CN102605425A - Laser matrix crystal of lead chlorofluoride doped with rare earth ions and preparation method thereof - Google Patents
Laser matrix crystal of lead chlorofluoride doped with rare earth ions and preparation method thereof Download PDFInfo
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- CN102605425A CN102605425A CN2012101146143A CN201210114614A CN102605425A CN 102605425 A CN102605425 A CN 102605425A CN 2012101146143 A CN2012101146143 A CN 2012101146143A CN 201210114614 A CN201210114614 A CN 201210114614A CN 102605425 A CN102605425 A CN 102605425A
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Abstract
The invention relates to a laser matrix crystal of lead chlorofluoride doped with a rare earth ion and a preparation method thereof. The chemical formula of the laser matrix crystal is RE3<+>:PbClF, wherein the rare earth ion RE3<+> is selected from at least one of Yb3<+>, Nd3<+>, Tm3<+>, Ho3<+>, Pr3<+>, Ce3<+> and Er3<+>. The invention provides the chlorofluoride laser crystal doped with the rare earth, which has the advantages of disorder negative ion coordination and low symmetry.
Description
Technical field
The invention belongs to the photoelectron material field, relate to a kind of novel laser host crystal, be specifically related to a kind of rare earth ion doped fluorine lead chloride laser host crystal and preparation method thereof.
Background technology
Laser technology was through the development in surplus 40 years, and short pulse and ultrashort pulse trend are its forward positions.Femtosecond laser has ultrashort pulse, high repetition frequency, high-peak power and wide spectrum four big characteristics; The research of progress and physics, chemistry, biology, Materials science that is promoting information science is to in-depth development more, be widely used in scientific research and industrial technology a plurality of fields (
U. Keller, Nature, 2003,424:831.).
The titanium jewel femto-second laser that grow up the nineties in 20th century is the ultrafast laser device (for example referring to US5,377043) that present pulse is the shortest, use is maximum.Yet the 532nm pumping source that the titanium jewel needs has shortcomings such as volume is big, electrical efficiency is low, cost an arm and a leg, limited its as commercial femto-second laser to development portable, low-cost direction.Current, but the rare earth laserable material of LD pump-coupling becomes the key of people's Development of New Generation compact type, high-level efficiency, low-cost femto-second laser.
Since the nineties in last century; U.S. LLNL, French LULI, German Stuttgart university, Osaka, Japan university and HOYA company etc. all carry out the research of mixing the rare earth laserable material one after another, in mixing crystal such as Yb aluminate, alum salts, borate, tungstate, successively realize femtosecond laser output (
Y. Zaouter, et al, Opt. Lett. 2006,31:119).And at home: Shanghai ray machine institute, Shandong University, thing structure institute, peace light institute, silicate institute etc. have also successively carried out correlative study.
Mainly concentrate on the matrix of oxide aspect for the laser host crystal, like Y
3Al
5O
12(YAG), Ca
4YO (BO
3)
3(YCOB), KGd (WO
4)
2(KGW), YAl
3(BO
3)
4(YAB) etc.For example US20020159495A1 discloses a kind of thulium doped YAG (Tm:YAG) as laser host; US2001010697A1 discloses a kind of YCOB of the trivalent rare earth ions that mixes as laser host, for example: Yb:Ca
4YO (BO
3)
3Again, the YAB of the US20030138012A ytterbium that mixes is as laser host.
Compare with oxide crystal: halide crystal has the transmission range of non-constant width, can from extreme ultraviolet until infrared; And the refractive index ratio of halide crystal is lower, can reduce to use spectrographic surface albedo and the non-linear effect that limits under the high intensity laser beam pumping effect as far as possible.In addition, fluorochemical has low uptake factor, and relative dispersion is big, the damage threshold advantages of higher.Existing research shows rear-earth-doped CaF
2, SrF
2, BaF
2, PbF
2Become one of the most attractive wide-band tuning, superpower, ultra-short pulse laser crystalline material series Deng the cubic structure crystal of fluoride.For example, found at Yb:CaF in 2009
2Obtained in the crystal 99fs femtosecond laser output (
F. Friebel, et al. Opt. Lett. 2009,34:1474).In addition, Yb:SrF
2, Yb:BaF
2, Yb:PbF
2Crystal also be proved to be very potential superpower, ultrafast laser crystal (
J. L. Doualan, et al. Laser Phys. 2010,20:533).Particularly, the Yb:CaF that adopts Shanghai optical crystal seminar of silicate institute to provide of German Jena university in 2008
2Crystal has realized that pulsewidth is that 192fs, peak power are the laser output of 1TW, be considered to " the laser-produced fusion field is had milestone inthe " (
M. Siebold, et al. Opt. Lett. 2008,33:2770).
Yet the high symmetry that the cubic structure crystal of fluoride has, more weak crystal field intensity are unfavorable for that rare earth ion forms big Stark splitting of energy levels.
Summary of the invention
In the face of the problems referred to above that prior art exists, the inventor recognizes, with CaF
2, PbF
2, SrF
2Cubic crystal structure in fluorochemical is different, the PbClF crystal of tetragonal system (spacer: P4/nmm) can have the following advantages as doped substrate:
(1) utilizes fluorochloride crystalline low-symmetry, can realize the high field coupling of rare earth ion, the crystal field splitting that ground state level is big, reduce the temperature dependency of laser threshold and laser output performance;
(2) rare earth ion can occupy the divalent cation case in the host crystal, through forming gap F at random
-Or Cl
-Ion reaches the charge balance of system, improves the degree of disorder of local coordination structure, helps forming wide absorption and emission band more.
Based on above-mentioned cognition, through inventor's research with keen determination, the present invention provides a kind of rare earth ion doped fluorine lead chloride laser host crystal, and its chemical formula is RE
3+: PbClF, wherein rare earth ion RE
3+Be selected from ytterbium (Yb
3+), rubidium (Nd
3+), thulium (Tm
3+), holmium (Ho
3+), praseodymium (Pr
3+), cerium (Ce
3+) and erbium (Er
3+) at least a.Said rare earth ion RE
3+Doping can be 0.2～2mol%.
With the symmetric cubic structure crystal of fluoride of existing height; Fluorine lead chloride laser host crystal provided by the invention; Symmetry is low, can realize being coupled, forming the big crystal field splitting of ground state level with the high field of rare earth ion, can reduce the temperature dependency of laser threshold and laser output performance.In addition; The unordered host crystal of the second shell positively charged ion coordination more (like the rare-earth vanadate of multiple cationic components, silicate etc.) with respect to present research; Negatively charged ion belongs to first coordination shell; Influence to the rare earth ion spectrum property is bigger, and its unordered coordination structure will help obtaining wide and level and smooth emmission spectrum more.Therefore, the rear-earth-doped fluorochloride laser crystals with unordered anion binding, low-symmetry provided by the invention all has great importance to basic theory and the practical application aspect that develops full LD pumping ultrafast laser crystalline material.
Preferably, the present invention provides a kind of fluorine lead chloride crystal (Yb of the ytterbium that mixes
3+: PbClF) its doping is 0.5～2mol%.This crystal has bigger emission live width and long emission lifetime, is very suitable for carrying out the output of laser mode locking and wide-band tuning and ultrafast laser.
Preferably, the present invention also provides a kind of fluorine lead chloride crystal (Nd of the rubidium that mixes
3+: PbClF), and its doping is 0.2～1mol%.This crystalline crystal field engery level cracking is big, and has wide emission band, also is very suitable for carrying out laser mode locking and wide-band tuning.
On the other hand, the present invention also provides a kind of preparation above-mentioned rare earth ion doped fluorine lead chloride laser host crystalline method, comprising: with REF
3, PbF
2And PbCl
2Be raw material, adopt solid-phase synthesis to prepare rare earth ion doped fluorine lead chloride polycrystal raw material; At 600～630 ℃ of said polycrystal raw materials of following fusion; And adopt falling crucible method to make rare earth ion doped fluorine lead chloride monocrystalline.
In the present invention, the dropping speed of the crucible of said falling crucible method can be 10～20mm/ days, and rate of temperature fall can be 20～50 ℃/hour after growth was accomplished.In addition, growth time can be 3～5 days.
Adopting solid-phase synthesis to prepare in the step of rare earth ion doped fluorine lead chloride polycrystal raw material PbCl again,
2Can be excessive a little, preferred excessive 1～2mol%; Sintering temperature can be 400～500 ℃; Sintering time can be 10～20 hours.
Again, but the vacuum-sealing of the present invention's adopting quartz glass crucible, no seeded growth.
Preparing method's raw material of the present invention is simple, cost is low and technical process is simple, and controllability is high, and good reproducibility is fit to scale prodn, has fabulous application prospect.
Description of drawings
Fig. 1 illustrates Yb
3+: PbClF crystalline XRD figure spectrum;
Fig. 2 illustrates Nd
3+: PbClF crystalline XRD figure spectrum;
Fig. 3 illustrates Yb
3+: PbClF crystalline room temperature emmission spectrum;
Fig. 4 illustrates Nd
3+: PbClF crystalline room temperature emmission spectrum;
Fig. 5 illustrates Nd
3+: PbClF crystal and existing
+: YAG crystal emmission spectrum is relatively.
Embodiment
Book accompanying drawing as directed, and combine following embodiment to further specify the present invention, should be understood that Figure of description and following embodiment only are used to explain the present invention, and unrestricted the present invention.
The present invention adopts REF
3, PbF
2And PbCl
2Be raw material.The preferred raw material that adopts high-purity (99.99%).Can take by weighing raw material according to the reactions formula,
REF
3+PbF
2+PbCl
2?=RE
3+:PbClF；
Yet, with respect to REF
3, PbF
2, because PbCl
2Has higher volatility, for keeping the stoichiometric ratio of growing crystal, PbCl
2Excessive slightly, for example excessive 1～2mol%.
With the raw material thorough mixing; In vacuum glove box, pack into then in the quartz glass crucibles; And, place retort furnace in 400～500 ℃ of calcinings 10～20 hours down the raw material of good seal at the vacuum condition lower seal, solid state reaction can obtain the mixing fluorine lead chloride polycrystal raw material of trivalent rare earth ions.
Then, at 600～630 ℃ of above-mentioned polycrystal raw materials of following fusion.Constant temperature adopts crucible degrowth method to begin growth after the raw materials melt after 2 hours, and the quartz glass crucibles of use does not have seeded growth.Wherein dropping speed of the crucible is 10～20mm/ days, and growth time can be 3～5 days, and rate of temperature fall can be 20～50 ℃/hour after growth was accomplished, and can obtain transparent single crystal.
Crystal is carried out the orientation cutting along (001) face, carry out the test of room temperature emmission spectrum behind the optical polish.For example cutting obtains the crystal that crystalline size is Φ 20 * 50mm.
Fig. 1 and 2 illustrates example crystal Yb respectively
3+: PbClF and Nd
3+: the XRD diffracting spectrum of PbClF, can find out that crystal of the present invention has cubic phase P4/nmm structure.
With test room temperature emmission spectrum (respectively shown in Fig. 3 and 4) behind above-mentioned two kinds of example crystal-cut and the optical polish, pumping source adopts emission wavelength to be positioned at the laser diode of 808nm and 940nm.
Referring to Fig. 3,2.0mol%Yb
3+: PbClF crystal emission spectra peak wavelength is positioned at 1026nm, and halfwidth is 58nm, and its peak emission cross section is: 0.42 * 10
-20Cm
2; Emission lifetime is 5.33ms; Through Gauss curve fitting, calculate Yb
3+ 2F
7/2Energy level Stark splitting of energy levels value is: 801 cm
-1, corresponding laser lower level particle layout is 2.13%; And in the crystal of high symmetry cubic structure, comprise YAG, CaF
2, PbF
2Deng, the Yb ion
2F
7/2The crystal field splitting Δ E of the sub-energy level of maximum Stark of energy level equals～600cm
-1, the hot population of particle is 5.6%, falls 62% on a year-on-year basis; Mix the Yb laser crystals with other and compare, this crystal has bigger emission live width and long emission lifetime, is very suitable for carrying out the output of laser mode locking and wide-band tuning and ultrafast laser.
Again referring to Fig. 4,0.5mol%Nd
3+: PbClF crystal crystal emission spectra peak wavelength is positioned at 1060nm, and its peak emission cross section is 0.3 * 10
-19Cm
2, through the match of Gauss's multimodal, Nd:PbClF crystalline emission spectrum can be decomposed into two emission bands that overlap each other that peak wavelength is 1055nm and 1064nm, and the latter's halfwidth is 30nm, is 1.5 times of neodymium doped phosphate glass (20nm).Referring to Fig. 5; Compare with Nd:YAG; The Nd:PbClF crystal has wideer emmission spectrum than Nd:YAG crystal, and promptly the former crystal field engery level cracking is greater than the latter, and Nd:PbClF crystalline emmission spectrum is different from a plurality of narrow linewidth emission peaks independently mutually of Nd:YAG crystalline; But be similar to the big envelope of neodymium glass, promptly have wide emission band.Therefore, the Nd:PbClF crystal is very suitable for carrying out laser mode locking and wide-band tuning.
The present invention further for example following examples so that the present invention to be described better.
Embodiment 1:0.5mol%Yb
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: YbF
3, PbF
2, PbCl
2Be total to the 180g thorough mixing.PbCl wherein
2Excessive 1mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 400 ℃ of calcinings 10 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 630 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 20mm/ days, cooling (rate of temperature fall is 50 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 4 days of crystal growth cycle after accomplishing.
Embodiment 2:1.0mol%Yb
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: YbF
3, PbF
2, PbCl
2Be total to the 160g thorough mixing.Repeat the method for embodiment 1, make 1.0mol%Yb
3+: the transparent single crystal of PbClF, about 3 days of crystal growth cycle.
Embodiment 3:2.0mol%Yb
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: YbF
3, PbF
2, PbCl
2Be total to the 200g thorough mixing.Repeat the method for embodiment 1, make 2.0mol%Yb
3+: the transparent single crystal of PbClF, about 5 days of crystal growth cycle.
Embodiment 4:0.2mol%Nd
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: NdF
3, PbF
2, PbCl
2Be total to the 180g thorough mixing.PbCl
2Excessive 1mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 400 ℃ of calcinings 10 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 630 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 10mm/ days, cooling (rate of temperature fall is 50 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 4 days of crystal growth cycle after accomplishing.
Embodiment 5:0.5mol%Nd
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: NdF
3, PbF
2, PbCl
2Be total to the 160g thorough mixing.Repeat the method for embodiment 4, make 0.5mol%Nd
3+: the transparent single crystal of PbClF, about 3 days of crystal growth cycle.
Embodiment 6:1.0mol%Nd
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: NdF
3, PbF
2, PbCl
2Be total to the 200g thorough mixing.Repeat the method for embodiment 4, make 1.0mol%Nd
3+: the transparent single crystal of PbClF, about 5 days of crystal growth cycle.
Embodiment 7:1.0mol%Tm
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: TmF
3, PbF
2, PbCl
2Be total to the 180g thorough mixing.PbCl
2Excessive 1mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 450 ℃ of calcinings 15 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 630 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 15mm/ days, cooling (rate of temperature fall is 40 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 5 days of crystal growth cycle after accomplishing.
Embodiment 8:0.2mol%Ho
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: HoF
3, PbF
2, PbCl
2Be total to the 160g thorough mixing.PbCl
2Excessive 1.5mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 500 ℃ of calcinings 20 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 630 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 18mm/ days, cooling (rate of temperature fall is 30 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 4 days of crystal growth cycle after accomplishing.
Embodiment 9:0.5 mol%Pr
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: PrF
3, PbF
2, PbCl
2Be total to the 180g thorough mixing.PbCl
2Excessive 2mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 400 ℃ of calcinings 20 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 630 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 15mm/ days, cooling (rate of temperature fall is 20 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 5 days of crystal growth cycle after accomplishing.
Embodiment 10:0.5 mol%Ce
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: CeF
3, PbF
2, PbCl
2Be total to the 200g thorough mixing.PbCl
2Excessive 1mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 450 ℃ of calcinings 10 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 630 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 20mm/ days, cooling (rate of temperature fall is 50 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 4 days of crystal growth cycle after accomplishing.
Embodiment 11:1.0mol%Er
3+: the PbClF crystal
Press the chemical formula proportioning, take by weighing high-purity (5N) raw material: ErF
3, PbF
2, PbCl
2Be total to the 180g thorough mixing.PbCl
2Excessive 1mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 400 ℃ of calcinings 10 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 620 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 20mm/ days, cooling (rate of temperature fall is 50 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 4 days of crystal growth cycle after accomplishing.
Embodiment 11:0.5mol%Yb
3+/ 0.5mol%Nd
3+: the PbClF crystal is pressed the chemical formula proportioning, takes by weighing high-purity (5N) raw material: YbF
3, NdF
3, PbF
2, PbCl
2Be total to the 180g thorough mixing.PbCl wherein
2Excessive 1mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 450 ℃ of calcinings 15 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 600 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 10mm/ days, cooling (rate of temperature fall is 50 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 5 days of crystal growth cycle after accomplishing.
Embodiment 11:1.0mol%Tm
3+/ 0.2mol%Ho
3+: the PbClF crystal is pressed the chemical formula proportioning, takes by weighing high-purity (5N) raw material: TmF
3, HoF
3, PbF
2, PbCl
2Be total to the 200g thorough mixing.PbCl wherein
2Excessive 1mol%; Mixed raw materials is packed in vacuum glove box in the quartz glass crucibles, and at the vacuum condition lower seal, the 500 ℃ of calcinings 15 hours in retort furnace of the raw material of good seal, solid state reaction obtains fluorine lead chloride polycrystal raw material; At 600 ℃ of following fused raw materials, constant temperature began degrowth after 2 hours, and dropping speed of the crucible is 10mm/ days, cooling (rate of temperature fall is 50 ℃/hour) after growth is accomplished, and cooling obtains transparent single crystal, about 5 days of crystal growth cycle after accomplishing.
Industrial applicability: the present invention provides a kind of novel rare earth ion doped fluorine lead chloride laser host brilliant; It all has great importance to basic theory and the practical application aspect that develops full LD pumping ultrafast laser crystalline material as the fluorochloride laser crystals with unordered anion binding, low-symmetry.In addition, preparation is simple, cost is low, be fit to scale prodn for method of the present invention.
Claims (9)
1. rare earth ion doped fluorine lead chloride laser host crystal, its chemical formula is RE
3+: PbClF, wherein rare earth ion RE
3+Be selected from Yb
3+, Nd
3+, Tm
3+, Ho
3+, Pr
3+, Ce
3+And Er
3+In at least a.
2. rare earth ion doped fluorine lead chloride laser host crystal according to claim 1 is characterized in that said rare earth ion RE
3+Doping be 0.2～2mol%.
3. rare earth ion doped fluorine lead chloride laser host crystal according to claim 2 is characterized in that said rare earth ion RE
3+Be Yb
3+, its doping is 0.5～2mol%.
4. rare earth ion doped fluorine lead chloride laser host crystal according to claim 2 is characterized in that said rare earth ion RE
3+Be Nd
3+, its doping is 0.2～1mol%.
5. one kind prepares each described rare earth ion doped fluorine lead chloride laser host crystalline method in the claim 1～4, it is characterized in that, comprising:
With REF
3, PbF
2And PbCl
2Be raw material, adopt solid-phase synthesis to prepare the polycrystal raw material of rare earth ion doped fluorine lead chloride;
At 600～630 ℃ of said polycrystal raw materials of following fusion; And adopt falling crucible method to make the monocrystalline of rare earth ion doped fluorine lead chloride.
6. method according to claim 5 is characterized in that, the dropping speed of the crucible of said falling crucible method is 10～20mm/ days, and rate of temperature fall was 20～50 ℃/hour after growth was accomplished.
7. method according to claim 6 is characterized in that, the growth time of said falling crucible method is 3～5 days.
8. according to each described method in the claim 5～7, it is characterized in that, adopting solid-phase synthesis to prepare in the step of rare earth ion doped fluorine lead chloride polycrystal raw material PbCl
2Excessive 1～2mol%, sintering temperature is 400～500 ℃, sintering time is 10～20 hours.
9. method according to claim 8 is characterized in that, the vacuum-sealing of adopting quartz glass crucible, no seeded growth.
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| CN104342154A (en) * | 2013-08-09 | 2015-02-11 | 中国科学院上海硅酸盐研究所 | Lead difluoride base material with Eu<2+> characteristic luminescence and preparation method thereof |
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| CN104342154A (en) * | 2013-08-09 | 2015-02-11 | 中国科学院上海硅酸盐研究所 | Lead difluoride base material with Eu<2+> characteristic luminescence and preparation method thereof |
| JP2020501368A (en) * | 2016-12-04 | 2020-01-16 | ニューポート コーポレーション | High power mode locked laser system and method of use |
| JP7286540B2 (en) | 2016-12-04 | 2023-06-05 | ニューポート コーポレーション | High power mode-locked laser system and method of use |
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