CN102330157A - Flow guide cylinder for producing silicon single crystal rod - Google Patents
Flow guide cylinder for producing silicon single crystal rod Download PDFInfo
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- CN102330157A CN102330157A CN201110231075A CN201110231075A CN102330157A CN 102330157 A CN102330157 A CN 102330157A CN 201110231075 A CN201110231075 A CN 201110231075A CN 201110231075 A CN201110231075 A CN 201110231075A CN 102330157 A CN102330157 A CN 102330157A
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- single crystal
- flow guide
- silicon single
- crystal rod
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Abstract
The invention relates to a flow guide cylinder for producing a silicon single crystal rod. The flow guide cylinder for producing the silicon single crystal rod comprises a flow guide cylinder body, wherein the flow guide cylinder body comprises a cylinder body top end and a cylinder bottom end; a flow guide chamber body is included between a cylinder body upper end and a cylinder body lower end; a flow guide outlet is formed in a central area of the cylinder body bottom end and communicated with the flow guide chamber body; the cylinder body bottom end corresponding to the outer ring of the flow guide outlet is provided with a solid-liquid interface protective part; and the section width of the solid-liquid interface protective part is 39.17-43.17 mm. According to the invention, because the flow guide chamber body is formed between the cylinder body upper end and the cylinder body lower end, the flow guide outlet communicated with the flow guide chamber body is mounted at the cylinder body bottom end and the solid-liquid interface protective part is formed on the outer ring of the flow guide outlet, the radial argon diffusion distance can be increased through enlarging the radial width of the solid-liquid interface protective part, the capacity of preventing the surrounding particles from entering the solid-liquid interface is improved, simple structure, safety and reliability are obtained, the finished product ratio of dislocation-free single crystals can be increased, and the machining cost is reduced.
Description
Technical field
The present invention relates to a kind of guide shell, guide shell is used in especially a kind of silicon single crystal rod production, belongs to the silicon single crystal rod machining technology.
Background technology
In recent years, because problems such as global warming, the deterioration of the ecological environment, conventional energy resources shortage, Renewable Energy Development obtains the attention and the support of national governments.Under the incentive policy of the promotion of technical progress and national governments drives; Solar energy power generating industry and market are able to develop rapidly; The investment of the whole nation in silicon single crystal rod production increases greatly; Cause domestic photovoltaic industry competition fierce unusually, each solar energy single crystal silicon rod manufacturer is all in the raising dislocation-free single crystal yield rate of doing everything possible, to obtain the advantage in market competition.For improving on the dislocation-free single crystal yield rate, just must increase the protection of high-purity argon gas to solid-liquid interface, destroy the dislocation-free single crystal growth to prevent that particle gets into solid-liquid interface on every side.On high-purity argon gas protection solid-liquid interface; The report at angle of inclination that has only distance and the guide shell inwall in the gap that guide shell lower end and bath surface constitute at present, but the shape in the gap that guide shell lower end and bath surface are constituted and this shape do not have to report to the effect of high-purity argon gas protection solid-liquid interface.
Summary of the invention
The objective of the invention is to overcome the deficiency that exists in the prior art; Provide a kind of silicon single crystal rod production to use guide shell, it is simple in structure, can increase the protection of high-purity argon gas to solid-liquid interface; Improve the ability that prevents the solid-liquid interface of particle entering on every side; Improve the yield rate of dislocation-free single crystal, cut down finished cost, safe and reliable.
According to technical scheme provided by the invention, guide shell is used in said silicon single crystal rod production, comprises stream guiding barrel, and said stream guiding barrel comprises cylinder top and cylindrical shell bottom; Comprise the water conservancy diversion cavity between cylindrical shell upper end and cylindrical shell lower end; The central section of said cylindrical shell bottom is provided with diversion outlet, and said diversion outlet is connected with the water conservancy diversion cavity; The cylindrical shell bottom is provided with solid-liquid interface protection portion corresponding to the outer ring of diversion outlet, and the width in said solid-liquid interface protection portion cross section is 39.17mm ~ 43.17mm.
The end edge of said cylinder top stretches out and forms tube along portion, and said tube is positioned on the same horizontal plane along portion and cylinder top.
Said tube is provided with connecting hole along portion.The external diameter of said cylinder top is greater than the external diameter of cylindrical shell bottom.
The rounded shape of said diversion outlet, the axis of diversion outlet and the axis of stream guiding barrel are located along the same line.
Pass through arc transition between said stream guiding barrel and cylindrical shell bottom.The wall thickness 10mm of said stream guiding barrel.
Said cylinder top and stream guiding barrel inwall angle are 83 degree.The width of said diversion outlet is 260mm.
The width of said cylindrical shell bottom is 380mm.
Advantage of the present invention: form the water conservancy diversion cavity between the cylinder top of stream guiding barrel and cylindrical shell bottom, the cylindrical shell bottom is provided with the diversion outlet that is connected with the water conservancy diversion cavity, and the outer ring of diversion outlet forms solid-liquid interface protection portion; Through enlarging the radial width of solid-liquid interface protection portion, can increase the distance of radially dispersing argon gas, improved the ability that prevents the solid-liquid interface of particle entering on every side; Simple in structure; Can improve the yield rate of dislocation-free single crystal, cut down finished cost, safe and reliable.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
Below in conjunction with concrete accompanying drawing and embodiment the present invention is described further.
As shown in Figure 1: as to the present invention includes stream guiding barrel 1, orienting lug 2, solid-liquid interface protection portion 3, diversion outlet 4, water conservancy diversion cavity 5, connecting hole 6, tube along portion 7, cylinder top 8 and cylindrical shell bottom 9.
As shown in Figure 1: guide shell comprises stream guiding barrel 1, and said stream guiding barrel 1 has cylinder top 8 and cylindrical shell bottom 9, and the external diameter of cylinder top 8 is greater than the external diameter of cylindrical shell bottom 9.9 formation in cylinder top 8 and cylindrical shell bottom are positioned at the water conservancy diversion cavity 5 of stream guiding barrel 1, and the shape of the shape of said water conservancy diversion cavity 5 and stream guiding barrel 1 is consistent.The centre of cylindrical shell bottom 9 is provided with diversion outlet 4, and said diversion outlet 4 is connected with water conservancy diversion cavity 5, diversion outlet 4 rounded shapes; The axis of the axis of diversion outlet 4 and stream guiding barrel 1 is located along the same line.Cylindrical shell bottom 9 is provided with solid-liquid interface protection portion 3 corresponding to the outer ring that diversion outlet 4 is set; Said solid-liquid interface protection portion 3 is circular; And the width M in said solid-liquid interface protection portion 3 cross sections is 39.17 ~ 43.17mm, also is that the outer ring of diversion outlet 4 is 39.17 ~ 43.17mm apart from distance between the barrel of stream guiding barrel 1.Solid-liquid interface protection portion 3 is provided with the orienting lug 2 of vertical distribution, and said orienting lug 2 is positioned at water conservancy diversion cavity 5, and orienting lug 2 is positioned at the end of contiguous diversion outlet 4.
The end edge of cylinder top 8 stretches out and forms tube along portion 7, and said tube is positioned at same plane along portion 7 with cylinder top 8; And tube is provided with connecting hole 6 along portion 7, and said connecting hole 6 connects tube along portion 7.Angle is 83 degree between the inwall of cylinder top 8 and stream guiding barrel 1, and the inner wall thickness of stream guiding barrel 1 is 10mm.Particularly, be example to prepare 6.5 inches monocrystalline, the external diameter width of diversion outlet 4 is 260mm, the external diameter of cylindrical shell bottom 9 is 380mm.3 in the barrel of stream guiding barrel 1 and solid-liquid interface protection portion pass through arc transition, and wherein, the radius of 3 circular arcs of the inwall of stream guiding barrel 1 and solid-liquid interface protection portion is 20mm; The radius of 3 annulus of the outer wall of stream guiding barrel 1 and solid-liquid interface protection portion is 21.61mm; The width M in solid-liquid interface protection portion 3 cross sections is 41.17mm ± 2mm.
As shown in Figure 1: during work; The trend of argon gas stream is to pass through stream guiding barrel 1 from top to bottom under the airtight hot system; Diversion outlet 4 from stream guiding barrel 1 arrives bath surface downwards then; Through the cylindrical shell bottom 9 and the gap that bath surface constitutes of stream guiding barrel 1, turn round then upwards along stream guiding barrel 1 outer wall, the gap through stream guiding barrel 1 outer wall and interior stay-warm case discharges out of the furnace downwards again.In the argon gas stream of this airtight hot system and the argon gas stream of opening wide hot system (no guide shell) during relatively through the gap of stream guiding barrel 1 lower end and bath surface formation; The present invention's solid-liquid interface protects the cross-sectional width of portion 3 to be set to 39.17 ~ 43.17mm; Enlarged the width of solid-liquid interface protection portion 3 as much as possible; Only otherwise influence the rising of quartz crucible; Just stream guiding barrel 1 lower end and bath surface gap be shaped as flat four limit types, with form at bath surface one have big radial width radially disperse argon flow field; Because the increase of solid-liquid interface protection portion 3 radial width has increased and radially dispersed the distance of argon gas, thereby improved the ability that prevents the solid-liquid interface of particle entering on every side.
9 of the cylinder top 8 of stream guiding barrel 1 of the present invention and cylindrical shell bottoms form water conservancy diversion cavity 5, and cylindrical shell bottom 9 is provided with the diversion outlet 4 that is connected with water conservancy diversion cavity 5, and the outer ring of diversion outlet 4 forms solid-liquid interface protection portion 3; Through enlarging the radial width of solid-liquid interface protection portion 3, can increase the distance of radially dispersing argon gas, improved the ability that prevents the solid-liquid interface of particle entering on every side; Simple in structure; Can improve the yield rate of dislocation-free single crystal, cut down finished cost, safe and reliable.
Claims (10)
1. guide shell is used in a silicon single crystal rod production, comprises stream guiding barrel (1), and said stream guiding barrel (1) comprises cylinder top (8) and cylindrical shell bottom (9); Comprise water conservancy diversion cavity (5) between cylindrical shell upper end (8) and cylindrical shell lower end (9); It is characterized in that: the central section of said cylindrical shell bottom (9) is provided with diversion outlet (4), and said diversion outlet (4) is connected with water conservancy diversion cavity (5); Cylindrical shell bottom (9) is provided with solid-liquid interface protection portion (3) corresponding to the outer ring of diversion outlet (4), and the width in said solid-liquid interface protection portion (3) cross section is 39.17mm ~ 43.17mm.
2. guide shell is used in silicon single crystal rod production according to claim 1, it is characterized in that: the end edge of said cylinder top (8) stretches out and forms tube along portion (7), and said tube is positioned on the same horizontal plane with cylinder top (8) along portion (7).
3. guide shell is used in silicon single crystal rod production according to claim 2, it is characterized in that: said tube is provided with connecting hole (6) along portion (7).
4. guide shell is used in silicon single crystal rod production according to claim 1, it is characterized in that: the external diameter of said cylinder top (8) is greater than the external diameter of cylindrical shell bottom (9).
5. guide shell is used in silicon single crystal rod production according to claim 1, it is characterized in that: the rounded shape of said diversion outlet (4), the axis of the axis of diversion outlet (4) and stream guiding barrel (1) is located along the same line.
6. guide shell is used in silicon single crystal rod production according to claim 1, it is characterized in that: pass through arc transition between said stream guiding barrel (1) and cylindrical shell bottom (9).
7. guide shell is used in silicon single crystal rod production according to claim 1, it is characterized in that: the wall thickness 10mm of said stream guiding barrel (1).
8. guide shell is used in silicon single crystal rod production according to claim 1, it is characterized in that: said cylinder top (8) is 83 degree with stream guiding barrel (1) inwall angle.
9. guide shell is used in silicon single crystal rod production according to claim 1, it is characterized in that: the width of said diversion outlet (4) is 260mm.
10. guide shell is used in silicon single crystal rod production according to claim 1, it is characterized in that: the width of said cylindrical shell bottom (9) is 380mm.
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CN201110231075A CN102330157A (en) | 2011-08-12 | 2011-08-12 | Flow guide cylinder for producing silicon single crystal rod |
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CN201110231075A CN102330157A (en) | 2011-08-12 | 2011-08-12 | Flow guide cylinder for producing silicon single crystal rod |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1907915A (en) * | 2006-07-20 | 2007-02-07 | 西安超码科技有限公司 | Method for manufacture thermal field charcoal/charcoal draft tube for single crystal silicon pulling furnace |
CN101343775A (en) * | 2008-08-22 | 2009-01-14 | 宁晋晶兴电子材料有限公司 | Capacity increasing charging device for quartz crucible of monocrystalline silicon manufacturing stove |
CN201864792U (en) * | 2010-12-10 | 2011-06-15 | 镇江荣德新能源科技有限公司 | Guide cylinder for czochralski method monocrystalline silicon growing device and monocrystalline silicon growing device |
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2011
- 2011-08-12 CN CN201110231075A patent/CN102330157A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1907915A (en) * | 2006-07-20 | 2007-02-07 | 西安超码科技有限公司 | Method for manufacture thermal field charcoal/charcoal draft tube for single crystal silicon pulling furnace |
CN101343775A (en) * | 2008-08-22 | 2009-01-14 | 宁晋晶兴电子材料有限公司 | Capacity increasing charging device for quartz crucible of monocrystalline silicon manufacturing stove |
CN201864792U (en) * | 2010-12-10 | 2011-06-15 | 镇江荣德新能源科技有限公司 | Guide cylinder for czochralski method monocrystalline silicon growing device and monocrystalline silicon growing device |
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Application publication date: 20120125 |