CN102492934B - 一种制备石墨烯薄膜的装置、方法及所得石墨烯薄膜 - Google Patents
一种制备石墨烯薄膜的装置、方法及所得石墨烯薄膜 Download PDFInfo
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- CN102492934B CN102492934B CN201110442123.7A CN201110442123A CN102492934B CN 102492934 B CN102492934 B CN 102492934B CN 201110442123 A CN201110442123 A CN 201110442123A CN 102492934 B CN102492934 B CN 102492934B
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
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- 229910010271 silicon carbide Inorganic materials 0.000 description 3
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CN201110442123.7A CN102492934B (zh) | 2011-12-26 | 2011-12-26 | 一种制备石墨烯薄膜的装置、方法及所得石墨烯薄膜 |
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CN201110442123.7A CN102492934B (zh) | 2011-12-26 | 2011-12-26 | 一种制备石墨烯薄膜的装置、方法及所得石墨烯薄膜 |
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CN102492934A CN102492934A (zh) | 2012-06-13 |
CN102492934B true CN102492934B (zh) | 2016-05-11 |
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CN201110442123.7A Active CN102492934B (zh) | 2011-12-26 | 2011-12-26 | 一种制备石墨烯薄膜的装置、方法及所得石墨烯薄膜 |
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Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103151248B (zh) * | 2013-03-07 | 2016-04-20 | 武汉电信器件有限公司 | 一种光电探测器制作中锌的扩散装置及其扩散方法 |
CN103435035B (zh) * | 2013-08-20 | 2016-08-10 | 常州二维碳素科技股份有限公司 | 一种连续制备和转移石墨烯的装置及方法 |
CN103449428B (zh) * | 2013-09-10 | 2015-11-25 | 常州二维碳素科技股份有限公司 | 一种石墨烯生长装置及其生长石墨烯的方法 |
CN103920423B (zh) * | 2014-04-21 | 2016-04-06 | 厦门大学 | 一种生长过程可视的用于石墨烯制备的真空腔 |
CN105088335B (zh) * | 2014-05-09 | 2018-01-05 | 理想能源设备(上海)有限公司 | 一种生长石墨烯薄膜的装置及其生长方法 |
CN103993296A (zh) * | 2014-06-09 | 2014-08-20 | 中国科学院宁波材料技术与工程研究所 | 基于管式炉的卷对卷气相沉积装置 |
CN103993297A (zh) * | 2014-06-09 | 2014-08-20 | 中国科学院宁波材料技术与工程研究所 | 一种连续快速生长石墨烯的气相沉积装置 |
CN105293474B (zh) * | 2014-08-01 | 2018-01-09 | 常州二维碳素科技股份有限公司 | 一种快速制备石墨烯的设备及其制备方法 |
CN106119806B (zh) * | 2016-06-27 | 2018-12-28 | 重庆墨希科技有限公司 | 一种流水式连续规模化石墨烯薄膜制备装置 |
CN109112499A (zh) * | 2018-08-30 | 2019-01-01 | 郑州大工高新科技有限公司 | 一种新型气相沉积法制备石墨烯的生产装置 |
WO2020082343A1 (zh) * | 2018-10-26 | 2020-04-30 | 丁海钊 | 线外圈石墨烯涂层装置 |
CN111394712A (zh) * | 2020-04-27 | 2020-07-10 | 青岛赛瑞达电子装备股份有限公司 | 双层石英工艺室结构 |
CN113186515A (zh) * | 2021-05-19 | 2021-07-30 | 江苏微导纳米科技股份有限公司 | 工艺管道加热装置 |
CN114671710B (zh) * | 2022-03-10 | 2023-04-07 | 西北工业大学 | 一种双周期多层TaC/HfC超高温陶瓷抗烧蚀涂层及制备方法 |
CN115367740A (zh) * | 2022-08-18 | 2022-11-22 | 安徽贝意克智能科技有限公司 | 一种垂直石墨烯的连续制备装备及使用方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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TW200535269A (en) * | 2004-04-26 | 2005-11-01 | Applied Films Gmbh & Co Kg | Method for coating substrates in inline installations |
CN101285175A (zh) * | 2008-05-29 | 2008-10-15 | 中国科学院化学研究所 | 化学气相沉积法制备石墨烯的方法 |
CN102191480A (zh) * | 2010-03-03 | 2011-09-21 | 佳能安内华股份有限公司 | 真空处理设备和真空处理方法 |
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CN1328410C (zh) * | 2004-10-19 | 2007-07-25 | 吉林大学 | 氧化锌生长用低压金属有机化学汽相沉积设备及其工艺 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200535269A (en) * | 2004-04-26 | 2005-11-01 | Applied Films Gmbh & Co Kg | Method for coating substrates in inline installations |
CN101285175A (zh) * | 2008-05-29 | 2008-10-15 | 中国科学院化学研究所 | 化学气相沉积法制备石墨烯的方法 |
CN102191480A (zh) * | 2010-03-03 | 2011-09-21 | 佳能安内华股份有限公司 | 真空处理设备和真空处理方法 |
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