CN102330065A - Multifunctional substrate frame for vacuum coating equipment - Google Patents
Multifunctional substrate frame for vacuum coating equipment Download PDFInfo
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- CN102330065A CN102330065A CN201110283620A CN201110283620A CN102330065A CN 102330065 A CN102330065 A CN 102330065A CN 201110283620 A CN201110283620 A CN 201110283620A CN 201110283620 A CN201110283620 A CN 201110283620A CN 102330065 A CN102330065 A CN 102330065A
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- substrate frame
- substrate
- vacuum coating
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- subpanel
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Abstract
The invention discloses a multifunctional substrate frame for vacuum coating equipment, which comprises a mounting disk and at least two mounting bars, wherein two long strip sliding chutes are arranged on the mounting disk in parallel; the mounting bars are provided with two mounting holes; and the central distance between the two mounting holes is the same as that between the two sliding chutes. According to the substrate frame disclosed by the invention, the mounting requirements on coating an optical thin film in the vacuum coating and coating substrates with different sizes and shapes in other vacuum coating equipment can be met. The invention has the beneficial effects that the waste of designing and processing the substrate frame in the vacuum coating can be greatly reduced, the research periods of different products are shortened, and the like, and batch coating can be realized.
Description
Technical field
The invention belongs to vacuum coating film equipment annex manufacturing technology field, relate to a kind of substrate frame, be specifically related to a kind of multi-functional substrate frame that is used for vacuum coating film equipment.
Background technology
Have one or more substrate erecting frames in the vacuum coating film equipment, be used for fixing the substrate that needs plated film.Optical thin film is a kind of product in the vacuum plating, and the equipment that is coated with optical thin film is relatively large than other vacuum coating film equipment, and the shape of substrate frame is big, number is more.In being coated with the process of optical thin film; The design that need carry out substrate frame according to the geomery of substrate is to satisfy the plated film requirement; But in the development and production process of the optical thin film of reality, different user is not quite similar to the shape of final optical thin film substrate, the requirement of thickness equidimension, and this just needs design and processes different substrate frame; Bring trouble before giving plated film, caused financial resources, manpower and waste of time.Particularly, often have little time to process a kind of new substrate frame for the relatively shorter product development of time requirement.The problems referred to above not only are present in the process that is coated with of optical thin film, and also there is same problem in other vacuum platings.
Summary of the invention
In order to overcome the problem that exists in the above-mentioned prior art, the purpose of this invention is to provide a kind of multi-functional substrate frame that is used for vacuum coating film equipment, can install and fix the substrate of different shapes and size, save financial resources, manpower and time.
For realizing above-mentioned purpose; The technical scheme that the present invention adopted is; A kind of multi-functional substrate frame that is used for vacuum coating film equipment comprises subpanel and at least two mounting bars, is arranged with two long strip sliding groove in the subpanel in parallel; Be processed with two open holes on the mounting bar, the width between centers of two open holes equates with the width between centers of two chutes.
Be respectively arranged with the step of a protrusion on two sides that parallel on the mounting bar, with the open hole axis.
A side in two sides that parallel on the mounting bar, with the open hole axis is provided with the step of a protrusion.
The thickness of step is 0.1mm～0.2mm.
Be processed with two parallel chutes in the subpanel of substrate frame of the present invention, many mounting bars be installed, between two adjacent mounting bars, place the identical substrate of a plurality of geomeries through these two chutes.Should be fit to difform substrate, have characteristics such as installing simply, be convenient to cleaning.Can satisfy of the plated film requirement of present optical thin film plating equipment to most substrate.In addition, this substrate frame can be applied on other the vacuum coating film equipment fully.
Description of drawings
Fig. 1 is the structural representation of substrate frame of the present invention.
Fig. 2 is the left view of Fig. 1.
Fig. 3 is the structural representation of mounting bar in the substrate frame of the present invention.
Fig. 4 is the vertical view of Fig. 3.
Among the figure, 1. subpanel, 2. chute, 3. mounting bar, 4. screw, 5. nut, 6. body, 7. step, 8. open hole.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is elaborated.
In field of surface engineering technique; Physical vapor deposition is a kind of technology of comparative maturity; Mainly comprise multiple depositional modes such as magnetron sputtering, ion beam sputtering, arc ion plating and electron gun evaporation; In the depositing device of these modes, generally all need special deposition substrate installing mechanism, in the plated film field, we are referred to as the basal disc frame.Common basal disc frame is mainly circular metal construction on the depositing device at present.In order to satisfy difform film plating substrate, in actual coating process, often on the stainless steel plate of certain size size, process the hole the same of some amount with sizes of substrate, then, the substrate of need plated film is put into the hole on the stainless steel plate.This has just caused the energy and financial resources that need cost a lot of money in the early stage that is coated with film to come substrate frame is designed and processes, and the processing of substrate frame simultaneously also needs the regular hour, the significant wastage of a kind of time and financial resources concerning producing sheet research institute or personnel.
In order to overcome the problem that exists in the above-mentioned prior art; The basal disc that the present invention mainly combines to exist in the optical thin film coating process sets up the problem that meter processing is wasted; Purpose in line with practicing thrift the variant prodn development time provides a kind of substrate frame that is fit to be coated with the different shapes substrate, and this substrate frame not only is fit to being coated with of optical thin film; In being coated with of the different films that it can also be used widely, can reduce the development cost and the lead time of variant prodn greatly.Substrate frame mentality of designing of the present invention is ingenious; The slit of two certain widths of processing on the thin plate (can select material different and shape as requested) of certain material; The mounting bar that processing simultaneously has fixed function is according to the size of substrate, through the position of adjustment screw; Adjust the distance between adjacent two mounting bars, be used to install and fix the substrate of different shapes and size.
As depicted in figs. 1 and 2, the structure of substrate frame of the present invention comprises subpanel 1 and at least two mounting bars 3; Be arranged with two long strip sliding groove 2 in the subpanel 1 in parallel.
Perhaps in line with the principle of practicing thrift, the material of subpanel 1, shape and thickness can be different as requested.
The structure of mounting bar 3 like Fig. 3 and shown in Figure 4, comprises body 6, and body 6 is a rectangular parallelepiped, and the width between centers that is processed with 8, two open holes 8 of two open holes on the body 6 equates with the width between centers of two chutes 2; Be respectively arranged with the step 7 of a protrusion on two sides that parallel on the body 6, with open hole 8 axis, these two steps 7 are as a whole with body 6, and form " T " font; Step 7 also can be one, and itself and body 6 form " L " shape.The thickness L of step 7 is 0.1～0.2mm.
The thickness of step 7 is 0.1～0.2mm, can not be too thick, in case major structure becomes the plated film shade; The depth H of step 7 is generally several millimeters, and near the thickness of substrate, if mounting bar 3 adopts mechanically resistant material to make, the degree of depth of step 7 selects 1mm just can meet the demands as far as possible.
For the ease of the mounted substrate frame, a grip can be set in subpanel 1.Mounting bar 3 generally selects for use stainless steel or metallic copper to process, and also can select number of various materials to form on request, and the length of mounting bar 3 does not have particular requirement, but can not surpass the border of subpanel 1.Schema is as shown in Figure 2.
During mounted substrate: clean subpanel 1 earlier; Then, mounting bar 3 is placed in the subpanel 1, makes step 7 on the mounting bar 3 towards direction setting away from subpanel 1; Penetrate screw 4 respectively in two open holes 8 on mounting bar 3; Screw 4 passes open hole 8 and gets into chute 2, and stretches out from the other end of chute 2, cover loading nut 5 on screw 4; The substrate of the identical shaped and size that needs plated film is placed in the subpanel 1 between adjacent two mounting bars 3; Substrate need plated film towards last, move these two adjacent mounting bars 3, make step 7 relative on two mounting bars 3 be pressed in the both sides of substrate respectively; Tightening screw 4 makes two mounting bars 3 tightly push down substrate; Fixed substrate can be provided with many mounting bars 3 in the same subpanel 1, and the substrate of a lot of identical shaped and size of quantity can be installed simultaneously; Also can install and fix the substrate of different shapes and size, realize producing in batches the purpose of variant prodn; The substrate frame that substrate is installed is put into vacuum coating film equipment, substrate is carried out plated film.Substrate finally is arranged as several rows in subpanel 1, the installation sum of substrate is decided by the size of subpanel 1.
Substrate frame of the present invention can satisfy in optical thin film in the vacuum plating and other vacuum coating film equipments plated film installation requirement to the substrate of different size and shape.Can significantly reduce the waste of substrate frame Design and Machining in the vacuum plating through the present invention, shorten lead time of variant prodn or the like, and can realize the batch plated film.
Claims (4)
1. multi-functional substrate frame that is used for vacuum coating film equipment; It is characterized in that; This substrate frame comprises subpanel (1) and at least two mounting bars (3); Be arranged with two long strip sliding groove (2) in the subpanel (1) in parallel, be processed with two open holes (8) on the mounting bar (3), the width between centers of two open holes (8) equates with the width between centers of two chutes (2).
2. multi-functional substrate frame according to claim 1 is characterized in that, is respectively arranged with the step (7) of a protrusion on two sides that described mounting bar (3) goes up, parallel with open hole (8) axis.
3. multi-functional substrate frame according to claim 1 is characterized in that, a side in two sides that described mounting bar (3) goes up, parallel with open hole (8) axis is provided with the step (7) of a protrusion.
4. according to claim 2 or 3 described multi-functional substrate frame, it is characterized in that the thickness of said step (7) is 0.1mm～0.2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110283620A CN102330065A (en) | 2011-09-22 | 2011-09-22 | Multifunctional substrate frame for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110283620A CN102330065A (en) | 2011-09-22 | 2011-09-22 | Multifunctional substrate frame for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102330065A true CN102330065A (en) | 2012-01-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110283620A Pending CN102330065A (en) | 2011-09-22 | 2011-09-22 | Multifunctional substrate frame for vacuum coating equipment |
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| CN (1) | CN102330065A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103215557A (en) * | 2013-05-10 | 2013-07-24 | 天津大学 | Clamp for reversely fixing a plurality of substrates of magnetic-control sputtering equipment and clamping method thereof |
| CN104726837A (en) * | 2013-12-18 | 2015-06-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber and plasma processing equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1018033A (en) * | 1996-07-02 | 1998-01-20 | Tokyo Electron Ltd | Holding member of substrate, housing body of substrate, method for transporting substrate and treating device for substrate |
| CN2611391Y (en) * | 2003-03-14 | 2004-04-14 | 中国科学院上海光学精密机械研究所 | Double-disk connection substrate device |
| CN101165206A (en) * | 2006-10-20 | 2008-04-23 | 鸿富锦精密工业（深圳）有限公司 | Substrate fixture and rotary disc for coating film and film coating machine |
| CN201343497Y (en) * | 2009-02-13 | 2009-11-11 | 江苏津通先锋光电显示技术有限公司 | Adjustable glass substrate frame |
-
2011
- 2011-09-22 CN CN201110283620A patent/CN102330065A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1018033A (en) * | 1996-07-02 | 1998-01-20 | Tokyo Electron Ltd | Holding member of substrate, housing body of substrate, method for transporting substrate and treating device for substrate |
| CN2611391Y (en) * | 2003-03-14 | 2004-04-14 | 中国科学院上海光学精密机械研究所 | Double-disk connection substrate device |
| CN101165206A (en) * | 2006-10-20 | 2008-04-23 | 鸿富锦精密工业（深圳）有限公司 | Substrate fixture and rotary disc for coating film and film coating machine |
| CN201343497Y (en) * | 2009-02-13 | 2009-11-11 | 江苏津通先锋光电显示技术有限公司 | Adjustable glass substrate frame |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103215557A (en) * | 2013-05-10 | 2013-07-24 | 天津大学 | Clamp for reversely fixing a plurality of substrates of magnetic-control sputtering equipment and clamping method thereof |
| CN103215557B (en) * | 2013-05-10 | 2015-01-21 | 天津大学 | Clamp for reversely fixing a plurality of substrates of magnetic-control sputtering equipment and clamping method thereof |
| CN104726837A (en) * | 2013-12-18 | 2015-06-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber and plasma processing equipment |
| CN104726837B (en) * | 2013-12-18 | 2018-05-25 | 北京北方华创微电子装备有限公司 | Reaction chamber and plasma processing device |
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Application publication date: 20120125 |