CN102443816B - Analytic pretreatment machine for metal material and treatment method for analytic pretreatment machine - Google Patents

Analytic pretreatment machine for metal material and treatment method for analytic pretreatment machine Download PDF

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Publication number
CN102443816B
CN102443816B CN 201110403912 CN201110403912A CN102443816B CN 102443816 B CN102443816 B CN 102443816B CN 201110403912 CN201110403912 CN 201110403912 CN 201110403912 A CN201110403912 A CN 201110403912A CN 102443816 B CN102443816 B CN 102443816B
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cathode
vacuum chamber
anode
sample
zone
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CN102443816A (en
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杨洋
金凯
尹如
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NANJING HEAO ELECTROMECHANICAL EQUIPMENT CO Ltd
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NANJING HEAO ELECTROMECHANICAL EQUIPMENT CO Ltd
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Abstract

The invention relates to an analytic pretreatment machine for a metal material, also relates to a corresponding treatment method and belongs to the technical field of metallurgy detecting and grinding equipment. The analytic pretreatment machine comprises a vertical cylindrical vacuum chamber provided with an air exhaust interface and a sealing door; the middle of the bottom surface of the vacuum chamber upwards extends to form a cathode tube connected with a high-voltage power supply; a cathode head with a placing area for a to-be-treated sample is arranged on the top of the cathode tube; a shielding device for covering the cathode head and the cathode tube is extended from the periphery of the placing area; a cooling channel which is externally connected with a cooling fluid source is arranged inside the cathode head; a grounded anode base is arranged at the middle of the top end of the vacuum chamber; the grounded anode base downwards extends to form an anode head opposite to the cathode head; an inert gas feeding pipe is arranged in the anode head; and a gas exhausting port of the gas feeding pipe is opposite to the sample placing area of the cathode head. Due to the adoption of the analytic pretreatment machine and the treatment method disclosed by the invention, secondary oxidation can be avoided; excellent effect and high speed can be obtained; and the demand for quick analysis can be better met, and thereby a more accurate detection result is obtained.

Description

Analysis of Metallic Materials pretreating machine and treatment process thereof
Technical field
The present invention relates to a kind of equipment of removing metallurgical test specimen surface oxide layer, especially a kind of Analysis of Metallic Materials pretreating machine also relates to its treatment process simultaneously, belongs to metallurgical analysis detection technique field.
Background technology
Understand according to the applicant, the key step that metallurgical sample is carried out gasometry is to obtain by punching earlier to analyze required sample at present, again sample is put into analytical instrument and does sample analysis.There is following problem in this process: 1. whole process is carried out in atmospheric environment, has the secondary oxidation problem, the impact analysis result; 2. zone of oxidation is difficult to remove fully around the sample of cut mode acquisition, and can produce the new zone of oxidation that high temperature oxidation generates; 3. level of automation is lower, can not adapt to the requirement of laboratory real-time analysis.
Take other mechanical means to remove zone of oxidation and all be difficult to address the above problem, adopt the method for chemical scavenging zone of oxidation then to be easy to influence follow-up analytical results.
Retrieval finds, it is a kind of for the method and apparatus that metal strand, the hot rolled strip especially made by common steel or stainless steel are carried out descaling and/or cleaning that application number is that the Chinese patent application of CN03825001.2 discloses.According to this method, metal strand is carried by a device along a throughput direction, makes a metal strand plasma descaling of experience and/or a plasma cleaning process in this device.Yet this device and the surface oxide layer that is not suitable for metallurgical sample remove to be handled.
Summary of the invention
The objective of the invention is to: the problem at above-mentioned prior art exists, a kind of Analysis of Metallic Materials pretreating machine that can remove metallurgical specimen surface zone of oxidation fast and can avoid the secondary high temperature oxidation is proposed, provide corresponding treatment process simultaneously.
In order to reach above purpose, Analysis of Metallic Materials pretreating machine of the present invention comprises the upright tubular vacuum chamber with bleed interface and hermatic door; The cathode tube that connects high-voltage power supply is extended at the middle part, bottom surface of described vacuum chamber up, the top of described cathode tube is the cathode taps that pending sample is laid the zone, the described zone of laying is extended the shielding unit that covers cathode taps and cathode tube, the cooling channel that described cathode taps inside has external cooling fluid source on every side; The top middle portion of described vacuum chamber is equipped with the anode seat of ground connection, and described anode seat extends the anode head relative with cathode taps down, has inert gas inleting pipe in the described anode head, and the zone is laid facing to the sample of described cathode taps in the air outlet of described inlet pipe.
As follows by the treatment step that Analysis of Metallic Materials pretreating machine of the present invention is removed metallurgical sample zone of oxidation:
The first step, lay airtight vacuum chamber, zone back with what sample was placed on cathode taps;
Second goes on foot, imports argon gas from inert gas inleting pipe;
The 3rd step, the input of maintenance argon gas, interface is bled from bleeding;
The 4th step, when treating that vacuum tightness in the vacuum chamber reaches preset value, connect high pressure and make between anode head and the cathode taps and produce plasma jet, remove the positive top layer of sample zone of oxidation;
The 5th goes on foot, sample is reversed, and the connection high pressure makes between anode head and the cathode taps and produces plasma jet, removes sample reverse side top layer zone of oxidation;
The 6th step, maintenance input argon gas are blown away the zone of oxidation dust of removing, and are taken away by the interface of bleeding.
After adopting the present invention, the pre-treatment of sample is carried out under the situation of starvation fully, therefore can avoid secondary oxidation; Plasma jet can thoroughly be removed the zone of oxidation of each and every one corner of sample, and not only effect is good, and speed is fast, can better satisfy the demand of real-time analysis, thereby obtains detected result more accurately.
Description of drawings
The present invention is further illustrated below in conjunction with accompanying drawing and preferred embodiment.
Fig. 1 is the structural representation of one embodiment of the invention.
Fig. 2 is the use view of Fig. 1 embodiment.
Embodiment
Embodiment one
The Analysis of Metallic Materials pretreating machine of present embodiment as shown in Figure 1, upright tubular vacuum chamber has the lower flange 9 of relative annular groove and upper flange 2 and inside and outside footpath respectively by upper and lower surface and forms with the glass material cylindrical shell 4 that annular groove matches, the upper and lower end of cylindrical shell 4 inserts respectively in the annular groove of the upper and lower flange that is lined with sealing-ring 3, and sealing is connected.One side of cylindrical shell 4 has the hermatic door (not shown), and the top upper flange of vacuum chamber has bleeds interface 1 and be used for the flanged coupling 28 of measurement of vacuum.
The bottom of vacuum chamber is supported on the foot lever 12 by base plate 11.The blue 9 underrun sealing-rings 20, insulating washer 19 that issue of vacuum chamber are connected with cathode flange 18 insulation that connect high-voltage power supply, the middle part of cathode flange 18 be equipped be electrically connected with it extend into cathode tube 21 in the vacuum chamber up.The fixing pending sample 23 in the top of cathode tube 21 is laid the cathode taps 22 in zone.Extend the shielding case 7 that covers cathode taps 22 and the shielding cylinder 8 that covers cathode tube 21 around laying the zone, can guarantee that therefore plasma jet only lays the zone.Have the cooling channel by inlet tube and outlet tube 17 and water pipe head 16 external cooling fluid source in cathode taps 22 inside, thereby can effectively control the temperature rise in the sample scavenging process.The anode seat 24 of ground connection is equipped with at upper flange 2 middle parts on vacuum chamber top, and the anode rod that extends with cathode taps 22 relative anode heads 6 is installed at the center of this anode seat down.The center of anode head 6 has inert gas inleting pipe 5, the zone is laid facing to the sample of cathode taps 22 in the air outlet of inlet pipe 5, and this structure not only is conducive to plasma and takes place, and helps peeling off of sample zone of oxidation, can also be in time by brushing, the zone of oxidation dust that will come off is in time taken away.Inlet pipe 5 extends to outside the vacuum chamber from the anode rod center always up, is communicated with inert gas source.The anode seat 24 outer anode caps 27 that shield that are equipped with.
During use, as shown in Figure 2, flanged coupling 28 connects vacuum gauge 29 and the purging valve 30 that reflects vacuum tightness respectively by threeway, and gas fittings 1 is by the external vacuum pump 31 of corrugated tube, and inlet pipe 5 is through the air outlet of needle-valve 33 external argon bottles 32.Configure the parameters such as discharge vacuum tightness, discharging current, discharge time and discharge time of this operation.
More convenient in order to operate, the pretreating machine of present embodiment also has been equipped with the sample transfer robot arm, and leaves the automatic interface with analytical instrument.Afterwards:
1) by mechanical manipulator sample is placed on airtight vacuum chamber, the regional back of laying of cathode taps;
2) from inert gas inleting pipe, import argon gas;
3) the 3rd step, the input of maintenance argon gas are bled from the interface of bleeding, and need adjust extraction flow and argon gas input flow rate by discharge vacuum tightness in case of necessity;
When 4) treating that the interior vacuum tightness of vacuum chamber reaches preset value, the connection high pressure makes between anode head and the cathode taps and produces plasma jet, removes the positive top layer of sample zone of oxidation;
5) mechanical manipulator reverses sample, connects high pressure again, removes sample reverse side top layer zone of oxidation;
6) keep the input argon gas, blow away the zone of oxidation dust of removing, and take away by the interface of bleeding.
To clean clean sample at last transfers to analytical instrument and tests.
Compared with prior art, present embodiment has following outstanding progress:
1. whole process is finished in vacuum environment, has avoided the secondary oxidation in the sample making course;
2. remove zone of oxidation with traditional milling and compare the disadvantageous effect of having avoided the temperature rise in the mechanical processing process to bring to sample;
3. for the higher sample of hardness, can first sample preparation removing oxide layer again, avoided first removing oxide layer again sample preparation to the link of sample second-heating, effective, save time;
4. whole sample making course can be finished automatically, need not manual intervention, and can with the analytical instrument slitless connection, realize from sample preparation to the system automation of analyzing.

Claims (7)

1. an Analysis of Metallic Materials pretreating machine is characterized in that: comprise the upright tubular vacuum chamber with bleed interface and hermatic door; The cathode tube that connects high-voltage power supply is extended at the middle part, bottom surface of described vacuum chamber up, the top of described cathode tube is the cathode taps that pending sample is laid the zone, the described zone of laying is extended the shielding unit that covers cathode taps and cathode tube, the cooling channel that described cathode taps inside has external cooling fluid source on every side; The top middle portion of described vacuum chamber is equipped with the anode seat of ground connection, and described anode seat extends the anode head relative with cathode taps down, has inert gas inleting pipe in the described anode head, and the zone is laid facing to the sample of described cathode taps in the air outlet of described inlet pipe.
2. Analysis of Metallic Materials pretreating machine according to claim 1, it is characterized in that: described vacuum chamber has the lower flange of relative annular groove and upper flange and inside and outside footpath respectively by upper and lower surface to be formed with the glass material cylindrical shell that annular groove matches, and the upper and lower end of described cylindrical shell inserts respectively that sealing is connected in the annular groove of the upper and lower flange that is lined with sealing-ring.
3. Analysis of Metallic Materials pretreating machine according to claim 2, it is characterized in that: lower flange underrun sealing-ring, the insulating washer of described vacuum chamber and the cathode flange insulation that connects high-voltage power supply are connected, the middle part of described cathode flange be equipped be electrically connected with it extend into cathode tube in the vacuum chamber up.
4. Analysis of Metallic Materials pretreating machine according to claim 3 is characterized in that: described shielding unit is made of the shielding case that covers cathode taps and the shielding cylinder that covers negative electrode.
5. Analysis of Metallic Materials pretreating machine according to claim 4, it is characterized in that: the anode seat of ground connection is equipped with at the upper flange middle part of described vacuum chamber, the anode rod that extends with the relative anode head of cathode taps is installed at the center of described anode seat down, the inlet pipe at described anode head center extends to outside the vacuum chamber from the anode rod center always up, is communicated with inert gas source.
6. Analysis of Metallic Materials pretreating machine according to claim 5, it is characterized in that: described anode seat is equipped with anode cap outward.
7. according to the treatment process of the arbitrary described Analysis of Metallic Materials pretreating machine of claim 1 to 6, it is characterized in that may further comprise the steps:
The first step, lay airtight vacuum chamber, zone back with what sample was placed on cathode taps;
Second goes on foot, imports argon gas from inert gas inleting pipe;
The 3rd step, the input of maintenance argon gas, interface is bled from bleeding;
The 4th step, when treating that vacuum tightness in the vacuum chamber reaches preset value, connect high pressure and make between anode head and the cathode taps and produce plasma jet, remove the positive top layer of sample zone of oxidation;
The 5th goes on foot, sample is reversed, and the connection high pressure makes between anode head and the cathode taps and produces plasma jet, removes sample reverse side top layer zone of oxidation;
The 6th step, maintenance input argon gas are blown away the zone of oxidation dust of removing, and are taken away by the interface of bleeding.
CN 201110403912 2011-12-08 2011-12-08 Analytic pretreatment machine for metal material and treatment method for analytic pretreatment machine Active CN102443816B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104797072B (en) * 2015-04-16 2018-06-19 大连交通大学 A kind of inductive coupling radio frequency plasma source
CN105115801B (en) * 2015-09-11 2019-01-22 贵州省分析测试研究院 A kind of Analysis of Metallic Materials front processor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85106786A (en) * 1985-09-07 1987-04-29 株式会社东芝 X-ray tube
CN1694975A (en) * 2002-11-09 2005-11-09 Sms迪马格股份公司 Method and device for descaling and/or cleaning a metal casting
CN2746712Y (en) * 2004-03-18 2005-12-14 中国科学院微电子研究所 Atmospheric low temp cold plasma discharge channel device
CN101661861A (en) * 2008-08-28 2010-03-03 中国科学院合肥物质科学研究院 Hollow anode ion source used for ultra high vacuum system
CN102099891A (en) * 2008-06-11 2011-06-15 惠而浦股份有限公司 Plasma process and reactor for treating metallic pieces
CN202369649U (en) * 2011-12-08 2012-08-08 南京和澳自动化科技有限公司 Treatment machine before metal material analysis

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85106786A (en) * 1985-09-07 1987-04-29 株式会社东芝 X-ray tube
CN1694975A (en) * 2002-11-09 2005-11-09 Sms迪马格股份公司 Method and device for descaling and/or cleaning a metal casting
CN2746712Y (en) * 2004-03-18 2005-12-14 中国科学院微电子研究所 Atmospheric low temp cold plasma discharge channel device
CN102099891A (en) * 2008-06-11 2011-06-15 惠而浦股份有限公司 Plasma process and reactor for treating metallic pieces
CN101661861A (en) * 2008-08-28 2010-03-03 中国科学院合肥物质科学研究院 Hollow anode ion source used for ultra high vacuum system
CN202369649U (en) * 2011-12-08 2012-08-08 南京和澳自动化科技有限公司 Treatment machine before metal material analysis

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