CN102297177B - Pneumatic servo actuator - Google Patents
Pneumatic servo actuator Download PDFInfo
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- CN102297177B CN102297177B CN 201110195143 CN201110195143A CN102297177B CN 102297177 B CN102297177 B CN 102297177B CN 201110195143 CN201110195143 CN 201110195143 CN 201110195143 A CN201110195143 A CN 201110195143A CN 102297177 B CN102297177 B CN 102297177B
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- guide rail
- air
- float guide
- bellows
- servo actuator
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Abstract
The invention relates to a pneumatic servo actuator, in particular to a pneumatic servo actuator which adopts a bellows as an actuating element and simultaneously is provided with a frictionless air floating guide rail, which belongs to the technical field of industrial automatic instruments and systems. The pneumatic servo actuator comprises the actuating element, the air floating guide rail, a displacement sensor, an object stage and a mechanism body; the actuating element is the bellows; the bellows is the actuating element of the pneumatic servo actuator, and the air floating guide rail comprises an air floating guide rail rotor and an air floating guide rail stator; the displacement sensor comprises a reading head and a grating ruler; the connection relationship is that: one end of the bellows is sealed and is connected with the air floating guide rail rotor, and the other end of the bellows is fixed on the mechanism body; a bellows air inlet hole is arranged on the mechanism body; the object stage is arranged on the air floating guide rail rotor; the bottom end of the air floating guide rail stator is fixed on the mechanism body; when the air floating guide rail works normally, the air floating guide rail rotor has frictionless motion; the grating ruler is fixed on the side surface of the object stage; and the reading head is fixed on one side of the mechanism body, and is over against the grating ruler.
Description
Technical field
The present invention relates to a kind of Pneumatic servo actuator, relate in particular to a kind of with bellows as executive component simultaneously with the Pneumatic servo actuator of friction-free air floating guide rail, belong to industrial process measurement and control instrument and systems technology field.
Background technique
The composition form of pneumatic servo system is as broad as long with general servo-system, and its links not necessarily is pneumatic entirely, but actuator must be pneumatic.In pneumatic servo system, the general normal employing piston type cylinder of actuator, main inner cavity pressure pushing piston motion during cylinder operation, but because the compressibility of gas and the impact of traditional cylinder interior piston and the factors such as inner core, bar and port frictional force, the strong nonlinearity and the low rigidity that have caused pneumatic servo system, realization is relatively more difficult to the Satisfactory Control of pneumatic servo system, and control accuracy is not high, so far in industrial application and immature.
Summary of the invention
The objective of the invention is to propose a kind of Pneumatic servo actuator for solve the problem of the frictional force that Pneumatic servo actuator exists in movement process.
To achieve these goals, the present invention is achieved through the following technical solutions:
A kind of Pneumatic servo actuator, it comprises executive component, air-float guide rail, displacement transducer, object table and mechanism body; Executive component is bellows; Bellows is the executive component of Pneumatic servo actuator, provides implementation capacity to Pneumatic servo actuator; Air-float guide rail is comprised of air-float guide rail mover and air-float guide rail stator, is used for eliminating the frictional force of Pneumatic servo actuator movement process; Displacement transducer is comprised of read head and grating scale, is the station acquisition device of Pneumatic servo actuator, for the Pneumatic servo actuator moving displacement being gathered and feeding back; Its annexation is: bellows one end is shut, and is connected with the air-float guide rail mover, and the other end is fixed on the mechanism body, and mechanism body is provided with the bellows inlet hole; Object table is installed on the air-float guide rail mover; The bottom of air-float guide rail stator is fixed on the mechanism body; When air-float guide rail worked, the air-float guide rail mover was without frictional movement; Grating scale is fixed on the side of object table; Read head is fixed on a side of mechanism body, and relative with grating scale;
Its working procedure is: open source of the gas, gas is through filter, one the tunnel passes into the gas of certain pressure and another road second reduction valve pass into certain pressure to bellows through inlet hole gas through the first reduction valve to air-float guide rail stator inlet hole, the air-float guide rail normal operation, bellows promotes air-float guide rail mover frictionless motion, drive is installed in object table on the air-float guide rail mover when moving together, read head can be read the scale variable quantity of the grating scale that moves with object table, and this variable quantity equals the displacement distance of object table.
Described line pipe preferable alloy material.
The gas pressure that described the first reduction valve passes into to air-float guide rail stator inlet hole is 0.3～0.6Mpa; The gas pressure that the second reduction valve passes into to bellows through inlet hole is 0～1.0Mpa.
Beneficial effect
The present invention contrasts prior art, has the following advantages:
1, by bellows being installed in an end of object table, so that Pneumatic servo actuator is not subjected to the impact of the non-linear factors such as frictional force in movement process; And bellows output displacement and incoming pressure are linear, easily control.
2, air-float guide rail forms one deck air film by the pressed gas of outside input between air-float guide rail stator and mover, make the air-float guide rail mover can be without friction, vibrationless smooth motion, thereby make Pneumatic servo actuator obtain higher kinematic accuracy and Location accuracy.
Description of drawings
Fig. 1 is the overall structure figure of Pneumatic servo actuator of the present invention;
Fig. 2 is the sectional structure chart of Pneumatic servo actuator of the present invention;
Fig. 3 is air-float guide rail structural drawing of the present invention;
Fig. 4 is the Pneumatic circuit of Pneumatic servo actuator of the present invention;
Fig. 5 is the connection diagram of VDC and grating scale in the Pneumatic servo actuator of the present invention;
Among the figure, 1-metal bellows, 2-inlet hole, 3-air-float guide rail mover, 4-air-float guide rail stator, 5-air-float guide rail stator inlet hole, 6-grating scale, 7-read head, 8-mechanism body, 9-object table, 10-filter, 11-source of the gas, the 12-the first reduction valve, the 13-the second reduction valve, 14-DC electrical source.
Embodiment
The present invention will be further described below in conjunction with drawings and Examples.
A kind of Pneumatic servo actuator in the present embodiment, its structure forms as shown in Figure 1, comprises metal bellows 1, air-float guide rail mover 3, air-float guide rail stator 4, grating scale 6, read head 7, mechanism body 8, object table 9.Wherein, end central authorities of metal bellows 1 are provided with inlet hole 2.Air-float guide rail mover 3 and air-float guide rail stator 4 form air-float guide rail, and air-float guide rail stator one side is provided with inlet hole 5.
The annexation of above-mentioned constituent elements is:
Read head 7 and grating scale 6 form displacement transducer, and grating scale 6 is fixed on the side of object table 9.Read head 7 is fixed on a side of mechanism body 8, and relative with grating scale 6, and DC electrical source 14 provides operating voltage 14 for read head 7;
When Pneumatic servo actuator was worked, source of the gas 11 produced supply gas pressure and passes through the inlet hole 2 of bellows 1 to the metal bellows air feed through pneumatic filter 10, a tunnel through the second reduction valve 13; Another road first reduction valve 12 is given the air-float guide rail air feed by 4 inlet hole 5 on the air-float guide rail stator.
Preferably, the pressure of metal bellows 1 work is the 0.5Mpa adjustable pressure, and the working pressure of air-float guide rail is 0.4MPa, and the operating voltage of displacement transducer is 5V.
Open source of the gas 11, gas is through filter 10, provides the pressure of 0.4MPa through the first reduction valve 12 to air-float guide rail, the air-float guide rail normal operation, and air-float guide rail mover 3 can frictionless motion.
Simultaneously, source of the gas 11 provides the adjustable pressure of 0.5MPa for the inlet hole 2 of metal bellows 1 through the second reduction valve 13, and DC electrical source 14 provides the operating voltage of 5V for displacement transducer read head 7.Metal bellows 1 inner chamber can extend when bearing air pressure, and drive air-float guide rail mover 3 and the object table 5 that is installed on the air-float guide rail mover 3 moves together, read head 7 is read the variable quantity with displacement transducer grating scale 6 scales of object table 9 motion, and namely the distance that moves of object table 9 is 1.797mm.
Regulate the second reduction valve 13, the pressure that changes input metal bellows 1 changes in the scope of 0～0.8Mpa, can obtain the corresponding displacement amount that displacement transducer records.
By said process, metal bellows 1 becomes displacement output with the pressure of input, and incoming pressure and output displacement are linear, as shown in Figure 5.This shows, in this course, avoided the disturbance of non-linear factor fully.
Claims (2)
1. a Pneumatic servo actuator is characterized in that: comprise executive component, air-float guide rail, displacement transducer, object table (9) and mechanism body (8); Executive component is bellows; Bellows is the executive component of Pneumatic servo actuator, provides implementation capacity to Pneumatic servo actuator; Air-float guide rail is comprised of air-float guide rail mover (3) and air-float guide rail stator (4), is used for eliminating the frictional force of Pneumatic servo actuator movement process; Displacement transducer is comprised of read head (7) and grating scale (6), is the station acquisition device of Pneumatic servo actuator, for the Pneumatic servo actuator moving displacement being gathered and feeding back;
Its annexation is: bellows one end is shut, and is connected with air-float guide rail mover (3), and the other end is fixed on the mechanism body (8), and mechanism body (8) is provided with bellows inlet hole (2); Object table (9) is installed on the air-float guide rail mover (3); The bottom of air-float guide rail stator (4) is fixed on the mechanism body; When air-float guide rail worked, air-float guide rail mover (3) was without frictional movement; Grating scale (6) is fixed on the side of object table (9); Read head (7) is fixed on a side of mechanism body, and relative with grating scale (6);
Its working procedure is: open source of the gas (11), gas is through filter (10), one the tunnel passes into gas for air-float guide rail stator inlet hole (5) through the first reduction valve (12), simultaneously, another road second reduction valve (13) passes into gas through inlet hole (2) to bellows, the air-float guide rail normal operation, bellows promotes air-float guide rail mover (3) frictionless motion, drive is installed in object table (9) on the air-float guide rail mover (3) when moving together, read head (7) can be read the scale variable quantity with the grating scale (6) of object table (9) motion, and this variable quantity equals the displacement distance of object table (9).
2. a kind of Pneumatic servo actuator according to claim 1, it is characterized in that: bellows is metal material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110195143 CN102297177B (en) | 2011-07-13 | 2011-07-13 | Pneumatic servo actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110195143 CN102297177B (en) | 2011-07-13 | 2011-07-13 | Pneumatic servo actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102297177A CN102297177A (en) | 2011-12-28 |
| CN102297177B true CN102297177B (en) | 2013-10-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110195143 Expired - Fee Related CN102297177B (en) | 2011-07-13 | 2011-07-13 | Pneumatic servo actuator |
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| Country | Link |
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| CN (1) | CN102297177B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110174047A (en) * | 2018-10-25 | 2019-08-27 | 山东理工大学 | A kind of back pressure type U-tube gas electric transducer |
| CN110076734A (en) * | 2019-05-20 | 2019-08-02 | 青岛理工大学 | Pneumatic bellows drive ultra-precise two-dimensional positioning platform |
| CN111120149A (en) * | 2019-12-13 | 2020-05-08 | 内蒙航天动力机械测试所 | Servo actuator stroke detection device |
| CN111895917B (en) * | 2020-08-19 | 2021-08-31 | 中国科学院力学研究所 | Method for detecting deformation of high-enthalpy-resistant gas medium compensator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5347914A (en) * | 1991-10-21 | 1994-09-20 | Matsushita Electric Industrial Co., Ltd. | Traverse apparatus |
| DE202005014215U1 (en) * | 2005-09-09 | 2006-03-09 | Morawski, Jerzy Henryk | Linear guide for transmitting of transverse forces for standard cylinders of all types has slide unit detachably connected to piston rod of standard cylinder by means of driver-angle piece |
| CN101275594A (en) * | 2007-03-31 | 2008-10-01 | 费斯托合资公司 | Fluid power arrangement |
| CN101290021A (en) * | 2008-06-10 | 2008-10-22 | 胡书彬 | Bellows power cylinder |
-
2011
- 2011-07-13 CN CN 201110195143 patent/CN102297177B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5347914A (en) * | 1991-10-21 | 1994-09-20 | Matsushita Electric Industrial Co., Ltd. | Traverse apparatus |
| DE202005014215U1 (en) * | 2005-09-09 | 2006-03-09 | Morawski, Jerzy Henryk | Linear guide for transmitting of transverse forces for standard cylinders of all types has slide unit detachably connected to piston rod of standard cylinder by means of driver-angle piece |
| CN101275594A (en) * | 2007-03-31 | 2008-10-01 | 费斯托合资公司 | Fluid power arrangement |
| CN101290021A (en) * | 2008-06-10 | 2008-10-22 | 胡书彬 | Bellows power cylinder |
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| CN102297177A (en) | 2011-12-28 |
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