CN102376606A - Mask box provided with sensor - Google Patents
Mask box provided with sensor Download PDFInfo
- Publication number
- CN102376606A CN102376606A CN2010102509978A CN201010250997A CN102376606A CN 102376606 A CN102376606 A CN 102376606A CN 2010102509978 A CN2010102509978 A CN 2010102509978A CN 201010250997 A CN201010250997 A CN 201010250997A CN 102376606 A CN102376606 A CN 102376606A
- Authority
- CN
- China
- Prior art keywords
- sub
- cover plate
- upper cover
- lower cover
- accommodation space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a mask box which is provided with a pressure sensor between an external container and an internal container. According to the invention, the pressure sensor which is arranged at the inner side of the external container is used for sending the pressure between the external container and the internal container and the condition whether the internal container is firmly fixed by the external container or not is judged by interpretation on the sensed pressure.
Description
Technical field
The present invention relates in order to deposit the container of semiconductor element or mask,, judge through the sensing apparatus (particularly a kind of pressure sensor) that is configured in the mask box whether the mask box is fixing by stably particularly about a kind of mask box.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photoetching technique (Optical Lithography) is played the part of important role, so long as about figure (pattern) definition, all need rely on photoetching technique.Photoetching technique is that the circuit that designs is made into the mask with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to silicon chip (silicon wafer) the demonstration specific pattern that can make public through mask.
The trend of industrial circle be towards produce less chip with and/or on bigger wafer, produce the higher logic density of tool to meet the more and more littler chip of live width.Apparently, the measure of precision that the mask surface energy is patterned and this pattern can be replicated in the degree on the crystal column surface exactly, this two affect the quality of semiconductor final products.The resolution (resolution) on the wafer of being reproduced in pattern depends on and is used for the ultraviolet wavelength of projection on the crystal column surface that scribbles photoresist.It is DUV (the deep ultraviolet light of 193 nanometers (nm) that current photoetching utensil utilizes wavelength; DUV), it allows the minimum feature size of tool 100nm grade.The equipment that has developed at present utilizes extreme ultraviolet light (the extreme ultraviolet light of 157nm; EUV), make the resolution of characteristic size less than 70nm.
Therefore the pollution of avoiding the mask surface to receive pollutant is very important, and this pollutant can cause the injury or the feasible pattern distortion (distort) that projects to photoresist during the course on surface, therefore causes the final products of bad quality.Traditional mask surface has thin, the optically transparent film of one deck, and depends on and be supported in a framework, and is attached on the mask.Its purpose is to seal external contaminant and reduces maybe be by the caused impression defective of the pollutant that migrates to the pattern example edition.Yet extreme ultraviolet light is used to the reflection from patterned surface, and is opposite with the mask characteristic of DUV photoetching utilization transmission.At present, the conventional art thin-film material that still can't provide extreme ultraviolet light to penetrate.Therefore, the reflective masks version that is used in the EUV lithography receives pollution greatly and injury easily than the mask of using in the conventional lithography.This situation in order to receive, store, to transport and load and transport any container of wafer, has increased the requirement of strengthening on the function for being intended for EUV lithography.
Therefore; In order to reduce,, be to carry mask with an internal container in the isolated technology that prior art has developed in storage, manufacturing, the produced pollution between the delivery period; And with an external container internal container is fixed in mask box wherein again, please refer to Fig. 6.As shown in Figure 6, lid d covers mask e and is fixed in wherein on lower cover c through an internal container and the internal container, with lid b on the lower cover a of an external container and the external container inner container lid merging is fixed in wherein more afterwards.In the exposure technology of extreme ultraviolet light, need in exposure sources, internal container to be taken out from external container, again mask is taken out to make public from internal container afterwards.Therefore, during carrying out exposure technology, internal container and external container need separated or cover; Yet; During this exposure technology; Whether operating personnel but can't learn has internal container to exist in nontransparent external container, perhaps whether have or not that inner container lid is tight really, under this uncertain situation; Be easy to cause internal container to come off or lose, make the mask infringement and cause cost allowance.In view of this, the present invention provide a kind of have can the sensing external container and internal container between the mask box of pressure.
Summary of the invention
According to above-mentioned explanation; A main purpose of the present invention provide a kind of between external container and internal container the mask box of pressure sensor; Whether the pressure sensor that utilization is arranged between external container to the internal container comes sensing, come interpretation external container fixing internal container via the cresset with the pressure sensor electric connection.
Another main purpose of the present invention; Provide a kind of between external container and internal container the mask box of pressure sensor; Utilization is arranged at the pressure sensor between external container to the internal container; Internal container is stable in the external container, to avoid rocking and colliding the damage that mask is produced.
Another main purpose again of invention; Provide a kind of mask box that between external container and internal container, disposes Temperature Humidity Sensor; The humiture measurement mechanism that utilization is arranged between external container to the internal container is measured the inner environmental aspect of mask box, avoids too high or too low humiture to pollute inner mask.
Based on above-mentioned purpose; The present invention at first provides a kind of pressure sensor and humiture measurement mechanism that is disposed in the mask box; The mask box has on second inner surface cover plate by the lower cover with one first inner surface and and forms; When this lower cover and this upper cover plate covered, first inner surface and second inner surface formed one first accommodation space; Be arranged in the sub-upper cover plate that sub-lower cover and that first accommodation space configuration one has sub first inner surface has sub second inner surface, this son first inner surface and this son second inner surface form one second accommodation space; A plurality of pressure sensors are through a plurality of through holes of outer surface to the second inner surface of upper cover plate, and its induction end is between second inner surface to the sub-outer surface of sub-upper cover plate.
The present invention then provides a kind of pressure sensor and humiture measurement mechanism that is disposed in the mask box; This mask box has on second inner surface cover plate by the lower cover with one first inner surface and and forms; When lower cover and this upper cover plate covered, first inner surface and second inner surface formed one first accommodation space; Be arranged in the sub-upper cover plate that sub-lower cover and that first accommodation space configuration one has sub first inner surface has sub second inner surface, this son first inner surface and this son second inner surface form one second accommodation space; One concave part is formed on the outer surface of upper cover plate; To a plurality of through holes with respect to second inner surface of opposite side, and its induction end is between second inner surface to the sub-outer surface of sub-upper cover plate through the concave part of the outer surface of upper cover plate for a plurality of pressure sensors.
The present invention then provides a kind of pressure sensor and humiture measurement mechanism that is disposed in the mask box again; This mask box has on second inner surface cover plate by the lower cover with one first inner surface and and forms; When lower cover and this upper cover plate covered, first inner surface and second inner surface formed one first accommodation space; Be arranged in the sub-upper cover plate that sub-lower cover and that first accommodation space configuration one has sub first inner surface has sub second inner surface, this son first inner surface and this son second inner surface form one second accommodation space; A plurality of pressure sensors are through a plurality of through holes of outer surface to the second inner surface of upper cover plate, and its induction end is between second inner surface to the sub-outer surface of sub-upper cover plate; One humiture measurement mechanism is arranged on second inner surface of upper cover plate; One receiver is arranged on this outer surface, and electrically connects this pressure sensor and this humiture measurement mechanism.
Via design provided by the present invention, can fix via the interpretation of pressure sensor being judged on its external container whether there be really lower cover, caused unnecessary damage therebetween to avoid carrying or storing.
Description of drawings
Fig. 1 is an exploded perspective view of the present invention;
Fig. 2 is a cover plate sketch map on the present invention;
Fig. 3 is the cross-sectional schematic that the present invention loads mask;
Fig. 4 is the pressure sensor configuration schematic diagram of another embodiment of the present invention;
Fig. 5 is the pressure sensor configuration schematic diagram of another embodiment of the present invention;
Fig. 6 is existing mask case sketch map.
[main element symbol description]
10 lower covers
101 first inner surfaces
103 air valves
11 upper cover plates
111 second inner surfaces
113 outer surfaces
115 concave parts
117 through holes
13 handles
15 beads
17 first accommodation spaces
20 sub-lower covers
201 sub first inner surfaces
203 strutting pieces
21 sub-upper cover plates
211 sub second inner surfaces
213 sub-outer surfaces
23 second accommodation spaces
30 pressure sensors
301 induction end
303 adjustment ends
31 humiture measurement mechanisms
33 signalling generators
35 data display equipments
351 display lamps
40 fixtures
50 mask
The lower cover of a external container
Cover on the b external container
The lower cover of c internal container
Cover on the d internal container
The e mask
Embodiment
Since the present invention disclose a kind of between external container and internal container the mask box of sensors configured, particularly dispose a kind of mask box of pressure sensor; Some that are wherein used are about mask, mask box, and strutting piece in the mask box or transducer utilize prior art to reach, so in following explanation, do not do complete description.In addition, graphic in following in the literary composition, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the sketch map relevant with characteristic of the present invention.
At first, see also Fig. 1, be mask box exploded perspective view of the present invention.As shown in Figure 1, the mask box is formed by a lower cover 10 and 11 of upper cover plates, wherein; Lower cover 10 comprises one first inner surface 101; At least a plurality of fixtures 40 are formed on first inner surface 101, and in a preferred embodiment, the fixture 40 of three convexities are arranged on first inner surface 101; Upper cover plate 11 comprises the outer surface 113 that one second inner surface 111 reaches with respect to the second inner surface opposite side; And when lower cover 10 and upper cover plate 11 cover; Form one first accommodation space 17 between first inner surface 101 of lower cover 10 and second inner surface 111 of upper cover plate 11, so can form an external container; One sub-lower cover 20 has sub first inner surface 201, and the strutting piece 203 of a plurality of at least convexities is formed at four corners on the first sub-inner surface 201; One sub-upper cover plate 21; Has the sub-outer surface 213 that sub second inner surface 211 reaches with respect to the second inner surface opposite side; Sub-lower cover 20 all is arranged in first accommodation space 17 with sub-upper cover plate 21; And when group lower cover 20 covers with sub-upper cover plate 21, form one second accommodation space 23 between son first inner surface 201 of sub-lower cover 20 and son second inner surface 211 of sub-upper cover plate 21, so can form an internal container; One concave part (RECESS) 115 is to be formed on the outer surface 113 of upper cover plate 11; Leader 13 is arranged on the outer surface 113 of upper cover plate 11 and is across on the concave part 115, makes to keep a distance between handle 13 and the concave part 115, and when wherein this distance can conveniently be carried, the bearer can stretch into hand the extending space of handgrip 13; A pair of bead 15; Be arranged on the outer surface 113 of upper cover plate 11, this bead 15 grasps the device of mask box for making things convenient for robotic arm or manpower, and the present invention does not limit its shape; And in a preferred embodiment this bead 15 be shaped as symmetrical right angle flap body, in order to the extracting of machine.
In addition; At least one air valve 103 of configuration in lower cover 10; This air valve 103 is a column, is through to first inner surface 101 with respect to the bottom from the bottom of lower cover 10, and column air valve 103 extend upward to sub-lower cover 20 and through sub-lower cover 20 to sub first inner surface 201.Air valve 103 mainly is that inert gas is charged in second accommodation space 23 with the mask 50 in cleaning and the protection internal container.Most preferred embodiment of the present invention is for disposing two air valves 103 in lower cover 10; Wherein an air valve 103 is a charge valve; One air valve 103 is an air outlet valve; And the position that air valve 103 is disposed at lower cover 10 and inflation, board (not being shown among the figure) position of giving vent to anger are identical, but the present invention does not limit air valve 103 numbers, is positioned at the position of lower cover 10 or limits air valve 103 and is the inflation or the function of giving vent to anger.
Then, see also Fig. 2, be the sketch map of cover plate on the present invention.As shown in Figure 2, dispose a plurality of through holes 117 around the concave part 115 on the outer surface 113 of upper cover plate 11; One pressure sensor 30 respectively is set in each through hole 117, and this pressure sensor 30 is a kind of device that can transfer up and down, for example: use locked instrument with spinfunction, can be by helical rotation as the locked instrument of transferring up and down etc.Will stress that at this in the present invention, do not limit to that through hole 117 is configured in around the concave part 115, through hole 117 is also configurable on concave part 115, to this, the present invention does not limit.In addition; 30 of a plurality of pressure sensors electrically connect on the data display equipment 35 of the supreme outer surface 113 that is disposed at cover plate 11; In order to the force value that shows that pressure sensor 30 is read; Simultaneously, also further dispose at least one display lamp 351 on the data display equipment 35, show the cresset of different colours in order to the force value of being read according to pressure sensor 30.
Then, see also Fig. 3, for loading the cross-sectional schematic of mask in the mask box of the present invention.As shown in Figure 3; In son first inner surface 201 that sub-lower cover 20 was placed and be fixed on to one mask 50 and son second inner surface 211 formed second accommodation spaces 23 of sub-upper cover plate 21; Dispose the strutting piece 203 of a plurality of convexities near four corners of son first inner surface 201 of its neutron lower cover 20, make mask 50 be limited in the strutting piece 203 of a plurality of convexities; And have on first inner surface 101 of lower cover 10 configuration a plurality of fixtures 40; When upper cover plate 11 and lower cover 10 cover; Can form one first accommodation space 17, and the sub-lower cover 20 that covers after being integral can be placed and be fixed in first accommodation space 17 with sub-upper cover plate 21; At this moment, the fixture 40 on first inner surface 101 of lower cover 10 can support sub-lower cover 20.Moreover; A plurality of pressure sensors 30; Be arranged at via in the corresponding through hole 117; One adjustment end 303 of each pressure sensor 30 is arranged on the outer surface 113 of upper cover plate 11, and the induction end 301 of each pressure sensor 30 is arranged on second inner surface 111 of upper cover plate 11, and makes its induction end 301 between second inner surface 111 and sub-outer surface 213; And can be earlier adjustment end 303 through pressure sensor 30 induction end 301 is adjusted on the sub-outer surface 213 that is contacted with sub-upper cover plate 21, make pressure sensor be disposed between the external container and internal container of mask box.Clearly; When a plurality of pressure sensors 30 after lower cover 10 and upper cover plate 11 cover; Owing to transfer on the sub-outer surface 213 that promptly can compress and be contacted with sub-upper cover plate 21 through adjusted induction end 301, again through with first inner surface 101 of lower cover 10 on the support of fixture 40, make sub-lower cover 20 be fixed; Therefore; The induction end 301 of pressure sensor 30 can be pressed on the sub-outer surface 213 of sub-upper cover plate 21, and keeps a fixation pressure, and shows the fixation pressure pressure value of reading through data display equipment 35; So after can judging that upper cover plate 11 and lower cover 10 cover according to pressure value of reading that this data display equipment 35 shows, whether sub-upper cover plate 21 is fixed in wherein with sub-lower cover 20 exactly; If when the pressure value of reading arrives the force value that sets, then the display lamp on the data display equipment 35 351 can show a cresset, for example: show green cresset.At this moment, represent that promptly the mask box can transmit; When this mask box need be transmitted by mechanical arm, can transmit through the bead 15 on the mask box cover plate 11; When this mask box need be transmitted by operating personnel; Operating personnel can transmit through the handle 13 on the mask box cover plate 11; Because the below of mask box handle 13 forms a concave part 115, the hand of therefore being convenient to operating personnel stretches into concave part 115, with the handle 13 of holding with a firm grip.More owing to sub-upper cover plate 21 is fixed in first accommodation space 17 with sub-lower cover 20 exactly; It is hereby ensured the mask box in the process of transmitting or carrying, be arranged in sub-upper cover plate 21 and can be transmitted safely with the mask 50 of sub-lower cover 20 formed second accommodation spaces 23.Again for example: if when pressure values of reading of a plurality of pressure sensors 30 has the force value that any one and no show set, then the display lamp on the data display equipment 35 351 can show another cressets, for example: the exhibit red cresset; At this moment, represent that promptly upper cover plate 11 really covers with lower cover 10, make a plurality of pressure sensors 30 force value difference of institute's sensing each other.Again more for example: group upper cover plate 21 and sub-lower cover 20 are by after taking out in upper cover plate 11 and the lower cover 10; At this moment, after upper cover plate 11 and lower cover 10 cover, owing to s.m.p upper cover plate 21 and sub-lower cover 20 in upper cover plate 11 and lower cover 10 formed first accommodation spaces 17; Therefore; The induction end 301 of pressure sensor 30 can be pressed on the sub-outer surface 213 less than sub-upper cover plate 21, thus the pressure sensor 30 no any pressure values of reading appearance, at this moment; Display lamp 351 on the data display equipment 35 shows a cresset, for example: show yellow cresset.At this moment, promptly represent not have mask in upper cover plate 11 and the lower cover 10.
Via above-mentioned; After the upper cover plate 11 of the mask box among the present invention covers with lower cover 10; Whether first accommodation space 17 that the user also can be at an easy rate judges upper cover plate 11 and lower cover 10 according to the cresset that is shown on the data display equipment 35 has mask to exist, and whether the sub-upper cover plate 21 that holds mask firmly is fixed in first accommodation space 17 with sub-lower cover 20.
Then; The present invention is configuration one humiture measurement mechanism 31 on second inner surface 111 of upper cover plate 11 further; This humiture measurement mechanism 31 is mainly the humiture of measuring in first accommodation space 17; And, judge the variation whether humiture is arranged in first accommodation space 17 by the humiture that data display equipment 35 is shown via on the data display equipment that is electrically connected to outer surface 113 35.In addition, in an embodiment of the present invention, pressure sensor 30 and humiture measurement mechanism 31 can further possess the function of wireless transmission.Pressure sensor 30 is electrically connected at signalling generator 33 with humiture measurement mechanism 31, and pressure data and the wireless main control end (not shown) that is sent to of temperature data that pressure sensor 30 and humiture measurement mechanism 31 is measured, with convenient monitoring; Because the function of this wireless transmission is identical with prior art, gives unnecessary details so no longer give.
To stress that at this pressure sensor 30 of present embodiment configuration is not limited to a pressure sensor 30, also the transducer of configurable other type.In a preferred embodiment; Whether externally a configurable object sensor (not being shown among the figure) measures earlier internal container in the container, again information is sent to other pressure sensor 30; Notify its pressure of measuring the pressure-sensitive internal container, confirm whether internal container is just put.Therefore, the present invention is for type of sensor and quantity, and perhaps the mode of each transducer signal transmission does not limit.
Then, see also Fig. 4, be the configuration schematic diagram of another embodiment of pressure sensor of the present invention.The difference of Fig. 4 and Fig. 3 is; Fig. 4 is arranged at a plurality of through holes 117 on the upper cover plate 11 in the concave part 115 of outer surface 113 of upper cover plate 11; And a plurality of pressure sensors 30 are disposed in a plurality of through holes 117; One adjustment end 303 of each pressure sensor 30 is arranged on the outer surface that is positioned at concave part 115 113 of upper cover plate 11; And the induction end 301 of each pressure sensor 30 is arranged on second inner surface 111 that is positioned at concave part 115 of upper cover plate 11; And make its induction end 301 between second inner surface 111 and sub-outer surface 213 of concave part 115, and can be earlier adjustment end 303 through pressure sensor 30 induction end 301 is adjusted on the sub-outer surface 213 that is contacted with sub-upper cover plate 21, make pressure sensor be disposed between the external container and internal container of mask box; When upper cover plate 11 and lower cover 10 cover; Pressure sensor 30 can be fixed internal container (being the sub-outer surface 213 of sub-upper cover plate 21) with the fixture 40 on first inner surface 101 of lower cover 10, and can keep fixation pressures and export a force value at the pressure sensor 30 of stationary state.Clearly, present embodiment is for the embodiment of Fig. 3, and difference between the two is that present embodiment is disposed at a plurality of pressure sensors 30 in the concave part 115, so the function of the mask box of present embodiment is identical with the embodiment of Fig. 3, so no longer repeat to give unnecessary details.
Then, please consulting Fig. 5 again, is the pressure sensor of the present invention configuration schematic diagram of an embodiment again.A plurality of pressure sensors 30 directly are disposed on second inner surface 111 that is positioned at concave part 115 of upper cover plate 11, and make its induction end 301 be positioned at 213 of the outer surfaces of second inner surface 111 and sub-upper cover plate 21; In the present embodiment, pressure sensor 30 is the fixing state that can not transfer, and therefore, the length scale of pressure sensor is external container when covering, second inner surface 111 of upper cover plate 11 and the spacing of the sub-outer surface 213 of sub-upper cover plate 21.And its induction end 301 can be contacted with on the sub-outer surface 213 of sub-upper cover plate 21; And when upper cover plate 11 and lower cover 10 cover; Pressure sensor 30 can be fixed internal container with the fixture 40 on first inner surface 101 of lower cover 10, and can keep fixation pressures and export a force value at the pressure sensor 30 of stationary state.Clearly, present embodiment is for the embodiment of Fig. 3, and difference between the two is that present embodiment is disposed at a plurality of pressure sensors 30 in the concave part 115, so the function of the mask box of present embodiment is identical with the embodiment of Fig. 3, so no longer repeat to give unnecessary details.
Though the present invention discloses as above with aforesaid preferred embodiment; Right its is not in order to limit the present invention; Anyly have the knack of alike art; Do not breaking away from the spirit and scope of the present invention, when can doing a little change and retouching, therefore scope of patent protection of the present invention must be looked the appended claim person of defining of this specification and is as the criterion.
Claims (14)
1. mask box with transducer is characterized in that comprising:
One lower cover has one first inner surface, and is formed with a plurality of fixtures on this first inner surface;
One upper cover plate; Have one second inner surface and reach a outer surface with respect to this second inner surface opposite side; And dispose at least one through hole that runs through this outer surface and this second inner surface; And when this lower cover and this upper cover plate covered, this first inner surface and this second inner surface formed one first accommodation space;
One sub-lower cover is positioned at this first accommodation space and contacts with these a plurality of fixtures, and this sub-lower cover has sub first inner surface;
One sub-upper cover plate; Be positioned at this first accommodation space; It has sub second inner surface and with respect to a sub-outer surface of this second inner surface opposite side, and when this sub-lower cover and this sub-upper cover plate covered, this son first inner surface and this son second inner surface formed one second accommodation space; And
At least one transducer is disposed in this through hole, and each this transducer has a sense terminals, and this sense terminals is positioned on second inner surface of this upper cover plate.
2. mask box with transducer is characterized in that comprising:
One lower cover has one first inner surface, and is formed with a plurality of fixtures on this first inner surface;
One upper cover plate; Have one second inner surface and reach a outer surface with respect to this second inner surface opposite side; And the outer surface of this upper cover plate forms a concave part to the first inner surface direction of this lower cover; And dispose at least one through hole that runs through this outer surface and this second inner surface on this concave part, and when this lower cover and this upper cover plate covered, this first inner surface and this second inner surface formed one first accommodation space;
One sub-lower cover is positioned at this first accommodation space and contacts with these a plurality of first fixtures, and this sub-lower cover has sub first inner surface;
One sub-upper cover plate; Be positioned at this first accommodation space; It has sub second inner surface and with respect to a sub-outer surface of this second inner surface opposite side, and when this sub-lower cover and this sub-upper cover plate covered, this son first inner surface and this son second inner surface formed one second accommodation space; And
At least one transducer is disposed in this through hole of this concave part of this upper cover plate, and each this transducer has a sense terminals, and this sense terminals is positioned on second inner surface of this upper cover plate.
3. mask box with transducer is characterized in that comprising:
One lower cover has one first inner surface, and is formed with a plurality of fixtures on this first inner surface;
One upper cover plate; Have one second inner surface and reach a outer surface with respect to this second inner surface opposite side; And the outer surface of this upper cover plate forms a concave part to the first inner surface direction of this lower cover; And when this lower cover and this upper cover plate covered, this first inner surface and this second inner surface formed one first accommodation space;
One sub-lower cover is positioned at this first accommodation space and contacts with these a plurality of first fixtures, and this sub-lower cover has sub first inner surface;
One sub-upper cover plate; Be positioned at this first accommodation space; It has sub second inner surface and with respect to a sub-outer surface of this second inner surface opposite side, and when this sub-lower cover and this sub-upper cover plate covered, this son first inner surface and this son second inner surface formed one second accommodation space; And
At least one transducer is disposed on second inner surface of this concave part of this upper cover plate.
4. like claim 1,2 or 3 described mask boxes, it is characterized in that this transducer is a kind of pressure sensor.
5. like claim 1,2 or 3 described mask boxes, it is characterized in that, further dispose a humiture measurement mechanism, and be arranged in this first accommodation space.
6. mask box as claimed in claim 4 is characterized in that, further disposes a data display equipment, and is electrically connected at this pressure sensor.
7. mask box as claimed in claim 5 is characterized in that, further disposes a data display equipment, and is electrically connected at this humiture measurement mechanism.
8. according to claim 1 or claim 2 mask box is characterized in that, this transducer further has the adjustment end.
9. mask box as claimed in claim 1 is characterized in that, further disposes a concave part on this upper cover plate.
10. mask box as claimed in claim 1 is characterized in that, further disposes at least one handle and is positioned on this upper cover plate.
11. like claim 2 or 3 described mask boxes, it is characterized in that, further dispose at least one handle and be positioned on this upper cover plate and this handle is across on this concave part.
12. like claim 1,2 or 3 described mask boxes, it is characterized in that, further dispose on this outer surface that a pair of bead is positioned at this upper cover plate.
13., it is characterized in that further dispose a signalling generator, and be electrically connected at this transducer, wherein this signalling generator has the device of wireless transmission like claim 1,2 or 3 described mask boxes.
14. like claim 1,2 or 3 described mask boxes; It is characterized in that; Further at least one air valve of configuration is in this lower cover; This air valve is a column, is through to this first inner surface with respect to this bottom from the bottom of this lower cover, and this air valve extend upward to this sub-lower cover and through this sub-lower cover to this son first inner surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010250997.8A CN102376606B (en) | 2010-08-09 | 2010-08-09 | Mask box provided with sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010250997.8A CN102376606B (en) | 2010-08-09 | 2010-08-09 | Mask box provided with sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102376606A true CN102376606A (en) | 2012-03-14 |
| CN102376606B CN102376606B (en) | 2014-03-19 |
Family
ID=45795004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010250997.8A Active CN102376606B (en) | 2010-08-09 | 2010-08-09 | Mask box provided with sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102376606B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107966884A (en) * | 2017-11-23 | 2018-04-27 | 武汉新芯集成电路制造有限公司 | A kind of box for photomask location detection methods |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6338409B1 (en) * | 2000-04-13 | 2002-01-15 | International Business Machines Corporation | Reticle SMIF pod in situ orientation |
| CN101166682A (en) * | 2005-02-27 | 2008-04-23 | 安堤格里斯公司 | Substrate container with pressure equalization |
| CN101194207A (en) * | 2005-04-04 | 2008-06-04 | 诚实公司 | Environmental control in a reticle SMIF pod |
| WO2009023787A2 (en) * | 2007-08-14 | 2009-02-19 | Entegris, Inc. | Stoker with purge condition sensing |
| US20100051501A1 (en) * | 2008-08-29 | 2010-03-04 | International Business Machines Corporation | Ic waper carrier sealed from ambient atmosphere during transportation from one process to the next |
-
2010
- 2010-08-09 CN CN201010250997.8A patent/CN102376606B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6338409B1 (en) * | 2000-04-13 | 2002-01-15 | International Business Machines Corporation | Reticle SMIF pod in situ orientation |
| CN101166682A (en) * | 2005-02-27 | 2008-04-23 | 安堤格里斯公司 | Substrate container with pressure equalization |
| CN101194207A (en) * | 2005-04-04 | 2008-06-04 | 诚实公司 | Environmental control in a reticle SMIF pod |
| WO2009023787A2 (en) * | 2007-08-14 | 2009-02-19 | Entegris, Inc. | Stoker with purge condition sensing |
| US20100051501A1 (en) * | 2008-08-29 | 2010-03-04 | International Business Machines Corporation | Ic waper carrier sealed from ambient atmosphere during transportation from one process to the next |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107966884A (en) * | 2017-11-23 | 2018-04-27 | 武汉新芯集成电路制造有限公司 | A kind of box for photomask location detection methods |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102376606B (en) | 2014-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI389828B (en) | Sensors within reticle pod | |
| Chu et al. | Integrated polarization dependent photodetector and its application for polarization navigation | |
| WO2008021164A3 (en) | System for transferring calibration data | |
| JP7274429B2 (en) | Accommodating device for surface measuring equipment | |
| TW201326767A (en) | LED luminance detecting system and method | |
| TW200823443A (en) | Light sensor inspection device with embedded light source, and the testing machine having the same | |
| CN102376606B (en) | Mask box provided with sensor | |
| JP4435732B2 (en) | Sensor assembly, digital serial bus and protocol, sensor network, and lithographic apparatus and system | |
| CN107085352A (en) | Imprinting apparatus and article manufacturing method | |
| US7929117B2 (en) | Apparatus for real-time contamination, environmental, or physical monitoring of a photomask | |
| CN101839800B (en) | Lens fixing device | |
| TWI641923B (en) | An inspection substrate and an inspection method | |
| CN208432850U (en) | A kind of exposure device | |
| TW200822697A (en) | Method for aligning color filters to a back-illuminated imaging array | |
| TWI463251B (en) | Mask structure with function of sensing environment information | |
| CN207366571U (en) | A kind of gold mark and fluorescence immune chromatography synthesis analyzer | |
| JP2019504477A (en) | Measurement board and measurement method | |
| CN205483324U (en) | Industrial safety facility dimension is protected to patrol and examine and is used temperature measuring device | |
| US20090101792A1 (en) | Wireless illumination sensing assembly | |
| CN206847681U (en) | A kind of wireless humiture dust sensor | |
| CN207618110U (en) | A kind of flour weight detection device | |
| CN218241319U (en) | Mobile flow adjusting machine | |
| TWI755836B (en) | Optical element detection auxiliary device | |
| CN207763685U (en) | A kind of portable pavement planeness automatic detection device | |
| CN216560363U (en) | Simple and easy cement and adiabatic temperature rise survey device of concrete |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |