CN102290627B - Broadband low-loss passive balun on chip having laminated winding structure - Google Patents
Broadband low-loss passive balun on chip having laminated winding structure Download PDFInfo
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- CN102290627B CN102290627B CN 201110163976 CN201110163976A CN102290627B CN 102290627 B CN102290627 B CN 102290627B CN 201110163976 CN201110163976 CN 201110163976 CN 201110163976 A CN201110163976 A CN 201110163976A CN 102290627 B CN102290627 B CN 102290627B
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- 238000004804 winding Methods 0.000 title abstract 3
- 239000002184 metal Substances 0.000 claims abstract description 31
- 229910052751 metal Inorganic materials 0.000 claims abstract description 31
- 238000005452 bending Methods 0.000 claims description 17
- 239000004020 conductor Substances 0.000 claims description 15
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 claims description 10
- 238000003475 lamination Methods 0.000 claims description 6
- 238000003780 insertion Methods 0.000 abstract description 6
- 230000037431 insertion Effects 0.000 abstract description 6
- 230000001808 coupling effect Effects 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 241000193935 Araneus diadematus Species 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
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Abstract
The invention discloses a broadband low-loss passive balun on chip having a laminated winding structure. The balun on chip is provided with three layers of metal conducting wires. The metal conducting wires in a first layer are secondary conducting wires, the metal conducting wires in a second layer are primary conducting wires and the metal conducting wires in a third layer are ground wires. U-shaped continuous bent winding structures are formed between the heads and tails of the conducting wires of each layer. The geometrical shapes of all U-shaped bends are completely consistent. The U-shaped bends are broken from midpoints between the heads and tails of the secondary conducting wires in the first layer to form left and right discontinuous U-shaped bend sections. Single-end signals of an unbalanced end are connected with the heads of the primary conducting wires. The tails of the primary conducting wires are connected to the ground wires. The heads and tails of the secondary conducting wires are all connected with the ground wires. Breakpoints of the conducting wires in the same sections with the heads of the secondary conducting wires are normal phase signal output ends, and the breakpoints of the conducting wires in the same sections with the tails of the secondary conducting wires are inverted signal output ends. The single-end signals of the unbalanced end are convertedinto differential signals of a balanced end for output under the coupling action of the primary and secondary conducting wires. The ground wires reduce the insertion loss of the balun and simultaneously expand a gain bandwidth and a matched bandwidth.
Description
Technical field
The present invention relates to broadband passive Ba Lun, relate in particular to passive Ba Lun on a kind of broadband low loss sheet of lamination serpentine structure, be applicable to millimetre-wave circuit.
Background technology
In wireless receiving and emission system, need usually to adopt Ba Lun to carry out the conversion of single-ended signal and differential signal.For example, the single-ended signal that antenna is received converts differential signal to and is connected to low noise amplifier, or converting differential signal to single-ended signal is connected to antenna and launches.Ba Lun is the circuit devcie of finishing single-ended signal and differential signal translation function, and its design difficulty is how to guarantee good amplitude balance, phase equilibrium and lower insertion loss etc.
Traditional structure Ba Lun mainly is Marchand structure Ba Lun and helical structure transformer Ba Lun.Structure is the most basic barron structure shown in Fig. 1 (a), is made of two sections quarter-wave metal coupling line a and b.Signal is imported from port one, and in theory, under the coupling effect ideal situation, port 2 and port 3 place's amplitude output signals are half of input signal amplitude, respectively leading input signal 90 degree and the quadrature laggings of phase place.Structure shown in Fig. 1 (b) is Marchand structure Ba Lun, Ba Lun among Fig. 1 (a) is improved, in order to obtain broadband character, introduce open stub c and closed stub d by way of compensation, have lower insertion loss, but the design of its amplitude balance and phase equilibrium is relatively difficult.Because Marchand structure Ba Lun is made up of two groups of quarter-wave metal coupling lines, size is relatively large when design.Structure is helical structure transformer Ba Lun shown in Fig. 2 (a), have good amplitude balance degree and phase equilibrium degree, but the eddy current effect of its substrate is big, and it is bigger to cause inserting loss ratio, common S21<-5dB.And the geometry relative complex, exist between the coil and intersect, shown in Fig. 2 (b), cross spider must pass through different layers metal bridge joint, is difficult to guarantee that how much mechanisms are symmetrical fully, and then worsens amplitude balance degree and phase equilibrium degree, especially when high frequency, the influence of cross section bridge joint is more serious.
Summary of the invention
The present invention overcomes the deficiency of prior art, passive Ba Lun on a kind of lamination serpentine structure broadband low loss sheet is provided, technical scheme is as follows: passive Ba Lun on a kind of broadband low loss sheet of lamination serpentine structure, it is characterized in that: be provided with the three-layer metal lead, be provided with insulating medium layer between each layer conductor, the ground floor plain conductor is secondary wire, the second layer metal lead is primary wires, the three-layer metal lead is ground wire, the head of each layer conductor, the bending serpentine structure that all takes the shape of the letter U continuous between the tail end, the U-shaped bending is odd number, the geometry of all U-shaped bendings is in full accord, head with lead, center U-shaped bending between the tail end is benchmark, the U-shaped bending of the left and right sides is symmetry fully, behind the three-layer metal conducting wire stack, corresponding one by one between the U-shaped bending of each layer, with ground floor secondary wire head, mid point between the tail end disconnects, constitute discontinuous about two sections U-shaped bendings, uneven end single-ended signal connects the primary wires head end, the primary wires tail end is connected to ground wire, the head of secondary wire, the equal earth connection of tail end, with the cut-off point of the same section lead of secondary wire head end be the positive signal output part, with the cut-off point of the same section lead of secondary wire tail end be the inversion signal output.
Dielectric layer thickness between said ground floor and the second layer metal lead is less than the dielectric layer thickness between the second layer and the three-layer metal lead (the dielectric layer thickness between ground floor and the second layer metal lead is as far as possible little under the situation that manufacturing process allows, and the dielectric layer thickness between the second layer and the three-layer metal lead is looked specific performance and required and can be adjusted); The width of the width of three-layer metal lead 〉=first, second layer plain conductor.
Advantage of the present invention and remarkable result:
(1) reduced the insertion loss.The present invention adopts broadside coupled, and wherein the 3rd layer of ground wire and primary wires form microstrip structure, reducing the electromagnetic coupled between primary wires and the substrate, thereby reduces the decay of non-equilibrium end signal significantly.See Fig. 8.
(2) reduced eddy current effect.The present invention adopts serpentine structure, and the helical structure comparison with traditional reduces the substrate eddy current effect significantly, thereby reduces substrate loss.
(3) expanded bandwidth.See Fig. 8.
(4) increased the coupling bandwidth.The present invention matches 50 ohm in broad frequency band, see Fig. 9.
(5) geometry is simple and symmetrical fully.The degree of balance height of amplitude and phase place is seen Figure 11 and Figure 12.
Description of drawings
Fig. 1 (a) is simple coupling line Ba Lun schematic diagram;
Fig. 1 (b) is the schematic equivalent circuit of traditional Marchand structure Ba Lun;
Fig. 2 (a) is conventional helical structure transformer Ba Lun plane graph;
Fig. 2 (b) is conventional helical structure transformer Ba Lun 3-D solid structure figure;
Fig. 3 (a) is the schematic equivalent circuit of Ba Lun of the present invention;
Fig. 3 (b) is the application circuit schematic diagram of Ba Lun of the present invention;
Fig. 4 is the 3-D solid structure figure of Ba Lun of the present invention;
Fig. 5 is ground floor plain conductor (secondary wire) vertical view of Ba Lun of the present invention;
Fig. 6 is second layer metal lead (primary wires) vertical view of Ba Lun of the present invention;
Fig. 7 is three-layer metal lead (ground wire) vertical view of Ba Lun of the present invention;
Fig. 8 is the insertion damage curve of Ba Lun of the present invention;
Fig. 9 is the input match curve of Ba Lun of the present invention;
Figure 10 is the balance end phase curve of Ba Lun of the present invention;
Figure 11 is the balance end amplitude balance of the Ba Lun of the present invention line of writing music;
Figure 12 is the balance end phase equilibrium of the Ba Lun of the present invention line of writing music.
Embodiment
Referring to Fig. 4,5,6,7, passive Ba Lun on a kind of lamination serpentine structure broadband low loss sheet is provided with the three-layer metal lead, is provided with insulating medium layer between each layer conductor, and the ground floor plain conductor is secondary wire, as shown in Figure 5.The second layer metal lead is primary wires, as shown in Figure 6.The three-layer metal lead is ground wire, as shown in Figure 7.The bending serpentine structure that all takes the shape of the letter U continuous between the two ends of each layer plain conductor (bending part can arrange chamfering), geometry is symmetrical (for ease of port pins fully, middle U-shaped can omit height) uneven end single-ended signal inputs to primary wires head end 1, primary wires tail end 6 is connected to ground wire, coupling by primary wires and secondary wire is (for adding close coupling, dielectric layer thickness between primary wires and the secondary wire is as far as possible little under the situation that manufacturing process allows), convert non-equilibrium end single-ended signal the output of to balance end differential signal, wherein the secondary wire point of interruption 2 is exported positive phase signals, the secondary wire point of interruption 3 output inversion signals, the head of secondary wire, tail end 4,5 are connected to ground wire respectively.Ground wire makes when Ba Lun inserts the loss reduction, has expanded gain bandwidth and coupling bandwidth.The port 4,5,7 of three-layer metal lead all is connected to ground.The continuous bending of U-shaped is set to odd number, is respectively in the both sides of U-shaped height to guarantee uneven end single-ended signal input port 1 and output positive signal port 2 and output inversion signal port 3, reaches effect of the present invention.The live width of ground floor plain conductor and second layer metal lead can be looked operating frequency and be changed, and the 3rd layer of ground wire can be tried one's best wideer.
Fig. 3 (a) is equivalent electric circuit of the present invention, and Ba Lun compares with the Marchand structure, and remarkable difference is arranged.Single-ended signal is imported from port one, behind two groups of plain conductor coupling lines, is connected to ground.Because electromagnetic coupled effect between the plain conductor line is at balance end port 2 and port 3 places output differential signal.Because the interchange ground connection of primary metals lead one end, make Ba Lun of the present invention can more conveniently be applied to active circuit, circuit structure is the applicating example of Ba Lun of the present invention shown in Fig. 3 (b), and wherein primary wires one end is connected to transistor drain, and the other end is connected to DC power supply.This advantages of application highly significant, Ba Lun directly provides the drain electrode direct current biasing for transistor, has saved chip area, has improved the linearity of circuit, has reduced equivalent input noise.
Referring to Fig. 8, curve shown in the figure is the insertion damage curve of Ba Lun, i.e. the amplitude of S21 and S31, and Ba Lun is keeping low-loss wideer bandwidth that has simultaneously, and relative bandwidth is 66.2%.
Referring to Fig. 9, curve shown in the figure is the return loss plot S11 of Ba Lun, Ba Lun in wideer frequency band with 50 ohm of couplings.
Referring to Figure 10, curve shown in the figure is the phase place of difference port, i.e. the phase place of S21 and S31.
Referring to Figure 11, curve shown in the figure is the amplitude balance degree of Ba Lun.
Referring to Figure 12, curve shown in the figure is the phase equilibrium degree of Ba Lun.
Area of the present invention is neglected operating frequency range greatly and is decided, and in 27-80GHz, the area of Ba Lun is less than 0.03mm as operating frequency
2
Claims (1)
1. passive Ba Lun on the broadband low loss sheet of a lamination serpentine structure, it is characterized in that: be provided with the three-layer metal lead, be provided with insulating medium layer between each layer conductor, the ground floor plain conductor is secondary wire, the second layer metal lead is primary wires, the three-layer metal lead is ground wire, the head of each layer conductor, the bending serpentine structure that all takes the shape of the letter U continuous between the tail end, the U-shaped bending is odd number, the geometry of all U-shaped bendings is in full accord, head with lead, center U-shaped bending between the tail end is benchmark, the U-shaped bending of the left and right sides is symmetry fully, behind the three-layer metal conducting wire stack, corresponding one by one between the U-shaped bending of each layer, with ground floor secondary wire head, mid point between the tail end disconnects, constitute discontinuous about two sections U-shaped bendings, uneven end single-ended signal connects the primary wires head end, the primary wires tail end is connected to ground wire, the head of secondary wire, the equal earth connection of tail end, with the cut-off point of the same section lead of secondary wire head end be the positive signal output part, with the cut-off point of the same section lead of secondary wire tail end be the inversion signal output;
Dielectric layer thickness between described ground floor and the second layer metal lead is less than the dielectric layer thickness between the second layer and the three-layer metal lead; The width of the width of three-layer metal lead 〉=first, second layer plain conductor.
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TWI562450B (en) * | 2015-01-26 | 2016-12-11 | Trans Electric Co Ltd |
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WO2013128795A1 (en) | 2012-02-29 | 2013-09-06 | パナソニック株式会社 | Electromagnetic resonance coupler |
CN104362989B (en) * | 2014-10-10 | 2017-09-19 | 中国电子科技集团公司第三十六研究所 | A kind of transmission line balancer and power amplifier impedance matching circuit |
CN107331977B (en) * | 2017-06-28 | 2019-08-30 | 电子科技大学 | The strong mutual coupling phased array antenna of the low RCS ultra wide bandwidth angle sweep of low section based on polarization conversion material |
CN110380689B (en) * | 2019-07-18 | 2022-09-30 | 中国电子科技集团公司第三十八研究所 | Passive balun on silicon substrate with side edge coupled winding structure |
CN112087214B (en) * | 2020-09-15 | 2023-03-14 | 西安电子科技大学 | TSV coupling and RDL interconnection on-chip passive balun and manufacturing process |
CN113764851B (en) * | 2021-10-11 | 2022-07-19 | 杭州泛利科技有限公司 | IPD-based miniaturized low-insertion-loss broadband balun |
CN116566329A (en) * | 2022-01-27 | 2023-08-08 | 锐石创芯(深圳)科技股份有限公司 | Balun, radio frequency front end chip and radio frequency front end module |
CN115173017B (en) * | 2022-06-28 | 2024-04-09 | 中国电子科技集团公司第四十三研究所 | Miniature 90-degree power divider adopting folding coupling line structure |
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CN202217771U (en) * | 2011-06-17 | 2012-05-09 | 东南大学 | Broadband low-loss on-chip passive balun with laminated meandering structure |
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CN202217771U (en) * | 2011-06-17 | 2012-05-09 | 东南大学 | Broadband low-loss on-chip passive balun with laminated meandering structure |
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Title |
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宋蓓等.带中心抽头平面螺旋结构巴伦设计与实现.《中国集成电路》.2005,全文. |
带中心抽头平面螺旋结构巴伦设计与实现;宋蓓等;《中国集成电路》;20050831;全文 * |
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