CN102554466A - Laser Material Processing Device With Prism - Google Patents
Laser Material Processing Device With Prism Download PDFInfo
- Publication number
- CN102554466A CN102554466A CN2011103781343A CN201110378134A CN102554466A CN 102554466 A CN102554466 A CN 102554466A CN 2011103781343 A CN2011103781343 A CN 2011103781343A CN 201110378134 A CN201110378134 A CN 201110378134A CN 102554466 A CN102554466 A CN 102554466A
- Authority
- CN
- China
- Prior art keywords
- focus
- optical splitter
- laser beam
- mirror section
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to a laser material processing device (1) which comprises the following components: the prism (3) which is rotatably supported for deflecting a laser beam (2), and a focusing unit (4) which is provided at the downstream part in the optical path and is provided with a focusing device (5). The focusing device is used for focusing the laser beam (2) which is deflected to the focusing unit (4) by the prism (3) to a workpiece (11) to be processed. According to the invention, the focusing unit (4) is provided with at least one light splitter (5,6,6'). The light splitter is used for splitting the deflected laser beam (2) to at least two splitted light beams (7,8) for generating at least two focuses (9,10) on the workpiece (11). Furthermore the light splitters (5,6,6') are constructed for generating a variable distance (a) between the focuses (9,10) on the workpiece (11).
Description
Technical field
The present invention relates to a kind of Materialbearbeitung mit Laserlicht device; It has the rotatably mounted polygon prism that is used for the deflection laser bundle and has at the focusing unit of light path in downstream, and this focusing unit has and is used to make the laser beam that is deflected on the focusing unit by polygon prism to focus on the focus device on the workpiece to be processed.
Background technology
For example by US 4,099,830 disclose such device.The device of describing there that is used for the processing plastic runway has around two polygon prisms that axis is rotatably mounted, and wherein, laser beam projects on the workpiece as line-focus through focusing unit.In order to produce line-focus, laser beam is turning on two directions of extending perpendicular to the direction of propagation in a different manner under the situation of using cylindrical lens or is forming images.Be used to make laser beam focusing on the first direction and be used for the collimation of laser on second direction on the other hand on the one hand at the lens that are located at the polygon prism downstream on the light path.For will a plurality of line-focus being used to the application of processing simultaneously, can be provided for the optical element of beam split in the polygon prism front.Through using a plurality of divided beams, can carry out a plurality of process concurrently, thereby improve process velocity.
If will see that in groups though can adjust a plurality of groups of mutual spacings through the change in rotational speed of polygon prism so, the divided beams of said group of inside is in constant gap ratio at this moment through the divided beams that this beam split that is used to improve processing speed forms.Therefore, the flexible selection of all lines spacings can not realize.
Summary of the invention
The objective of the invention is to, a kind of Materialbearbeitung mit Laserlicht device is provided, to different processed and applied, it not only can realize high processing speed, can also realize the flexibility of height.
This purpose is through the Materialbearbeitung mit Laserlicht device solves of the said type of beginning; Wherein, Focusing unit has at least one optical splitter, is used for the laser beam of deflection is divided at least two divided beams on workpiece, to produce at least two focuses, wherein; Optical splitter is configured to be created in the variable spacing of the focus on the workpiece, and has at least one movable optics usually for this reason.
In said apparatus, these divided beams spacing distance each other and therefore the spacing between the focus can coordinate to application-specific, and also can during process, carry out adaptive.Advantageously, here, optical splitter is controllable, make to remove to the pre-adjustment of application-specific, and spacing distance also can be adaptive according to the rotating speed of polygon prism (and so according to spacing distance of the group of these divided beams).Optical splitter can additionally be constructed like this, makes that the radiation intensity of each divided beams or the distribution of power on each divided beams of laser beam are adjustable, describes in more detail as following.
In first form of implementation, self is configured to focus device optical splitter.In this case, the function about " beam split and focusing " needn't be provided with other optical element in focusing unit or between focusing unit and polygon prism.Preferably, in this case, focus device is configured to reflective, and each divided beams to be formed is had at least one corresponding mirror section or corresponding mirror segmental arc.
In another kind of form of implementation, optical splitter is configured on direction of beam propagation, be located at the optical element at the focus device upper reaches.The optical element that in beam path, is located at the upper reaches here can be the part of focusing unit, perhaps alternatively, in beam path, is arranged between polygon prism and the focusing unit.Also in this case, the optical element preferable configuration that is used for beam split becomes reflective.Particularly preferably, in this case, be arranged on deflecting mirror in this device and be constructed such that it can realize beam split.Therefore can cancel additional optics, and the optical element that has been arranged on anyway in the device provides the additional function as optical splitter.
In a kind of form of implementation, optical splitter has at least one movable mirror section.This or these movable mirror sections can be configured to adjust the spacing of focus or the orientation of divided beams relative to each other movably on direction of beam propagation.The relative motion relative to each other of mirror section is preferably through fixing realizing with (at least) movable mirror section.
In a kind of improvement project, that said at least one mirror section is configured to swing and/or movably.Can use known to those skilled in the art driver part for this reason, for example, piezo-activator, linear drive apparatus, rotating driving device or similar device.
Using an optical element that is located at the focus device upper reaches to carry out the branch light time, for example when using a deflecting mirror in the light path that is arranged on collimation, said optical element can be divided into and divided beams corresponding (especially plane) mirror section.(corresponding to the scanning direction) axis that these mirror sections preferably can wind perpendicular to direction of beam propagation swingingly is supported, and wherein, the angle of being surrounded by minute surface or mirror section is measuring about the spacing distance of these divided beams.
Especially, when use was configured to be located at the optical splitter of optical element at the focus device upper reaches, preferably the only mirror section in these mirror sections was configured to swing.This mirror section that can swing is imaged onto its divided beams on the fringe region of focus device of laser beam, and all the other zones (at least when this can realize through angle of oscillation) can be inswept by the divided beams through the mirror section deflection that can swing.Therefore, the adjustment of the largest interval distance of divided beams can be passed through the only motion realization of a mirror section, causes the simplification in structure, startup and the control at optical splitter thus.Here, except the swing of mirror section, can be additionally or alternatively be provided for the mechanism of moving lens section on direction of beam propagation.
When optical splitter suitable when directed with respect to laser beam; The optical axis (promptly on the laser propagation direction) of laser beam that can be through being parallel to incident moves at least one movable mirror section and adjusts the spacing between these divided beams, and adjusts the spacing between the focus thus.
The surface size of each mirror section through selecting laser beam or incide the radiation share on the corresponding mirror section can additionally be adjusted the power share of laser emission.
In preferred implementing form, optical splitter has at least two movable mirror sections, and one of them movable mirror section makes laser beam deflect into first focus in primary importance with selection mode and in the second place, makes laser beam deflect into second focus.In this case; The quantity of mirror section surpasses the quantity of divided beams to be formed, thereby in these mirror sections at least one can be with selection mode attach troops to a unit in two (or a plurality of) divided beams one and in two (or a plurality of) focuses one of attaching troops to a unit thus.Attach troops to a unit between the mirror section of this or another divided beams or mirror section and another movable mirror section that the mirror section can for example be arranged in a fixed-site with selection mode.In this case, this mirror section can be fixed or particularly synchronously controlled and drive with another mirror section with the selection mode holding position.
In a kind of preferred improvement project, optical splitter can be perpendicular to direction of beam propagation or mobile perpendicular to the optical axis (and perpendicular to scanning direction) of laser beam.Obtain following possibility thus; Promptly change and incide the radiation share on these mirror sections; Its mode is to move with making all mirror segment sync, can change the relative position of laser beam thus, and then can change the radiation share on the mirror section that incides separately.Compare (it causes close result) with above-mentioned use than the more mirror section of divided beams, not only project organization but also control are so not complicated in this solution, because for this purpose, it is just enough that conventional straight line moves the unit.
Particularly when optical splitter is embodied as focus device, in addition meaningfully, when the processing curved surface, except moving, also carry out the swing of winding of at least one mirror section perpendicular to the axis of direction of beam propagation.Except the spacing that can influence these divided beams, also can influence the focal position of divided beams thus.
In another kind of form of implementation, optical splitter has a home position, and in this home position, said at least two focuses overlap.In home position, all laser beams that incide on the optical splitter all focus on unique focus.When using deflecting mirror as optical splitter; Here can all mirror sections be arranged in the total deflection plane; When using focus lamp as optical splitter, adjacent mirror section can interconnect in home position and affiliated minute surface transition each other continuously.Through being set, this home position improves the flexibility that adds man-hour, because wherein all radiant power pack processing on unique focus of laser beam also are attainable.
In another kind of form of implementation, the variable spacing between these focuses can be according to the workpiece movement speed regulation.For also at the workpiece movement rapid change of common band shape, particularly when regulating up or down, can change the lines spacing or lasting lines spacing is constant, this is particularly advantageous.Can irrespectively reach good processing result and reduce substandard products with feed speed or translational speed in this way.As according to the translational speed spacing substitute or additional, change has to be beneficial to and improves efficient or improve product quality the spacing of these focuses or the lines that on the scanning direction, produce with thickness according to the different qualities of workpiece to be processed.
Obtain other advantages of theme of the present invention and favourable design by specification, claims and accompanying drawing.The characteristic of equally, more than mentioning can be used with combination in any with the characteristic that is further listed in with forming individually or.
Description of drawings
Describe the present invention in detail by means of the embodiment that reproduces in the accompanying drawings below.Shown should not be construed as exhaustive with described embodiment and enumerate, be used to explain example feature of the present invention but have.
The figure of accompanying drawing is very schematically illustrated according to theme of the present invention and be not pro rata.Single built-up section according to theme of the present invention is illustrated in this wise, makes it possible to illustrate well its structure.
In the accompanying drawings:
Fig. 1 illustrates the side view that has the Materialbearbeitung mit Laserlicht device of focusing unit according to of the present invention;
Fig. 2 is illustrated in the detailed view of deflecting mirror as the focusing unit of Fig. 1 in the embodiment of variable optical splitter; And
Fig. 3 illustrates the side view that has as the focusing unit of the focus lamp of variable optical splitter.
The specific embodiment
Fig. 1 shows the Materialbearbeitung mit Laserlicht device 1 that is used for so-called laser-scoring equipment, and it has rotatably mounted polygon prism 3, and polygon prism will be deflected on the focusing unit 4 by the laser beam 2 that (not showing) lasing light emitter produces.Polygon prism 3 has the drive unit 3a of servomotor form, so that drive polygon prism 3 with the rotary speed of expectation.
Focusing unit 4 comprises that the first plane deflecting mirror, 6 ', the first plane deflecting mirror makes 90 ° of laser beam 2 deflections to the second plane deflecting mirror 6.Make laser beam 2 deflect into the focus device that is used for laser beam 2 that form is a focus lamp 5 through the second plane deflecting mirror 6.Carry out beam split according to the light-dividing principle of in Fig. 2, describing in detail through second deflecting mirror 6 here.Be noted that here first deflecting mirror 6 ' also can be used as such optical splitter alternatively, perhaps when the expectation repeated spectroscopic, can use two deflecting mirrors 6,6 '.The divided beams 7,8 that incides on the focus lamp 5 focuses on the focus 9,10 of two horizontal intervals on the workpiece 11, and this workpiece is band shape sheet material in this example, and this band shape sheet material can be gone up in direction of feed (referring to the arrow among Fig. 1) and move with speed V.
Having of in Fig. 1, the showing structure that two deflecting mirrors 6,6 ' and play the focus lamp 5 of deflecting action equally causes the compact structure of focusing unit 4.
Part according to focusing unit 4 in Fig. 2 and Fig. 3 is described two kinds of light-dividing principles in detail, and this part is through second deflecting mirror 6 and focus lamp 5 reconstruction beams guiding and moulding.
In the embodiment shown in Figure 2, plane deflecting mirror 6 is used for beam split.For this reason, deflecting mirror 6 is divided into mirror section 6a two vicinities, the plane, 6b, particularly is divided into first fixing mirror section 6a and the movable second mirror section 6b, and the movable second mirror section is rotatably mounted around axis 13.Axis 13 extends perpendicular to direction of beam propagation and the scanning direction that is parallel to the focus 9,10 on the workpiece 11, and the scanning direction is confirmed through the deflection of laser beam 2 on each minute surface of polygon prism 3.The part that incides on the fixing mirror section 6a of laser beam 2 deflects on the compresses lower section of crooked focus lamp 5 as divided beams 7, and the divided beams 8 that incides on the rotatably mounted mirror section 6b deflects on the top section of focus lamp 5.Angle position according to movable mirror section 6b obtains the spacing distance at the divided beams 7,8 of focus lamp 5 upper deflectings, and then obtains the spacing a of the focus 9,10 on the workpiece 11.
The minute surface of mirror section 6a, 6b surrounds an angle [alpha] with respect to rotation 13.During in angle [alpha]=180 °; Deflecting mirror 6 as optical splitter is arranged in home position, wherein, and the surface that mirror section 6a, 6b are configured to put down; Thereby it is adjacent each other in the divided beams 7,8 of mirror section 6a, 6b to attach troops to a unit, thereby focus 9,10 overlaps on unique focus.At movable mirror section 6b when this angle position swings open, second divided beams 8 along with the increase of angle [alpha] from first divided beams 7 of fixed-site away from, thereby increase focus 9, the spacing a between 10.
Carry out beam split through focus lamp 5 in the embodiment shown in fig. 3.To this, focus lamp 5 is divided into three mirror section 5a, 5b, 5c.The first mirror section 5a fixes, and the second and the 3rd mirror section 5b, 5c are movable, under present case, are embodied as movably.The motion utilization of the second and the 3rd mirror section 5b, 5c (not showing) drive unit is parallel to the optical axis 2a that deflects into the light beam 2 on the focus lamp 5 through deflecting mirror 6 to carry out.Begin from (not showing) home position; In home position; Mirror section 5a, 5b, 5c form the total minute surface with continually varying curvature; Thereby do not form divided beams, the second and the 3rd mirror section 5b, 5c can move on beam direction 2a independently of each other, so that form three (not showing) divided beams.
But in this example, the second and the 3rd mirror section 5b, 5c synchronously move, thereby they form a total divided beams 8, and then on workpiece 11, form a total focus 10.The spacing a of two focuses 9,10 on workpiece 11 is in this case corresponding to the second and the 3rd mirror section 5b, the 5c mobile distance from home position.It is understandable that in order to change the ratio that incides the laser power on each focus 9,10, the second mirror section 5b can be retained in its home position alternatively, and only the 3rd mirror section 5c can move.In this case, the second mirror section 5b is used to produce first divided beams 7, and therefore the laser power on first focus 9 on the workpiece 11 is incided in raising.
It is understandable that; In order to adjust the distribution of the expectation of laser power on two focuses 9,10; Alternatively or additionally; The common of Fig. 3 can utilize (not showing) linear moving apparatus to move transverse to the optical axis 2a of laser beam 2 as the focus lamp 5 of optical splitter or the deflecting mirror 6 of Fig. 2, so that change the ratio that incides the last laser beam intensity of each mirror section 5a to 5c, 6a, 6b.
Be used for making the telecontrol equipment of mirror section 5a to 5c, 6a, 6b motion to control by means of control device 12 (referring to Fig. 1), control device can be configured to programmable unit (for example, computer).Said control can be carried out according to the translational speed of workpiece 11 especially, and promptly focus 9, the spacing a between 10 can adjust according to translational speed V.It is understandable that control device 12 also can be used in the rotary speed through servomotor 3a adjustment polygon prism 3.Spacing between the rotary speed influence front and back line group in succession of polygon prism 3; These line groups produce in the scanning of scanning direction, workpiece 11 upper edge through focus 9,10 respectively, and this scanning direction is transverse to when the moving direction when deflecting into each minute surface upper deflecting of polygon prism 3.The adjustment of the translational speed V of workpiece 11 also can be carried out through the control device 12 that is arranged in the device 1.
Claims (11)
1. device (1) that is used for Materialbearbeitung mit Laserlicht comprising:
The rotatably mounted polygon prism that is used for deflection laser bundle (2) (3), and
In light path, be located at focusing unit (4) downstream, that have focus device (5), said focus device is used for the laser beam (2) that is deflected on the said focusing unit (4) by said polygon prism (3) is focused on workpiece to be processed (11),
It is characterized in that,
Said focusing unit (4) has at least one optical splitter (5,6,6 '); Said optical splitter is used for that the laser beam of deflection (2) is divided at least two divided beams (7,8) and produces at least two focuses (9,10) to go up at said workpiece (11), and said optical splitter (5,6,6 ') is configured to produce the variable spacing (a) of the focus (9,10) on the said workpiece (11).
2. device according to claim 1 is characterized in that, said optical splitter is configured to focus device (5).
3. device according to claim 1 is characterized in that, said optical splitter is configured to be located at the optical element (6,6 ') at said focus device (5) upper reaches.
4. according to each described device in the aforementioned claim, it is characterized in that said optical splitter (5,6,6 ') is configured to reflective.
5. device according to claim 4 is characterized in that, said optical splitter (5,6,6 ') has at least one movable mirror section (5b, 5c, 6b).
6. device according to claim 5 is characterized in that, and is that said movable mirror section (5b, 5c, 6b) is configured to swing and/or movably.
7. according to claim 5 or 6 described devices, it is characterized in that the optical axis (2a) that said at least one movable mirror section (5b, 5c) can be parallel to the laser beam (2) of incident moves.
8. according to each described device in the claim 5 to 7; It is characterized in that; Said optical splitter (5) has at least two movable mirror sections (5b, 5c), and one of them movable mirror section makes laser beam (2) deflect into first focus (9) in primary importance with selection mode and in the second place, makes laser beam (2) deflect into second focus (10).
9. according to each described device in the aforementioned claim, it is characterized in that said optical splitter (5,6) can move perpendicular to the optical axis (2a) of said laser beam (2).
10. according to each described device in the aforementioned claim, it is characterized in that said optical splitter (5,6,6 ') has a home position, overlap at least two focuses (9,10) described in this home position.
11., it is characterized in that the variable spacing (a) between these focuses (9,10) can be according to translational speed (V) adjustment of said workpiece (11) according to each described device in the aforementioned claim.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE202010009009U DE202010009009U1 (en) | 2010-11-11 | 2010-11-11 | Device for laser material processing with a polygon mirror |
| DE202010009009.1 | 2010-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102554466A true CN102554466A (en) | 2012-07-11 |
Family
ID=43571374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103781343A Pending CN102554466A (en) | 2010-11-11 | 2011-11-11 | Laser Material Processing Device With Prism |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102554466A (en) |
| DE (1) | DE202010009009U1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103831529A (en) * | 2012-11-20 | 2014-06-04 | 三星显示有限公司 | Laser processing apparatus |
| CN108311792A (en) * | 2017-01-17 | 2018-07-24 | 宝山钢铁股份有限公司 | Belt steel surface laser scoring apparati |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3138636A1 (en) * | 2015-09-03 | 2017-03-08 | Haas Food Equipment GmbH | Assembly for the purification of baking surfaces |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4099830A (en) * | 1976-12-15 | 1978-07-11 | A. J. Bingley Limited | Optical systems including polygonal mirrors rotatable about two axes |
| US5060668A (en) * | 1984-05-16 | 1991-10-29 | B. A. T. Cigaretten-Fabriken Gmbh | Device for the production of at least two adjacent rows of perforations in cigarettes and/or filter-lining paper or filter-wrapping paper |
| CN1601325A (en) * | 2003-09-25 | 2005-03-30 | 希尔蒂股份公司 | Optical beam splitter |
| CN1820888A (en) * | 2006-03-24 | 2006-08-23 | 华中科技大学 | Method and device for laser on-line punching for medical thin material |
| CN201152907Y (en) * | 2007-12-06 | 2008-11-19 | 武汉华工激光工程有限责任公司 | Focusing mirror in laser double point welding light splitting method |
| CN101666620A (en) * | 2009-09-27 | 2010-03-10 | 合肥工业大学 | Multi-source parallel confocal micro detection system |
-
2010
- 2010-11-11 DE DE202010009009U patent/DE202010009009U1/en not_active Expired - Lifetime
-
2011
- 2011-11-11 CN CN2011103781343A patent/CN102554466A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4099830A (en) * | 1976-12-15 | 1978-07-11 | A. J. Bingley Limited | Optical systems including polygonal mirrors rotatable about two axes |
| US5060668A (en) * | 1984-05-16 | 1991-10-29 | B. A. T. Cigaretten-Fabriken Gmbh | Device for the production of at least two adjacent rows of perforations in cigarettes and/or filter-lining paper or filter-wrapping paper |
| CN1601325A (en) * | 2003-09-25 | 2005-03-30 | 希尔蒂股份公司 | Optical beam splitter |
| CN1820888A (en) * | 2006-03-24 | 2006-08-23 | 华中科技大学 | Method and device for laser on-line punching for medical thin material |
| CN201152907Y (en) * | 2007-12-06 | 2008-11-19 | 武汉华工激光工程有限责任公司 | Focusing mirror in laser double point welding light splitting method |
| CN101666620A (en) * | 2009-09-27 | 2010-03-10 | 合肥工业大学 | Multi-source parallel confocal micro detection system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103831529A (en) * | 2012-11-20 | 2014-06-04 | 三星显示有限公司 | Laser processing apparatus |
| US9643280B2 (en) | 2012-11-20 | 2017-05-09 | Samsung Display Co., Ltd. | Laser processing apparatus |
| CN108311792A (en) * | 2017-01-17 | 2018-07-24 | 宝山钢铁股份有限公司 | Belt steel surface laser scoring apparati |
Also Published As
| Publication number | Publication date |
|---|---|
| DE202010009009U1 (en) | 2011-02-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9016881B2 (en) | Beam guide and method for adjusting the opening angle of a laser beam | |
| US7525708B2 (en) | Scanner head for a laser machining device | |
| US10327318B2 (en) | Adjusting a beam diameter and an aperture angle of a laser beam | |
| CN103384580B (en) | Optical scanning device and laser machining device | |
| JP2009543585A (en) | Improvement of scanning ophthalmoscope or improvement on scanning ophthalmoscope | |
| CN1063850C (en) | Cascade scanning optical system | |
| EP2248073B1 (en) | Optical pattern generators using axicon segments | |
| US20210325639A1 (en) | Laser processing apparatus | |
| US20120029491A1 (en) | Device for processing eye tissue by a means of femtosecond laser pulses | |
| CN101784939A (en) | Multibeam scanning device | |
| KR20100015913A (en) | Correction of optical elements by means of correction light emitted in a flat manner | |
| CN102554466A (en) | Laser Material Processing Device With Prism | |
| US5004311A (en) | Beam scanning method and apparatus | |
| US9017315B2 (en) | Device for processing eye tissue by means of femtosecond laser pulses | |
| US4714310A (en) | Method and apparatus for dynamic focusing control of a radiant energy beam | |
| TW200922726A (en) | Device for machining a workpiece by means of parallel laser beams | |
| KR20220088461A (en) | Energy Delivery Optimization for Laser Thickness Control of Fused Glass Systems and Methods | |
| KR100412495B1 (en) | multi-beam laser scanning apparatus | |
| JP2007240968A5 (en) | ||
| JPH05228673A (en) | Laser beam machine | |
| JP2006171318A (en) | Scanning exposure apparatus | |
| JP2006178190A (en) | Optical scanner | |
| JP2002001565A (en) | Laser beam machining device | |
| JP4085560B2 (en) | Image forming apparatus | |
| JPH02269305A (en) | Optical scanner |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120711 |