CN102306583A - Miniature pressure switch with three-dimensional multidirectional sensitivity property - Google Patents
Miniature pressure switch with three-dimensional multidirectional sensitivity property Download PDFInfo
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- CN102306583A CN102306583A CN201110253832A CN201110253832A CN102306583A CN 102306583 A CN102306583 A CN 102306583A CN 201110253832 A CN201110253832 A CN 201110253832A CN 201110253832 A CN201110253832 A CN 201110253832A CN 102306583 A CN102306583 A CN 102306583A
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Abstract
The invention, which belongs to the micro-electro-mechanical system technology field, relates to a miniature pressure switch with a three-dimensional multidirectional sensitivity property. According to the invention, a movable electrode comprises an annular movable electrode and a horizontal beam, wherein the annular movable electrode is connected with an S-shaped horizontal spring and is hung above a substrate by a spring supporting seat. A fixed electrode is in an L shape, wherein one part of the L shape is in parallel to the substrate and the other part of the L shape is perpendicular to the substrate. There is a vertical gap between the part of the fixed electrode and the annular movable electrode, wherein the part is in parallel to the substrate and there is a horizontal gap between the part of the fixed electrode and the annular movable electrode, wherein the part is perpendicular to the substrate. According to the invention, the switch is constructed by a movable electrode and a fixed electrode, wherein the movable electrode is supported by a spring; and multidirectional micro-contact pressure effects can be simultaneously detected only by utilizing one miniature switch device; moreover, a force source direction can be substantially analyzed according to conduction conditions of four pairs of electrodes, so that function of the switch is increased and system package in an integrated circuit of the switch becomes convenient.
Description
Technical field
the present invention relates to a kind of microswitch, are specifically related to a kind of miniature contact pressure switch of three-dimensional multidirectional-sensitive.Belong to micro-electromechanical system field.
Background technology
are that the miniature contact pickup of basic engineering and manufacturing is because of it has that volume is little, cost is low and advantage such as batch process receives much concern with the micro electro mechanical system (MEMS) technology.Micro-machinery switch in the past; Because of its processing method is based on micro electro mechanical system (MEMS) technology; The preparation of switch is to be that etching or plating are carried out in the basis with silicon under a lot of situation; Through dry etching SOI (Silicon on Insulator) but silicon chip obtain can be unsettled the horizontal movement structure, and utilize the sidewall inclined-plane etch to realize the turn-on power loss of switch, this is the micro-machinery switch that horizontal pressure force drives; And, then can realize the micro mechanical pressure switch of vertical drive through plating on monocrystal silicon substrate and sacrifice layer process technology.
The most forms that adopt cantilever beam to remove another fixed electrode of contact-impact as electrode of the design of
micromechanics pressure electrical switch; The switching device of making is generally single direction power and drives; When responsive multi-direction external force of needs while is done the time spent; Can only unite and use a plurality of switches, not only cause the quantitative waste of switching device, and made the encapsulation of system integrated more difficult, complicated.Thereby; How to use few switching device quantity to respond to, detect as far as possible from multidirectional external force effect; It is the direction that people make great efforts that the enough responsive three-dimensional multidirectional external force of energy collecting acts on a kind of microswitching device always, and it is also considerably less to propose the electrical switch design of this responsive three-dimensional multidirectional external force effect at present.
are found through the literature search to prior art; Vincent De Sars etc. have delivered the paper that is entitled as " A practical approach to the design and control of active endoscopes " (" for a practical approach of the design and the control of movable endoscope ") at " Mechatronics " (" electromechanical integration " 2010 20 phase 251-264 page or leaf), this paper mainly is to discuss and improve to present endoscopic use controlled.And very importantly; Paper proposes; Make the endoscope of mentioning in the literary composition can reach the purpose of automatic control, but also need cooperate the pressure switch of multidirectional-sensitive to control, however the pressure switch of the present this multidirectional-sensitive ripe design of neither one also.
Summary of the invention
the objective of the invention is to overcome the deficiency of prior art; A kind of micro pressure switch of three-dimensional multidirectional-sensitive is provided; Make whole micro pressure switch can be simultaneously responsive from the little touching on level and all directions such as vertical, and its movable electrode and fixed electrode are had contact effect preferably.
the present invention realize through following technical scheme, the present invention includes: substrate, movable electrode, fixed electrode, horizontal spring and spring supporting seat; Described movable electrode comprises annular movable electrode and two parts of horizontal beam, and annular movable electrode is connected with snakelike horizontal spring, and unsettled above substrate by the spring supporting seat; Described fixed electrode is fixed in the substrate, be positioned at substrate around, the spring supporting seat is fixed on substrate, is positioned at substrate central authorities; Described fixed electrode is L shaped, and a L shaped part is parallel to substrate, another part perpendicular to substrate, and wherein fixed electrode is parallel to base part and annular movable electrode has the down suction, and fixed electrode has horizontal clearance perpendicular to base part and annular movable electrode.
During the micro pressure switch of the contact force that
reach setting threshold when the external world along the negative surface normal directive effect of horizontal beam in three-dimensional multidirectional-sensitive of the present invention; Movable electrode will touch the part that fixed electrode is parallel to substrate, thereby realize the connection to external circuit in vertical direction; The contact force that reaches setting threshold when the external world is when being parallel to dielectric base upper surface any direction and acting on above-mentioned electrical switch; The mass electrode will touch the part of fixed electrode perpendicular to substrate; Thereby on level is multi-direction, realize connection, and through can know the direction in extraneous contact force source to the analysis of the electrode connected to external circuit; When the contact force in the external world is not to be entirely parallel or during vertical substrate surface; The vertical component of extraneous power and horizontal component can make movable electrode move in a manner described; When extraneous component of force reaches threshold value, can make movable electrode contact the connection that realizes external circuit with fixed electrode.
described substrate can be insulating material preparations such as quartz, glass.
It is inner that the horizontal beam of
said movable electrode partly is positioned at annular movable electrode, and its upper surface is parallel with annular movable electrode upper surface, and whole and annular movable electrode is an one.
described movable electrode is the body structure that forms through metals such as repeatedly lamination electronickelling or copper, and horizontal beam partly has outer crossed circular type and two kinds of structures of interior crossed circular type.
described fixed electrode is the body structure that forms through metals such as repeatedly lamination electronickelling or copper, and its shape of cross section is L shaped, and vertical view is shaped as sector structure, is divided into being parallel to base part and perpendicular to two parts of base part.
In
described fixed electrode; Directly link to each other in base part with equality perpendicular to base part; Difference has monolithic devices, one-sided type, three kinds of structures of bilateral type in the position of substrate because of electrode, and the lateral edges of one-sided type structure and the edge that is parallel to the base part electrode are on same straight line; The bilateral edge of bilateral type structure respectively with the both sides of the edge that are parallel to the base part electrode on same straight line.
described horizontal spring is the snakelike body structure of multiturn that forms through metals such as repeatedly lamination electronickelling or copper, every section circular arc all with the concyclic heart of spring supporting seat.
described spring supporting seat is the circular cylindrical shape structure that forms through metals such as repeatedly lamination electronickelling or copper.
the present invention is the basis with the MEMS process technology, adopts the method for on dielectric base such as quartz or glass, repeatedly not disturbing lamination to electroplate whole construction of switch mutually under the room temperature to make.The present invention is under the effect of the little touch in the external world, and little touch drives the unsettled movable electrode motion of serpentine spring, and when little touch reached certain threshold value, movable electrode touched fixed electrode at regular intervals with it, realizes the conducting to circuit.And when extraneous little touch was eliminated or is decreased to less than setting threshold, fixed electrode was again by springs return, thus realization closing to external circuit.
the present invention is directed in the past, and micromechanics pressure electrical switch is merely the driving of folk prescription outward force; In the responsive multi-direction external force of needs, can only use a plurality of switches to detect multidirectional Office of Foreign Affairs; Caused switching device quantitatively waste and increased problems such as system in package cost; Proposed a kind ofly to have serpentine spring, by the spring-supported movable electrode of snake type, be divided into and be parallel to base part and perpendicular to the little contact pressure electrical switch of three-dimensional multidirectional-sensitive of the fixed electrode of base part; Only use a microswitching device can detect simultaneously from multidirectional little contact pressure effect; And the conducting situation through to four pairs of electrodes can roughly be analyzed the source direction of exerting oneself, and has increased the function of switch and has made things convenient for its system in package in integrated circuit.
Description of drawings
Fig. 1 is the micro pressure construction of switch sketch map of embodiment three-dimensional multidirectional-sensitive;
Fig. 2 is the micro pressure construction of switch vertical view of embodiment three-dimensional multidirectional-sensitive;
Fig. 3 is an embodiment movable electrode structural representation;
Fig. 4 is embodiment bilateral type fixed electrode structure and spring position sketch map;
Fig. 5 is embodiment one-sided type fixed electrode structure and spring position sketch map;
Fig. 6 is embodiment monolithic devices fixed electrode structure and spring position sketch map;
Fig. 7 is that embodiment adopts four spring structure sketch mapes.
Fig. 8 is that present embodiment movable electrode horizontal beam partly is the sketch map of interior crossed circular type structure.
Embodiment
elaborate to embodiments of the invention below in conjunction with accompanying drawing: present embodiment is being to implement under the prerequisite with technical scheme of the present invention; Provided detailed execution mode and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
The micro pressure sensor that the embodiment three-dimensional all-directional is responsive
are as shown in Figure 1, and present embodiment three-dimensional all-directional pressure sensors sensitive comprises: substrate 1, movable electrode (comprising annular movable electrode 2 and horizontal beam 3), fixed electrode (comprise be parallel to base part 4 and perpendicular to base part 5), horizontal spring 6, spring supporting seat 7.Fixed electrode has four pairs on substrate, wherein be parallel to base part 4 be positioned at annular movable electrode 2 under, be positioned at the inboard of annular water movable electrode 2 perpendicular to base part 5.Spring supporting seat 7 also in substrate 1, is positioned at substrate 1 center.Annular movable electrode 2 is connected by eight groups of horizontal springs 6, and unsettled above substrate 1 by spring supporting seat 7.Horizontal beam 3 is positioned at annular movable electrode 2 inboards and forms movable electrodes jointly with annular movable electrode 2.
In
present embodiment, the size of spring supporting seat 7 be radius be the 300-600 micron, highly for the 65-75 micron.
In
present embodiment; Horizontal spring 6 is the snakelike body structures of multiturn; Every section circular arc all with the concyclic heart of spring supporting seat, its live width be 25-50 micron, thickness be 25-40 micron, turn-to-turn apart from being the 25-50 micron, the radian of every section circular arc is 30 degree.
In
present embodiment; Movable electrode is divided into annular electrode 2 and 3 two parts of horizontal beam; Wherein annular electrode 2 is of a size of outer radius 1000-2000 micron, inside radius is 900-1800 micron, high 65-100 micron; Annular electrode 2 by horizontal spring 6 support unsettled substrate 1 be parallel to above the base part fixed electrode 4, and with the clearance distance that is parallel to base part fixed electrode 4 be the 20-30 micron; The outer crossed circular type structure of horizontal beam part is of a size of annulus inside radius 300-600 micron, outer radius is the 400-800 micron, and beam length is that 500-1000 micron, width are the 100-200 micron.
In
present embodiment, fixed electrode is divided into and is parallel to base part 4 and perpendicular to 5 two parts of base part, its whole shape of cross section is L shaped.Partial fixing electrode 4 sizes that are parallel to substrate are that inside radius is that 870-1740 micron, outer radius are that 970-1940 micron, fan-shaped radian are that 18-30 degree, thickness are 20 microns; Directly link to each other in base part fixed electrode 4 with equality perpendicular to base part fixed electrode 5; Be bilateral type structure perpendicular to base part fixed electrode 5 among the present embodiment figure; Size is that inside radius is that 800-1600 micron, outer radius are that the fan-shaped radian of 870-1740 micron, every side is that 5-11 degree, thickness are the 85-125 micron; The space radian is 8 degree, and is the 25-60 micron perpendicular to the horizontal clearance of base part fixed electrode 5 and annular electrode 2.
Fig. 2 is the vertical view of the micro pressure construction of switch of present embodiment three-dimensional multidirectional-sensitive.Can see perpendicular to having horizontal clearance between base part fixed electrode 5 and the annular electrode 2 from vertical view, and horizontal clearance is the 30-60 micron.
Fig. 3 is the structural representation of present embodiment movable electrode.Eight horizontal springs 6 link together annular movable electrode 2 with spring supporting seat 7.The bottom surface of the bottom surface of horizontal spring 5 and annular movable electrode 2 is in same plane, and the upper bottom surface of the upper bottom surface of horizontal spring 5 and spring supporting seat 7 is in same plane.
Sketch map when
Fig. 4 is present embodiment fixed electrode employing bilateral type structure.The shape of cross section of fixed electrode is L shaped, and vertical view is shaped as sector structure, is divided into being parallel to base part 4 and perpendicular to 5 two parts of base part.As shown in Figure 4, each fixed electrode perpendicular to base part 5 two little parts are arranged, lay respectively at the both sides of spring.The portion size that is parallel to substrate is that inside radius is that 870-1740 micron, outer radius are that 970-1940 micron, fan-shaped radian are that 18-30 degree, thickness are 20 microns.Perpendicular to the base part size is that inside radius is that 800-1600 micron, outer radius are that the fan-shaped radian of 870-1740 micron, every side is that 5-11 degree, thickness are the 85-125 micron, and the space radian is 8 degree.The bilateral edge of bilateral type structure respectively with the both sides of the edge that are parallel to the base part electrode on same straight line.
Fig. 5 is the sketch map of present embodiment fixed electrode when adopting one-sided type structure.Fixed electrode is divided into and is parallel to base part 4 and perpendicular to 5 two parts of base part.As shown in Figure 5, each fixed electrode be present in a side of spring perpendicular to 5 of base part.The portion size that is parallel to substrate is that inside radius is that 870-1740 micron, outer radius are that 970-1940 micron, fan-shaped radian are that 18-30 degree, thickness are 20 microns.Perpendicular to the base part size is that inside radius is that 800-1600 micron, outer radius are that 870-1740 micron, fan-shaped radian are that 5-11 degree, thickness are the 85-125 micron, and the lateral edges of one-sided type structure and the edge that is parallel to the base part electrode are on same straight line.
Sketch map when
Fig. 6 is present embodiment fixed electrode employing monolithic devices structure.As shown in Figure 6, have only when embodiment uses four spring structures, fixed electrode can adopt the monolithic devices structure.The shape of cross section of fixed electrode is L shaped, and vertical view is shaped as sector structure, is divided into being parallel to base part 4 and perpendicular to 5 two parts of base part.As shown in Figure 6, each fixed electrode be that perpendicular to base part 5 one distributes.The portion size that is parallel to substrate is that inside radius is that 870-1740 micron, outer radius are that 970-1940 micron, fan-shaped radian are that 18-30 degree, thickness are 20 microns.Perpendicular to the base part size is that inside radius is that 800-1600 micron, outer radius are that 870-1740 micron, fan-shaped radian are that 18-30 degree, thickness are the 85-125 micron.The bilateral edge of monolithic devices structure respectively with the both sides of the edge that are parallel to the base part electrode on same straight line.
Fig. 7 is the structural representation of present embodiment horizontal spring when being four springs.Horizontal spring 6 is the snakelike body structures of multiturn, every section circular arc all with the concyclic heart of spring supporting seat, its live width be 25-50 micron, thickness be 25-40 micron, turn-to-turn apart from being the 25-50 micron, the radian of every section circular arc is 30 degree.
Fig. 8 is that present embodiment movable electrode horizontal beam partly is the sketch map of interior crossed circular type structure.Its size annulus inside radius is that 400-800 micron, outer radius are the 500-1000 micron, and beam length is that 2000-4000 micron, width are the 100-200 micron.
in external circuit, one has four pairs of electrodes, and the electrode that wherein is connected to above-mentioned spring supporting seat 7 belows is a public pole, and four pairs of electrodes divide other other utmost point to be connected on respectively on four fixed electrodes 5.During the micro pressure switch of the contact force that reaches setting threshold when the external world along the negative surface normal directive effect of horizontal beam in three-dimensional multidirectional-sensitive of the present invention; Movable electrode will touch the part that fixed electrode is parallel to substrate, thereby realize the connection to external circuit in vertical direction; The contact force that reaches setting threshold when the external world is when being parallel to dielectric base upper surface any direction and acting on above-mentioned electrical switch, and the mass electrode will touch the part of fixed electrode perpendicular to substrate, thereby on level is multi-direction, realize the connection to external circuit.When the contact force in the external world is not to be entirely parallel or during vertical substrate surface; The vertical component of extraneous power and the acting in conjunction of horizontal component can make movable electrode move; When extraneous component of force reaches threshold value, can make movable electrode contact the connection that realizes external circuit with fixed electrode.And through can know the makeup in extraneous contact force source to the analysis of above-mentioned four pairs of whether conducting situation of electrode.Therefore; The present invention only use a micro pressure switch can be responsive from the little contact pressure on level and the vertical a plurality of directions; And can judge the makeup that analyzes the ambient pressure source, realize that the enough responsive three-dimensional multidirectional pressure of energy collecting acts on a kind of advantage of microswitching device.
above embodiment shows in detail and has described basic principle of the present invention, principal character and advantage of the present invention.The technical staff of the industry should understand, and the present invention is not restricted to the described embodiments, and the present invention also has various changes and modifications under the prerequisite that does not break away from spirit and scope of the invention, and these variations and improvement all fall in the scope of the invention that requires protection.The present invention requires protection range to be defined by appending claims and equivalent thereof.
Claims (10)
1. the micro pressure switch of a three-dimensional multidirectional-sensitive comprises: substrate, movable electrode, fixed electrode, horizontal spring and spring supporting seat; It is characterized in that: described movable electrode comprises annular movable electrode and two parts of horizontal beam, and annular movable electrode is connected with snakelike horizontal spring, and unsettled above substrate by the spring supporting seat; Described fixed electrode is fixed in the substrate, be positioned at substrate around, the spring supporting seat is fixed on substrate, is positioned at substrate central authorities; Described fixed electrode is L shaped, and a L shaped part is parallel to substrate, another part perpendicular to substrate, and wherein fixed electrode is parallel to base part and annular movable electrode has the down suction, and fixed electrode has horizontal clearance perpendicular to base part and annular movable electrode.
2. the micro pressure switch of three-dimensional multidirectional-sensitive according to claim 1 is characterized in that, described substrate is meant quartz or substrate of glass.
3. the micro pressure switch of three-dimensional multidirectional-sensitive according to claim 1; It is characterized in that; It is inner that the horizontal beam of said movable electrode partly is positioned at annular movable electrode, and its upper surface is parallel with annular movable electrode upper surface, and whole and annular movable electrode is an one.
4. according to the micro pressure switch of claim 1 or 3 described three-dimensional multidirectional-sensitives, it is characterized in that described annular movable electrode is of a size of outer radius 1000-2000 micron, inside radius is 900-1800 micron, high 65-100 micron.
5. according to the micro pressure switch of claim 1 or 3 described three-dimensional multidirectional-sensitives; It is characterized in that; Described movable electrode horizontal beam has outer crossed circular type and two kinds of structures of interior crossed circular type; When horizontal beam was outer crossed circular type structure, the annulus inside radius was that 300-600 micron, outer radius are the 400-800 micron, and beam length is that 500-1000 micron, width are the 100-200 micron; When horizontal beam was interior crossed circular type structure, the annulus inside radius was that 400-800 micron, outer radius are the 500-1000 micron, and beam length is that 2000-4000 micron, width are the 100-200 micron.
6. the micro pressure switch of three-dimensional multidirectional-sensitive according to claim 4 is characterized in that, described fixed electrode is that its shape of cross section is L shaped, and vertical view is shaped as sector structure, is divided into being parallel to base part and perpendicular to two parts of base part; The vertical interval that fixed electrode is parallel to base part and movable electrode is the 20-30 micron, be the 25-60 micron perpendicular to the level interval of base part and movable electrode.
7. according to the micro pressure switch of claim 1 or 6 described three-dimensional multidirectional-sensitives; It is characterized in that; In the described fixed electrode, being parallel to the base part size is that inside radius is that 870-1740 micron, outer radius are that 970-1940 micron, fan-shaped radian are that 18-30 degree, thickness are 20 microns.
8. according to the micro pressure switch of claim 1 or 6 described three-dimensional multidirectional-sensitives, it is characterized in that, in the described fixed electrode, directly link to each other in base part with equality that monolithic devices, one-sided type, three kinds of structures of bilateral type are arranged perpendicular to base part;
Wherein the monolithic devices physical dimension is that inside radius is that 800-1600 micron, outer radius are that 870-1740 micron, fan-shaped radian are that 18-30 degree, thickness are the 85-125 micron;
One-sided type physical dimension is that inside radius is that 800-1600 micron, outer radius are that 870-1740 micron, fan-shaped radian are that 5-11 degree, thickness are the 85-125 micron, and the lateral edges of one-sided type structure and the edge that is parallel to the base part electrode are on same straight line;
Bilateral type physical dimension is that inside radius is that 800-1600 micron, outer radius are that the fan-shaped radian of 870-1740 micron, every side is that 5-11 degree, thickness are the 85-125 micron; The space radian be 8 the degree, the bilateral edge of bilateral type structure respectively with the both sides of the edge that are parallel to the base part electrode on same straight line.
9. the micro pressure switch of three-dimensional multidirectional-sensitive according to claim 1; It is characterized in that; Described horizontal spring is the snakelike body structure of multiturn; Every section circular arc all with the concyclic heart of spring supporting seat, its live width be 25-50 micron, thickness be 25-40 micron, turn-to-turn apart from being the 25-50 micron, the radian of every section circular arc is 30 degree.
10. the micro pressure switch of three-dimensional multidirectional-sensitive according to claim 1 is characterized in that, described spring supporting seat is the circular cylindrical shape structure, its size be radius be the 300-600 micron, highly for the 65-75 micron.
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| CN110849508A (en) * | 2019-11-29 | 2020-02-28 | 上海交通大学 | Flexible pressure sensor based on discrete contact structure and preparation method thereof |
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