CN102313545A - Completely-symmetric lever-amplification capacitive micromechanical gyro - Google Patents
Completely-symmetric lever-amplification capacitive micromechanical gyro Download PDFInfo
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- CN102313545A CN102313545A CN201110205937A CN201110205937A CN102313545A CN 102313545 A CN102313545 A CN 102313545A CN 201110205937 A CN201110205937 A CN 201110205937A CN 201110205937 A CN201110205937 A CN 201110205937A CN 102313545 A CN102313545 A CN 102313545A
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Abstract
The invention discloses a micromechanical gyro for lever-amplification capacitance detection which is realized by a microelectromechanical system (MEMS), and belongs to the guidance field. The gyro adopts a lever amplification mechanism both in a driving direction and in a detection direction, and has the following beneficial effects: 1. in the driving direction, the driving force generated by a lever for a driving voltage is amplified; a low driving voltage can make a mass block generate large displacement through the lever; the driving force required by the mass block to reach the same speed and displacement is reduced, and thus the driving voltage is reduced; 2. in the detection direction, the displacement generated by the lever for the mass block in the detection direction is amplified, which amplifies the spacing change of the detection capacitance, and increases the sensitivity of the detection capacitance; 3. the driving direction and the sensitive direction are completely symmetric, which allows the driving frequency and the detection frequency to be completely matched, and thus increases the sensitivity.
Description
Affiliated field
The lever that the present invention relates to the realization of a kind of employing MEMS (MEMS) technology amplifies the micromechanical gyro of capacitance detecting, belongs to the guidance or the control device field that utilize coriolis effect.
Background technology
The frame-type rotor gyroscope of traditional classics is combined by hundreds of parts, and its complex structure, volume is big, serviceable life is short, can not satisfy development and many new demands of applications of technology.The solid-state gyro of mechanical rotor has then appearred not having; Like laser gyro, light gyro etc.; Its precision has reached the requirement of navigation level, but owing to shortcomings such as its price are high, volume is big, incompatibility is used for the now flourish mini inertia measurement unit and the demand of low price business market.And the micromechanical gyro that latest developments are got up, obvious advantage such as its volume is little, in light weight, price is low, the life-span is long since its notion is suggested, just be the focus of studying both at home and abroad always.
In the present stage static electricity driving capacitor detection micromechanical gyro; It is very little to detect capacitance sensitivity; Like number of patent application is 201110189840.3; Denomination of invention is amplified for the driving direction lever that the micromechanical gyro in the patent of " a kind of capacitive micro mechinery gyroscope that amplifies the mass movement velocity " adopts, and there is following shortcoming in this structure: 1. this structure is not complete symmetry, makes driving frequency and detection frequency be difficult to reach coupling fully; 2. the detection side is very low to capacitance sensitivity, and is very big to the subsequent treatment difficulty.
Summary of the invention
The objective of the invention is: detect the little deficiency that waits of capacitance sensitivity in the prior art in order to overcome; A kind of lever complete symmetry micromechanical gyro is provided, utilizes simple lever principle to increase to detect changes in capacitance to solve problems such as existing micromechanical gyro sensitivity, resolution is high inadequately.
The technical solution adopted for the present invention to solve the technical problems is: a kind of condenser type lever amplifies the complete symmetry micromechanical gyro, comprises an inertial mass 16; Definition mass 16 central points are initial point; With mass 16 parallel on one side be the X axle, parallel with mass 16 another sides is the Y axle, the present invention on directions X about the Y rotational symmetry; On Y direction about the X rotational symmetry, on the X-direction with Y direction on structure just the same.
Like Fig. 1; Mass 16 through be connected in the folded beam I6 of its Y on side and Y to lever 13 link to each other; Lever 13 mid points are fixed through anchor point II15, set a roof beam in place through drive transmitting beam 7 and drive frame and 3 link to each other in lever 13 two ends, and the drive frame 3 folded beam I6 through two ends that set a roof beam in place are connected on the anchor point I8; Be fixed on the driving comb that drive frame sets a roof beam in place on 3 and constitute driving comb to 5 with the driving comb that is fixed on the drive electrode 4, make drive frame set a roof beam in place 3 through lever 13 make mass 16 produce X to to-and-fro movement; Be fixed on drive frame set a roof beam in place on 3 other driving combs be fixed on the quiet broach of the driving that drives detecting electrode 1 and constitute and drive detection comb 2, detect to accomplish to drive.
Mass 16 through X to the folded beam II14 of side and X to lever 13 be connected; Lever 13 mid points are fixed through anchor point II15, and lever 13 two ends link to each other with responsive Vierendeel girder 12 through responsive transfer beams 9; Responsive Vierendeel girder 12 links to each other with anchor point I8 through the folded beam I6 at two ends; The responsive broach that is fixed on the responsive Vierendeel girder 12 constitutes responsive broach to 11 with the quiet broach that is fixed on the responsive detecting electrode 10, to accomplish the capacitance detecting of sensitive direction.Wherein, folded beam II14 and lever 13 tie points are m0 apart from anchor point II15, and anchor point II15 is m1 apart from the distance of lever 13 end points.
What the present invention proposed is the micromechanics complete symmetry gyro that a kind of capacitance detecting lever amplifies; Its principle of work is: when on drive electrode 4, adding the periodic voltage signal; Under the electrostatic forcing of driving comb 5; Through drive frame 3 lever 13 transmission of drive force that connect of setting a roof beam in place, make through folded beam II14 again and drive mass 16 along periodically to-and-fro movement of directions X.If gyro is when having the angular velocity omega input around Z-direction; On Y direction, can produce coriolis force, make mass 16 produce displacement d0 along Y direction, this displacement produces acting force through folded beam II14 to the folded beam II14 of lever 13 and the tie point of lever; Under the effect of lever 13; The two ends of lever 13 produce bigger displacement d1, and (d1＞d0), this displacement is delivered on the responsive Vierendeel girder 12 through responsive transfer beams 9 effects, makes responsive Vierendeel girder 12 produce displacement d1 in the Y direction; Thereby on responsive detection comb 10, obtain bigger capacitance change, obtain the information of input angular velocity ω.In the ideal case, lever is m1/m0, i.e. d1/d0=m1/m0 to mass at the displacement amplification of Y direction.
What the present invention adopted is full symmetrical configuration; Its beneficial effect is: 1. pair driving direction; Utilize lever that the driving force that driving voltage produces is amplified; Less driving voltage makes mass 16 produce bigger displacement through lever, thereby makes mass 16 reach same speed, the driving force that displacement is wanted reduces, and promptly driving voltage reduces; To the detection side to, utilize lever that mass is amplified to the displacement that produces the detection side, the changes in spacing that detects electric capacity is amplified; Increased the detection capacitance sensitivity; 3. driving direction and sensitive direction are symmetrical fully, and driving frequency and detection frequency are mated fully, have increased sensitivity.
Description of drawings
Fig. 1: the complete symmetry lever that the present invention proposes amplifies the capacitive micro mechinery gyroscope structural representation
Among the figure: 1-drives detecting electrode, and 2-drives detection comb, and the 3-drive frame is set a roof beam in place, the 4-drive electrode; The 5-driving comb, 6-folded beam I, 7-drive transmitting beam, 8-anchor point I; The responsive transfer beams of 9-, the responsive detecting electrode of 10-, the responsive detection comb of 11-, the responsive Vierendeel girder of 12-; The 13-lever, 14-folded beam II, 15-anchor point II, 16-mass.
Embodiment
Condenser type lever in the present embodiment amplifies the complete symmetry micromechanical gyro, comprises an inertial mass 16; Definition mass 16 central points are initial point; With mass 16 parallel on one side be the X axle, parallel with mass 16 another sides is the Y axle, the present invention on directions X about the Y rotational symmetry; On Y direction about the X rotational symmetry, on the X-direction with Y direction on structure just the same.
Like Fig. 1; Mass 16 through be connected in the folded beam I 6 of its Y on side and Y to lever 13 link to each other; The width of lever 13 is 10 microns; Lever 13 mid points are fixed through anchor point II15, set a roof beam in place through drive transmitting beam 7 and drive frame and 3 link to each other in lever 13 two ends, and the drive frame 3 folded beam I6 through two ends that set a roof beam in place are connected on the anchor point I8; Be fixed on the driving comb that drive frame sets a roof beam in place on 3 and constitute driving comb to 5 with the driving comb that is fixed on the drive electrode 4, make drive frame set a roof beam in place 3 through lever 13 make mass 16 produce X to to-and-fro movement; Be fixed on drive frame set a roof beam in place on 3 other driving combs be fixed on the quiet broach of the driving that drives detecting electrode 1 and constitute and drive detection comb 2, detect to accomplish to drive.
Mass 16 through X to the folded beam II14 of side and X to lever 13 be connected; Lever 13 mid points are fixed through anchor point II15, and lever 13 two ends link to each other with responsive Vierendeel girder 12 through responsive transfer beams 9; Under 20 microns of the length of responsive transfer beams 9,10 microns of width, 40 microns of the width of said responsive Vierendeel girder 12,880 microns of length; Responsive Vierendeel girder 12 links to each other with anchor point I8 through the folded beam I6 at two ends; The responsive broach that is fixed on the responsive Vierendeel girder 12 constitutes responsive broach to 11 with the quiet broach that is fixed on the responsive detecting electrode 10, to accomplish the capacitance detecting of sensitive direction.Wherein, folded beam II14 and lever 13 tie points are 60 microns apart from anchor point II15m0, and anchor point II15 is 420 microns apart from lever 13 end points apart from m1.
The micromechanics complete symmetry gyro that capacitance detecting lever in the present embodiment amplifies; Its principle of work is: when on drive electrode 4, adding the periodic voltage signal; Under the electrostatic forcing of driving comb 5; Through drive frame 3 lever 13 transmission of drive force that connect of setting a roof beam in place, make through folded beam II14 again and drive mass 16 along periodically to-and-fro movement of directions X.If gyro is when having the angular velocity omega input around Z-direction; Meeting produces coriolis force on Y direction, makes mass 16 produce displacement d0 along Y direction, and this displacement is through the lever 13 and folded beam tie point generation acting force of folded beam II14 to lever 13; Under the effect of lever 13; The two ends of lever 13 produce bigger displacement d1, and (d1＞d0), this displacement is delivered on the responsive Vierendeel girder 12 through responsive transfer beams 9 effects, makes responsive Vierendeel girder 12 produce displacement d1 in the Y direction; Thereby on responsive detection comb 11, obtain bigger capacitance change, obtain the information of input angular velocity ω.In theory lever to the enlargement factor of displacement for not having m1/m0=7.When the d0=1 micron, the displacement d1=7 micron of responsive in theory Vierendeel girder 12.Leverage has amplified 7 times to the displacement of mass, thereby has amplified 7 times to detecting the changes in capacitance amount.
Claims (1)
1. a condenser type lever amplifies the complete symmetry micromechanical gyro, comprises an inertial mass (16); Definition mass (16) central point is an initial point; With mass (16) parallel on one side be the X axle, parallel with mass (16) another side is the Y axle, the present invention on directions X about the Y rotational symmetry; On Y direction about the X rotational symmetry, on the X-direction with Y direction on structure just the same;
Mass (16) through be connected in the folded beam I (6) of its Y on side and Y to lever (13) link to each other; Lever (13) mid point is fixing through anchor point II (15); Lever (13) two ends through drive transmitting beam (7) set a roof beam in place with drive frame (3) link to each other, drive frame (3) the folded beam I (6) through two ends that sets a roof beam in place is connected on the anchor point I (8); Be fixed on the driving comb that drive frame sets a roof beam in place on (3) and constitute driving comb to (5) with the driving comb that is fixed on the drive electrode (4), make drive frame set a roof beam in place (3) through lever (13) make mass (16) generation X to to-and-fro movement; Be fixed on drive frame set a roof beam in place on (3) other driving combs be fixed on the quiet broach of the driving that drives detecting electrode (1) and constitute and drive detection comb (2), detect to accomplish to drive;
Mass (16) through X to the folded beam II (14) of side and X to lever (13) be connected; Lever (13) mid point is fixing through anchor point II (15), and lever (13) two ends link to each other with responsive Vierendeel girder (12) through responsive transfer beams (9); Responsive Vierendeel girder (12) links to each other with anchor point I (8) through the folded beam I (6) at two ends; The responsive broach that is fixed on the responsive Vierendeel girder (12) constitutes responsive broach to (11) with the quiet broach that is fixed on the responsive detecting electrode (10), to accomplish the capacitance detecting of sensitive direction; Said folded beam II (14) is m0 with lever (13) tie point apart from anchor point II (15), and anchor point II (15) is m1 apart from the distance of lever (13) end points.
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| CN201110205937A CN102313545A (en) | 2011-07-21 | 2011-07-21 | Completely-symmetric lever-amplification capacitive micromechanical gyro |
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| CN201110205937A CN102313545A (en) | 2011-07-21 | 2011-07-21 | Completely-symmetric lever-amplification capacitive micromechanical gyro |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113532408A (en) * | 2021-09-13 | 2021-10-22 | 中国人民解放军国防科技大学 | Lever structure-based in-plane sensitive axis micromechanical gyroscope |
| CN113790736A (en) * | 2021-08-03 | 2021-12-14 | 北京自动化控制设备研究所 | Installation error angle compensation method and circuit of dynamically tuned gyroscope |
| CN114264293A (en) * | 2021-11-22 | 2022-04-01 | 陕西华燕航空仪表有限公司 | High-vibration-resistance type full-symmetry MEMS gyroscope sensor structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113790736A (en) * | 2021-08-03 | 2021-12-14 | 北京自动化控制设备研究所 | Installation error angle compensation method and circuit of dynamically tuned gyroscope |
| CN113790736B (en) * | 2021-08-03 | 2023-10-13 | 北京自动化控制设备研究所 | Power tuning gyroscope installation error angle compensation method and circuit |
| CN113532408A (en) * | 2021-09-13 | 2021-10-22 | 中国人民解放军国防科技大学 | Lever structure-based in-plane sensitive axis micromechanical gyroscope |
| CN114264293A (en) * | 2021-11-22 | 2022-04-01 | 陕西华燕航空仪表有限公司 | High-vibration-resistance type full-symmetry MEMS gyroscope sensor structure |
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