CN102553315A

CN102553315A - Circulating water system

Info

Publication number: CN102553315A
Application number: CN201010605243XA
Authority: CN
Inventors: 游良呈; 孙景艳
Original assignee: CSMC Technologies Corp
Current assignee: CSMC Technologies Corp
Priority date: 2010-12-27
Filing date: 2010-12-27
Publication date: 2012-07-11

Abstract

The invention provides a circulating water system, which comprises a circulating water tank, a first filter screen (100) and a second filter screen (101). The first filter screen (100) and the second filter screen (101) are arranged at the outlet of the circulating water tank. The circulating water system also comprises a third filter screen (103) arranged between the first filter screen (100) and the second filter screen (101). Compared with the prior art, the invention has the beneficial effects of low cost and high filtering efficiency, the system can be cleaned easily, and blockage and no flow in a water pump can not be caused.

Description

Circulation

[technical field]

The present invention relates to a kind of circulation, especially relate to a kind of gas extraction system SCR and filter improvement technology.

[background technology]

Semiconductor technology exhaust exhaust treatment system is handled waste gas through alkalescence or acidic circulation water.In the cyclic water tank of exhaust treatment system washer, can suck the end miscarriage, bring big foreign material into, for example non-dust cloth, purification paper and so on because of waste gas.Disintegrating slag in the scrubbing tower also can be blended in the recirculated water simultaneously.

For addressing the above problem, as shown in Figure 1, existing way can add the twice filter screen at the cyclic water tank port of export: first filter screen 10, second filter screen 11, and suck end at water pump and add y-

type filter

12,13, prevent that impurity from getting into water circulating pump, prevents the water pump fault.Yet existing way has following shortcoming:

1, when cleaning first filter screen 10, impurity gets between first filter screen 10 and second filter screen 11;

2, when cleaning second filter screen 11, trash flow is gone into water pump and is sucked end;

3, suck end at water pump and add y-

type filter

12,13, dismounting is trouble comparatively.

[summary of the invention]

To the deficiency of prior art, the technical problem that the present invention solves provides a kind of circulation, effectively solids filtered impurity.

The object of the invention is realized through following technical scheme is provided:

A kind of circulation; Comprise a cyclic water tank; One is arranged at first filter screen (100), second filter screen (101) of said cyclic water tank outlet, and wherein, said circulation comprises that also one is arranged at the 3rd filter screen (103) between said first filter screen (100) and said second filter screen (101).

Further, said the 3rd filter screen (103) comprises that said the 3rd filter screen (103) also is provided with a handle (1031).

Said circulation comprises that also at least one connects the water circulating pump of said cyclic water tank outlet.

Said water circulating pump is connected with said cyclic water tank outlet conducting with water inlet pipe through outlet pipe.

Again further, said circulation also comprises first water circulating pump and second water circulating pump that connects said cyclic water tank.

Said first water circulating pump is connected with said cyclic water tank outlet conducting through first outlet pipe, first water inlet pipe; Said second water circulating pump is connected with said cyclic water tank outlet conducting through second outlet pipe, second water inlet pipe.

Compared with prior art, the invention has the beneficial effects as follows: cost is low, easy to be cleaned, and filter efficiency is high, situation about can not result in blockage, water pump not having flow.

[description of drawings]

Below in conjunction with accompanying drawing the present invention is described further:

Fig. 1 is existing circulation partial schematic diagram.

Fig. 2 is a best mode for carrying out the invention circulation partial schematic diagram.

Fig. 3 is Fig. 2 A-A cut-away section view.

[specific embodiment]

Following with reference to description of drawings preferred forms of the present invention.

As shown in Figure 2; Circulation of the present invention comprises a cyclic water tank (not shown); One is arranged at first filter screen 100, second filter screen 101 of the outlet of said cyclic water tank, and is arranged at the 3rd filter screen 103 between said first filter screen 100 and said second filter screen 101; Said circulation comprises that also at least one connects the water circulating pump of said cyclic water tank outlet; In best mode for carrying out the invention, be provided with two water circulating pumps 105,107: the first water circulating pumps 105 altogether and export conducting with said cyclic water tank and be connected through first outlet pipe 1051, first water inlet pipe 1052; Second water circulating pump 107 exports conducting with said cyclic water tank and is connected through second outlet pipe 1071, second water inlet pipe 1072.

As shown in Figure 3; Said the 3rd filter screen 103 is arranged between said first filter screen 100 and said second filter screen 101; Said the 3rd filter screen 103 also is provided with a handle 1031, proposes from said first filter screen 100 and said second filter screen 101 with convenient said the 3rd filter screen 103.Said the 3rd filter screen 103 filter areas are bigger, but the complete impurity of disposable filtering.

Through above-mentioned circulation, be to implement like this to filter:

1, disposes a large amount of impurity in the system through first filter screen 100 and second filter screen 101.The effect of the 3rd filter screen 103 is foreign material of removing between first filter screen 100 and second filter screen 101.

2, when daily PM cleans filter screen, earlier first filter screen 100 is taken out, after cleaning out it is put back to.Again the 3rd filter screen 103 is taken out and clean, after grade in an imperial examination three filter screens 103 are put back to, clean second filter screen 101 at last.

Although be the example purpose; Preferred implementation of the present invention is disclosed; But those of ordinary skill in the art will recognize, under the situation that does not break away from disclosed scope of the present invention and spirit by appending claims, various improvement, increase and replacement are possible.

Claims

1. a circulation comprises a cyclic water tank, and one is arranged at first filter screen, second filter screen of said cyclic water tank outlet, and it is characterized in that: said circulation comprises that also one is arranged at the 3rd filter screen between said first filter screen and said second filter screen.

2. circulation according to claim 1 is characterized in that, said the 3rd filter screen comprises that said the 3rd filter screen also is provided with a handle.

3. circulation according to claim 2 is characterized in that, said circulation comprises that also at least one connects the water circulating pump of said cyclic water tank outlet.

4. circulation according to claim 3 is characterized in that, said water circulating pump is connected with said cyclic water tank outlet conducting with water inlet pipe through outlet pipe.

5. circulation according to claim 2 is characterized in that, said circulation also comprises first water circulating pump and second water circulating pump that connects said cyclic water tank.

6. circulation according to claim 5 is characterized in that, said first water circulating pump is connected with said cyclic water tank outlet conducting through first outlet pipe, first water inlet pipe; Said second water circulating pump is connected with said cyclic water tank outlet conducting through second outlet pipe, second water inlet pipe.