CN102412089A - Device for measuring vacuum degree of vacuum arc extinguish chamber with built-in cold cathode gauge - Google Patents
Device for measuring vacuum degree of vacuum arc extinguish chamber with built-in cold cathode gauge Download PDFInfo
- Publication number
- CN102412089A CN102412089A CN2011102149820A CN201110214982A CN102412089A CN 102412089 A CN102412089 A CN 102412089A CN 2011102149820 A CN2011102149820 A CN 2011102149820A CN 201110214982 A CN201110214982 A CN 201110214982A CN 102412089 A CN102412089 A CN 102412089A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- cold cathode
- gauge
- built
- arc extinguish
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a device for measuring the vacuum degree of a vacuum arc extinguish chamber with a built-in cold cathode gauge, comprising a vacuum arc extinguish chamber main body, a power supply, a cold cathode vacuum gauge and a measuring circuit, wherein the cold cathode vacuum gauge is encapsulated in and integrated with the vacuum arc extinguish chamber, and a measuring electrode is lead out from a static end cover plate of the arc extinguish chamber. The device for measuring the vacuum degree of a vacuum arc extinguish chamber is used for measuring the vacuum degree of a vacuum switch during power-off maintenance, avoids the interference of a strong electromagnetic field on measurement, and meets the requirement for periodic measurement of the gradually changing vacuum degree. When the vacuum switch is in live line work, the gauge is in a power-off unused state, and design of the structure and position of the gauge also fully considers minimizing the infinitesimal disturbance of the built-in gauge on the electric field. The device provided by the invention is suitable for vacuum arc extinguish chambers of all voltage classes with the diameters of the vacuum arc extinguish chambers greater than 120mm, and is suitable for vacuum arc extinguish chambers of which the shell materials are glass or ceramic.
Description
Technical field
The present invention is the vacuum level of vacuum arc-quenching chamber measurement mechanism that a kind of built-in cold cathode is regulated.
Background technology
At present vacuum interrupter has reliable vacuum measurement method in process of production in the electrical network, so the product export parameter is believable, but these method of measurement all can not be used after the vacuum interrupter sealed-off, dispatching from the factory.The accurate measurement of final vacuum degree of dispatching from the factory never has fine solution.The domestic and international researcher who comprises the applicant; All once be devoted to the vacuum level of vacuum arc-quenching chamber Study of Monitoring in the switch cubicle, the method for measuring online arc control device vacuum degree mainly contains impulse magnetron electric discharge, Bo Keer electric light transformation approach, radome potentiometry, discharging sound shooting method, bi-bellow method, cold cathode vacuum gauge method and emission current rate of decay method or the like.These methods can be divided into on-line monitoring and measure two big types with " at the net off-line ": first kind on-line monitoring is exactly that measurement mechanism is in normally open, measures constantly and shows measurement data; Netting off-line measurement for second type, is exactly need can not measure its vacuum degree from dismounting vacuum interrupter in the switch cubicle, and measurement mechanism is a normally off, and is less to the electric network reliability influence.What CN97241647.1 disclosed a kind of vacuum level of vacuum arc-quenching chamber exempts to dismantle measurement mechanism; Main " C " shape iron core by the moulding of a kind of silicon steel sheet closed assembly; Put the coil of coiling outside; Place the clear space of vacuum interrupter one side, realize that purpose is measured in the dismounting of exempting from of arc control device vacuum degree.CN200810123365.8 discloses a kind of on-line detection method for vacuum level of vacuum arc-quenching chamber, is full of SF in the arc control device outside
6Gas is as external insulation gas, and the helium that is mixed with 5～15% weight in the insulating gas outside detects vacuum degree as indicating gas through the helium that detects in the vacuum tube, in case vacuum tube leaks, just can in vacuum tube, measure the existence of this gas.Thus it is clear that,, also do not have a kind of vacuum measuring device that is built in vacuum interrupter at present owing to reasons such as material, technology and design levels.
Summary of the invention
The purpose of this invention is to provide the vacuum level of vacuum arc-quenching chamber measurement mechanism that a kind of built-in cold cathode is regulated, can overcome the defective of prior art, measurement of vacuum when being used for the vacuum switch interruption maintenance has comparatively ideal accuracy of measurement.Avoided the interference of strong-electromagnetic field, can satisfy the requirement of the periodic measurement of gradual change amount vacuum degree again measuring.During the charged work of vacuum switch, regulate the no state of outage that is in; The structure of regulating, the design of position fully take into account also that to regulate the perturbation of inserting electric field as far as possible little.
The vacuum level of vacuum arc-quenching chamber measurement mechanism that a kind of built-in cold cathode provided by the invention is regulated comprises: vacuum interrupter main body, power supply, cold cathode vacuum gauge and measuring circuit is characterized in that:
The cold cathode vacuum gauge is packaged in the vacuum extinction chamber interior, and cold cathode is regulated the inboard of sealing-in at the quiet end casing of vacuum interrupter, becomes one with vacuum interrupter, draws measurement electrode at the quiet end casing of arc control device; Negative electrode is two stainless steel flat plates and places relatively; Middle square frame is anode (a shaped as frame anode), processes with molybdenum or stainless steel, is connected with anode extraction pole on the quiet end casing; Externally-applied magnetic field is perpendicular to electrode plane, and magnetic field is provided by Nd-Fe-B permanent magnet, and permanent magnet is in two dull and stereotyped anode outsides and regulate the space between the cylinder blanket.
The profile of cold cathode vacuum gauge is a cylinder, and its stainless steel casing soldering is on the quiet end casing of vacuum interrupter.
Its sealing structure is made up of sealing ring and sealing-in ceramics.The centre bore of sealing-in ceramics and anode extraction pole adopt the pin type sealing-in, and the sealing-in ceramics promptly is that sealing structure spare is again the electric insulation spare between the negative electrode anode.
Measurement of vacuum when the present invention is used for the vacuum switch interruption maintenance can be avoided the interference of strong-electromagnetic field to measuring, and can satisfy the requirement of the periodic measurement of gradual change amount vacuum degree again.During the charged work of vacuum switch, regulate the no state of outage that is in; The structure of regulating, the design of position also fully take into account owing to regulate the perturbation of inserting electric field.
After COMPREHENSIVE CALCULATING of the present invention has been analyzed built-in cold cathode and has been regulated the influence that the electromagnetic field of vacuum extinction chamber interior is distributed; Position, structure that built-in cold cathode is regulated have been designed; This installation can be carried out with the quiet end pieces production process of vacuum interrupter; When quiet end pieces is hunted leak, hunt leak together then, do not influence the enforcement of one-step seal-exhaust homogeneous tube production technology; Considered the influence of the breaking-closing operating vibration in switch number of times mechanical endurance, taken into full account that to regulate the perturbation of inserting electric field as far as possible little.Consider simultaneously that cold cathode regulates at the net state that works offline; Can use one of extraction electrode that the static conductive rod of vacuum interrupter regulates as cold cathode (negative electrode); Reduced the ceramicto-metal seal weld seam effectively one, dropped to minimum install the influence that cold cathode regulates vacuum interrupter encapsulation additional.Consider secondary electron yield under the ion bombardment, confirm to regulate electrode material.
The present invention is applicable to the vacuum interrupter of vacuum interrupter diameter greater than all electric pressures of 120mm, is applicable to that sheathing material is the vacuum interrupter of glass or pottery.
Description of drawings
Fig. 1 is that the vacuum level of vacuum arc-quenching chamber measurement mechanism overall structure that the built-in cold cathode of the present invention is regulated is formed sketch map.
Fig. 2 is that cold cathode is regulated principle assumption diagram.
Embodiment
Below in conjunction with accompanying drawing and instance technical scheme of the present invention is further specified.
As shown in the figure: 1-cold cathode vacuum gauge, 2-anode extraction pole, the quiet end casing of 3-, 4-static conductive rod, 5-sealing ring, 6-sealing-in ceramics, 7, the 8-minus plate, 9-shaped as frame anode.
The profile of cold cathode vacuum gauge 1 is a cylinder, and its stainless steel casing soldering is on the quiet end casing 3 of vacuum interrupter.Its internal structure principle is as shown in Figure 2, and negative electrode is two stainless steel flat plates 7 and 8 (Fig. 2), and opposing parallel is placed; Middle square frame is shaped as frame anode 9 (Fig. 2), can process with molybdenum or stainless steel, is connected with anode extraction pole 2 among Fig. 1; Externally-applied magnetic field is perpendicular to electrode plane, and magnetic field is provided by Nd-Fe-B permanent magnet, and permanent magnet is outside two dull and stereotyped anodes and between the cylinder blanket of regulating.
1 sealing-in of cold cathode vacuum gauge is in vacuum interrupter, in the inboard of quiet end casing 3.Its sealing structure is made up of sealing ring among Fig. 15 and sealing-in ceramics 6.The centre bore of ceramics 6 and anode extraction pole 2 adopt the pin type sealing-in, and sealing-in ceramics 6 promptly is that sealing structure spare is again the electric insulation spare between the negative electrode anode.
Operation principle of the present invention and process: two metal electrode anodes and negative electrode, after interpolar adds the dc high voltage of thousands of volts, at certain low pressure (10
-1～2000Pa) in owing to there is the numerous flow phenomenon of electronics, can cause self-maintained discharge.But 10
-1More low pressure state below the Pa, self-maintained discharge is extinguished.Can increase electron motion path as if the way with magnetic field control electron motion this moment.Shown in Figure 2 is the principle of cold cathode vacuum gauge (shown in 1 among Fig. 1): negative electrode is two metal plates (minus plates 7 and minus plate 8 among Fig. 2), placement relatively; Middle square frame is anode (the shaped as frame anode 9 among Fig. 2); Externally-applied magnetic field is perpendicular to electrode plane.When the electrons polar motion, because of its velocity attitude and magnetic field form an angle, under the effect of Lorentz force, its track is not straight line but the motion of spinning.Because anode is a shaped as frame,, but pass again, receive the repulsion of opposite negative electrode then and return so electronics not necessarily just can be run into it the first time.Can know that electronics is repeatedly just to stamp anode then with spiral trajectory vibration before and after the anode, electron path prolongs greatly, and the molecular number of collision and ionization increases, and makes than low pressure (10
-4About Pa) still can keep discharge.When electric field. when magnetic field was constant, discharging current was single-valued relationship by the unique decision of vacuum degree.Discharging current just can be measured vacuum degree through processing of circuit.
The application implementation example
The measuring circuit of cold cathode vacuum gauge comprises that dc high-voltage circuit, sample of signal, peak value lock-in circuit, operational amplification circuit etc. partly are routine techniques, are not included within the present invention.The course of work of cold cathode vacuum gauge is: when the vacuum switch is in the interruption maintenance state, on the anode 2 of Fig. 1, apply high direct voltage, static conductive rod 4 ground connection.Extract loop current signals through signal acquisition circuit, send in the computer of measuring system, handle (specifically seeing CN 200910070570.7), show measurement result through measuring expert system analysis.
Place: laboratory
Technical conditions:
1) power supply: 220V ± 10%, AC 50Hz
2) ambient temperature :-20 ℃～65 ℃
3) ambient humidity:＜80%
4) height above sea level:＜1000m
Product type is the vacuum interrupter of ZKTD3150/10-40, by above-mentioned use procedure, and result data such as table 1:
Table 1 vacuum measurement data.
| Method of measurement | Vacuum degree value (Pa) |
| Built-in cold cathode is regulated method | 1×10 -4 |
Claims (5)
1. the vacuum level of vacuum arc-quenching chamber measurement mechanism that built-in cold cathode is regulated comprises vacuum interrupter main body, power supply, cold cathode vacuum gauge and measuring circuit, it is characterized in that:
The cold cathode vacuum gauge is packaged in the vacuum extinction chamber interior, and cold cathode is regulated the inboard of sealing-in at the quiet end casing of vacuum interrupter, becomes one with vacuum interrupter, draws measurement electrode at the quiet end casing of arc control device; Negative electrode is two stainless steel flat plates and places relatively; Middle is the shaped as frame anode, is connected with anode extraction pole on the quiet end casing; Externally-applied magnetic field is perpendicular to electrode plane, and magnetic field is provided by Nd-Fe-B permanent magnet, and permanent magnet is in two dull and stereotyped anode outsides and regulate the space between the cylinder blanket.
2. the vacuum level of vacuum arc-quenching chamber measurement mechanism that built-in cold cathode according to claim 1 is regulated, the profile that it is characterized in that described cold cathode vacuum gauge is a cylinder, its stainless steel cylinder blanket soldering is on the quiet end casing of vacuum interrupter.
3. the vacuum level of vacuum arc-quenching chamber measurement mechanism that built-in cold cathode according to claim 1 is regulated; It is characterized in that described sealing structure is made up of sealing ring and sealing-in ceramics; The centre bore of sealing-in ceramics and the sealing-in of anode extraction pole pin type, sealing-in ceramics promptly are that sealing structure spare is again the electric insulation spare between the negative electrode anode.
4. the vacuum level of vacuum arc-quenching chamber measurement mechanism that built-in cold cathode according to claim 1 is regulated is characterized in that described shaped as frame anode processes with molybdenum or stainless steel.
5. the vacuum level of vacuum arc-quenching chamber measurement mechanism that built-in cold cathode according to claim 1 is regulated is characterized in that described permanent magnet is a Nd-Fe-B permanent magnet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110214982.0A CN102412089B (en) | 2011-07-29 | 2011-07-29 | Device for measuring vacuum degree of vacuum arc extinguish chamber with built-in cold cathode gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110214982.0A CN102412089B (en) | 2011-07-29 | 2011-07-29 | Device for measuring vacuum degree of vacuum arc extinguish chamber with built-in cold cathode gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102412089A true CN102412089A (en) | 2012-04-11 |
| CN102412089B CN102412089B (en) | 2014-04-02 |
Family
ID=45914115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110214982.0A Expired - Fee Related CN102412089B (en) | 2011-07-29 | 2011-07-29 | Device for measuring vacuum degree of vacuum arc extinguish chamber with built-in cold cathode gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102412089B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106356246A (en) * | 2016-11-03 | 2017-01-25 | 韩润萍 | Online monitoring device for vacuum degree of arc extinguishing chamber of vacuum circuit breaker |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63318034A (en) * | 1987-06-18 | 1988-12-26 | Hitachi Ltd | Vacuum deterioration detecting device for vacuum switch |
| DE19714655A1 (en) * | 1997-04-09 | 1998-10-15 | Abb Patent Gmbh | Vacuum switch chamber conditioning device |
| CN201569538U (en) * | 2009-03-19 | 2010-09-01 | 河南省泓钻科技发展有限公司 | Vacuum degree on-line monitoring device of inverted-magnetron febetron discharge vacuum switch |
| CN202332716U (en) * | 2011-07-29 | 2012-07-11 | 河北工业大学 | Vacuum measurement device internally provided with cold cathode tube for vacuum arc extinguish chamber |
-
2011
- 2011-07-29 CN CN201110214982.0A patent/CN102412089B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63318034A (en) * | 1987-06-18 | 1988-12-26 | Hitachi Ltd | Vacuum deterioration detecting device for vacuum switch |
| DE19714655A1 (en) * | 1997-04-09 | 1998-10-15 | Abb Patent Gmbh | Vacuum switch chamber conditioning device |
| CN201569538U (en) * | 2009-03-19 | 2010-09-01 | 河南省泓钻科技发展有限公司 | Vacuum degree on-line monitoring device of inverted-magnetron febetron discharge vacuum switch |
| CN202332716U (en) * | 2011-07-29 | 2012-07-11 | 河北工业大学 | Vacuum measurement device internally provided with cold cathode tube for vacuum arc extinguish chamber |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106356246A (en) * | 2016-11-03 | 2017-01-25 | 韩润萍 | Online monitoring device for vacuum degree of arc extinguishing chamber of vacuum circuit breaker |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102412089B (en) | 2014-04-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10712312B2 (en) | Flexible magnetic field coil for measuring ionic quantity | |
| US6153846A (en) | Vacuum insulated switching apparatus | |
| US20110044418A1 (en) | Long life high efficiency neutron generator | |
| US4440995A (en) | Vacuum circuit interrupter with on-line vacuum monitoring apparatus | |
| CN109932607A (en) | Strong electromagnetic field induced electrostatic discharge test system in space radiation environment | |
| CN105407621A (en) | Compact type D-D neutron generator | |
| CN202332716U (en) | Vacuum measurement device internally provided with cold cathode tube for vacuum arc extinguish chamber | |
| CN109119313B (en) | Large-emission-current hollow cathode ground test device | |
| KR950001216B1 (en) | Cathode sputtering apparatus | |
| CN102412089B (en) | Device for measuring vacuum degree of vacuum arc extinguish chamber with built-in cold cathode gauge | |
| EP0516422A2 (en) | Improvements relating to vacuum gauges | |
| US3263162A (en) | Apparatus and method for measuring the pressure inside a vacuum circuit interrupter | |
| US20220415595A1 (en) | Vacuum degree detection device with buried electrodes in vacuum interrupter and method thereof | |
| Allison | Construction and Performance of a Low Voltage Arc as a Source of Positive Ions | |
| Foosnaes et al. | The vacuum arc subjected to an axial magnetic field | |
| CN110192265B (en) | Anode electrode shield for inverted magnetron cold cathode ionization gauge | |
| CN202110999U (en) | Device for on-line monitoring vacuum degree of intelligent switch cabinet vacuum switch arc-extinguishing chamber | |
| CN105609365B (en) | The method and its detection means of Vacuity of Vacuum Circuit Breakers on-line checking | |
| RU2561235C1 (en) | Vacuum sensor | |
| CN109326484A (en) | A kind of vacuum interrupter of adjustable vacuum degree | |
| CN2081089U (en) | In-line detector for vacuity of vacuum switch | |
| CN104213089A (en) | Magnetron sputtering equipment and magnetron sputtering method | |
| RU2680672C1 (en) | Vacuum sensor | |
| US5923172A (en) | Penning type gauge head with ignition aid | |
| CN101000272A (en) | Method for measuring inner running state of vaccum arc-chutes based on X-ray capacity |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140402 Termination date: 20170729 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |