CN102544035A - 使用切割道蚀刻的晶圆切片 - Google Patents
使用切割道蚀刻的晶圆切片 Download PDFInfo
- Publication number
- CN102544035A CN102544035A CN2011103926126A CN201110392612A CN102544035A CN 102544035 A CN102544035 A CN 102544035A CN 2011103926126 A CN2011103926126 A CN 2011103926126A CN 201110392612 A CN201110392612 A CN 201110392612A CN 102544035 A CN102544035 A CN 102544035A
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- wafer
- tube core
- imageing sensor
- semiconductor layer
- etching
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14632—Wafer-level processed structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14687—Wafer level processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/954,151 US8071429B1 (en) | 2010-11-24 | 2010-11-24 | Wafer dicing using scribe line etch |
US12/954,151 | 2010-11-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102544035A true CN102544035A (zh) | 2012-07-04 |
CN102544035B CN102544035B (zh) | 2015-03-04 |
Family
ID=45034383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110392612.6A Active CN102544035B (zh) | 2010-11-24 | 2011-11-23 | 使用切割道蚀刻的晶圆切片 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8071429B1 (zh) |
CN (1) | CN102544035B (zh) |
HK (1) | HK1172152A1 (zh) |
TW (1) | TWI449096B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103681661A (zh) * | 2012-09-14 | 2014-03-26 | 台湾积体电路制造股份有限公司 | 晶圆中的划线 |
CN108630599A (zh) * | 2017-03-22 | 2018-10-09 | 东莞新科技术研究开发有限公司 | 芯片的形成方法 |
CN111226313A (zh) * | 2020-01-07 | 2020-06-02 | 长江存储科技有限责任公司 | 用于多晶圆堆叠和切割的方法 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102782862B (zh) * | 2010-02-26 | 2015-08-26 | 精材科技股份有限公司 | 芯片封装体及其制造方法 |
US8809120B2 (en) * | 2011-02-17 | 2014-08-19 | Infineon Technologies Ag | Method of dicing a wafer |
EP2530709B1 (en) * | 2011-06-03 | 2015-09-09 | Nxp B.V. | Method of producing a semiconductor wafer |
WO2013150427A1 (en) * | 2012-04-05 | 2013-10-10 | Koninklijke Philips N.V. | Led thin-film device partial singulation prior to substrate thinning or removal |
US9266192B2 (en) | 2012-05-29 | 2016-02-23 | Electro Scientific Industries, Inc. | Method and apparatus for processing workpieces |
US9040389B2 (en) | 2012-10-09 | 2015-05-26 | Infineon Technologies Ag | Singulation processes |
US11335721B2 (en) * | 2013-11-06 | 2022-05-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Backside illuminated image sensor device with shielding layer |
US10014333B2 (en) * | 2015-08-26 | 2018-07-03 | Semiconductor Components Industries, Llc | Back-side illuminated pixels with interconnect layers |
US20180015569A1 (en) * | 2016-07-18 | 2018-01-18 | Nanya Technology Corporation | Chip and method of manufacturing chips |
US10720360B2 (en) * | 2016-07-29 | 2020-07-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor die singulation and structures formed thereby |
US10916516B2 (en) * | 2017-06-07 | 2021-02-09 | Xilinx, Inc. | High bandwidth memory (HBM) bandwidth aggregation switch |
KR102525161B1 (ko) | 2018-07-16 | 2023-04-24 | 삼성전자주식회사 | 반도체 장치 및 상기 반도체 장치를 탑재한 반도체 패키지 |
DE102020115687B4 (de) * | 2020-06-15 | 2024-05-16 | Infineon Technologies Ag | Herstellung von halbleitervorrichtungen durch dünnen und zerteilen |
US12034027B2 (en) | 2021-08-20 | 2024-07-09 | Omnivision Technologies, Inc. | Semiconductor device contact pad and method of contact pad fabrication |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101308813A (zh) * | 2007-05-14 | 2008-11-19 | 台湾积体电路制造股份有限公司 | 元件的制造方法 |
CN101383299A (zh) * | 2007-09-05 | 2009-03-11 | 精材科技股份有限公司 | 电子元件的晶圆级封装及其制造方法 |
US20090289318A1 (en) * | 2008-05-23 | 2009-11-26 | Xintec Inc. | Electronics device package and fabrication method thereof |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2420443B (en) | 2004-11-01 | 2009-09-16 | Xsil Technology Ltd | Increasing die strength by etching during or after dicing |
TWI300593B (en) * | 2006-02-07 | 2008-09-01 | Touch Micro System Tech | Method of segmenting wafer |
US8049256B2 (en) * | 2006-10-05 | 2011-11-01 | Omnivision Technologies, Inc. | Active pixel sensor having a sensor wafer connected to a support circuit wafer |
US7838424B2 (en) * | 2007-07-03 | 2010-11-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Enhanced reliability of wafer-level chip-scale packaging (WLCSP) die separation using dry etching |
-
2010
- 2010-11-24 US US12/954,151 patent/US8071429B1/en active Active
-
2011
- 2011-10-25 TW TW100138728A patent/TWI449096B/zh active
- 2011-11-23 CN CN201110392612.6A patent/CN102544035B/zh active Active
-
2012
- 2012-12-10 HK HK12112732.4A patent/HK1172152A1/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101308813A (zh) * | 2007-05-14 | 2008-11-19 | 台湾积体电路制造股份有限公司 | 元件的制造方法 |
CN101383299A (zh) * | 2007-09-05 | 2009-03-11 | 精材科技股份有限公司 | 电子元件的晶圆级封装及其制造方法 |
US20090289318A1 (en) * | 2008-05-23 | 2009-11-26 | Xintec Inc. | Electronics device package and fabrication method thereof |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103681661A (zh) * | 2012-09-14 | 2014-03-26 | 台湾积体电路制造股份有限公司 | 晶圆中的划线 |
CN103681661B (zh) * | 2012-09-14 | 2017-11-03 | 台湾积体电路制造股份有限公司 | 晶圆中的划线 |
CN108630599A (zh) * | 2017-03-22 | 2018-10-09 | 东莞新科技术研究开发有限公司 | 芯片的形成方法 |
CN111226313A (zh) * | 2020-01-07 | 2020-06-02 | 长江存储科技有限责任公司 | 用于多晶圆堆叠和切割的方法 |
TWI745892B (zh) * | 2020-01-07 | 2021-11-11 | 大陸商長江存儲科技有限責任公司 | 用於多晶圓堆疊和切割的方法 |
US11710717B2 (en) | 2020-01-07 | 2023-07-25 | Yangtze Memory Technologies Co., Ltd. | Methods for multi-wafer stacking and dicing |
Also Published As
Publication number | Publication date |
---|---|
HK1172152A1 (zh) | 2013-04-12 |
US8071429B1 (en) | 2011-12-06 |
CN102544035B (zh) | 2015-03-04 |
TW201236072A (en) | 2012-09-01 |
TWI449096B (zh) | 2014-08-11 |
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Address after: American California Patentee after: OmniVision Technologies, Inc. Address before: American California Patentee before: Omnivision Technologies, Inc. |