CN102560344A - 硬质薄膜、具备硬质薄膜的产品及该产品的制作方法 - Google Patents

硬质薄膜、具备硬质薄膜的产品及该产品的制作方法 Download PDF

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CN102560344A
CN102560344A CN2010106044236A CN201010604423A CN102560344A CN 102560344 A CN102560344 A CN 102560344A CN 2010106044236 A CN2010106044236 A CN 2010106044236A CN 201010604423 A CN201010604423 A CN 201010604423A CN 102560344 A CN102560344 A CN 102560344A
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aluminium lamination
nitrogen
thin film
multilayer
product
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张新倍
陈文荣
蒋焕梧
陈正士
彭立全
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Hongfujin Precision Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
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Priority to US13/162,708 priority patent/US8586175B2/en
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Abstract

本发明公开一种硬质薄膜、具备硬质薄膜的产品、及产品的制作方法，一种硬质薄膜，包括多层复合膜层及至少一层镍层，每一所述复合膜层包括多层氮钛铝层与多层氮铬铝层，该多层氮钛铝层与多层氮铬铝层交替排列，所述镍层形成于二相邻复合膜层之间。产品包括一基体及形成在基体上的所述硬质薄膜。产品的制作方法包括将基体置入镀膜机中交替沉积氮钛铝层与氮铬铝层多个周期后，沉积一镍层。具有所述硬质薄膜的产品，产品的硬度与耐磨性均极大的提高，且制备方法简单。

Description

硬质薄膜、具备硬质薄膜的产品及该产品的制作方法
技术领域
本发明是关于一种硬质薄膜、具备该硬质薄膜的产品、及该产品的制作方法。
背景技术
硬质薄膜广泛地应用于硬质合金、高速钢、以及陶瓷等材料的表面以制作出高硬度及高耐磨性的产品。现有的硬质薄膜主要为氮钛铝(TiAlN)薄膜。然，在对产品硬度有更高要求时，如刀具，单纯的氮钛铝薄膜的硬度和耐磨性能还略显不足。
目前，高切削速度、高进给速度、高可靠性、高精度和长寿命是刀具的发展方向，而不用或少用冷却液的干式切削技术，由于效率高，对环境污染小，正逐步成为切削技术的主流。然这些技术对刀具涂层的性能提出了更高的性能要求，尤其是长时间的干式切削将导致刀具与被切削件接触处温度迅速升至600-800摄氏度以上，这些条件不仅要求涂层具有优异的高温抗氧化性能，还要求涂层具有更高硬度、耐摩擦等性能，单纯氮钛铝薄膜的硬度和耐磨性能以难以满足要求。
发明内容
鉴于上述内容，有必要提供一种高硬度、高耐磨损性的硬质薄膜。
另外，还有必要提供一种具备上述硬质薄膜的产品。
此外，有必要提供一种上述产品的制作方法。
一种硬质薄膜，包括多层复合膜层及至少一镍(Ni)层，每一所述复合膜层包括多层氮钛铝层与多层氮铬铝(CrAlN)层，该多层氮钛铝层与多层氮铬铝层交替排列，所述镍层形成于二相邻复合膜层之间。
一种产品，包括基体及形成于基体上的硬质薄膜，所述硬质薄膜包括多层复合膜层及至少一层镍层，每一所述复合膜层包括多层氮钛铝层与多层氮铬铝层，该多层氮钛铝层与多层氮铬铝层交替排列，所述镍层形成于二相邻复合膜层之间。
一种产品的制作方法，包括以下步骤：
提供一基体；
将基体置入镀膜机中交替沉积氮钛铝层与氮铬铝层以形成一复合膜层后，于该复合膜层表面沉积一镍层；
于该镍层表面沉积另一复合层，
照上述过程循环沉积，制得所述产品，使得产品最外层为一复合膜层。
本硬质薄膜由氮钛铝层、氮铬铝层及镍层沉积形成，该具备高硬度及优良的耐磨性能氮钛铝层与氮铬铝层交替沉积，通过交替沉积且结合纳米多层薄膜的硬化效应可使得硬质薄膜整体具有较高的硬度，硬度可高达40Gpa，可耐高温至900℃。通过间隔地加入镍层可缓解硬质薄膜的内应力，延长硬质薄膜的使用寿命。
附图说明
图1是本发明较佳实施例具备硬质薄膜的产品的剖视示意图；
图2是图1所示产品的制作方法流程图；
图3是图1产品的制作过程中所用镀膜机结构示意图。
主要元件符号说明
产品        10
基体        11
硬质薄膜    12
复合膜层    120
氮钛铝层    121
氮铬铝层    122
镍层        130
镀膜机        100
镀膜室        20
真空泵        30
轨迹          21
第一靶材      22
第二靶材      23
第三靶材      24
气源通道      25
具体实施方式
请参阅图1，本发明一较佳实施例的产品10，包括基体11、及形成在基体11上的硬质薄膜12。所述产品10可为刀具，该基体11的材质可为硬质合金、高速钢、陶瓷、以及金属陶瓷等。
所述硬质薄膜12通过PVD(物理气相沉积)镀膜形成在该基体11的表面，该硬质薄膜12包括多层复合膜层120及至少一层镍(Ni)层130。每一复合膜层120包括多层氮钛铝(TiAlN)层121与多层氮铬铝(CrAlN)层122，该多层氮钛铝层121与多层氮铬铝层122交替排列。所述多层氮钛铝层121与多层氮铬铝层122的层数分别优选为5-8层。每一所述镍层130层叠于两复合膜层120之间，用以缓解硬质薄膜12的内应力。所述交替排列的多层氮钛铝层121与多层氮铬铝层122的总厚度在8-20纳米之间。每一镍层130的厚度为20-40纳米。
所述复合膜层120可为多层，二相邻的复合膜层120之间形成有一层镍层130。所述硬质薄膜12的总厚度较佳为1.5-3微米。其中，与基体11接触的一层可为氮钛铝层121或氮铬铝层122，该氮钛铝层121或氮铬铝层122与基体11的热膨胀系数接近，在温度变化时与基体11结合处不会产生很大的内应力，便于与基体11结合稳定。由于镍层130材质较软，外露造成产品10硬度不佳，因此，外露于产品10表面的一层为复合膜层120的氮钛铝层121或氮铬铝层122。
请结合参阅图2及图3，该产品10的制作方法包括以下步骤：
S1：提供一基体11，将该基体11表面进行超声波清洗，如采用无水乙醇或丙酮对基体11进行超声波清洗，以除去基体11表面的油污。
S2：将基体11烘干后置入镀膜机100中进行PVD镀膜形成所述硬质薄膜12，该硬质薄膜12通过交替沉积复合膜层120与镍层130形成。所述镀膜机100包括一镀膜室20及连接于镀膜室20的一真空泵30，真空泵30用以对镀膜室20抽真空。该镀膜室20内设有转架(未图示)及挡板(未图示)、转架带动基体11沿圆形轨迹21运行。挡板用以在清洗靶材时隔离溅射的粒子溅射至基体11，其通过电动控制自动打开或关闭。轨迹21两侧分别设置有二相对的第一靶材22、二相对的第二靶材23及二相对的第三靶材24，其中二第一靶材22、二第二靶材23关于轨迹21的中心对称设置。每一第一靶材22、每一第二靶材23、及每一第三靶材24的两端均设有气源通道25。当基体11穿过二第一靶材22之间，二第二靶材23之间，及二第三靶材24之间时，将分别镀上第一靶材22、第二靶材23、及第三靶材24表面溅射出的粒子。
镀膜所述硬质薄膜12的过程如下：(1)将第一靶材22、第二靶材23及第三靶材24分别置于镀膜机的溅射源上，第一靶材22为TiAl靶材、第二靶材23为CrAl靶材、第三靶材24为镍靶材。首先清洗各靶材表面，清洗过程如下：抽真空至3.0×10-3Pa，通入流量为500cm3/s的高纯氩气，调节基体11的偏压为-250～-350V，开启第一靶材22、第二靶材23及第三靶材24，各靶材电流均为30～50A之间，氩气轰击第一靶材22、第二靶材23及第三靶材24的表面，如此将第一靶材22、第二靶材23及第三靶材24表面清洗干净。在清洗时转架不转动，且开启挡板将溅射的粒子与基体11隔离。(2)接着在基体11表面交替沉积氮钛铝层121与氮铬铝层122形成一复合膜层120。关闭第三靶材24，调节氩气流量为300cm3/s，通入流量为80～150cm3/s的氮气；调节第一靶材22、第二靶材23电流为30～45A，调节基体11的偏压至-250～-450V，关闭挡板，开启转架，调节转架速度为0.5-3r/min(转/分钟)，如此交替沉积氮钛铝层121与氮铬铝层122，交替沉积5-8个周期，沉积时间为250～300s，从而形成一复合膜层120。然后关闭第一靶材22与第二靶材23的电流，并停止通入氮气。开启第三靶材24，调节第三靶材24电流为20～30A，开始沉积镍层130，沉积时间为60～120s。如此，将形成一层镍层130在复合膜层120表面。
然后关闭第三靶材24，开启第一靶材22与第二靶材23电源，通入氮气。重复上述过程形成复合膜层120，然后在复合膜层120上形成镍层130，以此循环，直至硬质薄膜12的总厚度达1.5-3微米之间，且硬质薄膜12表面层为复合膜层120，如此获得产品10。镀膜结束后，关闭靶材电流、偏压、气流等，待镀膜室内温降至室温后取出产品10。
本硬质薄膜12由氮钛铝层、氮铬铝层及镍层沉积形成，氮钛铝层与氮铬铝层具备高硬度及优良的耐磨性能，交替沉积5-8个周期后结合纳米多层薄膜的硬化效应可使得硬质薄膜整体具有较高的硬度，硬度可高达40Gpa，抗高温氧化性可达900℃；通过间隔地加入镍层可缓解硬质薄膜12的内应力，延长硬质薄膜12的使用寿命。

Claims (10)

1.一种硬质薄膜，其特征在于：其包括多层复合膜层及至少一层镍层，每一所述复合膜层包括多层氮钛铝层与多层氮铬铝层，该多层氮钛铝层与多层氮铬铝层交替排列，所述镍层形成于二相邻复合膜层之间。
2.如权利要求1所述的硬质薄膜，其特征在于：所述多层氮钛铝层与多层氮铬铝层交替排列的层数分别为5-8层，每一氮钛铝层与每一氮铬铝层的厚度在8-20纳米之间。
3.如权利要求1所述的硬质薄膜，其特征在于：所述硬质薄膜的总厚度为1.5-3微米，所述硬质薄膜的外表为一复合膜层。
4.一种产品，包括基体及形成于基体上的硬质薄膜，其特征在于：所述硬质薄膜包括多层复合膜层及至少一层镍层，每一所述复合膜层包括多层氮钛铝层与多层氮铬铝层，该多层氮钛铝层与多层氮铬铝层交替排列，所述镍层形成于二相邻复合膜层之间。
5.如权利要求4所述的产品，其特征在于：所述基体选择为硬质合金、高速钢、陶瓷、以及金属陶瓷中的一种。
6.如权利要求3所述的产品，其特征在于：所述多层氮钛铝层与多层氮铬铝层交替排列的层数分别为5-8层，每一氮钛铝层与每一氮铬铝层的厚度在8-20纳米之间。
7.一种产品的制作方法，包括以下步骤：
提供一基体；
将基体置入镀膜机中交替沉积氮钛铝层与氮铬铝层以形成一复合膜层后，于该复合膜层表面沉积一镍层；
于该镍层表面沉积另一复合层，
照上述过程循环沉积，制得所述产品，使得产品最外层为一复合膜层。
8.如权利要求7所述的产品的制作方法，其特征在于：交替沉积前先清洗靶材，清洗过程中，将镀膜室内抽真空至3.0×10-3Pa，通入流量为500cm3/s的高纯氩气，开启TiAl靶材、CrAl靶材及镍靶材，各靶材的电流为30-50A。
9.如权利要求8所述的产品的制作方法，其特征在于：交替沉积每一氮钛铝层与每一氮铬铝层时，调节镀膜室内氩气流量为300cm3/s，通入流量为80～150cm3/s的氮气，调节TiAl靶材与CrAl靶材电流为30～45A，调节偏压至-250～-450V，调节转架速度为0.5-3r/min(转/分钟)。
10.如权利要求7所述的产品的制作方法，其特征在于：沉积每一镍层过程中，调节镍靶材电流为20～30A，沉积时间为60～120s。
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