CN102416590A - Flexible limiting support device for large-diameter light reflector and mounting method - Google Patents
Flexible limiting support device for large-diameter light reflector and mounting method Download PDFInfo
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Abstract
The invention discloses a flexible limiting and supporting device for a heavy-caliber light reflector and an installation method, and the device mainly comprises: the device comprises a floating supporting structure, a flexible supporting structure, a gear transmission mechanism and a pressure sensing device. The specific supporting method mainly comprises the following steps: based on the deformation theory of the thin circular plate, the position, the caliber and the bearing reaction force borne by the flexible limiting supporting disc of the large-caliber light reflecting mirror surface under the action of gravity and the pressure of the grinding disc are optimized and analyzed; placing the workpiece on a Whiffletree structure model transition support plate, and positioning the workpiece; rotating the worm gear transmission mechanism to lift the flexible supporting disk; and based on the support reaction force calculated by finite elements, the position of each support disc is positioned in real time by utilizing the pressure sensing device. The invention has good error correction effect, inhibits the influence of external thermal gradient change, and can meet the processing, detection and application processes of the active grinding disc of the large-caliber light reflector.
Description
Technical field
The present invention relates to the technical field of light reflection mirror bracing or strutting arrangement; Be particularly related to flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum and method; This bracing or strutting arrangement and method can be applicable to the active polishing process and the testing process of heavy caliber mill, and in the stage of practicing, this bracing or strutting arrangement and method can reduce extraneous power load; The negative interaction of inertial load and thermal force, thereby the image quality of assurance optical system.
Background technology
Improve constantly along with what the contemporary optics systematic function required, the quality requirement of optical element is also improving constantly.For the image quality that improves optical system and reduce cost, the contemporary optics part is just towards aspheric surface, big relative aperture, high light-weighted trend development.But because in the use; The lightweight mirror receives external influence power easily; Like the variation of space microgravity, inertial load, vibration, rigging error stress, air-flow, temperature loading etc. and influence the image quality of optical system; Therefore, need to adopt a kind of spacer assembly of flexible support to isolate machinery and the influence of heat effect to optical system in the support system, assurance speculum and supporting construction thereof have good dynamic structure performance and heat endurance.
The processing method of aperture lightweight speculum mainly contains CCOS small abrasive nose technology, magnetorheological (MRF) technology, and ion beam (IBF) technology, and strain disc polishing CCAL technology etc.Yet the CCOS polishing technology causes the medium-high frequency error of surface of the work easily, influences optical system imaging quality, and, in the optical elements of large caliber process, be difficult to guarantee to remove the uniformity of function; And MRF and IBF cost are expensive, and the removal amount is low, generally is applied to the nano-precision improvement stage of manufacturing procedure.The CCAL polishing technology is based on Theory of Elastic Thin Plate; The aluminium dish that adopts workpiece bore 1/6-1/3 size is under the effect that adds the variable force square, and thin plate produces high order surf deform coupling aspheric surface primary mirror surface, accomplishes the polishing of primary mirror high accuracy; It is high to have the efficient of removal, suppresses advantages such as medium-high frequency.
At present, the bolster model of aperture lightweight speculum is mainly unsteady supporting construction model of Whiffletree and Grubb rocking plate type supporting construction model.The Whiffletree bolster model can float the external load of balance workpiece interface through the adjustable support dish, makes mirror surface stressed more even, and particularly the heavy caliber mill can the movable grinding disc polishing process.The Whiffletree bolster model is the selected strong point on basic unit's supporting surface, through lever balance theory the strong point is expanded to double supporting surface, and on each supporting surface, sets dynamic supporting disk.The strong point that this bolster model is selected is relatively independent, and every group of supporting surface expanding on the strong point constitutes dynamic equilibrium.The Grubb bolster model is the floating bracket through a rigidity on the strong point of each static determinacy, expands to multi-point support to the strong point and remakes and be used for primary mirror, and the multi-point support that acts on minute surface is obeyed the standing balance rule.Whiffletree and the positioning accuracy of Grubb bolster model on the workpiece support face guarantee through 3 levelness of gripper shoe, so the stressed balance that reaches easily of workpiece supporting surface in application process.Yet the final support force of Whiffletree and Grubb bolster model all is embodied on the rigid supporting rod, and the local deformation of drawing it of the heat-malformation, oscillating load, the variations in flow that cause of variations in temperature can't be eliminated to external world.
List of references: " Jerry E.Nelson; Jacob Lubliner; Terry S.Mast; Telescope mirror suppors:plate deflections on point supports [J] .Advanced Technology Optical Telescopes, SPIE, 1982 (332); 212-228 " discloses based on thin plate Deformation Theory and Vukobratovich " grid effect " formula, the strong point and strong point endless belt position that those skilled in the art roughly extrapolate the aperture lightweight mirror according to above-mentioned theory and correlation formula easily.
Flexible spacing support combines the flexible support mode with the rigid support mode.Flexible supporting device is the flexure spring of combination, its objective is the pressure of balance grinding head for polishing, eliminates vibration error and suppresses the surface deformation that extraneous negative load causes; The rigid support purport in the polishing and the application stage carries out spacing to the aperture lightweight mirror and the protection.In ability movable grinding disc polishing process; Since can movable grinding disc weight big, when mill is in position, workpiece edge (mill expose workpiece edge size less than the mill size 1/3), can cause workpiece to produce micron-sized inclination; And can adopt 3 rigid support to act on the workpiece support face simultaneously this moment simultaneously; Tilt with this trace of eliminating the workpiece polishing process, be reduced to 0.96 micron by initial tilt quantity by 3.4 microns when aperture lightweight mirror edge is polished in 3 spacing supports, this precision is far below the positioning accuracy of burnishing machine Z axle; And the surface deformation under this supporting way has restorability.Through simulation analysis; Adopt flexible spacing bolster model; But the gravity of flexible supporting device supporting workpiece and mill 80%, the supporting surface equivalent stress changes lower, and maximum principal stress satisfies the limit stress requirement of workpiece; Greatly improved workpiece and resisted extraneous vibration, atmospheric turbulance changes, temperature thermal force deformation ability.
Summary of the invention
The objective of the invention is for designing a kind of flexible spacing bracing or strutting arrangement that can be applicable to heavy caliber mill processing, practices, thereby minute surface stress balance when this bracing or strutting arrangement has the polishing of the aperture lightweight of raising mirror edge, to have eliminated the local principal stress of supporting surface excessive and in the process of practicing, improve optical system and resist extraneous load effect and improve advantages such as quality of optical imaging.Thereby provide a kind of simple and compact for structure, with low cost, control is simple, integrated level is high, easy to operate, can realize the high accuracy polishing of heavy caliber, high lightweight speculum and the flexible stopping means of optical system installation application.
The objective of the invention is to realize by following technical proposals:
The flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum, this device comprises unsteady supporting construction, flexible support structure, gear drive and pressure sensor device; Wherein:
Said unsteady supporting construction, it adopts the Whiffletree model, and this model is a kind of supporting construction model of transition, its objective is workpiece is carried out initial alignment; Said unsteady supporting construction comprises base, newel, lever bracing frame, lever, ball, tripod, the reference column that floats, supporting disk, straight pin float; Wherein lever bracing frame, lever, ball, tripod constitute the floating lever rod balance model;
Said flexible support structure comprises support column, pedestal, flexible support dish, side bracing frame, spacing supported hole, flexible support post and combined type spring model; Pedestal is fixed on three support columns;
Said pressure sensor device comprises pressure sensor, signal adapter and pressure Output Display Unit, its objective is each flexible support structure model is monitored the active force that the lightweight mirror produces; Signal adapter comprises signal amplification circuit and A/D change-over circuit, is output as the elastic acting force of each flexible support dish to workpiece.
Further, the connected mode of unsteady reference column, the supporting disk that floats is that ball head universal connects.
Further, lever two end surfaces are the hemisphere concave surface, are that ball head universal is connected with the connected mode of tripod.
Further, the combined type spring model comprises installing rack, cluster spring, installing rack and lifting column secure fit, and flexible support structure has the vibration of inhibition, the function that the opposing thermal force is disturbed.
Further, the up-down model that the Whiffletree model supports adopts Worm and worm-wheel gearing, and the up-down model of flexible support dish and spacing supporting disk adopts the bevel gear transmission mechanism; Worm and worm-wheel gearing can be applicable to big mass loading, and has auto-lock function; And bevel gear transmission mechanism gearratio is high, and positioning accuracy is good.
Further, the driving gear of Worm and worm-wheel gearing is that worm screw, driven gear are that worm gear, adjusting gear are newel; Bevel gear transmission mechanism driving gear is that bevel gear, driven gear are that bevel gear, adjusting gear are lifting column; Wherein driven worm gear, driven bevel pinion are change gear, and driven worm gear left end is that worm gear, right-hand member are spur gear; The driven bevel pinion outer end is that bevel gear, interior ring are screwed hole.
Further; Worm and worm-wheel gearing is inner in base through bearing fixing, and the lever balance model is installed on the pedestal top, and the up-down mode of the bolster model that floats is for passing through rotary worm; Drive worm gear, and cooperate the realization base to go up and down with the newel straight-tooth by worm gear right-hand member spur gear.
Further; In base interior, lifting column passes spacing supported hole and cooperates with driven bevel pinion the bevel gear transmission mechanism through bearing fixing, and the rotation driving bevel gear is passed through in up-down mode position flexible and spacing support; Drive bevel gear, and realize the up-down of lifting column by the internal thread of bevel gear.
Further, pressure sensor is SMD pressure sensor, the voltage output analog signal that this SMD pressure sensor resolving power is 0.1mV.
According to the installation method of the above-mentioned flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum, said installation method step is following:
The first step:, roughly extrapolate the strong point and the strong point endless belt position of aperture lightweight mirror based on thin plate Deformation Theory and Vukobratovich " grid effect " formula;
Second step: adopt finite element analysis software, analyze under gravity and the effect of mill pressure, optimize flexibility, spacing supporting disk bore, position and the suffered support reaction of supporting surface of analyzing the low precision distortion of aperture lightweight mirror surface;
The 3rd step: pressure sensor is placed on the flexible support dish, and sensor voltage is exported signal gaging pressure is outputed in the pressure Output Display Unit through signal amplification circuit and A/D change-over circuit;
The 4th step: will place with the metal plate of workpiece equal quality on the flexible spacing supporting construction model, the active force that calculates to the first step is regulated driving bevel gear, roughly the position to each flexible spacing supporting disk positions, and cancels flat board;
The 5th step: the adjusting handle worm screw, promote the Whiffletree support platform, workpiece is placed on the unsteady bolster model of Whiffletree of mounting platform, workpiece is positioned; Slowly reduce the Whiffletree support platform, the realization workpiece bottom supports by Whiffletree is unsteady and supports excessively to flexible spacing support;
The 6th step: through the rotation driving bevel gear, regulate each flexible spacing supporting disk, and each flexible spacing supporting disk is accurately located through the pressure sensor numeral that the pressure sensor device feedback obtains.
Compared with prior art, advantage of the present invention is:
1, the flexible spacing bracing or strutting arrangement of aperture lightweight speculum of the present invention is mainly reflected on the flexible support structure the enabling capabilities of optical system, has improved the anti-vibration ability of supporting construction and has resisted extraneous negative load deformability;
2, support and swing and support with respect to floating, flexible spacing support reduces the maximum principal stress that greatly reduces workpiece, has eliminated the situation that application process stress is concentrated;
3, flexible spacing being supported in the ability movable grinding disc polishing process, the mill gravitational load acts on the flexible support model fully, and mill burnishing surface and minute surface are fitted fully, and polish is stressed more even;
4, unsteady bolster model or swing bolster model change to mirror centre distance with the polishing disk position the support force of workpiece, and each supporting disk of flexible support model is almost consistent to the support force of workpiece, and supporting surface is stressed evenly.
Description of drawings
Fig. 1 is flexible spacing supporting construction model sketch map;
Fig. 2 is the supporting construction model sketch map that floats;
Fig. 3 is a lever balance mounted cast sketch map;
Fig. 4 is a combined type spring model sketch map;
Fig. 5 is a worm and gear transmission model sketch map;
Fig. 6 is the bevel gearing sketch map
Fig. 7 is a pressure sensing display unit sketch map;
Fig. 8 is the flexible spacing Support Position of a bore Φ 1.8m lightweight mirror sketch map;
Fig. 9 is spacing supporting disk position optimization analysis chart;
Figure 10 is that spacing supporting disk bore optimization is analyzed;
Figure 11 is the surface deformation when descending ability movable grinding disc edge polishing based on the spacing supporting condition of flexibility;
Figure 12 is the stressed distribution of supporting disk under floating structure model, flexible support model, the flexible spacing bolster model.
Label among the figure: 101, base; 102, newel; 103, lever bracing frame; 104, lever; 105, ball; 106, tripod; 107, unsteady reference column; 108, unsteady supporting disk; 109, straight pin; 201, support column; 202, pedestal; 203, flexible support dish; 204, side bracing frame; 205, spacing supported hole; 206, installing rack; 207, cluster spring; 208, flexible support; 301, worm screw; 302, driven worm gear; 303, bearing; 304, lifting column; 305, driving bevel gear; 306, driven bevel pinion; 401, pressure sensor; 402, signal amplification circuit; 403, A/D change-over circuit; 404, pressure Output Display Unit;
The specific embodiment
Below in conjunction with the accompanying drawing and the specific embodiment the present invention is done further explanation:
Like Fig. 1,2, shown in 3, the unsteady supporting construction of apparatus of the present invention adopts the Whiffletree model, is a kind of supporting construction model of transition, its objective is workpiece is carried out initial alignment.Unsteady supporting construction mainly comprises base 101, newel 102, lever bracing frame 103, lever 104, ball 105, tripod 106, the reference column 107 that floats, supporting disk 108, straight pin 109 float.Wherein lever bracing frame 103, lever 104, ball 105, tripod 106 constitute the floating lever rod balance model;
As shown in Figure 3,104 liang of end surfaces of lever are the hemisphere concave surface, are that ball head universal is connected with the connected mode of tripod 106;
Like Fig. 1, shown in 4, flexible support structure mainly comprises support column 201, pedestal 202, flexible support dish 203, side bracing frame 204, spacing supported hole 205, flexible support post 208, installing rack 206 and cluster spring 207; Pedestal 202 is fixed on three support columns 201; Installing rack 206 and lifting column 304 secure fit;
Like Fig. 1,2,5, shown in 6, the driving gear of Worm and worm-wheel gearing is that worm screw 301, driven gear are that worm gear 302, adjusting gear are newel 102; Bevel gear transmission mechanism driving gear is that bevel gear 305, driven gear are that bevel gear 306, adjusting gear are lifting column 304; Wherein worm gear 302, driven bevel pinion 306 are change gear, and worm gear 302 left ends are that worm gear, right-hand member are spur gear; Driven bevel pinion 306 outer ends are that bevel gear, interior ring are screwed hole.Worm and worm-wheel gearing is fixed in base 101 inside through bearing 303; The lever balance model is installed on the pedestal top; The up-down mode of unsteady bolster model is for passing through rotary worm 301; Drive worm gear 302, and cooperate realization base 101 to go up and down with newel 102 straight-tooth by gear 302 right-hand member spur gears.The bevel gear transmission mechanism passes through bearing fixing in pedestal 202 inside; Lifting column 304 passes spacing supported hole 205 and cooperates with transmission bevel gear 306; Rotation driving bevel gear 305 is passed through in up-down mode position flexible and spacing support; Drive bevel gear 306, and realize the up-down of lifting column 304 by the internal thread of bevel gear 306;
As shown in Figure 7; Pressure sensor device comprises SMD pressure sensor 401, signal amplification circuit 402, A/D change-over circuit 403 and pressure Output Display Unit 404; Signal amplification circuit 402 is formed signal adapter with A/D change-over circuit 403; Its objective is each flexible support structure model is monitored the active force that the lightweight mirror produces, and driving bevel gear 305 is positioned according to measurement data;
Present embodiment combines the high lightweight hyperboloid lightweight mirror of a bore 1.8m to carry out analog simulation, and lightweight mirror material is a fused quartz, and workpiece weight is 408.68Kg, and light weight turns to (80.3%), adopts ability movable grinding disc polishing technology, and mill weight is 20kg.Fig. 8 is based on the plate theory model, the distribution map of 18 flexible support dishes that obtain after the optimization and 3 spacing supporting disk positions and bore.Through the finite element simulation analysis, adopt in the Whiffletree model, the active force of each supporting disk of inner and outer rings changes with annular radii, and the support reaction of each supporting surface of outer shroud is 225.217N, and the support reaction of interior each supporting surface of ring is 217.743N; And in the flexible support structure model, the active force to workpiece of 18 supporting disks is 222.73N, and therefore, flexible support has the advantage that supporting surface stress is concentrated of eliminating;
Fig. 9 is based on the flexible support model, and the position of 3 spacing supporting disks of rigidity is optimized analysis;
Figure 10 is based on the flexible support model, and the bore of 3 spacing supporting disks of rigidity is optimized analysis;
When Figure 11 is in the polishing of workpiece edge for mill, the surface deformation that spacing bolster model analysis obtains based on flexibility, PV (peak-to-valley value) 964.4nm, RMS (root-mean-square value) 215.0nm;
Figure 12 compares analysis to adopting Whiffletree stressed when the high lightweight hyperboloid lightweight mirror of bore 1.8m is supported of support, flexible support and three kinds of models of flexible spacing support that float.The outer ring position of Whiffletree model supports stressed (A7-A18) and supports stressed (A1-A6) greatly than endocyclic position, and the stressed mill polishing position effects that receives of supporting disk; 18 stressed being evenly distributed of flexible support model, and supporting disk do not receive the mill position effects basically to the workpiece active force, but during the polishing of mill edge, supporting surface can produce micron dimension; Flexible spacing support has combined the above two advantage; A1-A18 is the flexible support characteristic, stressed being evenly distributed, and also supporting disk does not receive the mill position effects basically to the workpiece active force; A19-A21 is spacing support, workpiece is carried out the inclination of position limitation protection and reduction workpiece polishing process.
The part that the present invention does not set forth in detail belongs to techniques well known.
Claims (10)
1. the flexible spacing bracing or strutting arrangement of an aperture lightweight speculum, it is characterized in that: this device comprises unsteady supporting construction, flexible support structure, gear drive and pressure sensor device; Wherein:
Said unsteady supporting construction, it adopts the Whiffletree model, and this model is a kind of supporting construction model of transition, its objective is workpiece is carried out initial alignment; Said unsteady supporting construction comprises base (101), newel (102), lever bracing frame (103), lever (104), ball (105), tripod (106), the reference column (107) that floats, supporting disk (108), straight pin (109) float; Wherein lever bracing frame (103), lever (104), ball (105), tripod (106) constitute the floating lever rod balance model;
Said flexible support structure comprises support column (201), pedestal (202), flexible support dish (203), side bracing frame (204), spacing supported hole (205), flexible support post (208) and combined type spring model; Pedestal (202) is fixed on three support columns (201);
Said pressure sensor device comprises pressure sensor (401), signal adapter and pressure Output Display Unit (404), its objective is each flexible support structure model is monitored the active force that the lightweight mirror produces; Signal adapter comprises signal amplification circuit (402) and A/D change-over circuit (403), is output as the elastic acting force of each flexible support dish to workpiece.
2. the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 1 is characterized in that: the connected mode of the reference column (107) that floats, the supporting disk (108) that floats is that ball head universal connects.
3. the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 1, it is characterized in that: lever (104) two end surfaces are the hemisphere concave surface, are that ball head universal is connected with the connected mode of tripod (106).
4. the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 1; It is characterized in that: the combined type spring model comprises installing rack (206), cluster spring (207); Installing rack (206) and lifting column (304) secure fit; Flexible support structure has the vibration of inhibition, the function that the opposing thermal force is disturbed.
5. the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 1; It is characterized in that: the up-down model that the Whiffletree model supports adopts Worm and worm-wheel gearing, and the up-down model of flexible support dish and spacing supporting disk adopts the bevel gear transmission mechanism; Worm and worm-wheel gearing can be applicable to big mass loading, and has auto-lock function; And bevel gear transmission mechanism gearratio is high, and positioning accuracy is good.
6. the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 5, it is characterized in that: the driving gear of Worm and worm-wheel gearing is that worm screw (301), driven gear are that worm gear (302), adjusting gear are newel (102); Bevel gear transmission mechanism driving gear is that bevel gear (305), driven gear are that bevel gear (306), adjusting gear are lifting column (304); Wherein driven worm gear (302), driven bevel pinion (306) are change gear, and driven worm gear (302) left end is that worm gear, right-hand member are spur gear; Driven bevel pinion (306) outer end is that bevel gear, interior ring are screwed hole.
7. the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 5; It is characterized in that: Worm and worm-wheel gearing is fixed in base (101) inside through bearing (303); The lever balance model is installed on the pedestal top; The up-down mode of unsteady bolster model drives worm gear (302) for through rotary worm (301), and cooperates realization base (101) up-down with newel (102) straight-tooth by worm gear (302) right-hand member spur gear.
8. the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 5; It is characterized in that: the bevel gear transmission mechanism passes through bearing fixing in pedestal (202) inside; Lifting column (304) passes spacing supported hole (205) and cooperates with driven bevel pinion (306); Rotation driving bevel gear (305) is passed through in up-down mode position flexible and spacing support, drives bevel gear (306), and realizes the up-down of lifting column (304) by the internal thread of bevel gear (306).
9. the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 1, it is characterized in that: pressure sensor (401) is SMD pressure sensor, the voltage output analog signal that this SMD pressure sensor resolving power is 0.1mV.
10. the installation method of the flexible spacing bracing or strutting arrangement of a kind of aperture lightweight speculum according to claim 1, it is characterized in that: said installation method step is following:
The first step:, roughly extrapolate the strong point and the strong point endless belt position of aperture lightweight mirror based on thin plate Deformation Theory and Vukobratovich " grid effect " formula;
Second step: adopt finite element analysis software, analyze under gravity and the effect of mill pressure, optimize flexibility, spacing supporting disk bore, position and the suffered support reaction of supporting surface of analyzing the low precision distortion of aperture lightweight mirror surface;
The 3rd step: pressure sensor (401) is placed on the flexible support dish (203), and sensor voltage is exported signal gaging pressure is outputed in the pressure Output Display Unit (404) through signal amplification circuit (402) and A/D change-over circuit (403);
The 4th step: will place with the metal plate of workpiece equal quality on the flexible spacing supporting construction model; Active force to calculating to the first step is regulated driving bevel gear (305); Roughly the position to each flexible spacing supporting disk positions, and cancels flat board;
The 5th step: adjusting handle worm screw (301), promote the Whiffletree support platform, workpiece is placed on the unsteady bolster model of Whiffletree of mounting platform, workpiece is positioned; Slowly reduce the Whiffletree support platform, the realization workpiece bottom supports by Whiffletree is unsteady and supports excessively to flexible spacing support;
The 6th step: through rotation driving bevel gear (305), regulate each flexible spacing supporting disk (203), and each flexible spacing supporting disk is accurately located through the pressure sensor numeral that the pressure sensor device feedback obtains.
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| CN105259635A (en) * | 2015-11-17 | 2016-01-20 | 中国科学院长春光学精密机械与物理研究所 | Whiffletree support structure applied to statically determined support of large-aperture reflector |
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| CN114460713B (en) * | 2021-12-28 | 2024-03-15 | 北京空间机电研究所 | Precise unloading structure of large-caliber reflector |
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