CN102336387A - Quartz micro-needle array tip spherical shell microstructure and preparation method thereof - Google Patents
Quartz micro-needle array tip spherical shell microstructure and preparation method thereof Download PDFInfo
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- CN102336387A CN102336387A CN201110304710XA CN201110304710A CN102336387A CN 102336387 A CN102336387 A CN 102336387A CN 201110304710X A CN201110304710X A CN 201110304710XA CN 201110304710 A CN201110304710 A CN 201110304710A CN 102336387 A CN102336387 A CN 102336387A
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- spherical shell
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- microneedle array
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- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract description 14
- 239000010453 quartz Substances 0.000 title abstract 8
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000011248 coating agent Substances 0.000 claims abstract description 14
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 239000007787 solid Substances 0.000 claims abstract description 13
- 239000002904 solvent Substances 0.000 claims abstract description 6
- 229920006254 polymer film Polymers 0.000 claims abstract description 5
- 238000002791 soaking Methods 0.000 claims abstract description 5
- 239000011257 shell material Substances 0.000 claims description 51
- 229920000642 polymer Polymers 0.000 claims description 14
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 12
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 8
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 claims description 6
- 239000004793 Polystyrene Substances 0.000 claims description 6
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 claims description 6
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 5
- 238000001354 calcination Methods 0.000 claims description 4
- 238000004528 spin coating Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000012943 hotmelt Substances 0.000 claims description 3
- 229920002223 polystyrene Polymers 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 238000004090 dissolution Methods 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims description 2
- 238000003618 dip coating Methods 0.000 claims 1
- 230000005622 photoelectricity Effects 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 238000010304 firing Methods 0.000 abstract 1
- 239000002861 polymer material Substances 0.000 abstract 1
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 238000007598 dipping method Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- KLULSCKBRGQDOY-UHFFFAOYSA-N 2-methylprop-2-enoic acid;toluene Chemical compound CC(=C)C(O)=O.CC1=CC=CC=C1 KLULSCKBRGQDOY-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000010128 melt processing Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000004005 microsphere Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses a quartz micro-needle array tip spherical shell microstructure and a preparation method thereof. The quartz micro-needle array tip spherical shell microstructure consists of a quartz micro-needle array and a spherical shell positioned at the tip of a micro-needle, wherein the diameter of the micro-needle is 2 to 200mu m, and the spherical shell is solid or hollow. The preparation method comprises the following steps of: coating a layer of polymer film on the surface of the tip of the quartz micro-needle; processing under the appropriate condition to make the polymer film form a spherical microstructure at the tip of the micro-needle; coating a layer of organic, inorganic or metal film on the surface of the spherical microstructure to obtain a quartz micro-needle array tip solid spherical shell microstructure; and removing a polymer material in a shell layer by a solvent soaking method or a firing method and the like to obtain a quartz micro-needle array tip hollow spherical shell microstructure. The quartz micro-needle array tip spherical shell microstructure is novel, is easy to prepare and can be applied to fields of biology, optics, photo-electricity, information and the like.
Description
Technical field
The present invention relates to most advanced and sophisticated spherical shell micro-structural of a kind of quartzy microneedle array and preparation method thereof, belong to material microstructure and preparing technical field thereof.
Background technology
Novel micro-structural will excite new function and performance, and realize using in every field such as field such as biology, optics, photoelectricity, information.Introduce the spheroid micro-structural of various materials at the tip of quartzy microneedle array (Chinese patent ZL 200710134575.2), can obtain in a lot of fields to use.For example; Because very thin quartzy micropin can accomplish evenly to be retracted to from several microns the aciculiform of most advanced and sophisticated tens nanometers; If at the microballoon of diameter hundreds of nanometers of its most advanced and sophisticated preparation to several microns, then can form the resonator system of a mechanics, can be used for the research and the application of micro-nano mechanics.If at the most advanced and sophisticated micro-sphere material of aciculiform is the electric or magnetic response, then single microballoon or microballoon and microballoon also can be applicable in the electric or magnetic device the characteristic of electric field, magnetic responsiveness in this system.At present, the preparation of the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array is technological difficulties, need seek new technology of preparing and method and obtain the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array.
Summary of the invention
The purpose of this invention is to provide the most advanced and sophisticated spherical shell micro-structural of a kind of quartzy microneedle array, make this fine structure material can obtain extensive use in fields such as biology, optics, photoelectricity, information.Another object of the present invention provides the preparation method of this fine structure material.
In order to realize the foregoing invention purpose, the technical scheme that the present invention adopts is following:
The most advanced and sophisticated spherical shell micro-structural of a kind of quartzy microneedle array is made up of quartzy microneedle array and the spherical shell that is positioned on the micropin tip; The diameter of said micropin bottom is 2-200 μ m, and said spherical shell is solid or hollow.
Said spherical shell material is the one or more combination in organic and inorganic or the metal material.
The preparation method of the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array of the present invention may further comprise the steps:
(1) in the bottom diameter be 2～200 μ m quartzy microneedle array tip end surface through spray, flood, dip, method such as spin coating or its combination, polymethyl methacrylate (PMMA), polystyrene (PS) or the rosin etc. that coat one deck 50nm～50 μ m thickness are by organic solvent dissolution or the little thin polymer film of heating back viscosity;
(2) the quartzy microneedle array of coated polymer is handled through hot melt, solvent vapo(u)r or the method for its combination is handled and made polymer form spherical micro-structural in that micropin is most advanced and sophisticated;
(3) should pass through chemical plating, plating, sol-gal process, sputter, coating or above method combination in any by the sphere micro-structure surface; Coating a layer thickness is the organic and inorganic or metallic film of 10nm～50 μ m, promptly gets the most advanced and sophisticated solid spherical shell micro-structural of quartzy microneedle array;
(4) remove the inner polymeric material of shell through methods such as solvent soaking or calcinations, promptly get the most advanced and sophisticated hollow ball shell micro-structural of quartzy microneedle array.
The present invention compared with prior art, its remarkable advantage is: (1) can obtain the most advanced and sophisticated spherical shell micro-structural of novel quartzy microneedle array; (2) with low cost, need not large-scale instrument, simple and reliable process.
Description of drawings
Fig. 1 is the preparation sketch map of the most advanced and sophisticated spherical shell micro-structural of the quartzy microneedle array of the present invention.Wherein, step 1): the most advanced and sophisticated coated polymer of quartzy microneedle array; Step 2): felicity condition is handled and is made polymer form sphere; Step 3): spherome surface coats; Step 4): remove spherical shell interior polymeric thing.
The specific embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is described in further detail.
The quartzy microneedle array that uses in the present embodiment is to utilize the method for describing among the patent ZL20071 0134575.2 to make.
Embodiment 1: at diameter is that the quartzy microneedle array tip end surface of 10 μ m is dipped the rosin that coats one deck 1 μ m thickness, heat-treats at 110 ℃ then, and polymer promptly forms spherical micro-structural in that micropin is most advanced and sophisticated.Then should sphere micro-structure surface sputter one deck the silver film, promptly get the solid ping-pong ball shell micro-structural in quartzy microneedle array tip; Perhaps remove the inner rosin of shell, promptly get the most advanced and sophisticated hollow silver spherical shell of quartzy microneedle array micro-structural through alcohol immersion.
Embodiment 2: be the rosin of the quartzy microneedle array tip end surface of 2 μ m through dipping coating one deck 50nm thickness at diameter, heat-treat at 130 ℃ then that polymer is promptly in the spherical micro-structural of the most advanced and sophisticated formation of micropin.After should sphere micro-structure surface sputter one layer thickness be the gold thin film of 10nm, promptly get the most advanced and sophisticated golden solid spherical shell micro-structural of quartzy microneedle array; Perhaps soak and remove the inner rosin of shell, promptly get the most advanced and sophisticated hollow gold goal shell micro-structural of quartzy microneedle array through acetone.
Embodiment 3: at diameter is the polymethyl methacrylate of quartzy microneedle array tip end surface spin coating coating one deck 50 μ m thickness of 200 μ m, and the chloroform steam treatment makes polymer in the spherical micro-structural of the most advanced and sophisticated formation of micropin.Is the silica membrane of 50 μ m with this sphere micro-structure surface through Prepared by Sol Gel Method one layer thickness, promptly gets the solid spherical shell micro-structural of the most advanced and sophisticated silica of quartzy microneedle array; Perhaps the inner polymethyl methacrylate of shell is removed in 400 ℃ of calcinings, promptly gets the most advanced and sophisticated hollow silica ball shell of quartzy microneedle array micro-structural.
Embodiment 4: the quartzy microneedle array tip end surface that at diameter is 125 μ m makes polymer in the spherical micro-structural of the most advanced and sophisticated formation of micropin through dipping the polystyrene (PS) that coats one deck 10nm～50 μ m thickness through the hot melt processing.This sphere micro-structure surface is coated the thin nickel metal film that a layer thickness is 10 μ m through chemical plating, promptly get the solid spherical shell micro-structural of the most advanced and sophisticated nickel of quartzy microneedle array; Perhaps remove the inner polystyrene of shell, promptly get the most advanced and sophisticated nickel hollow ball shell of quartzy microneedle array micro-structural through solvent soaking.
Embodiment 5: be the polymethyl methacrylate (PMMA) of the quartzy microneedle array tip end surface of 40 μ m through dipping coating one deck 5 μ m thickness at diameter, make polymer in the spherical micro-structural of the most advanced and sophisticated formation of micropin through the chloroform steam treatment.Is the chromium metallic film of 2 μ m with this sphere micro-structure surface through electroplating coating one layer thickness, promptly gets the solid spherical shell micro-structural of the most advanced and sophisticated chromium of quartzy microneedle array; Perhaps soak and remove the inner polymethyl methacrylate of shell, promptly get the most advanced and sophisticated chromium hollow ball shell of quartzy microneedle array micro-structural through chloroform.
Embodiment 6: be the polyethylene glycol of the quartzy microneedle array tip end surface of 30 μ m through dipping coating one deck 5 μ m thickness at diameter, make it in the spherical micro-structural of the most advanced and sophisticated formation of micropin through 110 ℃ of heat treatments.This sphere micro-structure surface is coated the polymethyl methacrylate that a layer thickness is 2 μ m through the mode of flooding the polymethyl methacrylate toluene solution, promptly get the solid spherical shell micro-structural of the most advanced and sophisticated polymethyl methacrylate of quartzy microneedle array; Perhaps remove the inner polyethylene glycol of shell, promptly get the most advanced and sophisticated polymethyl methacrylate hollow ball shell of quartzy microneedle array micro-structural through soaking in the water.
Embodiment 7: be the polystyrene (PS) of the quartzy microneedle array tip end surface of 8 μ m through spin coating coating one deck 1 μ m thickness at diameter, make polymer in the spherical micro-structural of the most advanced and sophisticated formation of micropin through the chloroform steam treatment.This sphere micro-structure surface is coated the titanium deoxid film that a layer thickness is 2 μ m through sol-gal process, promptly get the solid spherical shell micro-structural of the most advanced and sophisticated titanium dioxide of quartzy microneedle array; Perhaps remove the inner polystyrene of shell, promptly get the most advanced and sophisticated titanium dioxide hollow ball shell of quartzy microneedle array micro-structural through 400 ℃ of calcinations.
Claims (8)
1. the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array is characterized in that, the most advanced and sophisticated spherical shell micro-structural of said quartzy microneedle array is made up of quartzy microneedle array and the spherical shell that is positioned on the micropin tip; The diameter of said micropin bottom is 2-200 μ m, and said spherical shell is solid or hollow.
2. the most advanced and sophisticated spherical shell micro-structural of a kind of quartzy microneedle array according to claim 1 is characterized in that said spherical shell material is the one or more combination in organic and inorganic or the metal material.
3. one kind prepares the method for micro-structural according to claim 1, it is characterized in that, said method comprising the steps of:
(1) diameter is the thin polymer film of quartzy microneedle array tip end surface coating one deck 50nm～50 μ m thickness of 2～200 μ m in the bottom;
(2) the quartzy microneedle array of coated polymer is handled under proper condition made polymer form spherical micro-structural in that micropin is most advanced and sophisticated;
(3) should coat the organic and inorganic or metallic film that a layer thickness is 10nm～50 μ m by the sphere micro-structure surface, promptly get the most advanced and sophisticated solid spherical shell micro-structural of quartzy microneedle array;
(4) remove the inner polymeric material of shell through methods such as solvent soaking or calcinations, promptly get the most advanced and sophisticated hollow ball shell micro-structural of quartzy microneedle array.
4. the preparation method of the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array according to claim 3, it is characterized in that the coating described in the step (1) adopt spray, flood, dip or spin coating method in one or more combination.
5. the preparation method of the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array according to claim 3, the material that it is characterized in that the thin polymer film described in the step (1) is by organic solvent dissolution or the little polymer of heating back viscosity.
6. the preparation method of the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array according to claim 5 is characterized in that said polymer adopts polymethyl methacrylate, polystyrene or rosin.
7. the preparation method of the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array according to claim 3 is characterized in that the felicity condition described in the step (2) is the combination of hot melt, solvent vapo(u)r processing or above method.
8. the preparation method of the most advanced and sophisticated spherical shell micro-structural of quartzy microneedle array according to claim 3 is characterized in that the method for coating described in the step (3) is the combination in any of chemical plating, plating, sol-gal process, sputter, coating or above method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110304710.XA CN102336387B (en) | 2011-10-10 | 2011-10-10 | Quartz micro-needle array tip spherical shell microstructure and preparation method thereof |
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| CN201110304710.XA CN102336387B (en) | 2011-10-10 | 2011-10-10 | Quartz micro-needle array tip spherical shell microstructure and preparation method thereof |
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| Publication Number | Publication Date |
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| CN102336387A true CN102336387A (en) | 2012-02-01 |
| CN102336387B CN102336387B (en) | 2015-04-08 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102838078A (en) * | 2012-09-17 | 2012-12-26 | 无锡英普林纳米科技有限公司 | Suspended disk array microstructure and preparation method thereof |
| CN103569958A (en) * | 2013-11-12 | 2014-02-12 | 无锡英普林纳米科技有限公司 | Preparation method of spindle-shaped micron/submicron quartz rod array |
| CN108275646A (en) * | 2018-01-30 | 2018-07-13 | 北京理工大学 | A kind of low adhesion strength end effector and preparation method thereof for microoperation |
| CN112807561A (en) * | 2021-01-26 | 2021-05-18 | 上海烨映微电子科技股份有限公司 | Microneedle structure and method for producing same |
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| US20030095582A1 (en) * | 2000-12-21 | 2003-05-22 | Ackley Donald E. | Microneedle array systems |
| JP2005063798A (en) * | 2003-08-11 | 2005-03-10 | Japan Science & Technology Agency | Cone-shaped microstructure and its manufacturing method |
| CN101242948A (en) * | 2005-06-27 | 2008-08-13 | 应用薄膜股份有限公司 | Aluminum phosphate based microspheres |
| US20110011827A1 (en) * | 2009-07-17 | 2011-01-20 | Electronics And Telecommunications Research Institute | Method of manufacturing hollow microneedle structures |
| US20110117587A1 (en) * | 2009-11-13 | 2011-05-19 | National Tsing Hua University | Single molecule detection platform, manufacturing method thereof and method using the same |
-
2011
- 2011-10-10 CN CN201110304710.XA patent/CN102336387B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030095582A1 (en) * | 2000-12-21 | 2003-05-22 | Ackley Donald E. | Microneedle array systems |
| JP2005063798A (en) * | 2003-08-11 | 2005-03-10 | Japan Science & Technology Agency | Cone-shaped microstructure and its manufacturing method |
| CN101242948A (en) * | 2005-06-27 | 2008-08-13 | 应用薄膜股份有限公司 | Aluminum phosphate based microspheres |
| US20110011827A1 (en) * | 2009-07-17 | 2011-01-20 | Electronics And Telecommunications Research Institute | Method of manufacturing hollow microneedle structures |
| US20110117587A1 (en) * | 2009-11-13 | 2011-05-19 | National Tsing Hua University | Single molecule detection platform, manufacturing method thereof and method using the same |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102838078A (en) * | 2012-09-17 | 2012-12-26 | 无锡英普林纳米科技有限公司 | Suspended disk array microstructure and preparation method thereof |
| CN103569958A (en) * | 2013-11-12 | 2014-02-12 | 无锡英普林纳米科技有限公司 | Preparation method of spindle-shaped micron/submicron quartz rod array |
| CN108275646A (en) * | 2018-01-30 | 2018-07-13 | 北京理工大学 | A kind of low adhesion strength end effector and preparation method thereof for microoperation |
| CN108275646B (en) * | 2018-01-30 | 2020-10-09 | 北京理工大学 | Low-adhesion end effector for micro-operation and manufacturing method thereof |
| CN112807561A (en) * | 2021-01-26 | 2021-05-18 | 上海烨映微电子科技股份有限公司 | Microneedle structure and method for producing same |
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| CN102336387B (en) | 2015-04-08 |
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Effective date of registration: 20170721 Address after: 510640 Guangdong City, Tianhe District Province, No. five, road, public education building, unit 371-1, unit 2401 Patentee after: Guangdong Gaohang Intellectual Property Operation Co., Ltd. Address before: 214192 No. three, No. 99, Furong Road, Wuxi, Jiangsu Patentee before: Wuxi Imprint Nano Technology Co., Ltd. |
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Inventor after: Li Guiju Inventor before: Ge Haixiong Inventor before: Chen Yanfeng Inventor before: Yuan Changsheng Inventor before: Lu Minghui |
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Effective date of registration: 20170927 Address after: 274300, 169, North Village, administrative village, San San village, Huanggang Town, Heze, Shandong, Shanxian County Patentee after: Li Guiju Address before: 510640 Guangdong City, Tianhe District Province, No. five, road, public education building, unit 371-1, unit 2401 Patentee before: Guangdong Gaohang Intellectual Property Operation Co., Ltd. |
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