CN102553393A - Method for manufacturing fan filter unit (FFU) chemical filter - Google Patents
Method for manufacturing fan filter unit (FFU) chemical filter Download PDFInfo
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- CN102553393A CN102553393A CN2011104472760A CN201110447276A CN102553393A CN 102553393 A CN102553393 A CN 102553393A CN 2011104472760 A CN2011104472760 A CN 2011104472760A CN 201110447276 A CN201110447276 A CN 201110447276A CN 102553393 A CN102553393 A CN 102553393A
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Abstract
The invention relates to a method for manufacturing a fan filter unit (FFU) chemical filter. The method comprises the following steps of: making a single-layer chemical filter screen by the steps of preparing adhesive, soaking a base material into the adhesive, adsorbing active carbon, forming a filter screen and the like, cutting and superposing the filter screen according to the required specification, putting the filter screen into an FFU filter cavity, combining the filter screen and an FFU purification unit to finish assembly of a fan module, and thus obtaining the FFU chemical filter. A step of 'active carbon modification' or 'filter screen modification' can be added in the steps. The prepared FFU chemical filter has the advantages of light mass, low resistance, high adsorption speed and high filtration efficiency, can reduce the concentration of chemical pollutants in air in a clean room without increasing high energy consumption, and can efficiently treat molecular-level gaseous pollutants under the condition that the face velocity of 0.36 to 0.45m/s is ensured.
Description
Technical field
The present invention relates to air filter unit, relate in particular to a kind of being used in semiconductor, liquid crystal, the makers' toilet of precise electronic parts, the manufacturing approach of FFU chemical filter that can handling of molecular level gaseous contaminant belongs to the air purifying process field.
Background technology
Under the promotion of computer and information technology, the development of microelectronics industry has become the main pillar of world-technology progress.Microelectronic technical development is very fast, and the silicon wafer sizes of super large-scale integration manufacturing is done bigger and bigger, requires integrated more chip on the silicon wafer, and the live width size is more and more narrow also, and the narrowest live width that production technology is ripe has reached 28nm.Except traditional micronic dust particle, the gaseous contaminant of molecular level is also more and more obvious to the influence of chip defect rate.
American semiconductor equipment and materials association (SEMI) are divided into four types with gas-carrying molecule pollutant (AMC): acids, bases, can condense compounds, alloy class.In order to control the molecular level gaseous contaminant in the toilet, traditional way is that large-scale chemical filter is installed before the inferior high efficiency filter in ventilation shaft, for example: the drum type brake chemical filter, mould frame chemical filter etc.Along with the live width more and more narrow of IC chip and popularizing of FFU system, these traditional methods more and more can not satisfy the production development needs.
FFU (Fan Filter Unit) is the combination of blower fan and filter, also can be described as " filter plant that carries blower fan ".It is easy that the FFU system has design and construction, and wind speed is regulated flexibly, and clean area is easy to characteristics such as change, therefore become one of popular system form of industrial clean rooms, is widely used at microelectronic industry.FFU is installed in the air-supply end of toilet usually, generally is placed on " dry type " gasket seal keel frame of lifting.The FFU upper part is a blower fan module, and lower part is a filter.According to the requirement of cleanliness factor, filter can be efficient (HEPA) or ultra high efficiency (ULPA) filter of different brackets, for the toilet provides pure air.Blower fan module also will overcome the resistance of all passage components of whole circulation wind except overcoming the resistance of FFU bottom high efficiency particulate air filter, thereby keeps the operating air velocity of setting.
Along with the raising that the user requires cleanliness factor, the contradiction between filter effect and the operating air velocity has become the principal contradiction of the whole FFU system stable operation of influence, therefore, must be to the FFU system--particularly wherein chemical filter screen improves.
Summary of the invention
The objective of the invention is to overcome the problems referred to above that prior art exists; A kind of manufacturing approach of FFU chemical filter is provided; Through improvement to the FFU chemical filter screen; Under the prerequisite that guarantees FFU face wind speed, efficient handling of molecular level gaseous contaminant is for users such as chip production factory provide rational clean environment.
Technical solution of the present invention is, the manufacturing approach of FFU chemical filter is at first produced chemical filter screen according to following steps,
1. get quantitative water soluble adhesive, add thickener in proportion, make adhesive reach needed viscosity;
2. cut the foam base material of required specification, it is immersed in the adhesive after the above-mentioned modulation, make to form one deck adhesive film on the net bone of foam base material;
3. above-mentioned foam is taken out, tiling sticks to active carbon on the skeleton of foam on the top of the shelf full and uniformly;
4. with the above-mentioned unsettled placement of foam that is stained with active carbon, dry moulding, form the chemical monolayer screen pack;
Then, the chemical monolayer screen pack that makes is carried out cutting and stack according to required specification, be positioned in the filter chamber of FFU and combine, and then accomplish the assembling of blower fan module, promptly can be made into the FFU chemical filter with the FFU clean unit.
Further, the manufacturing approach of above-mentioned FFU chemical filter, wherein: 3. said step further comprises activated carbon modified step before; Promptly; Active carbon is put into modified solution flood, then active carbon is taken out, hang air-dry or dry at a certain temperature with baking oven; Or
Said step further comprises the filter screen modification procedure after 4., that is, the chemical monolayer screen pack that will dry moulding is put into modified solution and flooded, and filter screen is carried out modification, then with its taking-up, hangs air-dry.
No matter be that active carbon is carried out modification, still filter screen carried out modification, flood used modified solution, its Acidity of Aikalinity is opposite with the Acidity of Aikalinity of the FFU chemical filter of the processing gaseous molecular that desire is removed under environment for use.
Further, the manufacturing approach of above-mentioned FFU chemical filter, wherein: said water soluble adhesive is polyurethane adhesive, acrylate glue, polyvinyl alcohol, acrylic acid emulsion, acetate emulsion, butadiene-styrene rubber or acrylonitrile-butadiene rubber; Said foam base material is a polyurethane foam; Said active carbon is the microspheroidal active carbon, and its diameter range is 0.3mm～1.0mm.
Again further, the manufacturing approach of above-mentioned FFU chemical filter, wherein: the chemical monolayer screen pack that step forms after 4. handling, percentage meter by weight, active carbon 60-65%, adhesive 20-25%, foam base material 10-15%.
The FFU chemical filter that technical scheme is processed into according to the present invention; Light weight, resistance is low, adsorption rate is fast, filter efficiency is high, in the situation that does not increase more energy consumption, can drop to the chemical contamination concentration in the clean room atmosphere lower; More directly control the molecular level gaseous contamination in real time; Under the situation of 0.36-0.45m/s face wind speed, efficient handling of molecular level gaseous contaminant is for users such as chip production factory provide rational clean environment; Satisfy user's demand, promoted the development of microelectronic industry.
The specific embodiment
The present invention provides a kind of manufacturing approach of FFU chemical filter; Its key problem in technology is that the process of chemical filter screen is improved, and the chemical filter screen after the moulding can be removed airborne gaseous molecular pollutant; Comprise: organic volatile, for example formaldehyde, carbon tetrachloride; Bases gas, for example ammonia, organic amine; Acids gas, for example sulfur dioxide, hydrogen sulfide, nitrogen oxide etc.
The technical scheme according to the present invention; The processing of this chemical filter screen mainly comprises: processes such as modulation adhesive, base material impregnation, adhesion activity charcoal, filter screen moulding, filter screen modification; Filter screen combines with the FFU clean unit after processing, and promptly can be made into the FFU chemical filter.Concrete steps are following:
1, modulation adhesive: according to needs of production, get a certain amount of water soluble adhesive, press corresponding proportion and add thickener, make adhesive reach needed viscosity.
2, base material impregnation: cut the foam base material of required specification, it is immersed in the adhesive after the above-mentioned modulation, make to form one deck adhesive film on the net bone of foam base material.
3, adhesion activity charcoal: above-mentioned foam is taken out, and tiling sticks to active carbon on the skeleton of foam on the top of the shelf full and uniformly.
4, filter screen moulding: with the above-mentioned unsettled placement of foam that is stained with active carbon, dry moulding, make the screen pack that to remove general volatile organic matter (for example formaldehyde, carbon tetrachloride).
5, according to the requirement of concrete use occasion, the above-mentioned further cutting of filter screen after air-dry is combined into different specifications, be positioned in the filter chamber of FFU and combine, and completion promptly can be made into the FFU chemical filter with the FFU clean unit.
In the above-mentioned process, used adhesive is a water soluble adhesive, for example: polyurethane adhesive, acrylate glue, polyvinyl alcohol, acrylic acid emulsion, acetate emulsion, butadiene-styrene rubber (emulsion) or acrylonitrile-butadiene rubber, preferred water-based polyurethane adhesive.The employed thickener of adjustment adhesive viscosity does not have specific (special) requirements, and common commercially available article get final product.
Said foam base material can be PU, PE, EVA or PVC, optimization polyurethane foam.The active carbon that adheres to after the polyurethane foam impregnation is the microspheroidal active carbon, the preferred 0.3mm～1.0mm of its diameter range.Dry the filter screen that moulding forms after adhering to, mainly comprise three kinds of compositions, i.e. polyurethane foam (skeleton), adhesive and active carbon, three's percetage by weight is about: spheric active carbon 60-65%, adhesive 20-25%, foam base material 10-15%.
In addition, can further comprise " activated carbon modified " step before the said step 3, that is, active carbon put into modified solution flood, then active carbon taken out, hang air-dry.In order to improve effect, also can with baking oven active carbon be dried at a certain temperature.Perhaps,
Further comprise " filter screen modification " step after the said step 4, that is, the chemical monolayer screen pack that will dry moulding is put into modified solution and is flooded, and filter screen is carried out modification, then with its taking-up, hangs air-dry.
" activated carbon modified " or " filter screen modification " step is an optional step; According to user's request; Can effectively remove multiple gases after the modification, comprise and remove bases gas (for example ammonia, organic amine), acids gas (for example sulfur dioxide, hydrogen sulfide, nitrogen oxide).Flood used modified solution; Its composition is relevant with the kind and the concentration of the FFU chemical filter gaseous molecular that desire is removed under environment for use with concentration; Remove bases gas and use the acid solution dipping; Remove sour gas and then use alkaline modified solution dipping, should do corresponding analysis and allotment during concrete operations.
In addition, in the above-mentioned process, the thickness of chemical monolayer screen pack can be selected to regulate, can also be according to the concrete condition of actual application environment, and the number of plies of the method adjustment chemical filter screen through stack is to reach needed effect.
FFU chemical filter manufactured according to the present invention, light weight, resistance is low, adsorption rate is fast, filter efficiency is high.Because on a large amount of direct fixing base materials of microsphere active carbon; Be difficult to come off on the one hand, the contact area with atmosphere is big on the other hand, and the pressure loss is little; Thereby efficient handling of molecular level gaseous contaminant; Given full play to the advantage of FFU, than the inferior high efficiency filter in ventilation shaft before large-scale chemical filter is installed traditional method have better effect, be fit to very much the instructions for use to the toilet such as semiconductor, liquid crystal, precise electronic parts manufactory.
Below through instantiation to the invention technical scheme be described further; This instance only is a prominent example of using technical scheme of the present invention; Claim of the present invention is not constituted any limitation; All technical schemes of taking to be equal to replacement or equivalent transformation and forming all drop within the scope of requirement protection of the present invention.
Embodiment:
1, gets the soluble polyurethane adhesive of certain amount, add a certain proportion of thickener, make adhesive reach required viscosity.
2, cut the polyurethane foam that model is 630 * 630 * 10mm, it is immersed in a period of time in the above-mentioned polyurethane adhesive.
3, the polyurethane foam after will soaking takes out, and tiling sprays microsphere active carbon on the top of the shelf with certain flow velocity, make on its skeleton that sticks to polyurethane foam full and uniformly.After the adhesion, percentage meter by weight, microsphere active carbon 60-65%, polyurethane adhesive 20-25%, polyurethane foam 10-15%.
4, the above-mentioned polyurethane foam that is stained with microsphere active carbon is dried, obtain to remove the polyurethane screen pack of general volatile organic matter after the moulding.
5, above-mentioned screen pack is put into acid modification solution and flood a period of time, take out hang airing.
6, the polyurethane screen pack with above-mentioned modification is cut into 610 * 610 * 10mm specification.
7, continue to make the polyurethane screen pack of 5 modifications according to the step of 1-6.
8, the polyurethane screen pack with 6 modifications stacks, and is placed in the FFU filter chamber to combine with clean unit, and then accomplishes the assembling of blower fan module, and can make model is the FFU chemical filter of the alkaline gas removed of 610 * 610 * 60mm.
Result on trial shows that this FFU chemical filter can effectively be removed bases gases such as ammonia, organic amine under the situation of 0.36-0.45m/s face wind speed, and general volatile organic matter such as formaldehyde, carbon tetrachloride.
Claims (8)
1.FFU the manufacturing approach of chemical filter is characterized in that: at first, produce chemical filter screen according to following steps,
1. get quantitative water soluble adhesive, add thickener in proportion, make adhesive reach needed viscosity;
2. cut the foam base material of required specification, it is immersed in the adhesive after the above-mentioned modulation, make to form one deck adhesive film on the net bone of foam base material;
3. above-mentioned foam is taken out, tiling sticks to active carbon on the skeleton of foam on the top of the shelf full and uniformly;
4. with the above-mentioned unsettled placement of foam that is stained with active carbon, dry moulding, form the chemical monolayer screen pack;
Then, the chemical monolayer screen pack that makes is carried out cutting and stack according to required specification, be positioned in the filter chamber of FFU and combine, and then accomplish the assembling of blower fan module, promptly can be made into the FFU chemical filter with the FFU clean unit.
2. the manufacturing approach of FFU chemical filter according to claim 1; It is characterized in that: 3. said step further comprises activated carbon modified step before, that is, active carbon is put into modified solution flood; Then active carbon is taken out, hang air-dry or use oven for drying.
3. the manufacturing approach of FFU chemical filter according to claim 1; It is characterized in that: 4. said step further comprises the filter screen modification procedure afterwards; That is, the chemical monolayer screen pack that will dry moulding is put into modified solution and is flooded, and filter screen is carried out modification; With its taking-up, hang air-dry then.
4. according to the manufacturing approach of claim 2 or 3 described FFU chemical filters, it is characterized in that: said modified solution, its Acidity of Aikalinity is opposite with the Acidity of Aikalinity of the FFU chemical filter of the processing gaseous molecular that desire is removed under environment for use.
5. according to the manufacturing approach of claim 1 or 2 or 3 described FFU chemical filters, it is characterized in that: said water soluble adhesive is polyurethane adhesive, acrylate glue, polyvinyl alcohol, acrylic acid emulsion, acetate emulsion, butadiene-styrene rubber or acrylonitrile-butadiene rubber.
6. according to the manufacturing approach of claim 1 or 2 or 3 described FFU chemical filters, it is characterized in that: said foam base material is PU, PE, EVA or PVC.
7. according to the manufacturing approach of claim 1 or 2 or 3 described FFU chemical filters, it is characterized in that: said active carbon is the microspheroidal active carbon, and its diameter range is 0.3mm～1.0mm.
8. according to the manufacturing approach of claim 1 or 2 or 3 described FFU chemical filters, it is characterized in that: the chemical monolayer screen pack that step forms after 4. handling, percentage meter by weight, active carbon 60-65%, adhesive 20-25%, foam base material 10-15%.
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| CN2011104472760A CN102553393A (en) | 2011-12-28 | 2011-12-28 | Method for manufacturing fan filter unit (FFU) chemical filter |
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| CN2011104472760A CN102553393A (en) | 2011-12-28 | 2011-12-28 | Method for manufacturing fan filter unit (FFU) chemical filter |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103356307A (en) * | 2013-08-07 | 2013-10-23 | 天津市塑料研究所有限公司 | Arterial blood microembolus filter gum dipping and net pressing device |
| CN105430589A (en) * | 2015-10-30 | 2016-03-23 | 歌尔声学股份有限公司 | Sound absorbing assembly and manufacturing method thereof |
| CN105498413A (en) * | 2015-12-28 | 2016-04-20 | 刘智懿 | Ultrafine particle clearance membrane |
| CN106268041A (en) * | 2016-09-09 | 2017-01-04 | 上海科力玛数据科技有限公司 | A kind of for composite purifying air and its preparation method and application |
| CN106268065A (en) * | 2016-10-21 | 2017-01-04 | 苏州英德尔室内空气技术有限公司 | A kind of blower fan chemical filtering unit |
| CN109922408A (en) * | 2019-01-31 | 2019-06-21 | 歌尔股份有限公司 | The preparation method of sound-absorbing part |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103356307A (en) * | 2013-08-07 | 2013-10-23 | 天津市塑料研究所有限公司 | Arterial blood microembolus filter gum dipping and net pressing device |
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| CN105430589B (en) * | 2015-10-30 | 2018-11-23 | 歌尔股份有限公司 | A kind of sound-absorbing component and preparation method thereof |
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| CN106268065A (en) * | 2016-10-21 | 2017-01-04 | 苏州英德尔室内空气技术有限公司 | A kind of blower fan chemical filtering unit |
| CN109922408A (en) * | 2019-01-31 | 2019-06-21 | 歌尔股份有限公司 | The preparation method of sound-absorbing part |
| CN109922408B (en) * | 2019-01-31 | 2021-06-11 | 歌尔股份有限公司 | Preparation method of sound absorption piece |
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Application publication date: 20120711 |