CN102581752A - Electric main shaft and scribing machine of ceramic ball - Google Patents
Electric main shaft and scribing machine of ceramic ball Download PDFInfo
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- CN102581752A CN102581752A CN2011100021555A CN201110002155A CN102581752A CN 102581752 A CN102581752 A CN 102581752A CN 2011100021555 A CN2011100021555 A CN 2011100021555A CN 201110002155 A CN201110002155 A CN 201110002155A CN 102581752 A CN102581752 A CN 102581752A
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Abstract
The invention provides an electric main shaft and a scribing machine of a ceramic ball, which belong to the manufacturing field of integrated circuit package equipment, wherein the electric main shaft of the ceramic ball comprises a rotary shaft component, a knife rest component fixed at the front end of the rotary shaft component and used for clamping a cutting blade, a front bearing component fixed at the front end of the rotary shaft component, a stator fixed at the middle part of the rotary shaft component, a rear bearing component fixed at the rear part of the rotary shaft component, and a carbon brush component fixed on a rear end cover of the rear bearing component and contacted with the rotary shaft component. With the adoption of the technical scheme provided by the invention, the rotary shaft is prevented from locking due to poor rigidity of the main shaft and can be ensured to keep precision under long-time work.
Description
Technical field
The present invention relates to the integrated circuit sealed in unit and make the field, be meant a kind of Ceramic Balls electricity main shaft and scribing machine especially.
Background technology
Scribing machine is the precise cutting equipment that hard brittle material cutting-ups such as glass, quartz, pottery is become single electronic devices and components.The working mechanism of scribing machine is high-rate grinding, and electric main shaft is the execution unit of high-rate grinding.The electricity main shaft is with directly pack into the inside of electric main shaft of stator, the rotor of motor, is also referred to as direct driving main shaft (Direct Drive Spindle) sometimes, is the built-in type electric machine main shaft.
At present; The electric main shaft that uses on the scribing machine is a static air pressure electricity main shaft; Static air pressure electricity main axis rotation precision is high but poor rigidity can't satisfy the cutting of thick crisp and hard material (thickness is greater than 2 millimeters), particularly can't satisfy the needs of opening the V-type groove on the crisp and hard material surface.Inventor of the present invention finds; The dynamo-electric main shaft of the scribing of prior art because rigidity is not enough; When the thick crisp and hard material of cutting, often produce the rotating shaft unstability, make directly to contact between rotating shaft and the air bearing to produce dry friction, cause the precision of rotating shaft to be lost rapidly; Do not make electric main shaft out of service like system, then will influence the precision of electric main shaft work even burn out the bearing and the motor of electric main shaft.
To occurring scribing machine in the correlation technique when cutting thick hard brittle material, owing to the poor rigidity of high-speed air static pressure electricity main shaft, cause the low precision of static air pressure electricity main shaft work, even the problem that is worn even scraps, effective solution is not proposed at present as yet.
Summary of the invention
The technical problem that the present invention will solve provides a kind of Ceramic Balls electricity main shaft and scribing machine, can make the main shaft can be because of poor rigidity does not rotate a locking, guarantees that rotating shaft works long hours also can keep precision under the situation.
For solving the problems of the technologies described above, embodiments of the invention provide technical scheme following:
On the one hand, a kind of Ceramic Balls electricity main shaft is provided, comprises:
One rotating shaft assembly;
Be fixed on said rotating shaft assembly front end, be used for the cutter holder assembly of clamping cutting blade;
Be fixed on the anterior fore bearing assembly of said rotating shaft assembly;
Be fixed on the stator at said rotating shaft assembly middle part;
Be fixed on the rear bearing assembly at said rotating shaft assembly rear portion; And
Be fixed on the said rear bearing assembly rear end cap, with said rotating shaft assembly after the carbon brush component of end in contact;
Wherein, said fore bearing assembly comprises two Ceramic Balls fore bearings, and said rear bearing assembly comprises two Ceramic Balls rear bearings.
Wherein, said rotating shaft assembly comprises: a main shaft, the rotor that is connected with said main shaft interference fit and be fixed on the spindle screw on the said main shaft through screw thread;
Said cutter holder assembly comprises: a front rest with a back tool rest of said front rest matched in clearance, is used to lock the knife rest locknut of said front rest and said back tool rest;
Said fore bearing assembly comprises: be fixed on one on the said main shaft through screw thread and get rid of dish; One shell body; Through cover and drive end bearing bracket in the drive end bearing bracket that screw is fixed on the said shell body, interference fit fits together; Two Ceramic Balls fore bearings are arranged on the fore bearing adjustment spacer ring between the said two Ceramic Balls fore bearings, and interference fit is fixed on the coolant jacket in the said shell body;
Said rear bearing assembly comprises: be connected the rear bearing top cover on the main shaft through matched in clearance; Two Ceramic Balls rear bearings; Rear bearing is adjusted spacer ring, is fixed on the rear bearing locknut on the said main shaft through being threaded, and is fixed on the rear end cap on the said shell body through screw;
Said carbon brush component comprises: be fixed on the carbon brush holder on the said rear end cap through screw; Be fixed on the carbon brush end cap on the said carbon brush holder through screw; Be fixed on the carbon brush fixed block on the said carbon skeleton end cap through screw; Be fixed on the carbon brush screw on the said carbon brush fixed block through screw thread, the carbon-point that is connected with said carbon brush screw through brush holder spring.
Wherein, said Ceramic Balls electricity main shaft comprises that also one is fixed on the main shaft locknut on the said main shaft, is used for said cutter holder assembly is locked at the said front-end of spindle conical surface.
Wherein, said getting rid of in dish and the said drive end bearing bracket is provided with a labyrinth seal structure between the cover.
Wherein, be provided with a motor cooling water channel between said shell body and the said coolant jacket.
The embodiment of the invention also provides a kind of scribing machine, comprises electric main shaft, and said electric main shaft comprises:
One rotating shaft assembly;
Be fixed on said rotating shaft assembly front end, be used for the cutter holder assembly of clamping cutting blade;
Be fixed on the anterior fore bearing assembly of said rotating shaft assembly;
Be fixed on the stator at said rotating shaft assembly middle part;
Be fixed on the rear bearing assembly at said rotating shaft assembly rear portion; And
Be fixed on the said rear bearing assembly rear end cap, with said rotating shaft assembly after the carbon brush component of end in contact;
Wherein, said fore bearing assembly comprises two Ceramic Balls fore bearings, and said rear bearing assembly comprises two Ceramic Balls rear bearings.
Wherein, said rotating shaft assembly comprises: a main shaft, the rotor that is connected with said main shaft interference fit and be fixed on the spindle screw on the said main shaft through screw thread;
Said cutter holder assembly comprises: a front rest with a back tool rest of said front rest matched in clearance, is used to lock the knife rest locknut of said front rest and said back tool rest;
Said fore bearing assembly comprises: be fixed on one on the said main shaft through screw thread and get rid of dish; One shell body; Through cover and drive end bearing bracket in the drive end bearing bracket that screw is fixed on the said shell body, interference fit fits together; Two Ceramic Balls fore bearings are arranged on the fore bearing adjustment spacer ring between the said two Ceramic Balls fore bearings, and interference fit is fixed on the coolant jacket in the said shell body;
Said rear bearing assembly comprises: be connected the rear bearing top cover on the main shaft through matched in clearance; Two Ceramic Balls rear bearings; Rear bearing is adjusted spacer ring, is fixed on the rear bearing locknut on the said main shaft through being threaded, and is fixed on the rear end cap on the said shell body through screw;
Said carbon brush component comprises: be fixed on the carbon brush holder on the said rear end cap through screw; Be fixed on the carbon brush end cap on the said carbon brush holder through screw; Be fixed on the carbon brush fixed block on the said carbon skeleton end cap through screw; Be fixed on the carbon brush screw on the said carbon brush fixed block through screw thread, the carbon-point that is connected with said carbon brush screw through brush holder spring.
Wherein, said electric main shaft comprises that also one is fixed on the main shaft locknut on the said main shaft, is used for said cutter holder assembly is locked at the said front-end of spindle conical surface.
Wherein, said getting rid of in dish and the said drive end bearing bracket is provided with a labyrinth seal structure between the cover.
Wherein, be provided with a motor cooling water channel between said shell body and the said coolant jacket.
Embodiments of the invention have following beneficial effect:
In the such scheme; The fore bearing and the rear bearing of Ceramic Balls electricity main shaft are ceramic ball bearing; Guarantee that between shell body and the main shaft be electric insulation; And can improve the rigidity of electric main shaft, avoid occurring rotating the situation of a locking, make rotating shaft under situation about working long hours, also can keep precision because of the main shaft poor rigidity.
Description of drawings
Fig. 1 is the structural representation of embodiments of the invention Ceramic Balls electricity main shaft.
The specific embodiment
For technical problem, technical scheme and advantage that embodiments of the invention will be solved is clearer, will combine accompanying drawing and specific embodiment to be described in detail below.
Embodiments of the invention in the prior art when the thick hard brittle material of cutting; Because the poor rigidity of high-speed air static pressure electricity main shaft; The low precision that causes the work of static air pressure electricity main shaft, even the problem that is worn even scraps provide a kind of Ceramic Balls electricity main shaft and scribing machine; Can make the main shaft can be, guarantee that rotating shaft works long hours and also can keep precision under the situation because of poor rigidity does not rotate a locking.
Fig. 1 is the structural representation of embodiments of the invention Ceramic Balls electricity main shaft, and is as shown in Figure 1, and the Ceramic Balls electricity main shaft of present embodiment comprises successively:
One rotating shaft assembly;
Be fixed on the rotating shaft assembly front end, be used for the cutter holder assembly of clamping cutting blade;
Be fixed on the anterior fore bearing assembly of rotating shaft assembly;
Be fixed on the stator at rotating shaft assembly middle part;
Be fixed on the rear bearing assembly at rotating shaft assembly rear portion; And
Be fixed on the rear bearing assembly rear end cap, with rotating shaft assembly after the carbon brush component of end in contact.
Wherein, rotating shaft assembly comprises: a main shaft 26, the rotor 13 that is connected with main shaft 26 interference fit and be fixed on the spindle screw 25 on the main shaft 26 through screw thread;
Cutter holder assembly comprises: a front rest 3 with a back tool rest 4 of front rest 3 matched in clearance, is used to lock the knife rest locknut 2 of front rest 3 and back tool rest 4;
The fore bearing assembly comprises: be fixed on one on the main shaft 26 through screw thread and get rid of dish 5; One shell body 10; Through cover 6 and drive end bearing bracket 7 in the drive end bearing bracket that screw is fixed on the shell body 10, interference fit fits together; Two Ceramic Balls fore bearings 9 are arranged on the fore bearing adjustment spacer ring 8 between the two Ceramic Balls fore bearings 9, and interference fit is fixed on the coolant jacket 11 in the shell body 10;
The rear bearing assembly comprises successively: be connected the rear bearing top cover 14 on the main shaft 26 through matched in clearance; Two Ceramic Balls rear bearings 15; Rear bearing adjustment spacer ring 16 is fixed on the rear bearing locknut 17 on the main shaft 26 through being threaded, be fixed on the rear end cap 18 on the shell body 10 through screw;
Carbon brush component comprises: be fixed on the carbon brush holder 19 on the rear end cap 18 through screw; Be fixed on the carbon brush end cap 22 on the carbon brush holder 19 through screw; Be fixed on the carbon brush fixed block 21 on the carbon skeleton end cap 22 through screw; Be fixed on the carbon brush screw 20 on the carbon brush fixed block 21 through screw thread, the carbon-point 24 that is connected with carbon brush screw 20 through brush holder spring 23.
Further, Ceramic Balls electricity main shaft comprises that also one is fixed on the main shaft locknut 1 on the main shaft 26, is used for cutter holder assembly is locked at the main shaft 26 front end conical surfaces.
Further, get rid of in dish 5 and the drive end bearing bracket and be provided with a labyrinth seal structure between the cover 6, can guarantee when scribing machine is worked, it is inner that cutting cooling water smoke and booty are difficult to get into electric main shaft.
Further, be provided with a motor cooling water channel between shell body 10 and the coolant jacket 11, the heat that motor produces in the main shaft course of work is taken away through cooling water.
Ceramic Balls electricity main shaft of the present invention; Fore bearing and rear bearing are ceramic ball bearing; Guarantee that between shell body and the main shaft be electric insulation; And can improve the rigidity of electric main shaft, avoid occurring rotating the situation of a locking, make rotating shaft under situation about working long hours, also can keep precision because of the main shaft poor rigidity.
The embodiment of the invention also provides a kind of scribing machine, comprises electric main shaft as shown in Figure 1, and electric main shaft comprises successively and to connect:
One rotating shaft assembly;
Be fixed on the rotating shaft assembly front end, be used for the cutter holder assembly of clamping cutting blade;
Be fixed on the anterior fore bearing assembly of rotating shaft assembly;
Be fixed on the stator at rotating shaft assembly middle part;
Be fixed on the rear bearing assembly at rotating shaft assembly rear portion; And
Be fixed on the rear bearing assembly rear end cap, with rotating shaft assembly after the carbon brush component of end in contact.
Wherein, rotating shaft assembly comprises: a main shaft 26, the rotor 13 that is connected with main shaft 26 interference fit and be fixed on the spindle screw 25 on the main shaft 26 through screw thread;
Cutter holder assembly comprises: a front rest 3 with a back tool rest 4 of front rest 3 matched in clearance, is used to lock the knife rest locknut 2 of front rest 3 and back tool rest 4;
The fore bearing assembly comprises: be fixed on one on the main shaft 26 through screw thread and get rid of dish 5; One shell body 10; Through cover 6 and drive end bearing bracket 7 in the drive end bearing bracket that screw is fixed on the shell body 10, interference fit fits together; Two Ceramic Balls fore bearings 9 are arranged on the fore bearing adjustment spacer ring 8 between the two Ceramic Balls fore bearings 9, and interference fit is fixed on the coolant jacket 11 in the shell body 10;
The rear bearing assembly comprises successively: be connected the rear bearing top cover 14 on the main shaft 26 through matched in clearance; Two Ceramic Balls rear bearings 15; Rear bearing adjustment spacer ring 16 is fixed on the rear bearing locknut 17 on the main shaft 26 through being threaded, be fixed on the rear end cap 18 on the shell body 10 through screw;
Carbon brush component comprises: be fixed on the carbon brush holder 19 on the rear end cap 18 through screw; Be fixed on the carbon brush end cap 22 on the carbon brush holder 19 through screw; Be fixed on the carbon brush fixed block 21 on the carbon skeleton end cap 22 through screw; Be fixed on the carbon brush screw 20 on the carbon brush fixed block 21 through screw thread, the carbon-point 24 that is connected with carbon brush screw 20 through brush holder spring 23.
Further, electric main shaft comprises that also one is fixed on the main shaft locknut 1 on the main shaft 26, is used for cutter holder assembly is locked at the main shaft 26 front end conical surfaces.
Further, get rid of in dish 5 and the drive end bearing bracket and be provided with a labyrinth seal structure between the cover 6, can guarantee when scribing machine is worked, it is inner that cutting cooling water smoke and booty are difficult to get into electric main shaft.
Further, be provided with a motor cooling water channel between shell body 10 and the coolant jacket 11, the heat that motor produces in the main shaft course of work is taken away through cooling water.
In the electric main shaft of scribing machine of the present invention; Fore bearing and rear bearing are ceramic ball bearing; Guarantee that between shell body and the main shaft be electric insulation; And can improve the rigidity of electric main shaft, avoid occurring rotating the situation of a locking, make rotating shaft under situation about working long hours, also can keep precision because of the main shaft poor rigidity.
The above is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from principle according to the invention; Can also make some improvement and retouching, these improvement and retouching also should be regarded as protection scope of the present invention.
Claims (10)
1. a Ceramic Balls electricity main shaft is characterized in that, comprising:
One rotating shaft assembly;
Be fixed on said rotating shaft assembly front end, be used for the cutter holder assembly of clamping cutting blade;
Be fixed on the anterior fore bearing assembly of said rotating shaft assembly;
Be fixed on the stator at said rotating shaft assembly middle part;
Be fixed on the rear bearing assembly at said rotating shaft assembly rear portion; And
Be fixed on the said rear bearing assembly rear end cap, with said rotating shaft assembly after the carbon brush component of end in contact;
Wherein, said fore bearing assembly comprises two Ceramic Balls fore bearings, and said rear bearing assembly comprises two Ceramic Balls rear bearings.
2. Ceramic Balls electricity main shaft according to claim 1 is characterized in that,
Said rotating shaft assembly comprises: a main shaft, the rotor that is connected with said main shaft interference fit and be fixed on the spindle screw on the said main shaft through screw thread;
Said cutter holder assembly comprises: a front rest with a back tool rest of said front rest matched in clearance, is used to lock the knife rest locknut of said front rest and said back tool rest;
Said fore bearing assembly comprises: be fixed on one on the said main shaft through screw thread and get rid of dish; One shell body; Through cover and drive end bearing bracket in the drive end bearing bracket that screw is fixed on the said shell body, interference fit fits together; Two Ceramic Balls fore bearings are arranged on the fore bearing adjustment spacer ring between the said two Ceramic Balls fore bearings, and interference fit is fixed on the coolant jacket in the said shell body;
Said rear bearing assembly comprises: be connected the rear bearing top cover on the main shaft through matched in clearance; Two Ceramic Balls rear bearings; Rear bearing is adjusted spacer ring, is fixed on the rear bearing locknut on the said main shaft through being threaded, and is fixed on the rear end cap on the said shell body through screw;
Said carbon brush component comprises: be fixed on the carbon brush holder on the said rear end cap through screw; Be fixed on the carbon brush end cap on the said carbon brush holder through screw; Be fixed on the carbon brush fixed block on the said carbon skeleton end cap through screw; Be fixed on the carbon brush screw on the said carbon brush fixed block through screw thread, the carbon-point that is connected with said carbon brush screw through brush holder spring.
3. Ceramic Balls electricity main shaft according to claim 2 is characterized in that, comprises that also one is fixed on the main shaft locknut on the said main shaft, is used for said cutter holder assembly is locked at the said front-end of spindle conical surface.
4. Ceramic Balls electricity main shaft according to claim 3 is characterized in that said getting rid of in dish and the said drive end bearing bracket is provided with a labyrinth seal structure between the cover.
5. Ceramic Balls electricity main shaft according to claim 4 is characterized in that, is provided with a motor cooling water channel between said shell body and the said coolant jacket.
6. a scribing machine comprises electric main shaft, it is characterized in that, said electric main shaft comprises:
One rotating shaft assembly;
Be fixed on said rotating shaft assembly front end, be used for the cutter holder assembly of clamping cutting blade;
Be fixed on the anterior fore bearing assembly of said rotating shaft assembly;
Be fixed on the stator at said rotating shaft assembly middle part;
Be fixed on the rear bearing assembly at said rotating shaft assembly rear portion; And
Be fixed on the said rear bearing assembly rear end cap, with said rotating shaft assembly after the carbon brush component of end in contact;
Wherein, said fore bearing assembly comprises two Ceramic Balls fore bearings, and said rear bearing assembly comprises two Ceramic Balls rear bearings.
7. scribing machine according to claim 6 is characterized in that,
Said rotating shaft assembly comprises: a main shaft, the rotor that is connected with said main shaft interference fit and be fixed on the spindle screw on the said main shaft through screw thread;
Said cutter holder assembly comprises: a front rest with a back tool rest of said front rest matched in clearance, is used to lock the knife rest locknut of said front rest and said back tool rest;
Said fore bearing assembly comprises: be fixed on one on the said main shaft through screw thread and get rid of dish; One shell body; Through cover and drive end bearing bracket in the drive end bearing bracket that screw is fixed on the said shell body, interference fit fits together; Two Ceramic Balls fore bearings are arranged on the fore bearing adjustment spacer ring between the said two Ceramic Balls fore bearings, and interference fit is fixed on the coolant jacket in the said shell body;
Said rear bearing assembly comprises: be connected the rear bearing top cover on the main shaft through matched in clearance; Two Ceramic Balls rear bearings; Rear bearing is adjusted spacer ring, is fixed on the rear bearing locknut on the said main shaft through being threaded, and is fixed on the rear end cap on the said shell body through screw;
Said carbon brush component comprises: be fixed on the carbon brush holder on the said rear end cap through screw; Be fixed on the carbon brush end cap on the said carbon brush holder through screw; Be fixed on the carbon brush fixed block on the said carbon skeleton end cap through screw; Be fixed on the carbon brush screw on the said carbon brush fixed block through screw thread, the carbon-point that is connected with said carbon brush screw through brush holder spring.
8. scribing machine according to claim 7 is characterized in that, said electric main shaft comprises that also one is fixed on the main shaft locknut on the said main shaft, is used for said cutter holder assembly is locked at the said front-end of spindle conical surface.
9. scribing machine according to claim 8 is characterized in that, said getting rid of in dish and the said drive end bearing bracket is provided with a labyrinth seal structure between the cover.
10. scribing machine according to claim 9 is characterized in that, is provided with a motor cooling water channel between said shell body and the said coolant jacket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100021555A CN102581752A (en) | 2011-01-06 | 2011-01-06 | Electric main shaft and scribing machine of ceramic ball |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100021555A CN102581752A (en) | 2011-01-06 | 2011-01-06 | Electric main shaft and scribing machine of ceramic ball |
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| CN102581752A true CN102581752A (en) | 2012-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011100021555A Pending CN102581752A (en) | 2011-01-06 | 2011-01-06 | Electric main shaft and scribing machine of ceramic ball |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103042466A (en) * | 2012-12-29 | 2013-04-17 | 广州市昊志机电股份有限公司 | Deep-hole internal grinding spindle |
| CN104638807A (en) * | 2015-01-14 | 2015-05-20 | 海安联科汽车零部件有限公司 | Carbon frame provided with bearing fixing mechanism |
| CN108908758A (en) * | 2018-06-29 | 2018-11-30 | 安龙县玉素石料厂 | A kind of efficient stone mining cutting machine |
| CN110170910A (en) * | 2019-06-25 | 2019-08-27 | 张劲松 | A kind of scribing machine air-floating main shaft structure of the double positioning of cutterhead |
| CN110216579A (en) * | 2019-06-25 | 2019-09-10 | 张劲松 | A kind of scribing machine air-floating main shaft structure of the cooling cleaning of the interior water outlet of axis |
| CN114352704A (en) * | 2022-01-14 | 2022-04-15 | 深圳特斯特半导体设备有限公司 | Blade main shaft structure of dicing saw |
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| JP2004025667A (en) * | 2002-06-26 | 2004-01-29 | Disco Abrasive Syst Ltd | Spindle unit |
| CN1887520A (en) * | 2006-07-14 | 2007-01-03 | 沈阳仪表科学研究院 | Automatic aligning device for scribing machine platform datum |
| CN1947904A (en) * | 2006-11-02 | 2007-04-18 | 沈阳建筑大学 | Hot-isostatic pressure silicon nitride all-ceramic electric main shaft and its mfg. method |
| CN201423570Y (en) * | 2009-04-10 | 2010-03-17 | 陈平 | Thermostatic variable-frequency electrically-driven main shaft grinder unit |
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| JP2001121531A (en) * | 1999-10-29 | 2001-05-08 | Mitsubishi Materials Corp | Cutting machine |
| JP2004025667A (en) * | 2002-06-26 | 2004-01-29 | Disco Abrasive Syst Ltd | Spindle unit |
| CN2589139Y (en) * | 2002-12-26 | 2003-12-03 | 于云霞 | Fine electric spark machine |
| CN1887520A (en) * | 2006-07-14 | 2007-01-03 | 沈阳仪表科学研究院 | Automatic aligning device for scribing machine platform datum |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103042466A (en) * | 2012-12-29 | 2013-04-17 | 广州市昊志机电股份有限公司 | Deep-hole internal grinding spindle |
| CN104638807A (en) * | 2015-01-14 | 2015-05-20 | 海安联科汽车零部件有限公司 | Carbon frame provided with bearing fixing mechanism |
| CN108908758A (en) * | 2018-06-29 | 2018-11-30 | 安龙县玉素石料厂 | A kind of efficient stone mining cutting machine |
| CN110170910A (en) * | 2019-06-25 | 2019-08-27 | 张劲松 | A kind of scribing machine air-floating main shaft structure of the double positioning of cutterhead |
| CN110216579A (en) * | 2019-06-25 | 2019-09-10 | 张劲松 | A kind of scribing machine air-floating main shaft structure of the cooling cleaning of the interior water outlet of axis |
| CN110216579B (en) * | 2019-06-25 | 2024-05-17 | 张劲松 | Air-float main shaft structure of scribing machine for cooling and cleaning water in shaft |
| CN114352704A (en) * | 2022-01-14 | 2022-04-15 | 深圳特斯特半导体设备有限公司 | Blade main shaft structure of dicing saw |
| CN114352704B (en) * | 2022-01-14 | 2024-03-15 | 深圳特斯特半导体设备有限公司 | Blade spindle structure of dicing saw |
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Application publication date: 20120718 |