CN102477540A - Method for preparing doped diamond-like carbon and grease composite lubricating film - Google Patents
Method for preparing doped diamond-like carbon and grease composite lubricating film Download PDFInfo
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- CN102477540A CN102477540A CN2010105630466A CN201010563046A CN102477540A CN 102477540 A CN102477540 A CN 102477540A CN 2010105630466 A CN2010105630466 A CN 2010105630466A CN 201010563046 A CN201010563046 A CN 201010563046A CN 102477540 A CN102477540 A CN 102477540A
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- grease
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- doped diamond
- lubricating film
- composite lubricating
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Abstract
The invention discloses a method for preparing a doped diamond-like carbon and grease composite lubricating film. The composite lubricating film is characterized in that a grease lubricant is taken as a raw material, a magnetron sputtering device is used to prepare a metal and nonmetal co-doped diamond film, and a stable and uniform grease lubricating film is adsorbed on the diamond film. The composite lubricating film has the advantage of good tribological property, and can be used as an antifriction and anti-wear protective coating.
Description
Technical field
The present invention relates to the preparation method of a kind of doped diamond and grease compounded lubricant film.
Background technology
DLC film have high firmness, low-friction coefficient, high abrasion, good corrosion-resistant can property and chemicalstability succeed at aspects such as mechanical wear-resistant coating, microelectromechanical systems (MEMS) and semiconductor materials as the new function thin-film material and use.Yet, discover that bigger internal stress and the material fragility that causes is the defective of DLC film has restricted its development to a great extent.The experiment proof; Through doped metallic elements (like aluminium, titanium, copper etc.) and non-metallic element (silicon, boron, nitrogen etc.), can effectively reduce the internal stress in the film, enhancement film toughness and thermostability; Improve the work-ing life of film, make it have more outstanding over-all properties.
Solid-grease compounded lubricated comparing with independent solid lubrication has following advantage: corrosion-resistant, anti-oxidant in the anti-ground experiment process, prolongation is resistance to worn the life-span; Compare with independent grease lubrication then have high bearing capacity, volatility is little, be easy to fluid management etc.; Research and development solid-grease compounded composite lubricating film can increase substantially lubricated safety and operation life, is the moving parts life-span of the improving China's high-tech sector guarantee that develops skill.
Summary of the invention
The preparation method who the purpose of this invention is to provide a kind of doped diamond and grease compounded lubricant film.
The present invention is raw material with the grease lubricant, adopts magnetic control sputtering device to prepare the DLC film of metal and nonmetal codoped and stable, the uniform grease lubrication film of absorption above that.
The preparation method of a kind of doped diamond and grease compounded composite lubricating film is characterized in that steps of the method are:
A does substrate with monocrystalline silicon piece, cleans before the use, places the Vakuumkammer of magnetic control sputtering device;
Before the B sputter gas pressure in vacuum is evacuated to 1 * 10
-3Pa～3 * 10
-3Pa, before deposit film with Ar plasma bombardment silicon chip surface; Adopt TiAl target and silicon target, Ar and CH
4Gas is as sputter and reactant gases, and the gas flow, deposition power and the depositing time that get into Vakuumkammer through control prepare adulterated quasi-diamond; Getting into Vakuumkammer Ar airshed is 100sccm～140sccm; CH
4Airshed is 40sccm～60sccm; The reaction total gas pressure is 0.5Pa～0.8Pa; Deposition current is 1.5～2.5A/cm
2The substrate negative bias is 100V～200V;
C chooses grease lubricant and evenly is spun on the DLC film surface, after the room temperature held, obtains doped diamond and grease compounded composite lubricating film.
Grease lubricant of the present invention is polyalphaolefin (PAO), pentamethylene lubricating oil or the railway grease that contains PAO, and they all have good lubricating property.
Metal-doped DLC film involved in the present invention has favorable mechanical performance and tribological property, can be as anticorrosive and antifriction antiwear protective coating.
Greasy films of the present invention has good extreme pressure property and anti-wear and wear-resistant performance.The TP that adopts is following:
The UMT-2MT type friction wear testing machine of employing U.S. CE TR manufactured is estimated the tribological property of metal-doped DLC film, adopts the mode that reciprocatingly slides, and frequency is 3Hz; The single sliding stroke is 5mm; Normal load is 0.5N, 20 ℃ of envrionment temperatures, humidity 25%; The idol part is the steel ball of Φ 3mm, under room temperature and relative humidity RH=36%～40% condition, measures.Friction and wear test results shows, GCr15 steel ball and clean monocrystalline silicon surface frictional coefficient when rubbing is about 0.70.
0.5N load; TiAl and Si codoped DLC/GCr15 steel friction and wear test results show under the 10Hz sliding frequency: frictional coefficient is reduced to 0.10～0.15 behind monocrystalline silicon surface depositing Ti Al and the Si codoped DLC film; Along with the increase of slip number of times, frictional coefficient tends towards stability.Behind the monocrystalline silicon surface absorb oil lubricant of depositing Ti Al and Si codoped DLC, frictional coefficient further is reduced to 0.04～0.06;
Above coefficient of friction data shows that the metal involved in the present invention and the DLC film of nonmetal codoped have good tribological property, can be used as antifriction, wear-resistant protective coating; Doped diamond film surface absorb oil lubricant has antifriction and antistick effect, is expected the lubricant as fields such as space mechanism and infotecies.
Advantage of the present invention is: preparation process normal-temperature operation is lower to the material and the shape need of substrate.Film is fine and close, even, and surfaceness is low.Film antifriction antiwear and antistick performance are good.
Embodiment
Embodiment 1:
Do substrate with monocrystalline silicon piece, clean before the use, place Vakuumkammer;
Before the sputter gas pressure in vacuum is evacuated to 2.5 * 10
-3Pa.Before deposit film with Ar plasma bombardment 10 minutes with further cleaning silicon chip surface.Adopt TiAl target and silicon target, Ar and CH
4Gas is as sputter and reactant gases, and the Ar airshed that control gets into Vakuumkammer is 120sccm, CH
4Airshed is 40sccm, and reaction current is 1.5A/cm
2, the substrate negative bias is 150V, makes the doped diamond film;
Choose polyalphaolefin and evenly be spun on adulterated DLC film surface, after the room temperature held, obtain the quasi-diamond and the grease compounded lubricant film of metal and nonmetal codoped.
Embodiment 2:
Change the polyalphaolefin that uses into pentamethylene; Other steps are with embodiment 1.
Embodiment 3:
Polyalphaolefin is changed into the railway grease that contains PAO; Other steps are with embodiment 1.
Claims (2)
1. the preparation method of a doped diamond and grease compounded composite lubricating film is characterized in that steps of the method are:
A does substrate with monocrystalline silicon piece, cleans before the use, places the Vakuumkammer of magnetic control sputtering device;
Before the B sputter gas pressure in vacuum is evacuated to 1 * 10
-3Pa～3 * 10
-3Pa, before deposit film with Ar plasma bombardment silicon chip surface; Adopt TiAl target and silicon target, Ar and CH
4Gas is as sputter and reactant gases, and the gas flow, deposition power and the depositing time that get into Vakuumkammer through control prepare adulterated quasi-diamond; Getting into Vakuumkammer Ar airshed is 100sccm～140sccm; CH
4Airshed is 40sccm～60sccm; The reaction total gas pressure is 0.5Pa～0.8Pa; Deposition current is 1.5～2.5A/cm
2The substrate negative bias is 100V～200V;
C chooses grease lubricant and evenly is spun on the DLC film surface, after the room temperature held, obtains doped diamond and grease compounded composite lubricating film.
2. the method for claim 1 is characterized in that grease lubricant is polyalphaolefin, pentamethylene lubricating oil or the railway grease that contains polyalphaolefin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105630466A CN102477540A (en) | 2010-11-27 | 2010-11-27 | Method for preparing doped diamond-like carbon and grease composite lubricating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105630466A CN102477540A (en) | 2010-11-27 | 2010-11-27 | Method for preparing doped diamond-like carbon and grease composite lubricating film |
Publications (1)
| Publication Number | Publication Date |
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| CN102477540A true CN102477540A (en) | 2012-05-30 |
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| CN2010105630466A Pending CN102477540A (en) | 2010-11-27 | 2010-11-27 | Method for preparing doped diamond-like carbon and grease composite lubricating film |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105331945A (en) * | 2014-08-12 | 2016-02-17 | 上海航天设备制造总厂 | Preparing method for diamond-like carbon base solid-liquid composite lubricating film under high vacuum |
| CN107083551A (en) * | 2017-03-10 | 2017-08-22 | 广东工业大学 | A kind of ternary doping nano composite multiple layer diamond-like coating and its preparation method and application |
| CN110065011A (en) * | 2018-01-23 | 2019-07-30 | 项刚 | Skive and preparation method thereof |
| CN111223901A (en) * | 2019-11-29 | 2020-06-02 | 云谷（固安）科技有限公司 | Display panel and preparation method thereof |
| CN114196913A (en) * | 2021-12-13 | 2022-03-18 | 中国矿业大学 | Ultralow-friction solid-liquid composite lubricating coating and preparation method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040031625A1 (en) * | 2002-08-19 | 2004-02-19 | Lin Chih C. | DLC coating for earth-boring bit bearings |
| CN1863895A (en) * | 2003-08-06 | 2006-11-15 | 新日本石油株式会社 | System having DLC contacting faces, method for lubricating the system and lubricating oil for the system |
| CN101463466A (en) * | 2007-12-18 | 2009-06-24 | 中国科学院兰州化学物理研究所 | Preparation of metal doped diamond-like surface ion liquid lubricant self-assembled lubricating film |
| CN101619455A (en) * | 2008-07-03 | 2010-01-06 | 中国科学院兰州化学物理研究所 | Super lubricating Si-doped diamond film preparation method |
-
2010
- 2010-11-27 CN CN2010105630466A patent/CN102477540A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040031625A1 (en) * | 2002-08-19 | 2004-02-19 | Lin Chih C. | DLC coating for earth-boring bit bearings |
| CN1863895A (en) * | 2003-08-06 | 2006-11-15 | 新日本石油株式会社 | System having DLC contacting faces, method for lubricating the system and lubricating oil for the system |
| CN101463466A (en) * | 2007-12-18 | 2009-06-24 | 中国科学院兰州化学物理研究所 | Preparation of metal doped diamond-like surface ion liquid lubricant self-assembled lubricating film |
| CN101619455A (en) * | 2008-07-03 | 2010-01-06 | 中国科学院兰州化学物理研究所 | Super lubricating Si-doped diamond film preparation method |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105331945A (en) * | 2014-08-12 | 2016-02-17 | 上海航天设备制造总厂 | Preparing method for diamond-like carbon base solid-liquid composite lubricating film under high vacuum |
| CN107083551A (en) * | 2017-03-10 | 2017-08-22 | 广东工业大学 | A kind of ternary doping nano composite multiple layer diamond-like coating and its preparation method and application |
| CN107083551B (en) * | 2017-03-10 | 2019-06-11 | 广东工业大学 | A kind of ternary doping nano composite multiple layer diamond-like coating and its preparation method and application |
| CN110065011A (en) * | 2018-01-23 | 2019-07-30 | 项刚 | Skive and preparation method thereof |
| CN111223901A (en) * | 2019-11-29 | 2020-06-02 | 云谷（固安）科技有限公司 | Display panel and preparation method thereof |
| CN114196913A (en) * | 2021-12-13 | 2022-03-18 | 中国矿业大学 | Ultralow-friction solid-liquid composite lubricating coating and preparation method thereof |
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Application publication date: 20120530 |