CN102445167A - Method and device for evaluating surface shape - Google Patents
Method and device for evaluating surface shape Download PDFInfo
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- CN102445167A CN102445167A CN2010105023247A CN201010502324A CN102445167A CN 102445167 A CN102445167 A CN 102445167A CN 2010105023247 A CN2010105023247 A CN 2010105023247A CN 201010502324 A CN201010502324 A CN 201010502324A CN 102445167 A CN102445167 A CN 102445167A
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Abstract
The invention provides a method and device for evaluating a surface shape, which are used for detecting deformation and the like on surface shapes at higher accuracies. A surface light source (1) is used for irradiating patterns with periodic brightness towards glass (2); a CCD (Charge Coupled Device) video camera (3) is used for shooting patterns permeating the glass (2); and a signal processing device (4) is used for evaluating the surface shape of the glass (2) based on the deviation (deviation relative to the brightness periods of the patterns irradiated onto the glass (2)) of the shooting brightness periods.
Description
Technical field
The present invention relates to be used for to glass being the evaluation method estimated of the characteristic of surface configurations such as flatness of the object of representative and the evaluating apparatus that surface configuration is estimated with permeability or specularity.
Background technology
As the method that the characteristic of the surface configurations such as flatness of tabular objects such as glass is estimated, the method that has the mensuration result based on the cross sectional shape of measuring with contact mensuration machine of being estimated object to estimate.In this method, to estimated whole of object measure surface configuration concavo-convex, measuring the result based on it, to estimate the flatness of object etc. be desirable.But, in the evaluation that utilizes this assay method, spended time and cost of equipment that need be huge.Therefore, in the production engineering of the glass of reality etc., expect selecting section parts discretely and selected each position carried out the way of the mensuration of surface configuration.For example, towards certain direction of tabular object with several meters or cut apart as one and selected section parts and selected section parts measured than the length more than several meters.
But, the surface deformation of the muscle shape of glass, that short for example is 100～200mm.If, might omit short surface deformation based on the surface configuration evaluation that discrete measuring shape carries out.Therefore, under the situation of the tight evaluation of needs, still have to carry out the evaluation of spended time and expense.
As method easier and that accurately the characteristic of the surface configuration of tabular object is estimated, the method for putting down in writing in the japanese kokai publication hei 8-152403 communique is arranged.In the method; For example; The area source that from light and shade is carreau (tartan) shape is to being estimated the object projection light; To receiving light, estimate surface configuration by imaging apparatuss such as reflected light ccd video cameras to handling based on the electric signal that receives light from transmitted light or the reflected light of being estimated object.If it is being estimated object is smooth fully, then consistent from the state of the contrast of the state of the contrast of the light and shade that obtains based on the electric signal that receives light and known area source.Figure 28 (A) is that expression receives pixel in light pattern 100, the imaging apparatus to arrange 110 and from the key diagram of an example of the signal 120 of the expression light and shade of imaging apparatus.In by the evaluation object, do not have under the situation of surface deformation, as shown in the figure, at 3 surveyed areas that begin most of shooting, do not show contrast in the signal 120 and change.
But, in by signal 120, produced the contrast variation from the transmitted light of being estimated the object surfaces crushed element or reflected light generation.That is,, amplify or dwindle by comparing with the decorative pattern that produces by non-crushed element from the decorative pattern that produced by light of being estimated the object surfaces crushed element.For example, under the situation of amplifying, it is big that contrast becomes, and decorative pattern exposes to surveyed area.
Therefore, shown in Figure 28 (B), original maximal value part 120a and minimum value part 120b can not be in same surveyed areas, and the contrast in the surveyed area diminishes.At this, in each surveyed area, contrast is through (a-b)/(a+b) define.In addition, under the situation of dwindling, can not be by the complete video picture of imaging apparatus, and shown in Figure 28 (C), contrast diminishes.Therefore, compare, can whether produce surface deformation evaluation being estimated object through difference and reference value to white part in the contrast pattern that receives light and blackboard branch.
In addition, though pattern do not amplify or the situation of dwindling under, also can appear at the situation that value based on bright part in the signal that receives light 120 descends or the value of dark-part rises.In this case, also can compare, whether had surface deformation evaluation estimating object through difference and reference value to bright part in the surveyed area of prescribed level and dark-part.In Figure 28 (A), mesh portions is the white part that brightness has descended, and in comprising the surveyed area of this part, the contrast in the surveyed area diminishes.
In the method, transmitted light or the reflected light of being estimated object are carried out electric treatment, therefore, can short time ground be estimated by the surface configuration on the whole surface of tabular objects such as glass.
In addition, when the glass substrate of flat-panel monitors such as inspection LCD or plasma display etc., whether the fluctuating quantity that needs to confirm the surface is controlled in below the setting.As the method for measuring the surface undulation shape, utilize the contact determinator to carry out method for measuring.In the method for utilizing the contact determinator, be used in the detector of measuring displacement and contact glass surface and, import displacement from detector along the certain orientation mobile detector, measure the surface undulation shape.
And then, also proposed to utilize the contactless method of measuring the undulations of glass surface.Following method is for example arranged, promptly, receive reflected light, obtain the method for undulations according to the striped that is formed on the light and shade on the screen from glass surface with screen to the light of glass surface irradiation from pointolite.In addition; Also just like the method shown in the japanese kokai publication hei 9-166421 communique, promptly to glass surface irradiation position ten-four with reference to pattern light, the reflected light from glass surface is made a video recording; Analyze the distortion of reflected image, obtain the method for undulations through optimization computation.
But in method shown in Figure 28, for example under the situation of the surface deformation that has taken place to make pattern to amplify, if the form of amplifying is different with relation between the surveyed area, then the contrast in the surveyed area is different.For example, though the pattern shown in the pattern shown in Figure 28 (D) and Figure 28 (E) is likewise to amplify, owing to get into the mode difference of surveyed area, thereby the existence of the contrast in the surveyed area is poor.Receive light pattern to become the situation shown in Figure 28 (D) and become the situation shown in Figure 28 (E) and should obtain identical evaluation result, still,, then just can become different results if only estimate surface configuration based on the difference of the contrast in the surveyed area.That is, there is the problem of only carrying out the evaluation existence restriction of surface configuration based on the difference of the contrast in the surveyed area.
In addition, the problem below in the inspection method of the glass substrate of above-mentioned flat-panel monitor etc., existing.
(1) in the mensuration of contact, because mobile detector successively, so minute is elongated, is difficult to carry out The real time measure.In addition, might be enough make the determinand distortion because of the contact of detector.And then, big if determinand becomes, then also need device be arranged to large-scale device, therefore measure operation and become difficult.
(2) in the method that the light and shade striped that the reflection of light light from pointolite is produced is analyzed, the dynamic range that can estimate is little, and therefore, existence can not be measured little concavo-convex and big concavo-convex shortcoming simultaneously.
(3) though the method for utilizing optimization computation to obtain undulations according to the reflected image with reference to pattern is applicable to high-precision measuring, owing to need carry out double counting, thereby computing time is elongated.Therefore, if will rise and fall mensuration in real time, the systematic large-scaleization of then calculating.
The present invention is used to tackle the problems referred to above, is the method that can estimate the surface configuration of tabular object etc. easy and accurately, and its purpose is to provide the evaluation method and the evaluating apparatus of the surface configuration of the distortion that can detect surface configuration more accurately etc.In addition, its purpose be to provide can high precision and section time ground measure determinand the surface undulation shape, be applicable to the evaluation method and the evaluating apparatus of the surface configuration of real-time mensuration.
The evaluation method of surface configuration involved in the present invention comprises: had the periodically step of the pattern of light and shade to estimating object illumination; Receive and see through the step of estimating the pattern of reflection object by the pattern of evaluation object or from quilt; Estimate the step of the object surfaces shape with skew (with respect to the skew in the light and shade cycle that is irradiated to the pattern of being estimated object) based on the light and shade cycle that receives light image.
The evaluation method of surface configuration also can be, will with the light and shade equalization that receives the zone in the light image of the corresponding size of light and shade cycle that is irradiated to the pattern of being estimated object, estimated the object surfaces shape based on the signal evaluation after the equalization.
And then, also can be, receive the Offset portion and the side-play amount in the light and shade cycle of light image based on the signal measuring after the equalization, estimated the object surfaces shape based on measuring evaluation of result.
In addition, also can be to estimate according to the difference of the low part of high part of the amplitude in the signal after the equalization and near it amplitude and estimated the object surfaces shape.
In addition, also can utilize absolute value or the square value of equalization signal increase and decrease side-play amount as the light and shade cycle.
In addition; The evaluation method of surface configuration involved in the present invention also can comprise: the step of each reflected image of observation datum body; Wherein, said datum body is used to form from said each reflected image of the different parts reflection on the surface of determinand and can confirms the position; The step of the side-play amount of each reflected image when reflected image that obtains respectively to observe has the ideal plane with respect to determinand; Obtain the step of slope of the undulations of determinand according to each side-play amount; With the surperficial general planar of determinand is carried out the step that integration is obtained the undulations of determinand as constraint condition to the slope of undulations.
Datum body for example is that the known candy strip of bright spot or object point, the brightness spacing of carrying out the known motion of translational speed etc. has the periodically pattern of light and shade.
In addition, object point is meant, pointolite or place the object point of the physics such as some body under the lighting environment, and bright spot is meant, by the high brightness point that forms someway.In addition, the ideal plane is meant the plane that does not have fluctuating fully.
The evaluating apparatus of surface configuration involved in the present invention has: light source is had the periodically pattern of light and shade to estimating object illumination; Light receiving unit receives through said by the pattern of evaluation object or from the said pattern of being estimated reflection object; And evaluation unit, based on the skew of the light and shade cycle that receives light image that obtains by said light receiving unit, estimate said by evaluation object surfaces shape with respect to the light and shade cycle of the pattern of said light source.
Evaluation unit also can comprise: the equalization unit, with receive in the light image with the light and shade equalization that shines the corresponding zone of light and shade cycle of being estimated the pattern on the object; And processing unit, the equalization signal that uses said equalization unit to export is exported and is used for confirming the said deformation place of object surfaces shape and the signal of deflection estimated.
The evaluating apparatus of surface configuration involved in the present invention has: can confirm the datum body of position, be used to form from said each reflected image of the different parts reflection on the surface of determinand; Light receiving unit obtains each reflected image by the surface reflection of said determinand on the said datum body; And computing unit; The side-play amount of each reflected image when calculating each reflected image that said light receiving unit obtains and having the ideal plane with respect to said determinand; Obtain the slope of the undulations of said determinand according to said each side-play amount; The surperficial general planar of said determinand is carried out integration as constraint condition to the slope of said undulations, obtain the undulations of said determinand.
Description of drawings
Fig. 1 is the structural drawing of a structure example of the evaluating apparatus of expression surface configuration of the present invention.
Fig. 2 is the structural drawing of other structure example of the evaluating apparatus of expression surface configuration of the present invention.
Fig. 3 is the key diagram of the kind of expression pattern.
Fig. 4 is the block diagram of a structure example of expression arithmetic unit.
(A) of Fig. 5 is that key diagram, (B) of light of row of a cross section and the shooting face of arrival of expression transmissive glass is to be expression and the key diagram of the form of the corresponding shooting face of the chequer (B) with the part of chequer and key diagram, (C) that cross section D0～D14 representes together.
Fig. 6 shows the oscillogram of an example of picture signal and equalization signal that expression receives the light and shade of light pattern.
Fig. 7 is that expression is measured the key diagram of machine to the result of the surface configuration of the cross-section determination one side of each sample with contact.
Fig. 8 is the key diagram of expression to the output of the averaging circuit of each sample.
Fig. 9 is the relevant key diagram of expression shape value and measured value.
Figure 10 is the structural drawing of another other structure example of the evaluating apparatus of expression surface configuration of the present invention.
Figure 11 is the structural drawing of another other structure example of the evaluating apparatus of expression surface configuration of the present invention.
Figure 12 is the process flow diagram of summary operation of the evaluation method of expression surface configuration of the present invention.
Figure 13 is the heavy key diagram of mensuration shape of the undulations of expression determinand.
Figure 14 is the heavy key diagram of shape that the track of the reflected image observed of expression shifts to an earlier date with respect to the reflected image that is obtained by the ideal plane.
Figure 15 is the heavy key diagram of shape that the track of the reflected image observed of expression postpones with respect to the reflected image that is obtained by the ideal plane.
Figure 16 is the key diagram of the relation between the slope of degree in advance and undulations under the track of the reflected image observed of the expression situation about shifting to an earlier date with respect to the reflected image that is obtained by the ideal plane.
Figure 17 is the key diagram of the relation between the slope of degree and undulations under the track of the reflected image observed of the expression situation about postponing with respect to the reflected image that is obtained by the ideal plane.
Figure 18 is the key diagram of the definition of expression X axle and Z axle.
Figure 19 is the key diagram of the optical system of use in the expression simulation.
Figure 20 is the key diagram of the resulting undulations of simulation of an example and the evaluation method of surface configuration of the present invention of expression undulations.
Figure 21 is the key diagram of the resulting undulations of simulation of evaluation method of other and surface configuration of the present invention of expression undulations.
Figure 22 is the key diagram that one of the mobile bright spot of expression realizes example.
Figure 23 is the mensuration of undulations is carried out in expression to the whole surface of determinand the key diagram of an embodiment.
Figure 24 is the structural drawing of schematic configuration example of determinator of the undulations of expression other embodiments of the present invention.
(A) of Figure 25 is that result's key diagram, (B) that expression utilizes contact mensuration machine to measure the surface configuration of determinand is the key diagram that is illustrated in the example 3 surface configuration that the method for identical determinand embodiment of the present invention is obtained.
(A) of Figure 26 is that expression utilizes contact mensuration machine to measure the surface configuration of determinand and the key diagram of the absolute value of the side-play amount of the basic cycle that result's key diagram, (B) that calculate the absolute value of its differential is expression when in example 4, image being made a video recording.
(A) of Figure 27 is that mensuration result's key diagram, (B) of the surface configuration of the determinand that carries out of expression contact mensuration machine carries out positive and negative anti-phase when the minimum value and it is carried out integration and the shape key diagram that obtains the result shown in Figure 26 (B).
Figure 28 is the key diagram that is used to explain the evaluation method of surface configuration in the past.
Description of reference numerals
1 area source
2 glass (determinand)
3 video cameras
The 3a ccd video camera
4 arithmetic units
The 4a face of making a video recording
6,9 reflected images
11,12 reflection spots
20 bright spots
43 spot correcting circuits
44 averaging circuits
45 maximal value extraction circuits
46 minimum value extraction circuits
47 difference operation circuit
Embodiment
Below, embodiment of the present invention is described.
Fig. 1 is the structural drawing of a structure example of the evaluating apparatus of expression surface configuration of the present invention.As shown in the figure, from 1 pair of light that shines pattern as the tabular glass of being estimated object 2 of area source with the known light and shade of contrast.The light that sees through glass 2 is received light through the ccd video camera 3a as two-dimentional imaging apparatus.And, be input to arithmetic unit 4 from the electric signal corresponding of ccd video camera 3a with receiving light.Arithmetic unit 4 is based on the electric signal of being imported, and output is used to estimate the signal of concavo-convex grade of the surface configuration of glass 2.
The evaluating apparatus that carries out being estimated the evaluation of object surfaces shape based on the transmitted light from glass 2 has been shown among Fig. 1, and still as shown in Figure 2, the mode that also can carry out the evaluation of surface configuration through the reflected light based on glass 2 constitutes evaluating apparatus.In addition, in Fig. 1,2, shine the chequer as shown in Figure 3 or the light of candy strip to glass 2 from area source 1.Pattern is made up of the decorative pattern that periodically repeats, and therefore is defined as " cycle " of that kind shown in Figure 3.The inverse in cycle is the spatial frequency f of pattern.Below, f is called basic frequency with spatial frequency, and its inverse is called the basic cycle.
In addition, in fact according to carrying out the evaluation of surface configuration based on the basic frequency in transmitted light or the catoptrical shooting, still, and generally speaking, not of uniform size the causing of the pattern of size that ccd video camera 3a is captured and area source 1 and be similar shape.Therefore, the notion of the basic frequency of in following illustrated evaluation, using is strictly said to be to use the smooth fully captured spatial frequency f that sees through the pattern in image or the reflected image of ccd video camera 3a when being estimated object.
Fig. 4 is the block diagram of a structure example of expression arithmetic unit 4.In arithmetic unit shown in Figure 44, input circuit 41 is kept at this picture signal in the storer 42 from the picture signal of ccd video camera 3a input expression light and shade.Picture signals in 43 pairs of storeies of spot (shading) correcting circuit 41 are carried out spot and are proofreaied and correct, and remove the influence that the light quantity distribution of area source 1 brings for the shooting of ccd video camera 3a.Averaging of the light and shade filtration treatment of each pixel in each surveyed area after 44 pairs of spots of averaging circuit are proofreaied and correct, the value after maximal value extraction circuit 45 and minimum value extraction circuit 46 output equalizations.
At this, the surveyed area that is used for equalization is equivalent to the inverse (basic cycle) of the basic frequency of pattern.Therefore, averaging circuit 44 is by by each basic cycle filtrator of the integral form of averaging of picture signal etc. being constituted.The maximal value of the output of maximal value extraction circuit 45 output averaging circuits 44, the minimum value of the output of minimum value extraction circuit 46 output averaging circuits 44.And, the signal of the position of the poor and expression surveyed area of the output valve of difference operation circuit 47 output maximal value extraction circuits 45 and the output valve of minimum value extraction circuit 46.Above-mentioned maximal value and minimum value draw through the zone suitable with the fluctuating cycle of imagination on glass extracted.For example, this regional width is 2～10 times of basic frequency.
Then, the action to the evaluating apparatus of surface configuration describes with reference to the key diagram of Fig. 5～Fig. 9.Fig. 5 (A) is among the light of expression from the area source 1 that glass 2 whole faces are shone, see through a cross section Dn of glass 2 and arrive the key diagram of light of row of the shooting face 4a of ccd video camera 3a.Only show a banded zone among Fig. 5 (A), still, under the situation of the ccd video camera 3a that uses two dimension, the light that sees through glass 2 whole cross sections temporarily arrives the shooting face 4a of ccd video camera 3a.
The part of the chequer that Fig. 5 (B) will use is in this embodiment represented with cross section D0～D14, the form of the shooting face 4a of the ccd video camera 3a that Fig. 5 (C) expression is corresponding with the chequer shown in Fig. 5 (B).But, in Fig. 5 (C), only show with Fig. 5 (B) in the corresponding part E0～E4 of cross section D0～D4.In addition, in this embodiment, set optical system, make that the basic cycle in the chequer is corresponding with 5 pixels among the ccd video camera 3a.Therefore, at this, the surveyed area that is used for equalization is made up of 5 pixels.
The shooting that ccd video camera 3a is carried out is input to storer 42 through input circuit 41 in arithmetic unit 4.Spot correcting circuit 43 moment that shooting is transfused to obtain the mean value of picture signal as each pixel in several zones, front and back (comprising surveyed area) of the surveyed area of object as object.For example, under the situation of c zone as surveyed area of E1 row that will be shown in Fig. 5 (C), obtain the mean value of each pixel in b, c, the d zone of E1 row.Handle through this, can access light quantity distribution image (spot image: corresponding value shading image) with this surveyed area periphery background.Certainly, can further enlarge the subject area of averaging, also can the zone of the row before and after the E1 row be included in the subject area of averaging.
Spot correcting circuit 43 further removes calculation (division arithmetic) with resulting mean value to the picture signal of each pixel.As a result, even luminous quantity is gone up the position difference because of 1 of area source, also can reduce the influence that this different band is given shooting.
In addition, the spot method of correcting is not limited to said method.For example, also can use following method.
(1) in said method, replace getting the mean value of each pixel in each zone, use the intermediate value among the picture signal of each pixel in each zone.
(2) in said method, replace each picture signal being removed calculation with resulting mean value, deduct mean value from each picture signal.
(3) not each surveyed area all to be obtained be used for the mean value that spot is proofreaied and correct at every turn, directly the light from area source 1 is received methods such as light, obtain spot image in advance but utilize.Then, each surveyed area is carried out the spot timing, utilizing the picture signal in the spot image of already obtaining to remove calculation processing or subtraction.
The left side of Fig. 6 (A), (B), (C) shows the example that expression receives the picture signal of light pattern light and shade.In this embodiment, owing to be provided with spot correcting circuit 43, therefore show the output signal of spot correcting circuit 43 particularly.Under the smooth situation of glass 2, in receiving light pattern, do not produce and amplify or dwindle, therefore, shown in Fig. 6 (A), receive the cycle of light pattern consistent with the basic cycle.
If it is concavo-convex that the surface of glass 2 has, then show the amplification of pattern in the light pattern or dwindle receiving of obtaining by ccd video camera 3a through refraction action.For example, be that the transmitted light of protruding part amplifies pattern generating from the surface, from the transmitted light of recessed part pattern generating is dwindled.As a result, shown in the left side of Fig. 6 (B), (C), the cycle that receives light pattern squinted with respect to the basic cycle.Therefore, squint with respect to the basic cycle if can detect the cycle of the pattern that receives light pattern, the surface that then can detect glass 2 has concavo-convex.
Therefore, averaging circuit 43 squints with respect to the basic cycle in order to detect the cycle that receives light pattern, carries out like the filtration treatment with the light and shade equalization of each pixel after being proofreaied and correct by spot in the surveyed area.In this embodiment, by with chequer in corresponding 5 pixels of basic cycle constitute 1 surveyed area.Therefore, 43 pairs of 5 pixels of averaging circuit are with the picture signal equalization.The right side of Fig. 6 (A), (B), (C) shows the output signal example of averaging circuit 44.When receiving cycle of light pattern consistent with the basic cycle, this averaging circuit 44 such output valve shown in the right side of Fig. 6 (A) is fixing signal, as with the result behind each aignal averating in 1 cycle.
Have on the surface of glass 2 under the situation of convex portion, the signal that such mountain part shown in the left side of Fig. 6 (B) and paddy part have all broadened in the input signal of averaging circuit 44, occurs.In addition, have on the surface of glass 2 under the situation of concave portion, the signal that as the left side of 6 (C) shown in such mountain part and paddy have partly all narrowed down occurs.Averaging circuit 44 is if that kind is transfused to mountain part and all indeclinable signal of paddy part shown in Fig. 6 (A); Then export fixing setting; But; Such when receiving light pattern to have the signal under the situation of amplifying shown in the left side that is transfused to Fig. 6 (B), shown in the right side of Fig. 6 (B), output produces concavo-convex signal with respect to setting.
In addition, be transfused to shown in the left side of Fig. 6 (C) suchly when receiving light pattern to have the signal under the situation of dwindling, shown in the right side of Fig. 6 (C), also exporting with respect to setting and produce concavo-convex signal.The degree that broadens or narrow down of mountain part and paddy part is big more in the input signal of averaging circuit 44, and promptly the concavo-convex degree on glass 2 surfaces is big more, and then the concavo-convex degree in the output signal of averaging circuit 44 is big more.
In this embodiment, in order to estimate the output of averaging circuit 44, be provided with maximal value extraction circuit 45, minimum value extraction circuit 46 and difference operation circuit 47.Maximal value extraction circuit 45 is imported from the signal after the equalization in each surveyed area of averaging circuit 44, and exports the maximal value in this zone.Maximal value extraction circuit 45 is that peaked filtrator in the basic cycle constitutes by output one surveyed area for example.In addition, minimum value extraction circuit 46 is imported from the signal after the equalization in each surveyed area of averaging circuit 44, and exports the minimum value in this zone.Minimum value extraction circuit 46 is that the filtrator of the minimum value in the basic cycle constitutes by output one surveyed area for example.
Certainly, can make the size of averaging circuit 44 handled surveyed areas have various different with the size of difference operation circuit 47 handled scopes.For example, can be that the scope of 2～10 times size of 47 pairs of averaging circuit 44 handled surveyed areas of difference operation circuit is obtained the poor of maximal value and minimum value.In addition, also can make the subject area of maximal value extraction circuit 45 and minimum value extraction circuit 46 be different from averaging circuit 44 handled surveyed areas.
And output is as the difference signal of operation result and expression this moment position signalling as the position of the surveyed area of object.Do not have on the surface of glass 2 under the situation of distortion, shown in Fig. 6 (A), the output of averaging circuit 44 is fixed, therefore, and difference signal value of being expressed as 0 of difference operation circuit 47 outputs.But, having under the concavo-convex situation on the surface of glass 2, difference signal is expressed as non-0 value.And the value of difference signal is corresponding with concavo-convex degree.Therefore, can confirm the deformation extent of glass 2 and the position of distortion based on the value and the position signalling of the difference signal of difference operation circuit 47 output.
For example; Even under the situation shown in Figure 28 (D), (E); If the scope that make a plurality of surveyed areas that 47 pairs in difference operation circuit closes on, maybe will surpass surveyed area exported the poor of minimum value and maximal value as the scope of operand; Then under the situation shown in Figure 28 (D) and Figure 28 (E), also can export same difference signal.Therefore, according to the method for the invention, compare with method in the past, but can enlarge concavo-convex sensing range.
In addition; Even when the value of the bright part under but though the surface configuration of glass 2 changes the situation that does not produce the amplification of pattern or dwindle, from the output signal of ccd video camera 3a output descends or the value of dark-part rises, concavo-convex by also occurring in the signal after averaging circuit 44 equalizations.Therefore, according to the method for the invention, also can detect the variation of such surface configuration.
In this embodiment; Averaging circuit 44, maximal value extraction circuit 45, minimum value extraction circuit 46 and 47 pairs in difference operation circuit are kept in the storer 42 to be handled with whole corresponding picture signal glass 2 successively; But, also can handle together the two dimensional image in the storer 42.In addition, can replace method with the aignal averating of the expression light and shade in the surveyed area, the standard deviation of the light and shade in the output area, the differential of the signal after the homogenizing of also can making even is handled is estimated the surface configuration of glass 2.
[example 1]
Then, to contact measure the mensuration result of machine, the result that the evaluation of the evaluating apparatus of this embodiment is compared describes.Fig. 7 (A)～(E) shows 5 glass as sample A～E, measures the surface configuration of single face for a cross section with contact mensuration machine respectively and the result that obtains.Each sample A～E is thick 0.7mm, the square glass of 300mm.In addition, having half spacing as each sample A～E of determinand is the fluctuating about 10～15mm.
Fig. 8 (A)～(E) shows and makes 30 ° of sample A～E and inclined light shafts, utilizes the output of the averaging circuit 44 under the condition of lens, aperture F16 of f25 at ccd video camera 3a.1 spacing of the black and white of employed chequer is 6mm, on the sample face 1 pixel for be slightly larger than 1mm, 1 spacing is 5 pixel degree on image.Each sample A～E that obtains result shown in Fig. 8 (A)～(E) is identical with each sample A～E that obtains result shown in Fig. 7 (A)～(E).
As stated, the cycle that occurs among Fig. 8 (A)～(E) receiving light pattern is with respect to the part of basic cycle skew, promptly mountain part or paddy part have occurred having the corresponding part in concavo-convex position with glass surface.In fact, according to the relation between the phase place of the surface configuration of glass and pattern, the concave portion of glass surface is corresponding or corresponding with the paddy part with the mountain part among Fig. 8 (A)～(E).But, with the corresponding situation of mountain part under and with the corresponding situation of paddy part under, all have correlativity between the absolute value of the difference of mountain part and paddy part and the concavo-convex degree of glass surface.
In addition, Fig. 8 (A)～(E) shows to the distribution with respect to the part of basic cycle skew of cycle that receives light pattern in the banded zone of sample, still, can directly estimate surface flatness to its cross section based on such distribution.And, as long as output needle is to the distribution in the whole cross section of sample, the direct surface flatness of whole of assess sample just.
Fig. 9 is the key diagram of the correlativity between expression shape value and the measured value.As shape value, use the maximal value (actual value) in the difference of adjacent protuberance and recess in the surface configuration of each sample.In addition, as measured value, use in the evaluating apparatus of above-mentioned embodiment, to the maximal value among the difference signal of difference operation circuit 47 outputs of each sample.As shown in Figure 9, closely related between shape value and the measured value.Related coefficient is 0.81.
In addition, in this embodiment, the situation of utilizing two-dimentional ccd video camera 3a is illustrated, still also can utilizes the imaging apparatus of one dimension.Figure 10 be illustrated in as light source 31 utilization send under the situation of light source of light of candy strip of light and shade with known contrast, transmitted light sees through glass 2 certain cross section and arrives the key diagram of form of shooting face 32 of the ccd video camera (not shown) of one dimension.Shown in figure 10, in this case,, the direction with shooting face 32 quadratures of one dimension carries out this glass 2 is estimated when moving glass 2.In addition, arithmetic unit (not shown) that kind also as shown in Figure 4 constitutes in this case.In addition, also can use reflected light in this case from glass 2.
Figure 11 is the structural drawing of other structure example of the evaluating apparatus of expression surface configuration of the present invention.In addition, in this embodiment, show determinator as the undulations of the evaluating apparatus of surface configuration.Shown in figure 11, determinator comprises: video camera 3 receives from the bright spot 20 that moves and sends and the light that is reflected on the surface of glass (determinand) 2 and form reflected image; Arithmetic units such as computing machine 4, the track of the reflected image that input is formed by video camera 3 calculates undulations.In addition, as video camera 3, can use the video camera of any ways such as regional video camera, line array video camera, video camera, still camera.In addition, the device that infrared rays receiver so long as photoelectric sensor arranged forms etc. can confirm that the device of the reflected image of bright spot 20 gets final product, and can use any infrared rays receiver.
Figure 12 is the process flow diagram of summary operation of the evaluation method of the surface configuration of expression in this embodiment.Shown in figure 12, in the evaluation method of surface configuration of the present invention, at first, video camera 3 receives the reflected light of the known bright spot that moves 20 of translational speed on the surface of glass 2, the reflected image that obtains moving (step S1).Have under the situation of fluctuating on glass 2 surfaces, the track of the reflected image that video camera 3 is captured is from the course deviation of the reflected image that obtained by the ideal plane that does not have fully to rise and fall.That is, the track with respect to the reflected image that is obtained by the ideal plane shifts to an earlier date or delay.
Therefore, according to of the skew (in advance information or deferred message) of resulting reflected image, calculate the slope (differential value) (step S2) of the undulations on glass 2 surfaces with respect to the reflected image of ideal plane.Then, glass 2 surfaces are roughly the plane as constraint condition, utilize integral operation to obtain undulations (step S3).
Then, with reference to the key diagram of Figure 13～Figure 18, the evaluation method of device shown in Figure 11 and surface configuration shown in Figure 12 is described.
Figure 13 is the heavy key diagram of mensuration shape of the undulations of expression determinand.Shown in figure 13, reflected image 6 video pictures of bright spot 20 are on the photo detector 5 of video camera 3.Path 7 expression is reflected on the surface of glass 2 and arrives the light path of photo detector 5 from the light of bright spot 20 outgoing.In addition, at this, example the fixed speed situation about moving of bright spot 20 with regulation.
As stated, have at glass surface under the situation of fluctuating, each of the reflected image 6 that obtains position constantly, the position of the reflected image that obtains with respect to the light by desirable surface reflection are in advance or postpone.Figure 14 is the heavy key diagram of shape that the track of expression reflected image 6 shifts to an earlier date with respect to the reflected image that is obtained by the ideal plane 9.In addition, Figure 15 is the shape heavy key diagram of the track of expression reflected image 6 with respect to the reflected image that is obtained by the ideal plane 9 delays.In Figure 14 and Figure 15, the actual light path of path 7 expressions shown in the solid line.After the reflection spot 11 of glass surface is reflected, pass through the lens center 10 of video camera 3 and arrive photo detector 5 from the light of bright spot 20 outgoing, form reflected image 6.
Figure 16 is the key diagram of the relation between the slope (differential value) of degree in advance and undulations under the track of expression reflected image 6 situation about shifting to an earlier date with respect to the reflected image that is obtained by the ideal plane 9.In addition, Figure 17 is the key diagram of the track of expression reflected image 6 with respect to the relation between the slope (differential value) of degree under the situation of the reflected image that is obtained by the ideal plane 9 delays and undulations.
In Figure 16 and Figure 17, α be with the vector that extends to path 8 from lens center 10 be under the situation of benchmark from the lens center the 10 formed angles of vector of extending to path 7.β be with the vector that extends to path 8 from lens center 10 be under the situation of benchmark from the lens center the 10 formed angles of vector of extending to the vertical below.γ is to be the formed angle of vector of extending to path 7 from bright spot 20 under the situation of benchmark with the vector that extends to vertical below from bright spot 20.And δ is that the vertical line vector with reflection spot 11 is the angle (slope of normal vector) that the normal vector of the contoured surface of reflection spot 11 under the situation of benchmark forms.
Above-mentioned all angles all be from get under situation about counterclockwise tilting as the vector of benchmark on the occasion of.Therefore, α＜0, δ＜0 in shape shown in Figure 16 is heavy, α＞0, δ＞0 in shape shown in Figure 17 is heavy.
[numerical expression 1]
The slope δ of normal vector is shown in numerical expression 1.As if the function that undulations is expressed as z=f (x), the slope of undulations (differential value)=tan δ can enough numerical expression 2 expressions.X axle and z axle such setting shown in figure 18, the point of x=0 for example is set in the left end of glass surface.
[numerical expression 2]
Therefore, undulations z obtains as numerical expression 3.In numerical expression 3, C is an integration constant.Though the surface configuration of the glass 2 that in flat-panel monitor, uses has small fluctuating but general planar.Therefore, can think have the relation shown in the numerical expression 4 to set up.That is, the mean value of the fluctuating on the additional glass surface is 0 condition.Thus, confirm the integration constant C in the numerical expression 3, to satisfy the constraint condition of numerical expression 4.Wherein, in numerical expression 4, desirable surface is made as the plane of z=0.
[several 3]
z＝∫f’(x)dx+C
[several 4]
∫f(x)dx＝0
Particularly, carry out following processing.
In addition, the position of lens center 10 is also confirmed.Can identify the position of each bright spot 20 constantly; The position of each reflection spot 11,12 constantly can be confirmed according to the position of reflected image 6,9 on photo detector 5; Because the position of lens center 10 also is known; Therefore, arithmetic unit 4 can calculate each each angle [alpha], β, γ constantly.Therefore, can calculate each δ constantly based on numerical expression 1.In addition, the position of each reflection spot 11 constantly is the x values in numerical expression 2～numerical expression 4.
Owing to calculated each δ constantly, therefore, arithmetic unit 4 can easily calculate the value of each constantly tan δ (=f ' (x)).Each f ' constantly (x) obtain f ' (x1), f ' (x2), f ' (x3) ..., (xn) such n of f ', such definition Δ (x) is described below.
Δ(x1)＝(f’(x1)+f’(x2))×(x2-x1)/2
Δ(x2)＝(f’(x2)+f’(x3))×(x3-x2)/2
·
·
Δ(x(n-1))＝(f’(x(n-1))+f’(xn))×(xn-x(n-1))/2
Undulations can be tried to achieve through f ' (x) is carried out numerical integration.Particularly, arithmetic unit 4 obtains the fluctuating height of each x through calculating following formula.
f(xn)＝Δ(x1)+Δ(x2)+…+Δ(x(n-1))
The undulations that obtains so not necessarily can satisfy numerical expression 4, and still, arithmetic unit 4 just can be met the undulations of numerical expression 4 through as shown in the formula the integration constant C in that kind regulation numerical expression 3.
C＝-(f(x1)+f(x2))×(x2-x1)/2
-(f(x2)+f(x3))×(x3-x2)/2
·
·
-(f(x(n-1))+f(xn))×(xn-x(n-1))/2
[example 2]
Then, the example of appropriateness of evaluation method of estimating the surface configuration of this embodiment through simulation is shown.In this simulation, be assumed to optical system shown in Figure 19.Among Figure 19, a represent the end of determinand 2 and draw from lens center 10 under vertical line between distance, b represent that width, the c of determinand 1 represent that distance, h between bright spot 20 and the lens center 10 represent the height of lens center 10 apart from ideal plane (plane that the surface undulation of determinand 2 is average).
In simulation, the position relation of setting bright spot 20, ideal plane and lens center 10 is known.Particularly, be set at a=450mm, b=250mm, c=1300mm, h=28.43mm.
In addition, with the undulations on determinand 2 surface with including amplitude a
1, a
2, wavelength L
1, L
2The function of numerical expression 5 expression express.
[numerical expression 5]
Figure 20 (A) is illustrated in a1=0.00005mm, L in the numerical expression 5
1=10mm, a
2The oscillogram of the undulations under the situation of=0.0mm, L2=20.0mm.Figure 20 (B) expression will have the oscillogram of the undulations that obtains when position shown in Figure 19 optical system that concerns and the determinand with the surface configuration shown in Figure 20 (A) are implemented the said determination method as object.Undulations basically identical shown in undulations shown in Figure 20 (B) and Figure 20 (A) promptly, is confirmed can correctly measure undulations according to the method for the invention.
Figure 21 (A) is illustrated in a in the numerical expression 5
1=0.00005mm, L
1=10mm, a
2=0.00005mm, L
2The oscillogram of the undulations under the situation of=20.0mm.Figure 21 (B) is the oscillogram that expression will have the undulations that obtains when position shown in Figure 19 optical system that concerns and the determinand with the surface configuration shown in Figure 21 (A) are implemented the said determination method as object.Undulations basically identical shown in undulations shown in Figure 21 (B) and Figure 21 (A) promptly, can be confirmed can correctly measure undulations according to the method for the invention.
In addition, in the evaluation method of surface configuration of the present invention, as long as carry out calculating the plus and minus calculation processing of calculating and being used for integration based on the angle of observed reading, therefore, the operand of arithmetic unit 4 is few.
Figure 22 is that expression realizes that one of mobile bright spot 20 realizes the key diagram of example.In this example, from movably catoptron 22 reflections of light quilt of LASER Light Source 21, reflected light is illuminated to screen 23.Under situation about setting like this, can the point of irradiation of reflected light on screen 23 be used as bright spot 20.At this,, then can realize the bright spot 20 of constant speed movement if so that the mode mobile mirror 22 of bright spot 20 constant speed movement on the screen 23.In addition, the mode that catoptron 22 moves has been shown in Figure 22, still, can have substituted the mode that catoptron 22 moves, and used the rotating mirror as polygon mirror to realize easily that with the correction catoptron catoptron moves.
In addition, in above-mentioned embodiment, for having used the example of the bright spot 20 of constant speed movement to be illustrated as forming the glass 2 surperficial confirmable datum body of each reflected image 6 and position that go up different parts.But, as long as confirmed that in advance translational speed, the translational speed of bright spot 20 are not that constant speed also can be suitable for the present invention.In addition, as datum body, being not limited to such as stated bright spot 20 that forms, also can be the point (object point) on the physical significance that self moves.
As object point, can use the pointolite that for example self moves, be placed in the point that can move under the lighting environment.Under the situation of the pointolite that use to move as object point, reflected image 6 is bright points, is placed under the situation of the point that can move under the lighting environment using as object point, and reflected image 6 is a dim spot.In addition, bright spot and object point are not the points on the mathematical meaning, but the actual zone that has to a certain degree expansion.
Situation to the undulations of measuring one dimension in above-mentioned embodiment is illustrated, and is for example shown in Figure 23 under the situation to the whole surface measurements undulations of determinand 2, as long as determinand 2 is moved to the direction with path 7 quadratures.And each row on 4 pairs of determinands of arithmetic unit 2 surface (among Figure 23 between the dotted line shown in imaginary each row) are implemented above-mentioned computing.In addition, Figure 23 shows the situation that determinand 2 moves, but the direction of bright spot 20 edges and path 7 quadratures is moved.
Figure 24 is the structural drawing of schematic configuration example of evaluating apparatus of the surface configuration of expression other embodiments of the present invention.In this embodiment, go up the confirmable datum body of reflected image 6 and position of different parts, replace mobile bright spot 20, use the known candy strip 61 of brightness spacing as forming glass (determinand) 2 surfaces.Utilize 3 pairs in video camera by from the light of each hi-lite 62 of candy strip 61 after the reflected image that glass surface forms is taken, input arithmetic unit 4.
In candy strip 61, the brightness spacing is known, and therefore, arithmetic unit 4 can identify each position of the reflected image 9 that the photo detector 5 of video camera 3 obtains in the ideal plane.Arithmetic unit 4 utilizes above-mentioned computing to calculate undulations based on the skew with respect to each position of the reflected image that is obtained by the ideal plane 9 of the position of the reflected image 6 of reality.Like this; The temporal information of the bright spot 20 that replace to move (positional information of each reflected image 6,9 constantly) is even use the spatial information (positional information of the reflected image 6,9 corresponding with each hi-lite 62) of candy strip 61 also can determine the undulations of glass surface.
[example 3]
Then, the method for utilizing this embodiment is shown and surveys example as the plate glass of determinand.In this example, utilize optical system position relation shown in Figure 19, particularly utilized device shown in Figure 24.In Figure 19, a represent the end of determinand 2 and draw from lens center 10 under vertical line between distance, b represent that width, the c of determinand 1 represent that distance, h between bright spot 20 and the lens center 10 represent the height of lens center 10 apart from ideal plane (plane that the surface undulation of determinand 2 is average).
The position relation that position, ideal plane and lens center 10 are set of candy strip 61 is known.Particularly, be set at a=225mm, b=300mm, c=750mm, h=60mm.In addition, the high brightness portion of employed candy strip 61 and 1 cycle of low-light level portion are made as 1mm.Therefore, 1 cycle was 0.5mm in the heart in determinand 2.And video camera 3 uses the lens of aperture F16, focal length 55mm.Pixel resolution in the candy strip 61 is approximately 0.09mm, in the determinand 2 in the heart pixel resolution be approximately 0.04mm, 1 cycle of striped is equivalent to 11～12 pixels.
Figure 25 (A) shows the result who utilizes contact mensuration machine to measure the surface configuration of determinand 2.In addition, Figure 25 (B) shows identical determinand 2 is implemented the method for these embodiments and the surface configuration that obtains.Surface configuration shown in Figure 25 (B) is roughly consistent with the surface configuration shown in Figure 25 (A), therefore can know, can correctly measure surface configuration through the present invention.
In the example of the method for having implemented Fig. 1 and embodiment shown in Figure 4; Promptly; In the example of the surface configuration of the sample of measuring each shape shown in Figure 7, in respect to each sample, has the fluctuating that half spacing is 10～15mm degree, black and white 1 spacing of pattern is that 6mm measures under both more approaching conditions like this.
Under this such condition, there is directly related property with respect between the side-play amount of basic cycle and the surface configuration, therefore, have high relevance between the concavo-convex level.Therefore, in the example of the surface configuration of the sample of measuring each shape shown in Figure 7, making 1 pixel at sample surfaces is about 1mm, still, even under the low condition of such resolution, also can estimate concavo-convex level fully.
On the other hand; Shown in above-mentioned example (obtaining the example of the waveform shown in Figure 25 (B)); Supercentral 1 cycle of determinand 2 be 0.5mm such with the fully little situation of half distances when compared that rise and fall under; Can not calculate the poor of the maximal value explained and minimum value, the absolute value of the variation of surface configuration (absolute value of the slope of undulations) also has correlativity with respect to the absolute value apart from the side-play amount of basic cycle.Therefore, in this case,, can calculate surface configuration the absolute value of the side-play amount of basic cycle of calculating according to image is made the positive and negative integration that reversally carries out at each peak value.According to this computing method, can make to calculate and oversimplify.In addition, making positive and negative counter-rotating at each peak value, is for being back to the data that thoroughly deserve and original and concavo-convex relevant data.In addition, also can replace the absolute value of side-play amount and use the square value of side-play amount,, can access identical result though value is different.
[example 4]
Figure 26 (B) be expression with situation that example 3 identical conditions are made a video recording to image under the absolute value with respect to the side-play amount of basic cycle.Wherein, In the present example; Arithmetic unit 4 is implemented convergent-divergent according to the basic cycle and is handled the value that calculates after the equalization, with the absolute value of the difference of the average speckle signal (shading signal) in the value of calculating and 5 cycles, as the absolute value with respect to the side-play amount of basic cycle.That is, with the absolute value of the increase and decrease of equalization signal as side-play amount with respect to basic cycle in light and shade cycle.
When the distortion because of determinand 2 produces the skew with respect to the basic cycle, according to the phase place of pattern, both possibly be the many situation of part bright in the smooth width, also possibly be the many situation of part dark in the smooth width.Therefore, take absolute value with the mode that can both estimate under two kinds of situation.Figure 26 (A) is the result who representes to utilize the surface configuration of contact mensuration machine mensuration determinand 2 and calculate the absolute value of its differential.
In addition, Figure 27 (A) is that expression utilizes contact mensuration machine to measure the mensuration result of the surface configuration of determinand 2.Figure 27 (B) shows when minimum value the positive and negative counter-rotating of result shown in Figure 26 (B) and it is carried out integration and the shape that obtains.Because both shape is quite similar, therefore can know, through at each peak value to the positive and negative integration that reversally carries out of the absolute value (or square value) of the side-play amount of basic cycle, can estimate surface configuration.
In addition; In each embodiment of above-mentioned volume; As the determinand example glass 2, but the present invention so long as have can make the object on the surface of light reflection get final product, the present invention also can be applicable to the situation of the undulations that the determinand measured beyond the glass 2 is surperficial.
The invention effect
As stated; According to the present invention; The evaluation method of surface configuration and evaluating apparatus are set to estimate with respect to the skew of basic cycle based on the light and shade cycle that receives light image that is obtained by transmitted light or reflected light is estimated the object surfaces shape; Therefore, can the short time and estimate distortion on the surface configuration of plate objects such as glass etc. more accurately.In addition; Constituting the light and shade equalization that receives the zone corresponding in the light image with the basic cycle; Estimate under the situation of the object surfaces shape based on the signal after the equalization, compare, can obtain to enlarge the effect of the scope that can detect distortion with in the past method or device.
In addition; Evaluation method and evaluating apparatus with surface configuration constitute; The reflected image that respectively observes that obtains datum body has the side-play amount of each reflected image under the situation of ideal plane with respect to determinand; Obtain the slope of the undulations of determinand according to each side-play amount; The surperficial general planar of determinand is carried out integration as constraint condition to the slope of undulations, obtain under the situation of undulations, can and obtain undulations accurately with the non-contacting mode short time.Therefore, can obtain undulations in real time to the whole face of large-area determinand.
Claims (11)
1. the evaluation method of a surface configuration, wherein,
Had the periodically pattern of light and shade to estimating object illumination,
Reception sees through said by the pattern of evaluation object or from the said pattern of being estimated reflection object,
Said by the skew in the light and shade cycle of the pattern of evaluation object based on the light and shade cycle that receives light image with respect to being irradiated to, estimate said by evaluation object surfaces shape.
2. the evaluation method of surface configuration as claimed in claim 1, wherein,
With receive in the light image with the light and shade equalization that shines the corresponding zone of light and shade cycle of being estimated the pattern on the object,
Estimated the object surfaces shape based on the signal evaluation after the equalization is said.
3. the evaluation method of surface configuration as claimed in claim 2, wherein,
Receive the Offset portion and the side-play amount in the light and shade cycle of light image based on the signal measuring after the equalization, and evaluation of result is said is estimated the object surfaces shape based on measuring.
4. like the evaluation method of claim 2 or 3 described surface configurations, wherein,
Poor according to the low part of high part of the amplitude in the signal after the equalization and near it amplitude estimated and the object surfaces shape.
5. like the evaluation method of claim 1 or 3 described surface configurations, wherein,
The absolute value of the increase and decrease of use equalization signal or square value are as the side-play amount in light and shade cycle.
6. the evaluation method of a surface configuration, wherein,
Each reflected image of observation datum body, said datum body are used to form from said each reflected image of the different parts reflection on the surface of determinand and can confirm the position,
The side-play amount of each reflected image when reflected image that obtains respectively to observe has the ideal plane with respect to said determinand,
Obtain the slope of the undulations of said determinand according to said each side-play amount,
The surperficial general planar of said determinand as constraint condition, is carried out integration to the slope of said undulations, obtain the undulations of said determinand.
7. the evaluation method of surface configuration as claimed in claim 6, wherein,
Datum body is the bright spot or the object point of the known motion of translational speed.
8. the evaluation method of surface configuration as claimed in claim 6, wherein,
Datum body is to have the periodically pattern of light and shade.
9. the evaluating apparatus of a surface configuration comprises:
Light source is had the periodically pattern of light and shade to estimating object illumination;
Light receiving unit receives through said by the pattern of evaluation object or from the said pattern of being estimated reflection object; And
Evaluation unit based on the skew of the light and shade cycle that receives light image that is obtained by said light receiving unit with respect to the light and shade cycle of the pattern of said light source, is estimated said by evaluation object surfaces shape.
10. the evaluating apparatus of surface configuration as claimed in claim 9, wherein,
Evaluation unit comprises: the equalization unit, with receive in the light image with the light and shade equalization that shines the corresponding zone of light and shade cycle of being estimated the pattern on the object; And processing unit, the equalization signal that uses said equalization unit to export is exported and is used for confirming the said deformation place of object surfaces shape and the signal of deflection estimated.
11. the evaluating apparatus of a surface configuration comprises:
Can confirm the datum body of position, be used to form from said each reflected image of the different parts reflection on the surface of determinand;
Light receiving unit obtains each reflected image by the surface reflection of said determinand on the said datum body; And
Computing unit; The side-play amount of each reflected image when calculating each reflected image that said light receiving unit obtains and having the ideal plane with respect to said determinand; Obtain the slope of the undulations of said determinand according to said each side-play amount; The surperficial general planar of said determinand is carried out integration as constraint condition to the slope of said undulations, obtain the undulations of said determinand.
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