CN102519646B - Micro-power loading test method of nonlinear piezoelectric micro-energy collector - Google Patents
Micro-power loading test method of nonlinear piezoelectric micro-energy collector Download PDFInfo
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- CN102519646B CN102519646B CN 201110422133 CN201110422133A CN102519646B CN 102519646 B CN102519646 B CN 102519646B CN 201110422133 CN201110422133 CN 201110422133 CN 201110422133 A CN201110422133 A CN 201110422133A CN 102519646 B CN102519646 B CN 102519646B
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Abstract
The invention relates to a micro-power loading test method of a nonlinear piezoelectric micro-energy collector, belonging to the technical field of tests, in particular to micro-power loading and testing of the nonlinear piezoelectric micro-energy collector. A non-contact micro-power loading test method is in three forms respectively as follows: the Z-directional micro repelling force loading test of the piezoelectric micro-energy collector when a reversing connecting piece, a piezoelectric ceramic pile actuator and the piezoelectric micro-energy collector are vertically arranged in the Z direction, the Z-directional micro repelling force loading test of the piezoelectric micro-energy collector when the reversing connecting piece, the piezoelectric ceramic pile actuator and the piezoelectric micro-energy collector are horizontally arranged in the X direction, and the equivalent stiffness test of the piezoelectric micro-energy collector. The test method solves the milli-newton level micro-power loading test problem of the nonlinear piezoelectric micro-energy collector; the loaded micro-power is in the micro-newton level; the test method is high in precision, good in micro-power loading stability and simple and convenient for operation; the micro-power loading amplitude is easy and precise to control; and sample wafers are difficult to damage.
Description
Technical field
The invention belongs to technical field of measurement and test, particularly little power of non-linear piezoelectric micromotor energy resource collecting device loads and test.
Background technology
Existing chemical cell finite capacity needs constantly to change the battery that exhausts at work, is difficult to satisfy the growth requirement of radio sensing network.Along with the power consumption of microdevice reduces gradually, utilize ambient vibration will become a kind of novel energy form for it provides the energy.Piezoelectricity energy resource collecting device utilizes the electromechanical coupling characteristics of piezoelectric to collect environment energy of vibration source, has long, energy resource density advantages of higher of life-span, common piezoelectricity energy resource collecting device mainly is based on the linear oscillator principle, typical structure is the piezoelectric cantilever of terminal installation quality piece, and its size mostly is tens millimeters to tens centimetres.Yet based on the piezoelectricity energy resource collecting device of non-linear principle, have characteristics such as exhibition frequency and output charge are big.The primary structure of non-linear piezoelectricity energy resource collecting device is that two permanent magnets are arranged in end and the homopolarity relative position of piezoelectric cantilever respectively, are subjected to the piezoelectric cantilever nonlinear vibration of exciting with the elementary cell of piezoelectric cantilever as the vibration energy collection.Wherein the effect of permanent magnet is: (1) can reduce the natural frequency of piezoelectric cantilever significantly as the end mass piece of piezoelectric cantilever, makes it to be suitable for the vibration environment of low frequency 0-1000 Hz.The nonlinear vibration characteristics that repulsive force between (2) two permanent magnets causes, the frequency that can improve system realize opening up characteristic frequently and improve the output voltage of piezoelectricity energy resource collecting device.
Along with the development of MEMS (micro electro mechanical system) and the further reduction of microdevice power consumption, another kind of MEMS piezoelectric micromotor energy resource collecting device begins to receive publicity.2010, gondola B Ando document " Nonlinear mechanism in MEMS devices for energy harvesting applications[J]. Journal of Micromechanics and Microengineering; 20 (2010); 125020 (12pp). " in mention, process non-linear piezoelectric micromotor energy resource collecting device based on soi wafer, it is of a size of 2000 microns of length, 800 microns of width, 15 microns of thickness, has non-linear bistable state phenomenon when two little permanent magnet spacings are approximately 1.7 millimeters.Non-linear piezoelectric micromotor energy resource collecting device based on the micro-electromechanical processing technology making, size can be in 1 millimeter or several millimeters scopes, two little permanent magnets are arranged in end and the same polarity relative position of piezoelectric micro-cantilever beam, little permanent magnet three-dimensional dimension is all less than 1mm, and little repulsive force that piezoelectric micromotor energy resource collecting device is subjected to arrives in the hundreds of milli ox zero.By changing the spacing of little permanent magnet, when loading little repulsive force for non-linear piezoelectric micromotor energy resource collecting device, piezoelectric micro-cantilever beam in the non-linear piezoelectric micromotor energy resource collecting device structure can occur bending and deformation, because little repulsive force is very little, be easy to the piezoelectric micro-cantilever beam that fractures in little power loading procedure, accurately load and test relatively difficulty of little repulsive force.
Being 20071001275.5 at number of patent application is called in " micro-force loading device of piezoelectric film cantilever beam type micro-force sensor ", little power that this charger is not suitable for non-linear piezoelectric micromotor energy resource collecting device loads test, main cause has: 1, in non-linear piezoelectric micromotor energy resource collecting device, little permanent magnet of piezoelectric micro-cantilever beam end, make probe tip can't normally contact with the semi-girder surface, and in contact declines the power loading procedure, probe can slide on the print surface, damages print easily; 2. owing to the diastrophic influence of the little forcer of piezoelectric bimorph, error is bigger; 3. can not load little power at the axial direction of non-linear piezoelectric micromotor energy resource collecting device.
Summary of the invention
The technical barrier that the present invention will solve is some shortcomings that overcome the contact micro-force loading device of present technology existence, finds the little power of a kind of noncontact to load the method for test, and little power that will be suitable for non-linear piezoelectric micromotor energy resource collecting device especially loads test.Whole charger utilizes micron-sized microbit in-migration to transmit little power, and the displacement between two little permanent magnets reduces, and causes producing between two little permanent magnets little repulsive force of milli newton level, utilizes the high-precision electronic balance to realize the test of little power simultaneously.The little power of milli newton level that has solved non-linear piezoelectric micromotor energy resource collecting device loads test problem, makes its not only precision height, and little power loading stability is good, and easy and simple to handle, accurately controls the amplitude that little power loads, not fragile print easily.
The technical solution used in the present invention is that a kind of little power of non-linear piezoelectric micromotor energy resource collecting device loads method of testing, the little power of noncontact loads method of testing and divides three kinds of modes, be respectively when commutation web member 6, piezoelectric ceramics stack actuator 8, when the vertical Z-direction of piezoelectric micromotor energy resource collecting device I is arranged, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device I loads test; When commutation web member 6, piezoelectric ceramics stacked actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X to layout, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device I loaded test; The equivalent stiffness test of piezoelectric micromotor energy resource collecting device I; The method of testing concrete steps are as follows:
1. when commutation web member 6, piezoelectric ceramics stack actuator 8, when the vertical Z-direction of piezoelectric micromotor energy resource collecting device I is arranged, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device I loads test:
The first step is built device, commutation web member 6, piezoelectric ceramics stacks actuator 8, piezoelectric micromotor energy resource collecting device I successively from top to bottom vertically Z-direction arrange, the commutation web member 6 of flute profile is connected the lower end of monoblock type multiaxis displacement platform 4 by bolt 5, it is affixed by the two the second bonding agents 7 that piezoelectric ceramics stacks actuator 8 and commutation web member 6, web member 10 is fixed on piezoelectric ceramics by the three or three bonding agent 9 and stacks on the actuator 8, the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the web member 10 by the 4th bonding agent 11, the N utmost point of first little permanent magnet A points to negative Z-direction, second little permanent magnet B is fixed on the cushion block 13 by the 5th bonding agent 12, the N utmost point of second little permanent magnet B points to positive Z-direction, and cushion block 13 is fixed on the electronic balance 14;
Second step, little power loaded test, regulate the X-axis of monoblock type multiaxis displacement platform 4 respectively, Y-axis, the milscale of Z axle, make first little permanent magnet A and the vertical conllinear of second little permanent magnet B, distance between the two is the 20-25 millimeter, secondly, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, piezoelectric micromotor energy resource collecting device I is moved to negative Z-direction, stepping is 10 microns, when the distance between first little permanent magnet A and the second little permanent magnet B reaches 2.5 millimeters, suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform 4, use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, make piezoelectric micromotor energy resource collecting device I move 1 micron of stepping to negative Z direction.Meanwhile, by the suffered little repulsive force size of electronic balance 14 test second little permanent magnet B, the i.e. little repulsive force size of the Z-direction of piezoelectric micromotor energy resource collecting device I.
2. when commutation web member 6, piezoelectric ceramics stacked actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X to layout, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device I loaded test:
The first step is built device, commutation web member 6, piezoelectric ceramics stacks actuator 8, piezoelectric micromotor energy resource collecting device I successively from right to left horizontal X to layout, the commutation web member 6 of flute profile is connected the lower end of monoblock type multiaxis displacement platform 4 by bolt 5, it is affixed by second bonding agent 7 with commutation web member 6 that piezoelectric ceramics stacks actuator 8, second little permanent magnet B is fixed on piezoelectric ceramics by the 6th bonding agent 17 and stacks on the actuator 8, the N polar orientations of permanent magnet B is born X-direction, the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the cushion block 13 by the 7th bonding agent 18, the positive X-direction of N polar orientations of first little permanent magnet A is fixed on cushion block 13 on the electronic balance 14;
Second step, little power loaded test, regulate the X-axis of monoblock type multiaxis displacement platform 4 respectively, Y-axis, the milscale of Z axle, make first little permanent magnet A and the horizontal conllinear of second little permanent magnet B, distance between the two is the 20-25 millimeter, secondly, regulate the milscale of the X-axis of monoblock type multiaxis displacement platform 4, second little permanent magnet B is moved to negative X-direction, stepping is 10 microns, when the distance between first little permanent magnet A and the second little permanent magnet B reaches 2.5 millimeters, suspend the milscale of the X axis of regulating monoblock type multiaxis displacement platform 4, use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, make second little permanent magnet B move 1 micron of stepping to negative X-direction, meanwhile, by the suffered little repulsive force size of Z-direction of electronic balance 14 test piezoelectric micromotor energy resource collecting device I.
3. the equivalent stiffness of piezoelectric micromotor energy resource collecting device I test:
The first step is built device, commutation web member 6, piezoelectric ceramics stack actuator 8 successively from top to bottom vertically Z-direction arrange that piezoelectric micromotor energy resource collecting device I horizontal X is to layout.Commutation web member 6 is connected the lower end of monoblock type multiaxis displacement platform 4 by bolt 5, it is affixed by second bonding agent 7 with commutation web member 6 that piezoelectric ceramics stacks actuator 8, web member 20 is fixed on piezoelectric ceramics by the 8th bonding agent 19 and stacks on the actuator 8, second little permanent magnet B is fixed on the web member 20 by the 9th bonding agent 21, the N polar orientations of permanent magnet B is born Z-direction, the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the cushion block 13 by the tenth bonding agent 22, the N utmost point of end first little permanent magnet A of piezoelectric micromotor energy resource collecting device I points to positive Z-direction, and cushion block 13 is fixed on the electronic balance 14;
Little power of second step loads test and obtains little permanent magnet spacing and little repulsive force size variation relation curve, regulate the X-axis of monoblock type multiaxis displacement platform 4 respectively, Y-axis, the milscale of Z axle, make first little permanent magnet A and the vertical conllinear of second little permanent magnet B, and distance between the two is the 20-25 millimeter, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, piezoelectric micromotor energy resource collecting device I is moved to negative Z-direction, stepping is 10 microns, when the distance between first little permanent magnet A and the second little permanent magnet B reaches 2.5 millimeters, suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform 4, use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, piezoelectric micromotor energy resource collecting device I is moved to negative Z direction, 1 micron of stepping, meanwhile, by the suffered little repulsive force size of Z-direction of electronic balance 14 test piezoelectric micromotor energy resource collecting device I, draw out little permanent magnet spacing and little repulsive force size variation graph of relation.
The 3rd step equivalent stiffness k test, regulate the X-axis of monoblock type multiaxis displacement platform 4 respectively, Y-axis, the milscale of Z axle, make first little permanent magnet A and the vertical conllinear of second little permanent magnet B, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, second little permanent magnet B is moved to negative Z axle, first little permanent magnet A and second little permanent magnet B distance between the two are 20 millimeters, be designated as X0, adopt the Z axle milscale or (with) drive power supply for piezoelectric ceramics drives piezoelectric ceramics and stacks actuator 8 and move, obtain second little permanent magnet B at the axial displacement X1 of Z, because the existence of little repulsive force between first little permanent magnet A and the second little permanent magnet B, piezoelectric micromotor energy resource collecting device I bends, the displacement of terminal first little permanent magnet A is designated as X, distance between first little permanent magnet A and the second little permanent magnet B is designated as X2 at this moment, electronic balance 14 tests little repulsive force size at this moment is F, find out the X2 value by little permanent magnet spacing and little repulsive force size variation graph of relation that second step obtained, the Z-direction displacement X=X1+X2-X0 of first little permanent magnet A, the equivalent stiffness calculating formula of piezoelectric micromotor energy resource collecting device I is k=F/X.
The invention has the beneficial effects as follows: the equivalent stiffness that can test piezoelectric micromotor energy resource collecting device; Can regulate spacing between first little permanent magnet A and the second little permanent magnet B with 1 micron stepping, under the diastrophic condition of piezoelectric micromotor energy resource collecting device, accurately test the little repulsive force between two little permanent magnets; Can also adopt piezoelectric ceramics to stack actuator as exciting source as a kind of non-contacting exciting mode, be used for driving the vibration of piezoelectric micromotor energy resource collecting device.
Description of drawings
Accompanying drawing 1 is non-linear piezoelectric micromotor energy resource collecting device front view.Wherein: 1-substrate, 2-bonding agent, 3-the first bonding agent, the little permanent magnet of A-first, the little permanent magnet of B-second, C-electrode C, D-electrode D, I-piezoelectric micromotor energy resource collecting device.
Accompanying drawing 2 is the E-E sectional view of substrate.Wherein: a-silicon layer, b-silicon dioxide layer, c-bottom electrode layer, d-piezoelectric material layer, e-upper electrode layer, f-insulation course.
Accompanying drawing 3 is that the little repulsive force of Z-direction loads test pattern.Wherein: Z-solid axes Z axle, X-solid axes X-axis, I-piezoelectric micromotor energy resource collecting device, 1-substrate, 2-bonding agent, C-electrode C, D-electrode D, 4-monoblock type multiaxis displacement platform, 5-bolt, 6-commutation web member, 7-the second bonding agent, 8-piezoelectric ceramics stacks actuator, G-electrode G, F-electrode F, 9-the three bonding agent, 10-web member, 11-the four bonding agent, the little permanent magnet of A-first, the little permanent magnet of B-second, 12-the five bonding agent, 13-cushion block, 14-electronic balance, 15-vibration-damped table, 16-plexiglass tent.
Accompanying drawing 4 is that the little repulsive force of Z-direction loads test pattern.Wherein: Z-solid axes Z axle, X-solid axes X-axis, I-piezoelectric micromotor energy resource collecting device, 1-substrate, 2-bonding agent, C-electrode C, D-electrode D, 4-monoblock type multiaxis displacement platform, 5-bolt, 6-commutation web member, 7-the second bonding agent, 8-piezoelectric ceramics stacks actuator, G-electrode G, F-electrode F, 17-the six bonding agent, the little permanent magnet A of A-first, the little permanent magnet B of B-second, 18-the seven bonding agent, 13-cushion block, 14-electronic balance, 15-vibration-damped table, 16-plexiglass tent.
Accompanying drawing 6 is the vertical view of monoblock type multiaxis displacement platform.Wherein: X-solid axes X-axis, Y-solid axes Y-axis.
Accompanying drawing 7 is little permanent magnet spacing and little repulsive force size variation graph of relation.Wherein: ordinate is little repulsive force, and unit is milli newton mN, and horizontal ordinate is little permanent magnet spacing, and unit is micron μ m.
Embodiment
Describe enforcement of the present invention in detail below in conjunction with accompanying drawing.The little power of noncontact loads method of testing and divides three kinds of modes, be respectively when commutation web member 6, piezoelectric ceramics stack actuator 8, when the vertical Z-direction of piezoelectric micromotor energy resource collecting device I is arranged, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device I loads to be tested; When commutation web member 6, piezoelectric ceramics stacked actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X to layout, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device I loaded test; The equivalent stiffness test of piezoelectric micromotor energy resource collecting device I.When little power loads test, will be fixed on the vibration-damped table after all device integration, and cover device with plexiglass tent.
Non-linear piezoelectric micromotor energy resource collecting device front view as shown in Figure 1, have only when producing interactional little repulsive force between first little permanent magnet A and the second little permanent magnet B, just has the vibration nonlinear characteristic, be referred to as non-linear piezoelectric micromotor energy resource collecting device I, piezoelectric micromotor energy resource collecting device I comprises substrate 1, bonding agent 2, the first little permanent magnet A, electrode C and electrode D; The E-E cross section of substrate 1 is respectively silicon layer a from the bottom to top, silicon dioxide layer b, and bottom electrode layer c, piezoelectric material layer d, upper electrode layer e and insulation course f, as shown in Figure 2.The length range of piezoelectric micromotor energy resource collecting device I is 1500 microns to 3000 microns, and width range is 500 microns to 800 microns, and wherein the thickness range of piezoelectric micro-cantilever beam is 15 microns to 25 microns.
At first, adopt micro-electromechanical processing technology to process substrate 1, in this example, substrate 1 is a piezoelectric micro-cantilever beam, and length is 3000 microns, and width is 800 microns, thickness is 25 microns, among the E-E of cross section, be respectively silicon layer a, silicon dioxide layer b, bottom electrode layer c, piezoelectric material layer d, upper electrode layer e and insulation course f from the bottom to top, as shown in Figure 2.The permanent magnet material of selecting for use is neodymium iron boron, the length of polarised direction is 800 microns, adopt scribing machine that permanent magnet is cut into first little permanent magnet A and second little permanent magnet B, first little permanent magnet A and second little permanent magnet B are square, and the high size of length and width is 800 microns.Adopt low viscosity adhesive with substrate 1 and first little permanent magnet A bonding, be combined into piezoelectric micromotor energy resource collecting device I as shown in fig. 1.When little power loads test, will be fixed on the vibration-damped table 15 after all device integration, and cover device with plexiglass tent 16, whole device is adapted at the super toilet work of fixed temperature and humidity.
1. when commutation web member 6, piezoelectric ceramics stack actuator 8, when the vertical Z-direction of piezoelectric micromotor energy resource collecting device I is arranged, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device I loads test:
The first step is built device, as shown in Figure 3, commutation web member 6, piezoelectric ceramics stacks actuator 8, piezoelectric micromotor energy resource collecting device I vertically successively from top to bottom vertically Z-direction arrange, the commutation web member 6 of flute profile is connected monoblock type multiaxis displacement platform 4 lower ends by bolt 5, it is affixed by second bonding agent 7 with commutation web member 6 that piezoelectric ceramics stacks actuator 8, web member 10 is fixed on piezoelectric ceramics by the 3rd bonding agent 9 and stacks on the actuator 8, the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the web member 10 by the 4th bonding agent 11, the N utmost point of first little permanent magnet A points to negative Z-direction, second little permanent magnet B is fixed on the cushion block 13 by the 5th bonding agent 12, the N utmost point of second little permanent magnet B points to positive Z-direction, and cushion block 13 is fixed on the electronic balance 14;
Second step, little power loaded test, regulated X-axis, the Y-axis of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively, make first little permanent magnet A and the vertical conllinear of second little permanent magnet B, and distance between the two was the 20-25 millimeter.Secondly, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, piezoelectric micromotor energy resource collecting device I is moved to negative Z-direction, stepping is 10 microns, when the distance between first little permanent magnet A and the second little permanent magnet B reaches 2.5 millimeters, suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform 4, use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, make piezoelectric micromotor energy resource collecting device I move 1 micron of stepping to negative Z direction.Meanwhile, by the suffered little repulsive force size of electronic balance 14 test second little permanent magnet B, the i.e. little repulsive force size of the Z-direction of piezoelectric micromotor energy resource collecting device I.
2. when commutation web member 6, piezoelectric ceramics stacked actuator 8, piezoelectric micromotor energy resource collecting device I horizontal X to layout, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device I loaded test:
The first step is built device, as shown in Figure 4, commutation web member 6, piezoelectric ceramics stacks actuator 8, piezoelectric micromotor energy resource collecting device I successively from right to left horizontal X to layout, the commutation web member 6 of flute profile is connected monoblock type multiaxis displacement platform 4 lower ends by inner bolt 5, it is affixed by second bonding agent 7 with commutation web member 6 that piezoelectric ceramics stacks actuator 8, second little permanent magnet B is fixed on piezoelectric ceramics by the 6th bonding agent 17 and stacks on the actuator 8, the N polar orientations of permanent magnet B is born X-direction, the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the cushion block 13 by the 7th bonding agent 18, the N utmost point of first little permanent magnet A points to positive X-direction, and cushion block 13 is fixed on the electronic balance 14;
Second step, little power loaded test, regulate the X-axis of monoblock type multiaxis displacement platform 4, Y-axis, the milscale of Z axle, make first little permanent magnet A and the horizontal conllinear of second little permanent magnet B, and distance between the two is the 20-25 millimeter, secondly, regulate the milscale of the X-axis of monoblock type multiaxis displacement platform 4, second little permanent magnet B is moved to negative X-direction, stepping is 10 microns, when the distance between first little permanent magnet A and the second little permanent magnet B reaches 2.5 millimeters, suspend the milscale of the X axis of regulating monoblock type multiaxis displacement platform 4, use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, make second little permanent magnet B move 1 micron of stepping to negative directions X, meanwhile, by the suffered little repulsive force size of Z-direction of electronic balance 14 test piezoelectric micromotor energy resource collecting device I.
3. the equivalent stiffness of piezoelectric micromotor energy resource collecting device I test:
The first step is built device, as shown in Figure 5, commutation web member 6 stacks actuator 8 vertical Z-direction layout from top to bottom with piezoelectric ceramics, piezoelectric micromotor energy resource collecting device I horizontal X is to layout, commutation web member 6 is connected monoblock type multiaxis displacement platform 4 lower ends by bolt 5, it is affixed by second bonding agent 7 with commutation web member 6 that piezoelectric ceramics stacks actuator 8, web member 20 is fixed on piezoelectric ceramics by the 8th bonding agent 19 and stacks on the actuator 8, second little permanent magnet B is fixed on the web member 20 by the 9th bonding agent 21, the N polar orientations of permanent magnet B is born Z-direction, the substrate 1 of piezoelectric micromotor energy resource collecting device I is fixed on the cushion block 13 by the tenth bonding agent 22, the N utmost point of end first little permanent magnet A of piezoelectric micromotor energy resource collecting device I points to positive Z-direction, and cushion block 13 is fixed on the electronic balance 14;
Little power of second step loads test and obtains little permanent magnet spacing and little repulsive force size variation graph of relation, regulate X-axis, the Y-axis of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively, make first little permanent magnet A and the vertical conllinear of second little permanent magnet B, and distance between the two is the 20-25 millimeter.Secondly, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, piezoelectric micromotor energy resource collecting device I is moved to negative Z-direction, stepping is 10 microns, when the distance between first little permanent magnet A and the second little permanent magnet B reaches 2.5 millimeters, suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform 4, use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator 8, piezoelectric micromotor energy resource collecting device I is moved to negative Z direction, 1 micron of stepping, meanwhile, by the suffered little repulsive force size of Z-direction of electronic balance 14 test piezoelectric micromotor energy resource collecting device I, draw out little permanent magnet spacing and little repulsive force size variation graph of relation, as shown in Figure 7.
The 3rd step equivalent stiffness k test, regulate X-axis, the Y-axis of monoblock type multiaxis displacement platform 4, the milscale of Z axle respectively, make first little permanent magnet A and the vertical conllinear of second little permanent magnet B, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform 4, second little permanent magnet B is moved to negative Z axle, first little permanent magnet A and second little permanent magnet B distance between the two are 20 millimeters, are designated as X0.Adopt the Z axle milscale or (with) drive power supply for piezoelectric ceramics drives piezoelectric ceramics and stacks actuator 8 and move, second little permanent magnet B is at the axial displacement X1 of Z, because the existence of little repulsive force between first little permanent magnet A and the second little permanent magnet B, piezoelectric micromotor energy resource collecting device I bends, the displacement of terminal first little permanent magnet A is designated as X, distance between first little permanent magnet A and the second little permanent magnet B is designated as X2 at this moment, electronic balance 14 tests little repulsive force size F at this moment, find out the X2 value by the little permanent magnet spacing shown in the accompanying drawing 7 and little repulsive force size variation graph of relation again, the Z-direction displacement of first little permanent magnet A is X=X1+X2-X0, and the equivalent stiffness calculating formula of piezoelectric micromotor energy resource collecting device I is: k=F/X.
It is to utilize micron-sized microbit in-migration to transmit little power that the little power of the non-linear piezoelectric micromotor energy resource collecting of the present invention device loads method of testing, and the displacement between two little permanent magnets reduces, and causes producing between first and second little permanent magnet AB little repulsive force of milli newton level.Adopt drive power supply for piezoelectric ceramics excitation piezoelectric ceramics to stack actuator, two distances between little permanent magnet are reduced with the displacement of 1 micron of stepping, simultaneously, utilize the high-precision electronic balance to realize the test of little power, the little power of milli newton level that has solved non-linear piezoelectric micromotor energy resource collecting device loads test problem.
Claims (1)
1. little power of non-linear piezoelectric micromotor energy resource collecting device loads method of testing, it is characterized in that, the little power of noncontact loads method of testing and divides three kinds of modes, be respectively when commutation web member (6), piezoelectric ceramics stack actuator (8), piezoelectric micromotor energy resource collecting device (I) vertically Z-direction is arranged, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device (I) loads test; When commutation web member (6), piezoelectric ceramics stacked actuator (8), piezoelectric micromotor energy resource collecting device (I) horizontal X to layout, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device (I) loaded test; The equivalent stiffness test of piezoelectric micromotor energy resource collecting device (I); The method of testing concrete steps are as follows:
1. when commutation web member (6), piezoelectric ceramics stacked actuator (8), piezoelectric micromotor energy resource collecting device (I) vertically Z-direction is arranged, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device (I) loaded test:
The first step is built device, commutation web member (6), piezoelectric ceramics stacks actuator (8), piezoelectric micromotor energy resource collecting device (I) successively from top to bottom vertically Z-direction arrange, the commutation web member (6) of flute profile is connected monoblock type multiaxis displacement platform (4) lower end by bolt (5), it is affixed by second bonding agent (7) with commutation web member (6) that piezoelectric ceramics stacks actuator (8), web member (10) is fixed on piezoelectric ceramics by the 3rd bonding agent (9) and stacks on the actuator (8), the substrate (1) of piezoelectric micromotor energy resource collecting device (I) is fixed on the web member (10) by the 4th bonding agent (11), the N utmost point of first little permanent magnet (A) points to negative Z-direction, second little permanent magnet (B) is fixed on the cushion block (13) by the 5th bonding agent (12), the N utmost point of second little permanent magnet (B) points to positive Z-direction, cushion block (13) is fixed on the electronic balance (14) again;
Second step, little power loaded test, regulate the X-axis of monoblock type multiaxis displacement platform (4) respectively, Y-axis, the milscale of Z axle, make vertically conllinear of first little permanent magnet (A) and second little permanent magnet (B), and distance between the two is the 20-25 millimeter, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform (4), piezoelectric micromotor energy resource collecting device (I) is moved to negative Z-direction, stepping is 10 microns, when the distance between first little permanent magnet (A) and the second little permanent magnet (B) reaches 2.5 millimeters, suspend the milscale of the Z axle of regulating monoblock type multiaxis displacement platform (4), use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator (8), piezoelectric micromotor energy resource collecting device (I) is moved to negative Z-direction, 1 micron of stepping, again by the suffered little repulsive force size of electronic balance (14) test second little permanent magnet (B), the i.e. axial little repulsive force size of the Z of piezoelectric micromotor energy resource collecting device (I);
2. when commutation web member (6), piezoelectric ceramics stacked actuator (8), piezoelectric micromotor energy resource collecting device (I) horizontal X to layout, the little repulsive force of the Z-direction of piezoelectric micromotor energy resource collecting device (I) loaded test:
The first step is built device, commutation web member (6), piezoelectric ceramics stacks actuator (8), piezoelectric micromotor energy resource collecting device (I) successively from right to left horizontal X to layout, the commutation web member (6) of flute profile is connected monoblock type multiaxis displacement platform (4) lower end by bolt (5), it is affixed by second bonding agent (7) with commutation web member (6) that piezoelectric ceramics stacks actuator (8), second little permanent magnet (B) is fixed on piezoelectric ceramics by the 6th bonding agent (17) and stacks on the actuator (8), the N polar orientations of second little permanent magnet (B) is born X-direction, the substrate (1) of piezoelectric micromotor energy resource collecting device (I) is fixed on the cushion block (13) by the 7th bonding agent (18), the positive X-direction of N polar orientations of first little permanent magnet (A) is fixed on cushion block (13) on the electronic balance (14);
Second step, little power loaded test, regulate the X-axis of monoblock type multiaxis displacement platform (4) respectively, Y-axis, the milscale of Z axle, make first little permanent magnet (A) and the horizontal conllinear of second little permanent magnet (B), and distance between the two is the 20-25 millimeter, regulate the milscale of the X-axis of monoblock type multiaxis displacement platform (4), second little permanent magnet (B) is moved to negative X-direction, stepping is 10 microns, when the distance between first little permanent magnet (A) and the second little permanent magnet (B) reaches 2.5 millimeters, suspend the milscale of the X axis of regulating monoblock type multiaxis displacement platform (4), use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator (8), second little permanent magnet (B) is moved to negative directions X, 1 micron of stepping is again by the suffered little repulsive force size of Z-direction of electronic balance (14) test piezoelectric micromotor energy resource collecting device (I);
3. the equivalent stiffness of piezoelectric micromotor energy resource collecting device (I) test
The first step is built device, commutation web member (6) and piezoelectric ceramics stack actuator (8) successively from top to bottom vertically Z-direction arrange, piezoelectric micromotor energy resource collecting device (I) horizontal X is to layout, commutation web member (6) is connected monoblock type multiaxis displacement platform (4) lower end by bolt (5), it is affixed by second bonding agent (7) with commutation web member (6) that piezoelectric ceramics stacks actuator (8), web member (20) is fixed on piezoelectric ceramics by the 8th bonding agent (19) and stacks on the actuator (8), second little permanent magnet (B) is fixed on the web member (20) by the 9th bonding agent (21), the N polar orientations of permanent magnet (B) is born Z-direction, the substrate (1) of piezoelectric micromotor energy resource collecting device (I) is fixed on the cushion block (13) by the tenth bonding agent (22), the N utmost point of end first little permanent magnet (A) of piezoelectric micromotor energy resource collecting device (I) points to positive Z-direction, and cushion block (13) is fixed on the electronic balance (14);
Little power of second step loads test and draws little permanent magnet spacing and little repulsive force size variation graph of relation, regulate the X-axis of monoblock type multiaxis displacement platform (4) respectively, Y-axis, the milscale of Z axle, make vertically conllinear of first little permanent magnet (A) and second little permanent magnet (B), and distance between the two is the 20-25 millimeter, regulate the milscale of the Z axle of monoblock type multiaxis displacement platform (4), piezoelectric micromotor energy resource collecting device (I) is moved to negative Z-direction, stepping is 10 microns, when the distance between first little permanent magnet (A) and the second little permanent magnet (B) reaches 2.5 millimeters, suspend the Z axle milscale of regulating monoblock type multiaxis displacement platform (4), use drive power supply for piezoelectric ceramics excitation piezoelectric ceramics instead and stack actuator (8), piezoelectric micromotor energy resource collecting device (I) is moved to negative Z direction, 1 micron of stepping, by the suffered little repulsive force size of Z-direction of electronic balance (14) test piezoelectric micromotor energy resource collecting device (I), draw out little permanent magnet spacing and little repulsive force size variation graph of relation;
The 3rd step equivalent stiffness k test, regulate the X-axis of monoblock type multiaxis displacement platform (4) respectively, Y-axis, the milscale of Z axle, make vertically conllinear of first little permanent magnet (A) and second little permanent magnet (B), regulate the milscale of the Z axle of monoblock type multiaxis displacement platform (4), second little permanent magnet (B) is moved to negative Z axle, first little permanent magnet (A) and second little permanent magnet (B) distance between the two are 20 millimeters, be designated as X0, adopt the Z axle milscale or (with) drive power supply for piezoelectric ceramics drives piezoelectric ceramics to stack actuator (8) mobile, obtain second little permanent magnet (B) at the axial displacement X1 of Z, because the existence of little repulsive force between first little permanent magnet (A) and the second little permanent magnet (B), piezoelectric micromotor energy resource collecting device (I) bends, the displacement of terminal first little permanent magnet (A) is designated as X, distance between first little permanent magnet (A) and the second little permanent magnet (B) is designated as X2 at this moment, electronic balance (14) test little repulsive force size F at this moment, find out the X2 value by little permanent magnet spacing and little repulsive force size variation graph of relation again, the Z-direction displacement of first little permanent magnet (A) is X=X1+X2-X0, and the equivalent stiffness calculating formula of piezoelectric micromotor energy resource collecting device (I) is: k=F/X.
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