CN102539122A - Method and system for measuring diffraction efficiency of grating by using parabolic reflector - Google Patents
Method and system for measuring diffraction efficiency of grating by using parabolic reflector Download PDFInfo
- Publication number
- CN102539122A CN102539122A CN2012100077108A CN201210007710A CN102539122A CN 102539122 A CN102539122 A CN 102539122A CN 2012100077108 A CN2012100077108 A CN 2012100077108A CN 201210007710 A CN201210007710 A CN 201210007710A CN 102539122 A CN102539122 A CN 102539122A
- Authority
- CN
- China
- Prior art keywords
- light
- grating
- light beam
- tested
- parabolic mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention relates to a method and a system for measuring diffraction efficiency of a grating by using a parabolic reflector. The parabolic reflector is introduced into a measuring system. The parabolic reflector is characterized in that all light which is emitted from a focal point is reflected by the parabolic reflector. Reflected light beams move along a direction in parallel with an optical axis and are converged at a focal point of a rear focal plane of a convex lens through the convex lens which is perpendicular to the optical axis of the reflector. The probe of a detector is fixedly arranged at the focal point of the rear focal plane of the convex lens. Therefore, illuminating light waves which enter the grating in an incident way from any angle can be received by the probe of the detector. The method and the system have the advantages that the diffractive light energy can be received in real time within a large angle range, the diffractive light energy can be detected in the whole process, the system space is saved, the volume and the weight are reduced and the real-time fixed-point measurement of the diffraction efficiency is realized at the same time. Besides, by integrally adjusting the positions of the parabolic reflector, the incidence point of the grating and the probe of the detector, the system can meet the demands of different detection angle ranges and the universality is very high.
Description
Technical field
The present invention relates to a kind of method and system of measuring the grating diffraction efficiency curve, relate in particular to a kind of parabolic mirror character of utilizing, measure the method and system of diffraction efficiency of grating.
Background technology
Grating is a kind of important beam split optical element, is widely used in the every field of contemporary optics.Utilize the spectroscopic property of grating can make various device, like grating chi, grating spectrograph etc.When utilizing grating to carry out the practical devices design, at first to accurately know the peculiar parameters of grating such as grating cycle, grating refractive index degree of modulation and net thickness.These Determination of Parameters can obtain through research diffraction efficiency of grating curve.
In carrying out the diffraction efficiency of grating measuring process, the grating diffration angle can change along with the incident angle of incident light wave and change.When the grating cycle is big, multistage diffraction has appearred in diffraction direction, and changing with incident angle to the inferior angle of diffraction of certain one-level is not clearly.Can detector be fixed on a position to such grating, just can accomplish the measurement of diffraction efficiency.But for very little grating of grating cycle, especially for body grating, when wavelength was constant, very big change can take place with the change of incident angle in angle of diffraction, so, adopt the fixed detector method, can not accomplish measurement to diffraction efficiency of grating.This probe that just requires to accept diffraction energy can change in polarizers of big angle scope.
The measurement of diffraction efficiency of grating at present is to change incident angle with electronic step machine control turntable basically, manually changes position of detector and measures.This method can change because of the angle of detector artificially introduces measuring error.When the light wave near normal incided grating surface, its diffraction light wave was near incident light wave simultaneously.When surveying the diffraction light energy, detector will light-baffling phenomena occur and make the measurement of diffraction efficiency the blind area occur measuring.
Though a kind of realization of proposition is arranged recently diffraction efficiency of grating is carried out the autoscan measurement mechanism (patent No.: CN101545826); Can direct detection near the diffracted beam in the full angle scope, effectively solved the problem that exists in the above-mentioned diffraction efficiency measuring process.But this method in accepting the process of diffraction energy, need to detector on a large scale in along with incident angle changes and rotates, this makes measuring system need very big space, is unfavorable for this set of systems is dressed up instrument, carries out engineering survey.Simultaneously need adopt two detectors that are fixed on the electrical turntable to survey for different incidence angles, different detector record diffraction energies are introduced error to diffraction efficiency curve, have also increased the requirement of measuring system to experimental cost greatly.In the process of two detector conversions, might exist in addition and measure blind area and error in judgement.
Summary of the invention
The technical matters that solves
For fear of the weak point of prior art, the present invention proposes a kind of method and system of utilizing parabolic mirror to measure diffraction efficiency of grating.
Thought of the present invention is: Fermat principle is obeyed in the propagation of light, and promptly in all possible travel path that light experienced, the pairing light path of Actual path is got extreme value.According to paraboloidal geometric properties; Arbitrarily a bit after parabolic reflector, all be parallel to parabolic axis of symmetry on the parabola with the line of focus; Therefore for parabolic mirror; The Ray Of Light that is set out by focus is after parabolic mirror reflects, and reflection ray must be parallel to the optical axis of parabolic mirror.As shown in Figure 1, the light that is sent by focus is through parabolic mirror reflects, and reflected light all is parallel to the optical axis direction of paraboloidal mirror.
Technical scheme
A kind of method of utilizing parabolic mirror to measure diffraction efficiency of grating is characterized in that step is following:
Step 1: laser instrument is sent light be divided into first light beam and second light beam in 1: 1 ratio of energy;
Step 2: wherein first light beam collimates to diameter shines on the tested grating less than the parallel beam of 1mm and with incident angle, and the incidence point of adjustment incident angle is positioned at the along of parabolic mirror; Light beam forms the light beam that is parallel to optical axis direction through parabolic mirror reflects again behind tested optical grating diffraction, converge at a bit through convex lens again, measures the light intensity numerical value of this point;
Step 3: the twice with the light intensity numerical value at the convergent point place that the measures second light beam light intensity after divided by step 1 beam splitting obtains tested grating diffration efficient.
A kind of method of utilizing parabolic mirror to obtain body grating diffraction efficiency angle Selection linearity curve is characterized in that: change the incident angle that shines first light beam on the tested grating from 0 ° to-90 ° or from 0 ° to 90 °, following step circulates:
Step (1): laser instrument is sent light be divided into first light beam and second light beam in 1: 1 ratio of energy;
Step (2): wherein first light beam collimates to diameter shines on the tested grating less than the parallel beam of 1mm and with incident angle, and the incidence point of adjustment incident angle is positioned at the along of parabolic mirror; Light beam forms the light beam that is parallel to optical axis direction through parabolic mirror reflects again behind tested optical grating diffraction, converge at a bit through convex lens again, measures the light intensity numerical value of this point;
Step (3): with the twice of the light intensity numerical value at the convergent point place that the measures second light beam light intensity after divided by step 1 beam splitting, tested grating diffration efficient when obtaining this incident angle;
Obtaining the diffraction efficiency series of values between 0 ° to-80 ° or 0 ° to 80 °, is transverse axis with the incident angle, and diffraction efficiency is the longitudinal axis, obtains the angle Selection linearity curve of tested diffraction efficiency of grating; The change amount step value of said incident angle is less than 2 °.
A kind ofly realize the said system that utilizes parabolic mirror to measure the diffraction efficiency of grating method, it is characterized in that comprising laser instrument 1, beam splitter 2, beam-expanding collimation mirror 10, ellipsoidal reflector 6, second optical power detector 7 and first optical power detector 8; Beam splitter 2 is set on the laser optical path of laser instrument 1, and it is 1: 1 first light beam and second light beam that the light beam that beam splitter 2 sends laser instrument 1 is divided into beam intensity ratio; The light intensity that second optical power detector 7 records second light beam is set in the light path of second light beam; Beam-expanding collimation mirror 10 is set in the light path of first light beam, is the parallel beam of diameter less than 1mm with its collimation, and tested grating 5 is arranged on the light path of collimated light beam, and parabolic mirror 6 is arranged on the light path of tested optical grating diffraction light beam; Wherein the incidence point of collimation parallel beam on tested grating is the focus of parabolic mirror; On the reflected light path of parabolic mirror; With the optical axis vertical direction one convex lens 9 are set; In convex lens 9 back focal plane focal positions first optical power detector 8 is set, measures the intensity of reflected light of parabolic mirror; The twice of the light intensity that the light intensity numerical value that measures with first optical power detector 8 measures divided by second optical power detector 7 obtains tested grating diffration efficient.
A kind ofly realize that the said parabolic mirror that utilizes measures the system that diffraction efficiency of grating obtains the angle Selection linearity curve; It is characterized in that comprising laser instrument 1, beam splitter 2, beam-expanding collimation mirror 10, ellipsoidal reflector 6, second optical power detector 7 and first optical power detector 8; Beam splitter 2 is set on the laser optical path of laser instrument 1, and it is 1: 1 first light beam and second light beam that the light beam that beam splitter 2 sends laser instrument 1 is divided into beam intensity ratio; The light intensity that second optical power detector 7 records second light beam is set in the light path of second light beam; Beam-expanding collimation mirror 10 is set in the light path of first light beam, is the parallel beam of diameter less than 1mm with its collimation, and tested grating 5 is arranged on the light path of collimated light beam, and parabolic mirror 6 is arranged on the light path of tested optical grating diffraction light beam; Wherein the incidence point of collimation parallel beam on tested grating is the focus of parabolic mirror; On the reflected light path of parabolic mirror; With the optical axis vertical direction one convex lens 9 are set; In convex lens 9 back focal plane focal positions first optical power detector 8 is set, measures the intensity of reflected light of parabolic mirror; Tested grating is placed on the universal stage 3; First optical power detector 8 places convex lens 9 back focal plane focal positions; Parallel beam behind the adjustment beam-expanding collimation mirror 10 shines on the tested grating; Rotate universal stage 3 and make that the incident angle of parallel beam changes from 0 ° to-80 ° or 0 ° to 80 ° on the tested grating; Change amount step value is less than 2 °, use first optical power detector 8 in incident angle from 0 ° to-80 ° or 0 ° of intensity of reflected light that records second light beam on the parabolic mirror when to 80 °, changing; The twice of the light intensity that the light intensity numerical value that in each the variation, measures with first optical power detector 8 measures divided by second optical power detector 7, the serial diffraction efficiency of the tested grating that obtains changing.
Said tested grating is reflective gratings or transmission-type grating.
Beneficial effect
A kind of method and system of utilizing parabolic mirror to measure diffraction efficiency of grating that the present invention proposes are incorporated into measuring system with parabolic mirror.The characteristics of parabolic mirror are through parabolic mirror reflects with all light that send from focus; Folded light beam is all along being parallel to optical axis direction; Convex lens through perpendicular to mirror optical axis converge at convex lens back focal plane focal position, and the probe of detector is fixed on convex lens back focal plane focal position.Lighting light wave can be received by detector probe with the arbitrarily angled light that incides on the grating like this.This system is can be in polarizers of big angle scope real-time accepts the diffraction light energy.Can carry out whole process to the diffraction light energy and survey, save system space.Effectively dwindle the volume of this measuring system and alleviate its weight, realized the real-time one-point measurement of diffraction efficiency simultaneously.In addition, only need whole parabolic mirror, grating incidence point and the detector probe position adjusted, promptly, have very high versatility applicable to different detection angle scope demands.
Description of drawings
Fig. 1: the light that is the different directions that sends from focus of parabolic mirror is through parabolic mirror reflects, and reflected light is along the synoptic diagram that is parallel to the parabolic mirror optical axis direction;
Fig. 2: be the system architecture synoptic diagram that the present invention measures the reflective gratings diffraction efficiency;
Fig. 3: be the system architecture synoptic diagram that the present invention measures the transmission-type grating diffraction efficiency;
Fig. 4: the angle Selection linearity curve that is the tested diffraction efficiency of grating measured of the present invention
Among the figure: 1-laser instrument, 2-beam splitter, 3-universal stage, 4-three-dimensional adjustable shelf, 5-reflective gratings, 6-ellipsoidal mirror, 7-second optical power detector, 8-first optical power detector, 9-convex lens, 10-beam-expanding collimation mirror, 11-transmission-type grating.
Embodiment
Combine embodiment, accompanying drawing that the present invention is further described at present:
Embodiment one: a kind of system architecture synoptic diagram that utilizes parabolic mirror to measure diffraction efficiency of grating of the present invention's design is as shown in Figure 2, comprising: laser instrument 1, beam splitter 2; Universal stage 3, three-dimensional adjustable shelf 4, reflective gratings 5; Parabolic mirror 6, the second optical power detectors 7, the first optical power detectors 8; Convex lens 9, beam-expanding collimation mirror 10.
Describedly a kind ofly realize that the said workflow of the system that parabolic mirror measures the reflective gratings diffraction efficiency of utilizing is following: the wavelength that optical fiber coupling output He-Ne laser instrument 1 sends is that the laser beam of 632nm is that 1: 1 fiber optic splitter 2 is divided into first light beam and second light beam through splitting ratio; The light intensity P of second light beam
1Surveyed measurement by second optical power detector; Reflective gratings 5 is fixed on the three-dimensional adjustable shelf 4, and overall fixed is on universal stage 3; First light beam is become diameter to be not more than the parallel beam of 1mm by beam-expanding collimation mirror 10 beam-expanding collimations and incides on the reflective gratings 5; Adjustment three-dimensional adjustable shelf 4 and universal stage 3, and the focal position that parabolic mirror 6 is set overlaps with the light beam incidence point make formation after diffracted beam polished object face catoptron 6 reflections of reflective gratings 5 be parallel to the reflected light of incident beam; Reflected light shines on first optical power detector 8 that is positioned at its back focal plane convergent point position through behind the convex lens 9, and measures its intensity level P
2Light intensity numerical value P with the convergent point place that measures
2Divided by the second light beam light intensity P
1Twice, obtain tested grating diffration efficient; Change parallel beam from 40 ° to 55 ° and incide the incident angle on the reflective gratings 5 with 0.00125 ° precision change, obtain the diffraction efficiency series of values; With the incident angle is transverse axis, and diffraction efficiency is the longitudinal axis, obtains the angle Selection linearity curve of tested diffraction efficiency of grating as shown in Figure 4.
Embodiment two: a kind of system architecture synoptic diagram that utilizes parabolic mirror to measure the transmission-type grating diffraction efficiency of the present invention's design is as shown in Figure 3, comprising: laser instrument 1, beam splitter 2; Universal stage 3, three-dimensional adjustable shelf 4, transmission-type grating 11; Parabolic mirror 6, the second optical power detectors 7, the first optical power detectors 8; Convex lens 9, beam-expanding collimation mirror 10.
Describedly a kind ofly realize that the said workflow of the system that parabolic mirror measures the transmission-type grating diffraction efficiency of utilizing is following: the wavelength that optical fiber coupling output He-Ne laser instrument 1 sends is that the laser beam of 632nm is that 1: 1 fiber optic splitter 2 is divided into first light beam and second light beam through splitting ratio; The light intensity P of second light beam
1Surveyed measurement by second optical power detector; Transmission-type grating 11 is fixed on the three-dimensional adjustable shelf 4, and overall fixed is on universal stage 3; First light beam is become diameter to be not more than the parallel beam of 1mm by beam-expanding collimation mirror 10 beam-expanding collimations and incides on the transmission-type grating 11; Adjustment three-dimensional adjustable shelf 4 and universal stage 3, and the focal position that parabolic mirror 6 is set overlaps with the light beam incidence point make formation after diffracted beam polished object face catoptron 6 reflections of transmission-type grating 11 be parallel to the reflected light of incident beam; Reflected light shines on first optical power detector 8 that is positioned at its back focal plane convergent point position through behind the convex lens 9, and measures its intensity level P
2Light intensity numerical value P with the convergent point place that measures
2Divided by the second light beam light intensity P
1Twice, obtain the diffraction efficiency of tested transmission-type grating; Change parallel beam from 40 ° to 55 ° and incide the incident angle on the transmission-type grating 11 with 0.00125 ° precision change, obtain the diffraction efficiency series of values; With the incident angle is transverse axis, and diffraction efficiency is the longitudinal axis, obtains the angle Selection linearity curve of tested transmission-type grating diffraction efficiency as shown in Figure 4.
Claims (5)
1. method of utilizing parabolic mirror to measure diffraction efficiency of grating is characterized in that step is following:
Step 1: laser instrument is sent light be divided into first light beam and second light beam in 1: 1 ratio of energy;
Step 2: wherein first light beam collimates to diameter shines on the tested grating less than the parallel beam of 1mm and with incident angle, and the incidence point of adjustment incident angle is positioned at the along of parabolic mirror; Light beam forms the light beam that is parallel to optical axis direction through parabolic mirror reflects again behind tested optical grating diffraction, converge at a bit through convex lens again, measures the light intensity numerical value of this point;
Step 3: the twice with the light intensity numerical value at the convergent point place that the measures second light beam light intensity after divided by step 1 beam splitting obtains tested grating diffration efficient.
2. method of utilizing parabolic mirror to obtain body grating diffraction efficiency angle Selection linearity curve is characterized in that: change the incident angle that shines first light beam on the tested grating from 0 ° to-90 ° or from 0 ° to 90 °, following step circulates:
Step (1): laser instrument is sent light be divided into first light beam and second light beam in 1: 1 ratio of energy;
Step (2): wherein first light beam collimates to diameter shines on the tested grating less than the parallel beam of 1mm and with incident angle, and the incidence point of adjustment incident angle is positioned at the along of parabolic mirror; Light beam forms the light beam that is parallel to optical axis direction through parabolic mirror reflects again behind tested optical grating diffraction, converge at a bit through convex lens again, measures the light intensity numerical value of this point;
Step (3): with the twice of the light intensity numerical value at the convergent point place that the measures second light beam light intensity after divided by step 1 beam splitting, tested grating diffration efficient when obtaining this incident angle;
Obtaining the diffraction efficiency series of values between 0 ° to-80 ° or 0 ° to 80 °, is transverse axis with the incident angle, and diffraction efficiency is the longitudinal axis, obtains the angle Selection linearity curve of tested diffraction efficiency of grating; The change amount step value of said incident angle is less than 2 °.
3. realize the said system that utilizes parabolic mirror to measure the diffraction efficiency of grating method of claim 1 for one kind; It is characterized in that comprising laser instrument (1), beam splitter (2), beam-expanding collimation mirror (10), ellipsoidal reflector (6), second optical power detector (7) and first optical power detector (8); Beam splitter (2) is set on the laser optical path of laser instrument (1), and it is 1: 1 first light beam and second light beam that the light beam that beam splitter (2) sends laser instrument (1) is divided into beam intensity ratio; The light intensity that second optical power detector (7) records second light beam is set in the light path of second light beam; Beam-expanding collimation mirror (10) is set in the light path of first light beam, is the parallel beam of diameter less than 1mm with its collimation, and tested grating (5) is arranged on the light path of collimated light beam, and parabolic mirror (6) is arranged on the light path of tested optical grating diffraction light beam; Wherein the incidence point of collimation parallel beam on tested grating is the focus of parabolic mirror; On the reflected light path of parabolic mirror; With the optical axis vertical direction one convex lens (9) are set; In convex lens (9) back focal plane focal position first optical power detector (8) is set, measures the intensity of reflected light of parabolic mirror; The twice of the light intensity that the light intensity numerical value that measures with first optical power detector (8) measures divided by second optical power detector (7) obtains tested grating diffration efficient.
4. realize the said system that utilizes parabolic spherical reflector measurement diffraction efficiency of grating to obtain the angle Selection linearity curve of claim 2 for one kind; It is characterized in that comprising laser instrument (1), beam splitter (2), beam-expanding collimation mirror (10), ellipsoidal reflector (6), second optical power detector (7) and first optical power detector (8); Beam splitter (2) is set on the laser optical path of laser instrument (1), and it is 1: 1 first light beam and second light beam that the light beam that beam splitter (2) sends laser instrument (1) is divided into beam intensity ratio; The light intensity that second optical power detector (7) records second light beam is set in the light path of second light beam; Beam-expanding collimation mirror (10) is set in the light path of first light beam, is the parallel beam of diameter less than 1mm with its collimation, and tested grating (5) is arranged on the light path of collimated light beam, and parabolic mirror (6) is arranged on the light path of tested optical grating diffraction light beam; Wherein the incidence point of collimation parallel beam on tested grating is the focus of parabolic mirror; On the reflected light path of parabolic mirror; With the optical axis vertical direction one convex lens (9) are set; In convex lens (9) back focal plane focal position first optical power detector (8) is set, measures the intensity of reflected light of parabolic mirror; Tested grating is placed on the universal stage (3); First optical power detector (8) places convex lens (9) back focal plane focal position; Parallel beam behind the adjustment beam-expanding collimation mirror (10) shines on the tested grating; Rotate universal stage (3) and make that the incident angle of parallel beam changes from 0 ° to-80 ° or 0 ° to 80 ° on the tested grating; Change amount step value is less than 2 °, use first optical power detector (8) in incident angle from 0 ° to-80 ° or 0 ° of intensity of reflected light that records second light beam on the parabolic mirror when to 80 °, changing; The twice of the light intensity that the light intensity numerical value that in each the variation, measures with first optical power detector (8) measures divided by second optical power detector (7), the serial diffraction efficiency of the tested grating that obtains changing.
5. according to claim 3 or 4 described systems, it is characterized in that: said tested grating is reflective gratings (5) or transmission-type grating (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100077108A CN102539122A (en) | 2012-01-04 | 2012-01-04 | Method and system for measuring diffraction efficiency of grating by using parabolic reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100077108A CN102539122A (en) | 2012-01-04 | 2012-01-04 | Method and system for measuring diffraction efficiency of grating by using parabolic reflector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102539122A true CN102539122A (en) | 2012-07-04 |
Family
ID=46346566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100077108A Pending CN102539122A (en) | 2012-01-04 | 2012-01-04 | Method and system for measuring diffraction efficiency of grating by using parabolic reflector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102539122A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105716833A (en) * | 2014-12-02 | 2016-06-29 | 中国科学院大连化学物理研究所 | Device for measuring diffraction efficiency of intermediate infrared blazed grating |
| CN109407365A (en) * | 2018-12-13 | 2019-03-01 | 中国科学院上海光学精密机械研究所 | The measuring device and method of liquid crystal grating device diffraction efficiency under laser action |
| CN109580548A (en) * | 2018-12-31 | 2019-04-05 | 华中光电技术研究所（中国船舶重工集团有限公司第七七研究所） | Scattering formula near field micro optical system based on transmission method |
| CN111596268A (en) * | 2020-05-08 | 2020-08-28 | 山东大学 | Laser beam angle deviation detection device |
| CN112834026A (en) * | 2020-12-28 | 2021-05-25 | 慧三维智能科技(苏州)有限公司 | Method for measuring divergence angle of laser beam based on transmission type volume Bragg grating |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6123935A (en) * | 1984-07-12 | 1986-02-01 | Fujitsu Ltd | Measuring device for light diffraction efficiency |
| JPH03130639A (en) * | 1989-10-17 | 1991-06-04 | Nec Corp | Optical-axis aligning method for mtf measuring apparatus |
| US7106428B2 (en) * | 2002-08-01 | 2006-09-12 | Olympus Optical Co., Ltd. | Focal length measuring device |
| CN101545826A (en) * | 2009-04-30 | 2009-09-30 | 中国科学院上海光学精密机械研究所 | Device and method for measuring diffraction efficiency of grating |
| CN101995327A (en) * | 2010-09-10 | 2011-03-30 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure for concave grating diffraction efficiency tester |
-
2012
- 2012-01-04 CN CN2012100077108A patent/CN102539122A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6123935A (en) * | 1984-07-12 | 1986-02-01 | Fujitsu Ltd | Measuring device for light diffraction efficiency |
| JPH03130639A (en) * | 1989-10-17 | 1991-06-04 | Nec Corp | Optical-axis aligning method for mtf measuring apparatus |
| US7106428B2 (en) * | 2002-08-01 | 2006-09-12 | Olympus Optical Co., Ltd. | Focal length measuring device |
| CN101545826A (en) * | 2009-04-30 | 2009-09-30 | 中国科学院上海光学精密机械研究所 | Device and method for measuring diffraction efficiency of grating |
| CN101995327A (en) * | 2010-09-10 | 2011-03-30 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure for concave grating diffraction efficiency tester |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105716833A (en) * | 2014-12-02 | 2016-06-29 | 中国科学院大连化学物理研究所 | Device for measuring diffraction efficiency of intermediate infrared blazed grating |
| CN105716833B (en) * | 2014-12-02 | 2017-12-15 | 中国科学院大连化学物理研究所 | The measurement apparatus of infrared balzed grating, diffraction efficiency in a kind of |
| CN109407365A (en) * | 2018-12-13 | 2019-03-01 | 中国科学院上海光学精密机械研究所 | The measuring device and method of liquid crystal grating device diffraction efficiency under laser action |
| CN109580548A (en) * | 2018-12-31 | 2019-04-05 | 华中光电技术研究所（中国船舶重工集团有限公司第七七研究所） | Scattering formula near field micro optical system based on transmission method |
| CN111596268A (en) * | 2020-05-08 | 2020-08-28 | 山东大学 | Laser beam angle deviation detection device |
| CN112834026A (en) * | 2020-12-28 | 2021-05-25 | 慧三维智能科技(苏州)有限公司 | Method for measuring divergence angle of laser beam based on transmission type volume Bragg grating |
| CN112834026B (en) * | 2020-12-28 | 2022-09-20 | 慧三维智能科技(苏州)有限公司 | Method for measuring divergence angle of laser beam based on transmission type volume Bragg grating |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104568819B (en) | All-fiber transmission reflection integrated terahertz time-domain spectroscopy system | |
| CN102169050B (en) | Method for comprehensively measuring reflectivity | |
| CN105424322A (en) | Self-calibration optical axis parallelism detector and detection method | |
| CN102564741A (en) | Method and system for measuring grating diffraction efficiency by using ellipsoidal reflecting mirror | |
| CN107132029B (en) | Method for simultaneously measuring reflectivity, transmittance, scattering loss and absorption loss of high-reflection/high-transmission optical element | |
| CN103616164A (en) | Reflectivity and transmittance comprehensive measurement method based on pulse laser light source | |
| CN105181298B (en) | Multiple reflections formula confocal laser Long focal length measurement method and apparatus | |
| CN102539122A (en) | Method and system for measuring diffraction efficiency of grating by using parabolic reflector | |
| CN101995327B (en) | Optical path structure for concave grating diffraction efficiency tester | |
| CN202210068U (en) | Single light source and double light beam laser particle analyzer | |
| CN101443647A (en) | Optical measurement system with simultaneous multiple wavelengths, multiple angles of incidence and angles of azimuth | |
| CN109470177B (en) | Three-dimensional angle measuring method and device based on double gratings | |
| CN103018733B (en) | Focal point positioning device for astronomical telescope | |
| CN103954589A (en) | Precision measurement device and method for optical material refractive index | |
| CN102508225B (en) | Double-shaft laser remote sensing instrument ground detection and calibration system and detection and calibration method | |
| CN103674488A (en) | Device for measuring divergence angle and light spot pattern of laser device | |
| CN202433173U (en) | Device for measuring diffraction efficiency of reflective grating by parabolic reflector | |
| CN202433172U (en) | Device for measuring transmission-type grating diffraction efficiency by using parabolic reflector | |
| CN202433174U (en) | Device for measuring diffraction efficiency of reflective grating with ellipsoidal reflector | |
| CN109579744A (en) | Trailing type three-dimensional photoelectric auto-collimation method and apparatus based on grating | |
| Montecchi | Upgrading of ENEA solar mirror qualification set-up | |
| CN218099615U (en) | Laser coaxial range finder | |
| CN107727371A (en) | Measure astronomical optical fiber transmissivity and the system and measuring method of focal ratio degradation simultaneously | |
| CN101324521B (en) | Light path system of interferometer | |
| CN110441200B (en) | Laser measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120704 |