CN102290951B

CN102290951B - Direct drive rotating device

Info

Publication number: CN102290951B
Application number: CN2011102508749A
Authority: CN
Inventors: 王敕; 杨宁
Original assignee: CHANGSHU AIKERUIS PACKAGING AUTOMATION EQUIPMENT CO LTD
Current assignee: Suzhou Aike Ruisi intelligent equipment Limited by Share Ltd
Priority date: 2011-08-29
Filing date: 2011-08-29
Publication date: 2012-11-21
Anticipated expiration: 2031-08-29
Also published as: CN102290951A

Abstract

The invention relates to a direct drive rotating device belonging to the technical field of semiconductor packaging equipment. The direct drive rotating device comprises a shell, a stator, a lower cover, a rotor, a bearing, a grating scale and a code reader, wherein the rotor consists of a magnet yoke and a permanent magnet. The direct drive rotating device is characterized in that a plurality of groups of first air holes are arranged on the wall of the shell and around the circumferential direction of the wall, the number of each group of first air holes is a pair, and cooling air joints are arranged on the first air holes in a matching way; a plurality of groups of second air holes are arranged on the stator and around the edge part of the circumferential direction of the stator; air passage grooves with a same group number are arranged on the edge part of one side of the lower cover, wherein the one side faces to the stator; and the first air holes, the second air holes and the air passage grooves are mutually communicated. According to the direct drive rotating device disclosed by the invention, a coil winding of the stator is prevented from being heated and even burned by reducing coil winding, the requirement for high-speed rotation of a direct drive motor is met, the trouble of pollution caused by leakage is prevented, structure is simplified, volume is reduced, the influence of an external environment is prevented from being suffered, and the rigidity of the rotor is beneficial to enhance.

Description

Directly drive whirligig

Technical field

The invention belongs to the semiconductor packaging device technical field, be specifically related to a kind of whirligig that directly drives

Background technology

above mentioned directly drives the abbreviation that whirligig is direct drive-type whirligig, this device order about need not when load rotatablely moves by means of as transition member such as driving-belt and drive etc.

such as industry the reason of knowledge; Semiconductor packaging process has extremely harsh requirement, the for example whether good sealed in unit yields and the operating efficiency of being directly connected to of the positioning accuracy that horizontally rotates motion of the swing arm of semiconductor packaging device and frequency response characteristic to the encapsulation equipment.Along with people's improves constantly semiconductor packages efficient, and the drive source that more and more requires to order about the swing arm campaign must satisfy characteristics such as high frequency sound, high position precision and big torque.

are previous; Production of semiconductor products manufacturer generally adopts the swing arm of driven by servomotor semiconductor packaging device; Though servomotor has the high strong point of output speed; But moment is little is its shortcoming, therefore need the little moment of the high speed of servomotor be converted into the big moment output of low speed usually by means of variable transmission mechanism.And variable transmission mechanism has not only increased the moment of inertia of load; And reduced the frequency response characteristic of system; The error of variable transmission mechanism is unfavorable for guarantee system reliability and stability owing to parts simultaneously, because can impact to the positioning accuracy of swing arm.Directly drive whirligig and can remedy the said shortcoming of servomotor.

are no lack of in disclosed Chinese patent document and are seen in about directly driving the technical scheme of whirligig; The typical integral type door machine direct driving device that provides like a kind of direct driving motor and the publication No. CN102020178A of publication No. CN101752973A recommendation; Last in these two patent application schemes is that the vibration that exists of the direct driving motor to known washing machine as household electrical appliance is big, trouble is lost steadily and installed in operation and proposes; Technical essential is that rotor is located at outside the stator; The stator core of stator constitutes 36 groove structures, and the magnetic shoe number of rotor is designed to 42 uses and form 42 utmost points.The patent application scheme in back proposes to elevator door-motor.These two patent application schemes referential technical meaning of tool not for the direct driving motor of the semiconductor packaging device of high frequency sound and high position precision.

more typical a kind of direct drive turning device of introducing like CN10055809C; Walk to the alleged technique effect of the 3rd page of the 9th row and can be used as semiconductor packaging device and use though this scheme has its Instructions Page 2 last 1; But still have following drawback: one of which is difficult to play comprehensive cooling effect to iron core (being stator) that coil is set and to the lower cover that is used to limit iron core, because this patent scheme is on housing, to offer the installation seam; The refrigeration machine that will be used to cool off is connected with a interface on seam is installed; Fuel tank is connected with another interface on seam is installed, with the circulation that forms cooling fluid (specifically can referring to the 5th page of the 2nd to the 4th row of specification), it is thus clear that; The cooling of patent instruction is a surface cool; Be again single cooling, so-called surface cool is the cooling of the shell wall of housing, and so-called single cooling is and only housing parts is cooled off; Thereby deficiency so that the iron core temperature effectively reduce, so when long-time the use, undermine the anxiety of coil because of temperature rise is too high; Its two, the risk that had both existed cooling fluid to leak is followed again to leak because of cooling fluid to cause pollution risk, because the coolant of this patent instruction is a liquid, more properly says to be cold oil (specifically can referring to the 5th page of the 1st capable described fuel tank of specification); Its three, cooling device complex structure and investment are big, especially can cause bulkyization of whole direct drive turning device, because patent need be equipped with refrigeration machine and fuel tank.

in addition; The drawback that also exists grating chi (patent is claimed contactless accurate circle grating) and encoder (patent is claimed contactless read head) to damage easily; Because it is with anti-extraneous invasion ability or claims that the comparatively fragile grating chi and the encoder of ability of influence reveals naked setting, specifically can go referring to the Instructions Page 3 of this patent last two.Again; The patent plan hard is guaranteed the rotor rigidity of (patent is claimed direct drive motor rotor); Although what it adopted is high accuracy and high rigidity major diameter unilateral bearing (the 4th page of the 4th row of specification); And this bearing is difficult to obtain from commercially available channel because of belonging to specific bearing, in addition rotor is adopted stay bolt and the bearing inner race comparatively trouble that is connected not only, and lose the compactness of structure with succinctly.

In view of above-mentioned prior art, be necessary to improve, to this, the applicant has made good try, and the technical scheme that will introduce below produces under this background

Summary of the invention

top priority of the present invention be to provide a kind of help to housing, stator core and in order to the lower cover that limits stator core comprehensively cooling and use reduce temperature rise effectively so that avoid the coil scaling loss, help preventing because of coolant leak cause pollute trouble, be of value to simplified structure saving investment use embody economy directly drive whirligig.

another task of the present invention be to provide a kind of help to make grating chi and encoder be able to reliably protecting and use avoid suffering external environment influence directly drive whirligig.

another task of the present invention be to provide a kind of bearing to be provided with rationally to use improve rotor rigidity directly drive whirligig.

Top priority of the present invention is accomplished for embodying in ; Technical scheme provided by the invention is: a kind of whirligig that directly drives; The rotor, bearing, grating chi and the code reader that comprise the shell with bearing pedestal and stator container cavity, stator, lower cover, constitute by yoke and permanent magnets with rotor mating cavity; Stator is between shell and lower cover, and shell, stator and lower cover three be fixed together, and rotor is fixed through the bearing outer ring of its yoke and bearing and corresponding to described rotor mating cavity; The bearing inner race of bearing and described bearing pedestal are fixed; Be characterised in that: on the shell wall of described shell and around the circumferencial direction of shell wall, offer plural groups first pore with the interval state, the quantity of every group first pore is a pair of, and on each first pore, is equipped with a cooling air joint; On described stator and offer that quantity equates with the quantity of said first pore with the interval state and corresponding plural groups second pore in position around the edge of the circumferencial direction of stator; Offer the air flue groove that quantity equates with the group number of second pore at described lower cover towards the edge of a side of said stator and in the position corresponding to described second pore, first pore, second pore and air flue groove communicate with each other.

are for embodying another task of the present invention of accomplishing; Technical scheme provided by the invention is: described bearing pedestal has a bearing pedestal chamber; In this bearing pedestal chamber, constitute a code reader mounting panel, described code reader is arranged on the code reader mounting panel; The yoke of described rotor has a yoke chamber; This yoke chamber is towards said shell; And the central authorities in this yoke chamber constitute an axle bed cover; Put at axle bed and to be fixed with a grating chi fixed disk, described grating chi is fixed on the side of this grating chi fixed disk towards said code reader, and corresponding with code reader.

for embody accomplishing another task of the present invention, technical scheme provided by the invention is: described bearing has stacked against each other a pair of, and this is an angular contact bearing to bearing.

are in a concrete embodiment of the present invention; When described shell, stator and lower cover are fixed to one another link together after; Described first pore overlaps with described second pore each other, and described air flue groove overlaps with second pore.

in another concrete embodiment of the present invention, the position, aperture of described first pore is provided with the aperture matching thread, and described cooling air joint has screw thread and connects end, and screw thread connects end and connects with aperture matching thread screw thread.

are in another concrete embodiment of the present invention; Bottom in described yoke chamber is provided with pressure ring under the bearing; And on the end face of a side of said shell, be equipped with a bearing upper press ring in yoke; This bearing upper press ring and end face are fixed, and described bearing is between the upper and lower pressure ring of bearing.

In another concrete embodiment of the present invention, described stator container cavity is formed between the outer wall and described shell wall of said bearing pedestal .

also have among the concrete embodiment of the present invention, on the outer wall in described yoke chamber and around the circumferencial direction of this outer wall, constitute the permanent magnets groove, and described permanent magnets is embedded in the permanent magnets groove.

technical scheme provided by the invention is owing to offered plural groups first pore on the shell wall of shell; On stator, offered corresponding and second pore that communicates and the group number equates and offered the air flue groove that communicates with second pore and equate covering down with the group number of second pore with first pore; Thereby under the effect of cooling air joint, make and respectively organize first, second pore and become cooling circuit with the air flue groove shaped; Help to make shell, stator and lower cover to cool off comprehensively; Reduce temperature rise effectively and avoid the coil windings of stator to generate heat and even scaling loss, ensure the high speed rotating requirement of direct driving motor, owing to abandoned the liquid medium cooling in the prior art; Cause the trouble of pollution in case therefore can avoid leaking, and help simplified structure and reduced volume; Code reader and grating chi are separately positioned in shell and the rotor, can play the desirable effect of protecting of covering, avoid suffering external environment influence; Pair of bearings is stacked relatively, help improving the rigidity of rotor.

Description of drawings

Fig. 1 is the embodiments of the invention structure chart.

Fig. 2 is an application examples sketch map of the present invention.

Fig. 3 is the experiment test figure that directly drives whirligig provided by the invention.

Fig. 4 is local data's curve chart of Fig. 3.

Embodiment

can be expressly understood technical spirit of the present invention and beneficial effect more for the auditor that the makes Patent Office especially public; The applicant general elaborates with the mode of embodiment below; But the description to embodiment all is not the restriction to the present invention program, any according to the present invention design done only for pro forma but not substantial equivalent transformation all should be regarded as technical scheme category of the present invention.

Fig. 1 is asked for an interview in ; Provided and constituted the shell 1 that the present invention directly drives whirligig; This shell 1 also can be referred to as loam cake; Constitute bearing pedestal 11 towards the middle section of a side of the following lower cover that also will describe 3 with direct or indirect mode at this shell 1, alleged here direct mode is meant bearing pedestal 11 and shell 1 one manufacturing, and alleged here indirect mode is meant fixing with shell 1 again after bearing pedestal 11 independent the making; No matter therefore adopt which kind of mode, both are equivalent.In the present embodiment, after bearing pedestal 11 independent making, fixing with shell 1 through one group of dog screw 112.The bearing pedestal chamber 111 of bearing pedestal 11 has a code reader mounting panel 1111, on this code reader mounting panel 1111, is fixed with a code reader 7.Between the outer wall of bearing pedestal 11 and the shell wall 13 of shell 1 (inwall of shell wall 13), constitute stator container cavity 12.Preferably, the wiring board 71 usefulness screws 711 of code reader 7 are fixed with aforesaid code reader mounting panel 1111.

The stator 2 that provide is fixed together with lower cover 3 and aforesaid shell 1; Because the structure of stator 2 belongs to known technology; And the version of the winding coil 23 of stator 2 also belongs to known technology, so the applicant no longer gives unnecessary details it.In the present embodiment, stator 2 is placed between shell 1 and the lower cover 3.By shown in Figure 1; The spaced apart shell fixing hole 14 that is provided with in the edge of shell 1; The spaced apart stator fixing hole 24 that is provided with in the edge of stator 2; And offering lower cover fixing hole 32 in the edge of lower cover 3, shell fixing hole 14, stator fixing hole 24 and lower cover fixing hole 32 correspond to each other, and are penetrated successively in shell fixing hole 14, stator fixing hole 24 and the lower cover fixing hole 32 by bolt 141 shell 1, stator 2 and lower cover 3 threes are fixed together.Wherein, lower cover fixing hole 32 is a screwed hole.

are as the technical essential of technical scheme provided by the invention: on the shell wall 13 of shell 1 and around the circumferencial direction of shell wall 13, offer plural groups first pore 131 with the interval state; The quantity of every group first pore 131 is a pair of; Be designed with aperture matching thread 1311 (internal thread) at the position, aperture of each first pore 131, and on each first pore 131, be fixed with a cooling air joint 8 by means of aperture matching thread 1311.By shown in Figure 1, cooling air joint 8 has a screw thread and connects end 81, connects end 81 by this screw thread and with cooperating of aperture matching thread 1311 cooling air joint 8 is fixed on the housing 1 reliably.

again; Offer plural groups second pore 22 in the edge of stator 2 and around the circumferencial direction of stator 2; The group number of second pore 22 equates with the group number of aforesaid first pore 131; The position is corresponding, and the quantity of every group second pore 22 is a pair of (promptly two).

and, offer a plurality of air flue grooves 31 at lower cover 3 towards the edge of a side of stator 2 and around the circumferencial direction of lower cover 3, the quantity of air flue groove 31 equates with the group number of aforesaid second pore 22, and the position is corresponding.

are a time-out when by aforesaid bolt 141 shell 1, stator 2 and lower cover 3 being fixedly connected, and then aforesaid first, second pore 131,22 overlaps, and aforesaid air flue groove 31 overlaps with second pore 22.Because each group first, second pore 131,22 and air flue groove 31 is able to form the turnover loop of a cooling air, so first, second pore 131,22 of plural groups and a plurality of air flue grooves 31 have just constituted the turnover air circuit of a plurality of cooling airs.In the present embodiment; Though illustrated the group number of aforesaid first, second pore 131,22 respectively to have four; And air flue groove 31 has four; But obviously should not receive the restriction of this quantity, any increase or the measure that reduces first, second pore 131,22 and air flue groove 31 all should be regarded as equivalence and change, and promptly still belong to the present invention program's protection range.

are according to general knowledge; Aforesaidly organize with each that one of them cooling air joint 8 in a pair of cooling air joint 8 that one of them first pore 131 in first pore 131 connects is connected with the blowing plant pipeline and, and another cooling air joint 8 is as exhaust joint as inlet suction port.The outside air that is used to cool off gets into one first pore 131 through a cooling air joint 8, gets into air flue groove 31 through one second pore 22, discharges through another second pore 22 and another first pore 131 and another cooling air joint 8 again.

are asked for an interview Fig. 2 and are continued to combine Fig. 1; Rotor 4 is made up of yoke 41 and permanent magnets 42; Yoke 41 has a yoke chamber 411; Extend in the central authorities in this yoke chamber 411 and towards a side of shell 1 and to constitute axle bed cover 4111; On this axle bed cover 4111, be installed with a grating chi fixed disk 4112, towards a side of aforesaid code reader mounting panel 1111 grating chi 6 be set at this grating chi fixed disk 4112, grating chi 6 and code reader 7 corresponding and and code reader 7 between maintain the gap that is about 0.4-0.6 ㎜.Be provided with pressure ring 4113 under the bearing in the bottom in yoke chamber 411; And on the end face 412 of a side of shell 1, be fixed with a bearing upper press ring 413 through screw 4131 in yoke 41; On the outer wall in yoke chamber 411, constitute permanent magnets groove 414; Permanent magnets 42 is mounted in the permanent magnets groove 414, and in the rotor mating cavity 21 of stator 2 with aforesaid winding coil 23 corresponding (Fig. 2 shows).

rotor 4 is nested with on the bearing outer ring 51 of bearing 5; Inwall and the bearing outer ring 51 of more properly saying the yoke chamber 411 of yoke 41 overlap solid; And the bearing inner race 52 of bearing 5 is fixed on the aforesaid bearing pedestal 11 (Fig. 2 shows); And bearing 5 is at the upper and lower pressure ring of aforesaid bearing 413, between 4113, promptly limited on 413 pairs of bearings 5 of upper press ring.

aforesaid bearing 5 has a pair of, and this is oppositely arranged bearing 5, promptly back-to-back folded establishing, and this is angular contact bearing to bearing, pair of bearings so is provided with can significantly strengthen the rigidity that rotor 4 promptly strengthens yoke 41.

preferably are fixed with an output shaft 4114 with the flat key fixed form by shown in Figure 2 on the axle bed cover 4111 in the yoke chamber 411 of aforesaid yoke 41, and output shaft 4114 is connected with pivoted arm device 9.

are asked for an interview Fig. 3 and Fig. 4 and are still combined Fig. 1 and Fig. 2; The applicant tests structure of the present invention under secrecy provision, and the driving voltage of direct driving motor is 230V, adopts current loop control; The number of divisions of code reader 7 is 500,000 pulse/commentaries on classics; The position of rotor 4 is 50ms from the adjustment time of 0 ° of step to 90 °, and steady-state error is 0.00072 °, and line of response is by Fig. 2 and Fig. 3 signal.Can know that from experiment permanent-magnet synchronous direct driving motor provided by the invention can satisfy in the semiconductor high speed packaging technology driving requirement to aforesaid pivoted arm device 9.

in sum, cooling when the present invention program can embody shell 1, stator 2 and lower cover 3; Code reader 7 and grating chi 6 covered protect setting; With pair of bearings 5 back-to-back stacked (being oppositely arranged), thereby overcome the shortcoming in the prior art, reached goal of the invention objectively and embodied the described technique effect of applicant.

Certainly, above-mentionedly being merely preferred embodiment of the present invention, is not to be used for limiting practical range of the present invention, and promptly every equivalence of doing according to the content in the claim of the present invention changes and modifies, and all should be regarded as the present invention program's technological category

Claims

1. A kind of whirligig that directly drives; The rotor (4), bearing (5), grating chi (6) and the code reader (7) that comprise have bearing pedestal (11) and the shell (1) of stator container cavity (12), stator (2), lower cover (3), constitute by yoke (41) and permanent magnets (42) with rotor mating cavity (21); Stator (2) is positioned between shell (1) and the lower cover (3); And shell (1), stator (2) and lower cover (3) three are fixed together; Rotor (4) is fixing and corresponding to described rotor mating cavity (21) through the bearing outer ring (51) of its yoke (41) and bearing (5); The bearing inner race (52) of bearing (5) is fixing with described bearing pedestal (11); It is characterized in that: go up and offer plural groups first pore (131) around the circumferencial direction of shell wall (13) with the interval state at the shell wall (13) of described shell (1), the quantity of every group first pore (131) is a pair of, and on each first pore (131), is equipped with a cooling air joint (8); Go up and offer that quantity equates with the quantity of said first pore (131) and corresponding plural groups second pore in position (22) with the interval state at described stator (2) around the edge of the circumferencial direction of stator (2); Offer the air flue groove (31) that quantity equates with the group number of second pore (22) at described lower cover (3) towards the edge of a side of said stator (2) and in the position corresponding to described second pore (22), first pore (131), second pore (22) and air flue groove (31) communicate with each other, Described bearing pedestal (11) has a bearing pedestal chamber (111), in this bearing pedestal chamber (111), constitutes a code reader mounting panel (1111), and described code reader (7) is arranged on the code reader mounting panel (1111); The yoke (41) of described rotor (4) has a yoke chamber (411); This yoke chamber (411) is towards said shell (1); And the central authorities in this yoke chamber (411) constitute an axle bed cover (4111); On axle bed cover (4111), be fixed with a grating chi fixed disk (4112), described grating chi (6) is fixed on the side of this grating chi fixed disk (4112) towards said code reader (7), and corresponding with code reader (7)

2. whirligig that directly drives according to claim 1, it is stacked against each other a pair of to it is characterized in that described bearing (5) has, and this is an angular contact bearing to bearing (5).

3. whirligig that directly drives according to claim 1; It is characterized in that after described shell (1), stator (2) and fixed to one another the linking together of lower cover (3); Described first pore (131) overlaps with described second pore (22) each other, and described air flue groove (31) overlaps with second pore (22).

4. whirligig that directly drives according to claim 1; The position, aperture that it is characterized in that described first pore (131) is provided with aperture matching thread (1311); Described cooling air joint (8) has screw thread and connects end (81), and screw thread connects end (81) and connects with aperture matching thread (1311) screw thread.

5. whirligig that directly drives according to claim 1; It is characterized in that being provided with pressure ring under the bearing (4113) in the bottom in described yoke chamber (411); And on the end face (412) of a side of said shell (1), be equipped with a bearing upper press ring (413) in yoke (41); This bearing upper press ring (413) is fixing with end face (412), and described bearing (5) is positioned between the upper and lower pressure ring of bearing (413,4113).

6. whirligig that directly drives according to claim 1 is characterized in that described stator container cavity (12) is formed between the outer wall and described shell wall (13) of said bearing pedestal (11).

7. whirligig that directly drives according to claim 1; It is characterized in that on the outer wall in described yoke chamber (411) and constitute permanent magnets groove (414) that described permanent magnets (42) is embedded in the permanent magnets groove (414) around the circumferencial direction of this outer wall.