CN102592289A - Depth information obtaining method and system for movement target position of nanometer material - Google Patents
Depth information obtaining method and system for movement target position of nanometer material Download PDFInfo
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- CN102592289A CN102592289A CN2012100342480A CN201210034248A CN102592289A CN 102592289 A CN102592289 A CN 102592289A CN 2012100342480 A CN2012100342480 A CN 2012100342480A CN 201210034248 A CN201210034248 A CN 201210034248A CN 102592289 A CN102592289 A CN 102592289A
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Abstract
The invention discloses depth information obtaining method and system for a movement target position of a nanometer material. The method is applied in a nanometer operation system; the nanometer operation system comprises an electron microscope; an operator of the nanometer operation system forms an included angle with a vertical line of the plane where the target position is located; the method comprises the steps of: moving the operator in a depth direction; obtaining the overlooking planar image information of the tail end of the operator through the electron microscope; monitoring the moving direction of the tail end of the operator in the overlooking planar image; judging whether the moving direction changes to obtain a first judge result; and obtaining first depth direction position information of the tail end of the operator to be used as the depth information of the movement target position of the nanometer material if the first judge result indicates that the moving direction changes. The method and system disclosed by the invention can accurately obtain the depth information of the movement target position of the nanometer material.
Description
Technical field
The present invention relates to accurately control the field, particularly relate to the Depth Information Acquistion method and system of the moving target position of nano material.
Background technology
Along with developing rapidly of nanometer technology, also increasingly high for the requirement of the accuracy of the operation of the object (nano material) of nanoscale.When nano material is operated, need nano material (like nano wire, nanotube, nano particle and nanosphere) to be moved to preassigned position through nanometer operating system.Because when using nanometer operating system; Must be at first with the range information input nanometer operating system that nano material is moved at three dimensions; Nanometer operating system could carry out moving accurately to nano material according to the range information of input; So before the use nanometer operating system moves nano material, at first will obtain the depth information of the moving target position of nano material.
But, also there is not a kind of Depth Information Acquistion method of moving target position of effective nano material in the prior art, the operation on depth direction (Z direction) depends primarily on operator's experience for nano material.
Summary of the invention
The Depth Information Acquistion method and system that the purpose of this invention is to provide a kind of moving target position of nano material can accurately be obtained the positional information of nano material on depth direction.
For realizing above-mentioned purpose, the invention provides following scheme:
A kind of Depth Information Acquistion method of moving target position of nano material is applied to nanometer operating system; Said nanometer operating system comprises electron microscope; The vertical line on the manipulater of said nanometer operating system and said target location plane of living in forms angle;
Said method comprises:
On depth direction, move said manipulater;
Obtain the top plan view image information of the end of said manipulater through said electron microscope;
Monitor the moving direction of end on said plan view from above of said manipulater;
Judge that whether said moving direction changes, and obtains first judged result;
When said first judged result represented that said moving direction changes, the first depth direction positional information of end of obtaining said manipulater was as the depth information of the moving target position of said nano material.
Preferably, saidly judge that whether said moving direction changes, and comprising:
Write down the moving direction of the end of last said manipulater of a moment;
Obtain the moving direction of the end of the said manipulater of current time;
Whether the moving direction of end of judging the said manipulater of current time is opposite with last one constantly moving direction.
Preferably, said method also comprises:
After said moving direction changes, on depth direction, move said manipulater in opposite direction;
Judge whether said moving direction secondary takes place change, and obtains second judged result;
When said second judged result representes that said moving direction changes, obtain the second depth direction positional information of the end of said manipulater;
According to said first depth direction positional information and the said second depth direction positional information, calculating mean value obtains the depth information of the moving target position of said nano material.
Preferably, obtain the top plan view image information of the end of said manipulater through said electron microscope, comprising:
Obtain the image information of regions through said electron microscope;
Said image information is carried out Gauss's smothing filtering, adaptive threshold, corrosion and divergence process;
Gauss's smothing filtering takes out noise in the image
Obtain the graph outline of the said image information after the processing, with the summit of said graph outline end as said manipulater.
A kind of Depth Information Acquistion system of moving target position of nano material is applied to nanometer operating system; Said nanometer operating system comprises electron microscope; The vertical line on the manipulater of said nanometer operating system and said target location plane of living in forms angle;
Said Depth Information Acquistion system comprises:
The manipulater mobile unit is used on depth direction, moving said manipulater;
The image information acquisition unit is used for obtaining through said electron microscope the top plan view image information of the end of said manipulater;
The moving direction monitoring means is used to monitor the moving direction of end on said plan view from above of said manipulater;
First judging unit is used to judge whether said moving direction changes, and obtains first judged result;
The first Depth Information Acquistion unit is used for when said first judged result representes that said moving direction changes, and the first depth direction positional information of end of obtaining said manipulater is as the depth information of the moving target position of said nano material.
Preferably, said first judging unit comprises:
Last one moving direction record subelement constantly is used to write down the moving direction of the end of said manipulater of a moment;
Current time moving direction record subelement is used to obtain the moving direction of the end of the said manipulater of current time;
The moving direction judgment sub-unit is used to judge that the moving direction of end of the said manipulater of current time is whether opposite with last one constantly moving direction.
Preferably, said system also comprises:
Reverse operation device mobile unit is used for after said moving direction changes, and on depth direction, moves said manipulater in opposite direction;
Second judging unit is used to judge whether said moving direction secondary takes place change, and obtains second judged result;
The second Depth Information Acquistion unit is used for when said second judged result representes that said moving direction changes, obtaining the second depth direction positional information of the end of said manipulater;
The Depth Information Acquistion unit is used for according to said first depth direction positional information and the said second depth direction positional information, and calculating mean value obtains the depth information of the moving target position of said nano material.
Preferably, said image information acquisition unit comprises:
The image information acquisition subelement is used for obtaining through said electron microscope the image information of regions;
The Image Information Processing subelement is used for said image information is carried out Gauss's smothing filtering, adaptive threshold, corrosion and divergence process;
The terminal recognin of manipulater unit is used to obtain the graph outline of the said image information after the processing, with the summit of the said graph outline end as said manipulater.
According to specific embodiment provided by the invention, the invention discloses following technique effect:
Method and system of the present invention; The direction of motion of end on the imaging plane of electron microscope through the monitoring manipulater; When the direction of motion of end on the imaging plane of electron microscope of manipulater is changed; The depth information of the end of manipulater can accurately obtain the depth information of the moving target position of nano material as the depth information of the moving target position of nano material.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use among the embodiment below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work property, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the process flow diagram of Depth Information Acquistion method embodiment 1 of the moving target position of nano material of the present invention;
Electron microscope imaging synoptic diagram when Fig. 2 does not touch the plane, target location for the end of manipulater;
Electron microscope imaging synoptic diagram when Fig. 3 touches the plane, target location for the end of manipulater;
Fig. 4 is the process flow diagram of Depth Information Acquistion method embodiment 2 of the moving target position of nano material of the present invention;
Fig. 5 is a process flow diagram of judging whether moving direction changes of the present invention;
Fig. 6 obtains the process flow diagram of top plan view image information of the end of manipulater through electron microscope for the present invention;
Fig. 7 is the structural drawing of Depth Information Acquistion system embodiment 1 of the moving target position of nano material of the present invention;
Fig. 8 is the structural drawing of Depth Information Acquistion system embodiment 2 of the moving target position of nano material of the present invention;
Fig. 9 is the first judging unit structural drawing of the present invention;
Figure 10 is image information acquisition cellular construction figure of the present invention.
Embodiment
To combine the accompanying drawing in the embodiment of the invention below, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and embodiment the present invention done further detailed explanation.
The Depth Information Acquistion method of the moving target position of nano material of the present invention is applied to nanometer operating system; Said nanometer operating system comprises electron microscope; The vertical line on the manipulater of said nanometer operating system and said target location plane of living in forms angle.
Fig. 1 is the process flow diagram of Depth Information Acquistion method embodiment 1 of the moving target position of nano material of the present invention.As shown in Figure 1, the method comprising the steps of:
S101: on depth direction, move said manipulater;
S102: the top plan view image information of obtaining the end of said manipulater through said electron microscope;
S103: the moving direction of end on said plan view from above of monitoring said manipulater;
S104: judge that whether said moving direction changes, and obtains first judged result;
S105: when said first judged result represented that said moving direction changes, the first depth direction positional information of end of obtaining said manipulater was as the depth information of the moving target position of said nano material.
For the ease of understanding the principle of method of the present invention, specify below in conjunction with the image-forming principle of electron microscope.
Electron microscope imaging synoptic diagram when Fig. 2 does not touch the plane, target location for the end of manipulater.
In original position, the end of manipulater 104 is in 1 place, position.When behind move operation device 104 on the depth direction, the end of manipulater 104 is in 2 places, position.Image-forming principle by electron microscope can know that when the end of manipulater 104 was in 1 place, position, the light of the end of manipulater 104 was through behind the primary optical axis of object lens 103, with the 1 ' position that projects imaging plane 101; When the end of manipulater 104 was in 2 places, position, the light of the end of manipulater 104 was through behind the primary optical axis of object lens 103, with the 2 ' position that projects imaging plane 101.Therefore, be example with Fig. 2, when on depth direction, moving down said manipulater 104, on the imaging plane at electron microscope place, can see that the end of manipulater 104 moves to 2 ' by 1 ', i.e. dextrosinistral direction among Fig. 2.
Electron microscope imaging synoptic diagram when Fig. 3 touches the plane, target location for the end of manipulater.Image-forming principle by electron microscope can know that when the end of manipulater 104 was in 3 places, position (just the contact target plane 105), the light of the end of manipulater 104 was through behind the primary optical axis of object lens 103, with the 3 ' position that projects imaging plane 101; When the end of manipulater 104 was in 4 places, position (touch objective plane 105 back manipulaters 104 deformation takes place), the light of the end of manipulater 104 was through behind the primary optical axis of object lens 103, with the 4 ' position that projects imaging plane 101.
Need to prove why manipulater 104 deformation can take place, be because: the manipulater of said nanometer operating system 104 forms angle with the vertical line on plane of living in, said target location, and manipulater 104 itself has elasticity.So after manipulater 104 touched objective plane 105, if continue to move down manipulater 104, deformation will take place manipulater 104, and the end of manipulater 104 can produce slip relatively on objective plane 105.
Therefore, be example with Fig. 3, when on depth direction, moving down said manipulater 104, on the imaging plane at electron microscope place, can see that the end of manipulater 104 moves to 4 ' by 3 ', i.e. from left to right direction among Fig. 3.
Can find out; End at manipulater moves to objective plane, until coming in contact with objective plane, in the process that takes place again to slide relatively; The direction of motion of the end of manipulater on the imaging plane of electron microscope can change; And when the end of manipulater just contacted with objective plane, direction of motion just can change.Therefore; Method of the present invention is through the direction of motion of end on the imaging plane of electron microscope of monitoring manipulater; When the direction of motion of end on the imaging plane of electron microscope of manipulater is changed; The depth information of the end of manipulater can accurately obtain the depth information of the moving target position of nano material as the depth information of the moving target position of nano material.
Fig. 4 is the process flow diagram of Depth Information Acquistion method embodiment 2 of the moving target position of nano material of the present invention.As shown in Figure 4, the method comprising the steps of:
S401: on depth direction, move said manipulater;
S402: the top plan view image information of obtaining the end of said manipulater through said electron microscope;
S403: the moving direction of end on said plan view from above of monitoring said manipulater;
S404: judge that whether said moving direction changes, and obtains first judged result;
S405: when said first judged result represented that said moving direction changes, the first depth direction positional information of end of obtaining said manipulater was as the depth information of the moving target position of said nano material;
S406: after said moving direction changes, on depth direction, move said manipulater in opposite direction;
S407: judge whether said moving direction secondary takes place change, and obtains second judged result;
S408: when said second judged result representes that said moving direction changes, obtain the second depth direction positional information of the end of said manipulater;
S409: according to said first depth direction positional information and the said second depth direction positional information, calculating mean value obtains the depth information of the moving target position of said nano material.
In the present embodiment, after the moving direction of end on imaging plane of manipulater changes for the first time, to opposite direction move operation device.Understanding easily, is example with Fig. 2,3, and in the process that manipulater moves in the other direction, the end of manipulater will be from the position on imaging plane 4 ' moves to position 3 ', 2 ' moves to position 1 ' from the position again.The moving direction of the end of manipulater on imaging plane at first is from right to left, and after the end of manipulater left objective plane just, the moving direction of the end of manipulater on imaging plane became from left to right.Therefore, when the moving direction of the end of manipulater on imaging plane changed for the second time, the terminal residing depth location of manipulater also was the depth location of objective plane.
In the present embodiment; The first depth direction positional information and the second depth direction positional information are averaged; With the depth information of this mean value, can further improve the precision of depth information of the moving target position of nano material as the moving target position of nano material.
Fig. 5 is a process flow diagram of judging whether moving direction changes of the present invention.As shown in Figure 5, this flow process comprises step:
S501: the moving direction that writes down the end of last said manipulater of a moment;
S502: the moving direction that obtains the end of the said manipulater of current time;
S503: whether the moving direction of end of judging the said manipulater of current time is opposite with last one constantly moving direction.
Fig. 6 obtains the process flow diagram of top plan view image information of the end of manipulater through electron microscope for the present invention.As shown in Figure 6, this flow process comprises step:
S601: the image information of obtaining regions through said electron microscope;
S602: said image information is carried out Gauss's smothing filtering, adaptive threshold, corrosion and divergence process;
Wherein, Gauss's smothing filtering can carry out noise to image rejects, and smoothing processing obtains the better image edge; Adaptive threshold can dynamically be adjusted its threshold value according to the image local characteristics, is black and white binary image with image transitions, obtains more satisfactory thresholding treatment effect; Corrosion treatment can weed out " burr " of the image border of binaryzation; Divergence process is that edge of image is enlarged, and its effect will corrode the back edge of image exactly or inner hole is filled out, and corrodes usually and expands two kinds of methods and can be used alternatingly.
S603: obtain the graph outline of the said image information after the processing, with the summit of said graph outline end as said manipulater.
Adopt the flow process of Fig. 6, can obtain the top plan view image information of the end of manipulater more clearly.
The present invention discloses a kind of Depth Information Acquistion system of moving target position of nano material.Said Depth Information Acquistion system applies is in nanometer operating system; Said nanometer operating system comprises electron microscope; The vertical line on the manipulater of said nanometer operating system and said target location plane of living in forms angle.
Fig. 7 is the structural drawing of Depth Information Acquistion system embodiment 1 of the moving target position of nano material of the present invention.As shown in Figure 7, this system comprises:
Manipulater mobile unit 701 is used on depth direction, moving said manipulater;
Image information acquisition unit 702 is used for obtaining through said electron microscope the top plan view image information of the end of said manipulater;
Moving direction monitoring means 703 is used to monitor the moving direction of end on said plan view from above of said manipulater;
First judging unit 704 is used to judge whether said moving direction changes, and obtains first judged result;
The first Depth Information Acquistion unit 705 is used for when said first judged result representes that said moving direction changes, and the first depth direction positional information of end of obtaining said manipulater is as the depth information of the moving target position of said nano material.
System of the present invention is through the direction of motion of end on the imaging plane of electron microscope of monitoring manipulater; When the direction of motion of end on the imaging plane of electron microscope of manipulater is changed; The depth information of the end of manipulater can accurately obtain the depth information of the moving target position of nano material as the depth information of the moving target position of nano material.
Fig. 8 is the structural drawing of Depth Information Acquistion system embodiment 2 of the moving target position of nano material of the present invention.As shown in Figure 8, this system also comprises:
Reverse operation device mobile unit 801 is used for after said moving direction changes, and on depth direction, moves said manipulater in opposite direction;
The second Depth Information Acquistion unit 803 is used for when said second judged result representes that said moving direction changes, obtaining the second depth direction positional information of the end of said manipulater;
Depth Information Acquistion unit 804 is used for according to said first depth direction positional information and the said second depth direction positional information, and calculating mean value obtains the depth information of the moving target position of said nano material.
In the present embodiment; The first depth direction positional information and the second depth direction positional information are averaged; With the depth information of this mean value, can further improve the precision of depth information of the moving target position of nano material as the moving target position of nano material.
Fig. 9 is the first judging unit structural drawing of the present invention.As shown in Figure 9, this first judging unit comprises:
Last one moving direction record subelement 901 constantly is used to write down the moving direction of the end of said manipulater of a moment;
Current time moving direction record subelement 902 is used to obtain the moving direction of the end of the said manipulater of current time;
Moving direction judgment sub-unit 903 is used to judge that the moving direction of end of the said manipulater of current time is whether opposite with last one constantly moving direction.
Figure 10 is image information acquisition cellular construction figure of the present invention.As shown in Figure 9, this image information acquisition unit comprises:
Image information acquisition subelement 1001 is used for obtaining through said electron microscope the image information of regions;
Image Information Processing subelement 1002 is used for said image information is carried out Gauss's smothing filtering, adaptive threshold, corrosion and divergence process;
The terminal recognin of manipulater unit 1003 is used to obtain the graph outline of the said image information after the processing, with the summit of the said graph outline end as said manipulater.
Adopt the structure of Figure 10, can obtain the top plan view image information of the end of manipulater more clearly.
At last; Also need to prove; In this article; Relational terms such as first and second grades only is used for an entity or operation are made a distinction with another entity or operation, and not necessarily requires or hint relation or the order that has any this reality between these entities or the operation.And; Term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability; Thereby make and comprise that process, method, article or the equipment of a series of key elements not only comprise those key elements; But also comprise other key elements of clearly not listing, or also be included as this process, method, article or equipment intrinsic key element.Under the situation that do not having much more more restrictions, the key element that limits by statement " comprising ... ", and be not precluded within process, method, article or the equipment that comprises said key element and also have other identical element.
Description through above embodiment; Those skilled in the art can be well understood to the present invention and can realize by the mode that software adds essential hardware platform; Can certainly all implement, but the former is better embodiment under a lot of situation through hardware.Based on such understanding; All or part of can the coming out that technical scheme of the present invention contributes to background technology with the embodied of software product; This computer software product can be stored in the storage medium, like ROM/RAM, magnetic disc, CD etc., comprises that some instructions are with so that a computer equipment (can be a personal computer; Server, the perhaps network equipment etc.) carry out the described method of some part of each embodiment of the present invention or embodiment.
Each embodiment adopts the mode of going forward one by one to describe in this instructions, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.For the disclosed system of embodiment, because it is corresponding with the embodiment disclosed method, so description is fairly simple, relevant part is partly explained referring to method and is got final product.
Used concrete example among this paper principle of the present invention and embodiment are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, part all can change on embodiment and range of application.In sum, this description should not be construed as limitation of the present invention.
Claims (8)
1. the Depth Information Acquistion method of the moving target position of a nano material is characterized in that, is applied to nanometer operating system; Said nanometer operating system comprises electron microscope; The vertical line on the manipulater of said nanometer operating system and said target location plane of living in forms angle;
Said method comprises:
On depth direction, move said manipulater;
Obtain the top plan view image information of the end of said manipulater through said electron microscope;
Monitor the moving direction of end on said plan view from above of said manipulater;
Judge that whether said moving direction changes, and obtains first judged result;
When said first judged result represented that said moving direction changes, the first depth direction positional information of end of obtaining said manipulater was as the depth information of the moving target position of said nano material.
2. method according to claim 1 is characterized in that, saidly judges that whether said moving direction changes, and comprising:
Write down the moving direction of the end of last said manipulater of a moment;
Obtain the moving direction of the end of the said manipulater of current time;
Whether the moving direction of end of judging the said manipulater of current time is opposite with last one constantly moving direction.
3. method according to claim 1 and 2 is characterized in that, said method also comprises:
After said moving direction changes, on depth direction, move said manipulater in opposite direction;
Judge whether said moving direction secondary takes place change, and obtains second judged result;
When said second judged result representes that said moving direction changes, obtain the second depth direction positional information of the end of said manipulater;
According to said first depth direction positional information and the said second depth direction positional information, calculating mean value obtains the depth information of the moving target position of said nano material.
4. method according to claim 1 and 2 is characterized in that, obtains the top plan view image information of the end of said manipulater through said electron microscope, comprising:
Obtain the image information of regions through said electron microscope;
Said image information is carried out Gauss's smothing filtering, adaptive threshold, corrosion and divergence process;
Obtain the graph outline of the said image information after the processing, with the summit of said graph outline end as said manipulater.
5. the Depth Information Acquistion system of the moving target position of a nano material is characterized in that, is applied to nanometer operating system; Said nanometer operating system comprises electron microscope; The vertical line on the manipulater of said nanometer operating system and said target location plane of living in forms angle;
Said Depth Information Acquistion system comprises:
The manipulater mobile unit is used on depth direction, moving said manipulater;
The image information acquisition unit is used for obtaining through said electron microscope the top plan view image information of the end of said manipulater;
The moving direction monitoring means is used to monitor the moving direction of end on said plan view from above of said manipulater;
First judging unit is used to judge whether said moving direction changes, and obtains first judged result;
The first Depth Information Acquistion unit is used for when said first judged result representes that said moving direction changes, and the first depth direction positional information of end of obtaining said manipulater is as the depth information of the moving target position of said nano material.
6. system according to claim 5 is characterized in that, said first judging unit comprises:
Last one moving direction record subelement constantly is used to write down the moving direction of the end of said manipulater of a moment;
Current time moving direction record subelement is used to obtain the moving direction of the end of the said manipulater of current time;
The moving direction judgment sub-unit is used to judge that the moving direction of end of the said manipulater of current time is whether opposite with last one constantly moving direction.
7. according to claim 5 or 6 described systems, it is characterized in that said system also comprises:
Reverse operation device mobile unit is used for after said moving direction changes, and on depth direction, moves said manipulater in opposite direction;
Second judging unit is used to judge whether said moving direction secondary takes place change, and obtains second judged result;
The second Depth Information Acquistion unit is used for when said second judged result representes that said moving direction changes, obtaining the second depth direction positional information of the end of said manipulater;
The Depth Information Acquistion unit is used for according to said first depth direction positional information and the said second depth direction positional information, and calculating mean value obtains the depth information of the moving target position of said nano material.
8. according to claim 5 or 6 described systems, it is characterized in that said image information acquisition unit comprises:
The image information acquisition subelement is used for obtaining through said electron microscope the image information of regions;
The Image Information Processing subelement is used for said image information is carried out Gauss's smothing filtering, adaptive threshold, corrosion and divergence process;
The terminal recognin of manipulater unit is used to obtain the graph outline of the said image information after the processing, with the summit of the said graph outline end as said manipulater.
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| CN102835389A (en) * | 2012-09-11 | 2012-12-26 | 苏州大学 | Vitrification automatic operation system and operation method |
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| CN102592289B (en) | 2014-04-30 |
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