centre of rounded periphery framework 203, be embedded the continuous adjustable laser decay eyeglass 202 of whole piece, in the middle of adjustable laser decay eyeglass 202, be provided with a through hole 201 continuously, this through hole 201 can be connected and fixed through web member with the output shaft of stepper motor, under the driving of stepper motor, can drive continuous adjustable laser decay eyeglass 202 to rotate, thereby can to laser, carry out attenuation processing in choice for use eyeglass 202 optional positions, on the surface of rounded periphery framework 203, be provided with identification point 206, in rounded periphery framework 203 1 sides, be provided with U-shaped optoelectronic switch 204, on described U-shaped optoelectronic switch 204, be provided with the detecting device (not shown) for sensing identification point 206.By identification point 206 and U-shaped optoelectronic switch 204, can determine the reference position of eyeglass 202, by stepper motor, accurately control on this basis the position of rotation of described decay eyeglass 202.Utilize this continuous tunable laser attenuating device to laser, to make attenuation processing according to demand, and due to the continuously use of tunable laser attenuating device, decay setting range that can expansion of laser light, expands the range of choice of measured matter.
As shown in Figure 3, laser reflexes to switching device for edge optical filter 60 through continuous tunable laser attenuating device by the 5th reflective mirror 50, by switching device for edge optical filter 60, laser is further reflexed to the object lens 704 of microscope equipment 70, microscope equipment 70 is microscope, and concrete structure and principle of work are no longer detailed.Microscope equipment 70 is provided with for placing the objective table 701 of measured matter below object lens 704, the centre of this objective table 701 offers through hole 702, simultaneously below this through hole 702, corresponding position is provided with Halogen lamp LED white light transmission illuminator 703 that can brightness adjusting, when transparent measured matter is detected, can to measured matter, throw light on from measured matter below.And can regulate as required the brightness of this Halogen lamp LED white light transmission illuminator 703, thereby can shoot the photo of multiple different-effect.Because the control of Halogen lamp LED white light transmission illuminator 703 brightness for a person skilled in the art and unlatching and closed control are easily to realize, therefore no longer describe in detail.
As depicted in figs. 1 and 2, between switching device for edge optical filter 60 and microscope equipment 70, be provided with video and light path switching device 80, this video and light path switching device 80 are positioned at the top of microscope equipment 70, be placed in the casing of a sealing, owing in shooting process needing measured matter to throw light on, confocal Raman spectrometer in the present invention in the shell holder 1 of confocal Raman spectrometer, be positioned at laser instrument installation position above be provided with a LED white light illumination device 800, this LED white light illumination device 800 is transported to video and light path switching device 80 through light guide optical fiber 801 by light source, the surface of LED white light illumination device 800 is provided with a square lighttight housing 802, in the centre of housing 802, be provided with for the joint 803 with light guide optical fiber 801 plugs, the other end of light guide optical fiber 801 connects video and light path switching device 80.So, all light that LED white light illumination device 800 is sent can enter to video and light path switching device 80 by light guide optical fiber 801, when shooting, utilize the beam splitter in video and light path switching device 80 LED white light source to be transferred to the object lens of microscope equipment 70, from the top of measured matter, measured matter is thrown light on, and when laser detection, utilize beam splitter that LED white light source is removed, do not affect the transmission of laser, LED white light illumination device 800 is little with respect to the volume of incandescent lamp, and brightness is high.
The direct directive of laser that enters microscope equipment 70 object lens 704 is placed on the measured matter on microscope equipment 70 objective tables 701, switching device for edge optical filter 60 is collected and be back to the Raman signal that measured matter produces after by laser excitation and Rayleigh scattering light and laser through the object lens 704 of microscope equipment 70, as shown in Figure 4, this switching device for edge optical filter 60 includes that in four quadra 600(the present invention that be arranged in parallel above, to take four quadras be example, but not as limit, can make corresponding changes according to the increase of laser instrument), and all quadras 600 link into an integrated entity, can make synchronizing moving.The all quadras 600 that link into an integrated entity are with slide block, the mode of slide rail is fixed in the shell holder 1 of confocal Raman spectrometer, the quadra 600 and the slide block that wherein link into an integrated entity are connected and fixed, and slide rail is directly fixed in the shell holder 1 of confocal Raman spectrometer, integrally formed tooth bar 601 on slide block, this tooth bar 601 and gear engagement, this gear by one independently motor drive (not shown), under the control of control circuit, can drive slide block parallel, and when slide block is made parallel, can synchronously drive quadra 600 to move, owing to being arranged with one or two edge optical filter 602 in each quadra 600, this edge optical filter 602 can be substituted by trap filter disc, and the different wave length of each edge optical filter energy filtering laser, therefore, when detecting different materials, can select according to demand the edge optical filter 602 of multiple various combination, remove the laser of unwanted wave band.
By only having Raman signal finally to form Raman spectrum through confocal device and spectrum detection device after switching device for edge optical filter 60 filtering Rayleigh scattering lights and laser.Can be used for material to analyze and research.Confocal Raman spectrometer in the present invention utilizes said structure to do special processing to laser optical path, and concrete disposal route includes following steps:
1) according to measured matter, select one of them laser instrument to send laser, by the control knob that is located at confocal Raman spectrometer surface of shell, independently controlled, the laser sending enters laser transmission apparatus;
2) select one group of reflective mirror corresponding with described laser instrument in the laser switching device shifter of laser transmission apparatus by the extremely continuous tunable laser attenuating device of Laser Transmission, to swashing light intensity, make attenuation processing, obtain and detect the required respective strengths of measured matter;
3) by the laser reflection after described continuous tunable laser attenuating device is processed to switching device for edge optical filter, by the further object lens to microscope equipment by laser reflection of switching device for edge optical filter;
4) enter Ear Mucosa Treated by He Ne Laser Irradiation in microscope equipment object lens to the measured matter being placed on described microscope equipment objective table, described switching device for edge optical filter is collected and be back to the Raman signal that measured matter produces after by laser excitation and Rayleigh scattering light and laser through the object lens of microscope equipment, only have Raman signal finally to form Raman spectrum through the confocal device of signal and spectrum detection device after edge optical filter filtering Rayleigh scattering light and laser.
In confocal Raman spectrometer of the present invention, the disposal route of laser optical path also includes the step to measured matter carries out video camera adjusting on described microscope equipment objective table.
Claims (10)
1. a confocal Raman spectrometer, include laser instrument, laser transmission apparatus, microscope equipment, switching device for edge optical filter, video and light path switching device, the confocal device of signal and spectrum detection device, the laser that described laser instrument sends enters the object lens of described microscope equipment after the transmission of described laser transmission apparatus, directly directive is placed on the measured matter on described microscope equipment objective table, the Raman signal that measured matter produces after by laser excitation, described switching device for edge optical filter is collected and transferred to Rayleigh scattering light and laser through the object lens of microscope equipment, after filtering Rayleigh scattering light and laser, only there is Raman signal to form Raman spectrum through the confocal device of signal and spectrum detection device, it is characterized in that,
A side in described confocal Raman spectrometer is parallel three groups of laser instruments, i.e. the first laser instrument, second laser and the 3rd laser instrument of being provided with up and down, described laser transmission apparatus includes laser switching device shifter and is arranged on the light barrier of described three laser instrument front ends, on light barrier, offer three light holes that pass with described three laser instruments laser corresponding and that can make three laser instruments send respectively, light hole place is separately installed with the laser rays wave filter of corresponding three laser instruments, at described light barrier opposite side, described laser switching device shifter is set, this laser switching device shifter comprises: three are separately fixed at the laser that three laser instruments can be sent in the shell holder of confocal Raman spectrometer by the first reflective mirror of fixed angle reflection, with three corresponding three the second reflective mirrors that are provided with for the laser vertical of the first reflective mirror reflection is upwards reflected of the first reflective mirror, three groups of laser instruments arranging above three the second reflective mirrors general for accepting the 3rd reflective mirror of the laser of three described the second reflective mirrors reflections, in the shell holder that is arranged on confocal Raman spectrometer that can move back and forth by Electric Machine Control with the first laser instrument, two the second reflective mirrors that second laser is corresponding in these three second reflective mirrors, second reflective mirror corresponding with the 3rd laser instrument is directly fixed in shell holder, separately in the shell holder of described confocal Raman spectrometer, is provided with for receiving the laser that external laser sends the 4th reflective mirror that reflexes to described the 3rd reflective mirror,
The extremely continuous tunable laser attenuating device of Laser Transmission through described the 3rd reflective mirror reflection, this continuous tunable laser attenuating device is the eyeglass of a continuous decay directly being driven by stepper motor, described laser through described continuous tunable laser attenuating device by the 5th reflective mirror by laser reflection to switching device for edge optical filter, the laser further edge optical filter in switching device for edge optical filter reflexes to the object lens of described microscope equipment;
Laser is irradiated to through the object lens of described microscope equipment the measured matter being placed on described microscope equipment objective table, the Raman signal that measured matter produces after by laser excitation, described switching device for edge optical filter is collected and be back to Rayleigh scattering light and laser through the object lens of microscope equipment, described switching device for edge optical filter includes four quadras that be arranged in parallel above, described quadra is fixedly connected with and is integral, pass through slide block, the mode of slide rail is fixed in the shell holder of described confocal Raman spectrometer, in described each quadra, be arranged with one or two edge optical filter, the slide block that connects described quadra by one independently motor drive.
2. confocal Raman spectrometer according to claim 1, it is characterized in that, identical with the structure of described the first laser instrument, two the second reflective mirrors that second laser is corresponding, all the form with slide block, slide rail is fixed on described light barrier, and be equipped with independently motor, and wherein said slide block and described the second reflective mirror are connected and fixed, and described slide rail is directly fixed on described light barrier, described slide block is provided with tooth bar, this tooth bar with by described motor-driven gear, meshed.
3. confocal Raman spectrometer according to claim 2, it is characterized in that, described laser switching device shifter is located in a casing, this casing is arranged in the shell holder of described confocal Raman spectrometer, and be positioned at the front end of described laser instrument, this casing is square, described three the first reflective mirrors are separately fixed on the two side that described casing is relative with described three the second reflective mirrors, below the second reflective mirror corresponding to described second laser, be provided with the laser that the laser instrument for accepting outside described confocal Raman spectrometer sends the 4th reflective mirror that reflexes to described the 3rd reflective mirror, being connected to of the shell holder of the 4th reflective mirror and described confocal Raman spectrometer can be done being connected and fixed of parallel, described the 4th reflective mirror is with slide block, the form of slide rail is fixed on described casing, and be equipped with independently motor, wherein said slide block and described the 4th reflective mirror are connected and fixed, described slide rail is directly fixed on described casing, described slide block is provided with tooth bar, this tooth bar with by described motor-driven gear, meshed.
4. confocal Raman spectrometer according to claim 1, is characterized in that, described three laser instruments are separately fixed on support, and described support is further fixed in the shell holder of described confocal Raman spectrometer.
5. confocal Raman spectrometer according to claim 1, is characterized in that, described edge optical filter is replaced by notch filtering light sheet.
6. confocal Raman spectrometer according to claim 1, it is characterized in that, between described microscope equipment and described switching device for edge optical filter, be provided with described video and light path switching device, while is provided with a LED white light illumination device on the sidewall of the shell holder of described confocal Raman spectrometer, and this LED white light illumination device is connected with described video and light path switching device through light guide optical fiber.
7. confocal Raman spectrometer according to claim 6, it is characterized in that, the surface of described LED white light illumination device is provided with a square lighttight housing, in the centre of described housing, be provided with for the joint with described light guide optical fiber plug, the other end of described light guide optical fiber connects described video and light path switching device, described microscope equipment is provided with Halogen lamp LED white light transmission illuminator that can brightness adjusting below objective table, is provided with the through hole that the light for described Halogen lamp LED white light transmission illuminator passes through in the middle of the objective table of described microscope equipment.
8. confocal Raman spectrometer according to claim 1, it is characterized in that, described continuous tunable laser attenuating device includes rounded periphery framework, in the centre of this rounded periphery framework, be embedded with the continuous adjustable laser decay of whole piece eyeglass, centre at continuous adjustable laser decay eyeglass is provided with the through hole being connected and fixed with stepper motor, surface at described rounded periphery framework is provided with identification point, is provided with the U-shaped optoelectronic switch for detection of the position of described identification point in described rounded periphery framework one side simultaneously.
9. a disposal route for laser optical path in confocal Raman spectrometer, is characterized in that, includes following steps:
1) select one of them laser instrument to send laser, enter laser transmission apparatus;
2) select one group of reflective mirror corresponding with described laser instrument in the laser switching device shifter of laser transmission apparatus by the extremely continuous tunable laser attenuating device of Laser Transmission, to swashing light intensity, make attenuation processing, obtain and detect the required laser intensity of measured object;
3) by the laser reflection after described continuous tunable laser attenuating device is processed to switching device for edge optical filter, select the one group edge optical filter corresponding with described laser instrument in switching device for edge optical filter to reflect laser;
4) Laser Transmission after switching device for edge optical filter reflection is irradiated to through the object lens of microscope equipment the measured matter being placed on described microscope equipment objective table, described switching device for edge optical filter is collected and be back to the Raman signal that measured matter produces after by laser excitation and Rayleigh scattering light and laser through the object lens of microscope equipment, only have the confocal device of Raman signal entering signal after edge optical filter filtering Rayleigh scattering light and laser;
5) finally by spectrum detection device, Raman signal is formed to spectrum.
10. the disposal route of laser optical path in confocal Raman spectrometer according to claim 9, is characterized in that, also includes the step to measured matter carries out video camera adjusting on described microscope equipment objective table.
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| US20160209330A1 (en) * | 2015-01-21 | 2016-07-21 | Protrustech Co., Ltd | Integrated raman spectrometer and modularized laser module |
| CN106770183A (en) * | 2017-03-24 | 2017-05-31 | 北京极光仪器科技有限公司 | For the polarising means and confocal Raman spectrometer of confocal Raman spectrometer |
| CN106841165B (en) * | 2017-03-24 | 2023-11-21 | 钢研纳克检测技术股份有限公司 | Portable Raman spectrometer capable of turning optical path |
| CN109916875B (en) * | 2017-12-13 | 2023-07-25 | 安菲克斯(北京)仪器有限公司 | Laser confocal Raman spectrometer and optical path processing method thereof |
| CN109884027A (en) * | 2019-01-24 | 2019-06-14 | 浙江工业大学 | A kind of lower wave number Confocal laser-scanning microscopy instrument |
| CN112596224B (en) * | 2020-12-07 | 2023-04-11 | 安徽机电职业技术学院 | Microscope glass carrier device with adjustable |
| CN115389485B (en) * | 2022-10-26 | 2023-03-10 | 中国科学技术大学 | Raman microscopic equipment and Raman spectrum detection method |
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