CN102321912B - Output shaft mechanism for crystal-bar positioning devices - Google Patents
Output shaft mechanism for crystal-bar positioning devices Download PDFInfo
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- CN102321912B CN102321912B CN201110295589.9A CN201110295589A CN102321912B CN 102321912 B CN102321912 B CN 102321912B CN 201110295589 A CN201110295589 A CN 201110295589A CN 102321912 B CN102321912 B CN 102321912B
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- output shaft
- crystal
- bar positioning
- positioning devices
- shaft mechanism
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Abstract
Output shaft mechanism for crystal-bar positioning devices of the present invention, comprising: output shaft, is provided with copper nut in one end of described output shaft; Proximity transducer, described proximity transducer is arranged on the outside of described output shaft; Slip plunger, one end of described slip plunger is connected with one end of described output shaft; Tightness system, described tightness system is connected with other one end of described slip plunger.Output shaft mechanism for crystal-bar positioning devices of the present invention has been abandoned original monocrystal stove and has been equipped with crystal bar positioning component at upper furnace tube lower opening place, utilize the reducer assemblies be arranged on outside upper furnace tube can realize crystal bar effective location, and compact construction, the few and easily processing and manufacturing of amount of parts.
Description
Technical field
The present invention relates to CZ farad single crystal rod equipment unit, particularly a kind of output shaft mechanism for crystal-bar positioning devices.
Background technology
The monocrystal stove that existing production field uses is generally single upper furnace tube and crystal pulling system, the various and not easily processing and manufacturing of amount of parts, also can cause crystal bar to be directly exposed to easy oxidation stain in air, so upper furnace tube fitted underneath independently segregaion valve.Current common way is equipped with crystal bar crystal bar positioning component at monocrystal stove at upper furnace tube lower opening place in the industry, can not effectively locate by crystal bar simultaneously.
Summary of the invention
The object of the present invention is to provide a kind of compact construction, the few and easily processing and manufacturing of amount of parts, can realize the output shaft mechanism for crystal-bar positioning devices of crystal bar effective location.
Output shaft mechanism for crystal-bar positioning devices of the present invention, comprising: output shaft, is provided with copper nut in one end of described output shaft; Proximity transducer, described proximity transducer is arranged on the outside of described output shaft; Slip plunger, one end of described slip plunger is connected with one end of described output shaft; Tightness system, described tightness system is connected with other one end of described slip plunger.
Described slip plunger is the design of hollow, in described slip plunger, be provided with spring.Copper nut anti-rotation guide groove is provided with in the outside of described spring.Described slip plunger relative to other one end of described output shaft coupling end on be provided with graphite ear seat.Described tightness system comprises a set of cups and is arranged on the holding pin of described a set of cups one end.The inwall being provided with one end of described holding pin at described a set of cups is provided with dull and stereotyped anti-rotation guide groove.Described proximity transducer is connected with described output shaft by anti-skidding flat board.O-ring seals is provided with at the outer surface of described a set of cups and described slip plunger.
Output shaft mechanism for crystal-bar positioning devices of the present invention has been abandoned original monocrystal stove and has been equipped with crystal bar crystal bar positioning component at upper furnace tube lower opening place, utilize the reducer assemblies be arranged on outside upper furnace tube can realize crystal bar effective location, and compact construction, the few and easily processing and manufacturing of amount of parts.
Accompanying drawing explanation
Fig. 1 is output shaft mechanism for crystal-bar positioning devices structural blast schematic diagram of the present invention;
Description of reference numerals in output shaft mechanism for crystal-bar positioning devices accompanying drawing of the present invention:
1-output shaft 2-slip plunger 3-spring
4-copper nut 5-proximity transducer 6-copper nut anti-rotation guide groove
The anti-skidding flat board of the dull and stereotyped anti-rotation guide groove 9-of 7-graphite ear seat 8-
10-O shape sealing-ring 11-a set of cups 12-holding pin
Embodiment
Below in conjunction with accompanying drawing, output shaft mechanism for crystal-bar positioning devices 4 of the present invention is described in further detail.
As shown in Figure 1, output shaft mechanism for crystal-bar positioning devices of the present invention, the output terminal of output shaft 1 is one section of screw thread, copper nut 4 is equipped with at screw thread position, the square ear of copper nut 4 outer rim coordinates the rotation of limit copper nut 4 in slip plunger 2 with the rectangle copper nut anti-rotation guide groove 6 of slip plunger 2, first push the spring 3 through precompressed when copper nut 4 advances, the precompression of spring 3 overcomes sliding friction promotion slip plunger 2 and do rectilinear translation in a set of cups 11.Anti-skidding dull and stereotyped 9 make rigid attachment by screw and slip plunger 10, and anti-skidding dull and stereotyped 9 outer rim side's ears match with the rectangular flat anti-rotation guide groove 8 of a set of cups 8 rotation of limit slip plunger 2 in a set of cups 11.
Be fixed with graphite ear seat 7 in the front end of slip plunger 2, during location, graphite ear seat 7 and high temperature crystal bar come in contact.Based on high temperature and consideration high temperature crystal bar not being caused to metallic pollution, graphite ear seat 7 selection graphite.Holding pin 12 is had in the arranged outside of tightness system near slip plunger 2 one end.
Graphite ear seat 7 contacts with crystal bar, and the original LCR system of single crystal growing furnace can detect crystal bar ground connection immediately, and now PLC requires that DC speed-reducing stops operating, slip plunger 2 feed-disabling.Copper nut 4 centripetal force can be passed to the spring 3 of slip plunger 2, can the overshoot campaign of buffered DC reducing motor, protection crystal bar is only by the detent force equal with spring 3 force of compression.In the outside of a set of cups 11, proximity transducer 5 is housed, when slip plunger 2 rollback, can detect that anti-skidding dull and stereotyped 9 must be close, electrical control sends instructions, and DC speed-reducing stops, and slip plunger 2 stops rollback.
Output shaft mechanism for crystal-bar positioning devices of the present invention has been abandoned original monocrystal stove and has been equipped with crystal bar crystal bar positioning component at upper furnace tube lower opening place, utilize the reducer assemblies be arranged on outside upper furnace tube can realize crystal bar effective location, and compact construction, the few and easily processing and manufacturing of amount of parts.
Below the preferred embodiment of the invention is illustrated, but the present invention is not limited to embodiment, those of ordinary skill in the art also can make all equivalent modification or replacement under the prerequisite without prejudice to the invention spirit, and these equivalent modification or replacement are all included in the scope of the application.
Claims (6)
1. output shaft mechanism for crystal-bar positioning devices, is characterized in that, comprising:
Output shaft, is provided with copper nut in one end of described output shaft;
Proximity transducer, described proximity transducer is arranged on the outside of described output shaft;
Slip plunger, one end of described slip plunger is connected with one end of described output shaft;
Tightness system, described tightness system is connected with other one end of described slip plunger;
Wherein, described slip plunger is the design of hollow, in described slip plunger, be provided with spring;
Described slip plunger relative to other one end of described output shaft coupling end on be provided with graphite ear seat.
2. output shaft mechanism for crystal-bar positioning devices according to claim 1, is characterized in that, is provided with copper nut anti-rotation guide groove in the outside of described spring.
3. output shaft mechanism for crystal-bar positioning devices according to claim 1, is characterized in that, described tightness system comprises a set of cups and is arranged on the holding pin of described a set of cups one end.
4. output shaft mechanism for crystal-bar positioning devices according to claim 3, is characterized in that, the inwall being provided with one end of described holding pin at described a set of cups is provided with dull and stereotyped anti-rotation guide groove.
5. output shaft mechanism for crystal-bar positioning devices according to claim 1, is characterized in that, described proximity transducer is connected with described output shaft by anti-skidding flat board.
6. output shaft mechanism for crystal-bar positioning devices according to claim 3, is characterized in that, is provided with O-ring seals at the outer surface of described a set of cups and described slip plunger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110295589.9A CN102321912B (en) | 2011-09-30 | 2011-09-30 | Output shaft mechanism for crystal-bar positioning devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110295589.9A CN102321912B (en) | 2011-09-30 | 2011-09-30 | Output shaft mechanism for crystal-bar positioning devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102321912A CN102321912A (en) | 2012-01-18 |
| CN102321912B true CN102321912B (en) | 2016-02-17 |
Family
ID=45449739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110295589.9A Active CN102321912B (en) | 2011-09-30 | 2011-09-30 | Output shaft mechanism for crystal-bar positioning devices |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102321912B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023507A (en) * | 2018-09-26 | 2018-12-18 | 锐捷芯盛（天津）电子科技有限公司 | A kind of single crystal growing furnace crystal bar locating device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2952603A1 (en) * | 1979-12-28 | 1981-07-02 | Siemens AG, 1000 Berlin und 8000 München | Small dia silicon rod made from melt in drawing appts. - where rod is supported radially to minimise vibration, so long rods with constant dia can be mfd. |
| US5427057A (en) * | 1991-11-28 | 1995-06-27 | Shin-Etsu Handotai Co., Ltd. | Self-clamping holder for polysilicon rod used in floating-zone single-crystal growth method |
| CN201989258U (en) * | 2011-03-10 | 2011-09-28 | 重庆兰花太阳能电力股份有限公司 | Silicon rod positioning clamp |
-
2011
- 2011-09-30 CN CN201110295589.9A patent/CN102321912B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2952603A1 (en) * | 1979-12-28 | 1981-07-02 | Siemens AG, 1000 Berlin und 8000 München | Small dia silicon rod made from melt in drawing appts. - where rod is supported radially to minimise vibration, so long rods with constant dia can be mfd. |
| US5427057A (en) * | 1991-11-28 | 1995-06-27 | Shin-Etsu Handotai Co., Ltd. | Self-clamping holder for polysilicon rod used in floating-zone single-crystal growth method |
| CN201989258U (en) * | 2011-03-10 | 2011-09-28 | 重庆兰花太阳能电力股份有限公司 | Silicon rod positioning clamp |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102321912A (en) | 2012-01-18 |
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