CN102288303B - White-light interference high-temperature measuring sensor and application measuring device thereof - Google Patents
White-light interference high-temperature measuring sensor and application measuring device thereof Download PDFInfo
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- CN102288303B CN102288303B CN 201110197785 CN201110197785A CN102288303B CN 102288303 B CN102288303 B CN 102288303B CN 201110197785 CN201110197785 CN 201110197785 CN 201110197785 A CN201110197785 A CN 201110197785A CN 102288303 B CN102288303 B CN 102288303B
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Abstract
The invention provides a white-light interference high-temperature measuring device, which comprises a sensor, a white-light light source, a spectrograph and a data processor, wherein the sensor comprises a collimation lens, a polarizer and a sapphire right-angle prism, and the sapphire right-angle prism is used as a temperature sensing component. Light emitted from the white-light light source passes through an incident optical fiber to enter the collimation lens, and then becomes parallel light; the parallel light is divided into o light and e light by the polarizer; the o light and the e light are further transmitted to the sapphire right-angle prism; the sapphire right-angle prism reflects the o light and the e light back; the o light and the e light which are reflected back pass through the polarizer again to be interfered to obtain interfered light; the interfered light passes through the collimation lens, then is converged at a receiving optical fiber, and enters the spectrograph; the spectrograph carries out stripe detection on the interfered light, and conveys the detected spectral interfered stripe data to the data processor; and the data processor processes the interfered stripe data conveyed from the spectrograph and calculates out a temperature. The high-temperature measuring device has the advantages of high temperature resistance, corrosion resistance, high measurement precision, convenience in mounting, low cost and wide application aspect.
Description
[technical field]
The present invention relates to the temperature detection technical field, specifically is about a kind of Fibre Optical Sensor high temperature measurement sensor based on white light interference and application measurement mechanism thereof.
[background technology]
In various industrial manufacture processes, such as industries such as electric power, metallurgy, pottery, glass, chemical industry, cement, accurate measurement and the monitoring of high-temperature temperature have very important meaning.At present, high temperature measurement mainly contains contact and contactless two classes.Contact mainly is thermopair, and contactless have infrared measurement of temperature, flame image thermometric, a cement bond logging temperature technique etc., and these technology all exist some shortcomings.The thermopair of being made by noble metals such as platinum, rhodiums antioxygenic property when high temperature is poor, and long-term the use can produce bigger error, works under the environment of especially special at some and aggressive atmosphere, phenomenons such as burn into poisoning can occur, and sharply shorten serviceable life.In addition, the thermopair anti-electromagnetic interference capability is relatively poor, can not use under some occasion.Water-cooling welding torch air extracting thermocouple measuring equipment is heavy, and workload is big in the test process, and difficulty of test is big; And can not extended immobilization measure certain temperature degree that lights a cigarette, need withdraw from after test is finished.The tested zone of infrared measurement of temperature is uncertain, the blackness in tested zone is big to measurement result influence, the spuious light in space influence measuring accuracy, measurement environment atmosphere (as moisture vapor etc.) causes error to the unevenness absorption of light wave; Influences such as the pollution of flame image thermometric camera lens and complex image Processing Algorithm, measuring error is big, and resolution not high being easy to generate " is stolen a glance at ", the lighting system complexity, the ccd video camera mounting points is more, and coking or dust stratification make camera lens maintenance difficulty, poor reliability, expensive; The sound wave temperature-measurement principle is based on ideal gas, the various thermal parameters of flue gas are difficult to accurately determine, cause measuring error, the high frequency noise that produces during boiler soot-blowing influences the operate as normal of sound wave temp measuring system, sound wave takes place, receiving trap installation site environment temperature height, needs cooling reliably to damage to avoid measurement mechanism.The sapphire high temperature optical fiber temperature-measurement technology of Chu Xianing combined contact and contactless temperature-measuring method in recent years, though part has overcome the some shortcomings of contactless temperature-measuring, but because the sapphire fiber price is high, fiber lengths is limited and factor such as ordinary optic fibre interconnection technique complexity, its industrial applications is subjected to certain restriction.
Therefore, in order better to monitor the temperature in the various industrial product process procedures, need develop a kind of novel high temperature measurement sensor and application apparatus thereof.
[summary of the invention]
The objective of the invention is in order to overcome the deficiencies in the prior art, provide a kind of high temperature resistant, corrosion-resistant, measuring accuracy is high, easy for installation, high temperature measurement sensor and application apparatus thereof that cost is low.
White light interference high temperature measurement sensor provided by the invention, comprise: protective casing, the incident optical that is spaced setting successively that is positioned at protective casing, reception optical fiber, collimation lens, the polarizer, sapphire right-angle prism, wherein the sapphire right-angle prism is positioned at the front end of protective casing, and the sapphire right-angle prism is as temperature-sensing element; The end face of incident optical is positioned at the focus place of collimation lens, the axle center of collimation lens, the polarizer, sapphire right-angle prism and the axle center of protective casing are point-blank, collimation lens becomes directional light after the incident white light is collimated, the polarizer will be polarized from the incident directional light that the collimation lens collimation comes, be divided into o light and e light, and be transferred to the sapphire right-angle prism; The sapphire right-angle prism will reflect through its o light and e light, and the o light that reflects and e light interfere through the polarizer from the other direction of the described polarizer, and interference light converges to reception optical fiber through behind the collimation lens.
Wherein, described sapphire right-angle prism is made for the monocrystalline sapphire crystal.
Wherein, described sapphire right-angle prism is isosceles right-angle prism.
Wherein, the described polarizer is the Glan Taylor prism, and when the incident white light entered the Glan Taylor prism, the Glan Taylor prism played the polarizer light is carried out polarization spectro, when reflected light returns when entering the Glan Taylor prism, it plays analyzer interferes light.
Wherein, described incident optical and reception optical fiber constitute a fibre-optical splice, and it is positioned at the rear end of protective casing, and described incident optical is positioned at the centre of fibre-optical splice, and is positioned at the focus place of collimation lens; Receive optical fiber and be many, be evenly distributed in the periphery of incident optical, incident optical is used for transmitting the incident white light to collimation lens, receives the interference light that optical fiber acceptance reflects from collimation lens.
Wherein, the optical fiber of described fibre-optical splice is multimode optical fiber.
Wherein, the front end of protective casing is circular-arc for what seal.
Wherein, protective casing is resistant to elevated temperatures alundum tube, refractory ceramics pipe, water-cooled or air cool metal sleeve pipe.
White light interference high temperature measurement device provided by the invention, comprise: white light interference high temperature measurement sensor described above, white light source, spectrometer, data processor, wherein, white light source sends light enters described sensor through incident optical collimation lens, the polarizer carries out entering behind the polarisation sapphire right-angle prism and reflects again by the sapphire right-angle prism and interfere through analyzer, after enter collimation lens and become directional light, come out from an outgoing optical fiber, enter spectrometer, spectrometer carries out bar detection to interference light, detected spectrum interference fringe data are entered data processor, data processor is handled the interference fringe data that spectrometer sends, and calculates temperature.
Wherein, described white light interference high temperature measurement device also comprises the demonstration output device, and the signal that described data processor is imported into spectrometer carries out demodulation, obtains optical path difference OPD, and tries to achieve temperature according to following formula: T=-0.3465* (OPD)
3+ 71.443* (OPD)
2-4994.4696* (OPD)+118524.1127, and through showing that output device shows.
The present invention utilizes sapphire crystal to carry out high temperature measurement, its principle is that the sapphire right-angle prism is placed between a polarizer and the analyzer, a branch of nonpolarized light will be divided into ordinary light o light and extraordinary ray e light through behind the polarizer, and then enter the sapphire right-angle prism, because the birefringent influence of sapphire crystal, two-beam will produce the phase differential of Φ.In order to obtain this phase differential, light need interfere through analyzer, just can obtain this phase differential by detecting change of interference fringes, and the birefringence difference Δ n of the thickness d of this phase differential and sapphire right-angle prism and sapphire crystal is relevant, these two factors are all relevant with temperature simultaneously, therefore can realize the measurement of temperature by the detected phase difference.
The sapphire right-angle prism that the present invention adopts sapphire crystal to make can use up to 1800 ℃ and in corrosive environment in temperature as temperature sensing device, has high temperature resistant and advantage such as stable chemical performance; Be not subjected to water vapour in the high-temperature gas and the influence of gas composition, applied range; The high temperature gauge head is the high-precision optical device, and by the polarizer, analyzer measure the o light through sapphire crystal, the phase differential of e light is realized the measurement of temperature, has the measuring accuracy height; Simultaneously sapphire right-angle prism of the present invention changes light path as reflecting element again simultaneously not only as temperature-sensing element, make as long as element just can reach the effect of the polarizer and analyzer, and the component devices minimizing, easy for installation; Cost BELAND jewel optical fiber is low, has price advantage.
[description of drawings]
Fig. 1 is the schematic representation of apparatus of the application of white light interference high temperature measurement sensor of the present invention;
Fig. 2 is the light path synoptic diagram through the sapphire right-angle prism.
Description of reference numerals:
1. white light source; 2. input optical fibre; 3. fibre-optical splice; 4. collimation lens; 5. protective casing; 6. sapphire right-angle prism; 7. Glan Taylor prism; 8. output optical fibre; 9. spectrometer; 10. data processor; 11. demonstration output device; 100. high temperature measurement sensor; 13. incident ray 1; 14. incident ray 2; 13`. emergent ray 1; 14`. emergent ray 2; 6. sapphire right-angle prism
[embodiment]
Reach technological means and the effect that predetermined purpose is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, white light interference high temperature measurement sensor and application apparatus thereof to foundation the present invention proposition, its embodiment, structure, feature and effect thereof, illustrate as after.
As shown in Figure 1, the application apparatus of white light interference high temperature measurement sensor of the present invention comprises, white light source 1, input optical fibre 2, high temperature measurement sensor 100, output optical fibre 8, spectrometer 9, data processor 10, demonstration output device 11.Wherein, one end of described input optical fibre 2, output optical fibre 8 connects with high temperature measurement sensor 100 by a fibre-optical splice 3, the other end of described input optical fibre 2 and white light source 1 connect, the other end of output optical fibre 8 and spectrometer 9 connect, and data processor 10 is connected between spectrometer 9 and the display device 11.
High temperature measurement sensor 100 comprises described fibre-optical splice 3, protective casing 5, be positioned at the spaced collimation lens 4 successively of protective casing 5, comprise the Glan Taylor prism 7 of the polarizer and analyzer effect, as the sapphire right-angle prism 6 of temperature element.The front end of described protective casing 5 seals and is circular-arc, and the rear end is opening-like.Protective casing 5 can be selected resistant to elevated temperatures alundum tube, refractory ceramics pipe, water-cooled or air cool metal sleeve pipe for use, its can be under test environment atmosphere the work of long term high temperature degree.Described fibre-optical splice 3, collimation lens 4, Glan Taylor prism 7, sapphire right-angle prism 6 the rear end arrangement from protective casing 5 at interval successively are placed into front end; it is the rearmost end that fibre-optical splice 3 is positioned at protective casing 5; sapphire right-angle prism 6 is positioned at protective casing 5 foremost; when the front end of protective casing 5 is positioned at temperature measuring area; be positioned at temperature measuring area so that sapphire right-angle prism 6 can be enough when thermometric; can sensing temperature, guarantee thermometric accurately.The axle center of fibre-optical splice 3 and collimation lens 4 is positioned on the axle center of protective casing 5.
The optical fiber of described fibre-optical splice 3 inside is multimode optical fiber, comprises incident optical and receives optical fiber, is connected with output optical fibre 8 with input optical fibre 2 respectively, has reached the light of transmission light source 1 emission and has received the light that sapphire right-angle prism 6 reflects; The end of the incident optical of fibre-optical splice 3 is positioned on the focus of collimation lens 4, and the two is all on the axis of protective casing 5.The end face that receives optical fiber protrudes from the end face of launching fiber.Fibre-optical splice 3 is a fiber bundle structure, and namely described incident optical is a centre that is positioned at fibre bundle, receives optical fiber and be many as the 2-20 root, is laid in the periphery of incident optical uniformly.
The sapphire right-angle prism 6 of present embodiment adopts the monocrystalline sapphire crystal to make, and is isosceles right triangle.Sapphire (Sapphire) crystal is the hardest oxide crystal of occurring in nature, is the most basic monocrystalline form of aluminium oxide, has good corrosion resistance.It has the good optical performance, has two optical axises that refractive index is different, and the birefringence of monocrystalline sapphire crystal varies with temperature and changes.This character makes sapphire crystal can satisfy polarization thermometric needs.Simultaneously, the fusing point of sapphire crystal reaches 2040 ℃, so it can be worked under very high temperature and keeps its stability, its maximum operating temperature can reach 1800 ℃.As seen, sapphire crystal can satisfy the demand of carrying out the polarization thermometric under High Temperature High Pressure and the high corrosion environment, and the price of sapphire crystal has better economic worth in actual applications far below sapphire fiber.
The present invention utilizes sapphire crystal to carry out high temperature measurement, its principle is that sapphire crystal is placed between a polarizer and the analyzer, a branch of nonpolarized light such as white light will be divided into ordinary light o light and extraordinary ray e light through behind the polarizer, and then enter sapphire crystal, because the birefringent influence of sapphire crystal, two-beam will produce the phase differential of Φ.In order to obtain this phase differential, light need interfere through analyzer, just can obtain this phase differential by detecting change of interference fringes, and the birefringence difference Δ n of the thickness d of this phase differential and sapphire crystal and crystal is relevant, these two factors are all relevant with temperature simultaneously, therefore can realize the measurement of temperature by the detected phase difference.
The phase differential of two bundle polarized lights is to be decided by the optical path difference of two-beam line (Optical Path Difference is called for short OPD), namely
Φ＝2π*OPD/λ (1)
OPD＝|n
e-n
o|*d＝Δn*d (2)
Herein, d is sapphire right-angle prism thickness (d is the thickness of a broad sense, is the geometric distance of light process in right-angle prism), and ne, no are respectively the refractive index of e light and o light, and λ is wavelength.Δ n is relevant with the residing temperature of sapphire crystal with d, and following formula can be write
OPD＝|n
e-n
o|*d＝Δn(T)*d(T) (3)
Use pyrometer couple to demarcate, carry out polynomial expression then and carry out match, just can obtain the corresponding relation formula T=f (OPD) of temperature T and optical path difference OPD.Temperature and optical path difference have good one-to-one relationship, and relational expression is as follows:
T＝-0.3465*(OPD)
3+71.443*(OPD)
2-4994.4696*(OPD)+118524.1127 (4)
Actual when carrying out temperature survey, can draw temperature value according to formula (4) after measuring optical path difference.Optical path difference is to come out according to the data computation of spectrometer output.
The specific implementation process of white light interference high temperature measurement device of the present invention is as described below:
As shown in Figure 1, when carrying out high temperature measurement, tested zone is goed deep in protective casing 5 front portions, the temperature in the tested zone of sapphire right-angle prism 6 impressions.The light that wideband white light source 1 sends enters fibre-optical splice 3 through optical fiber 2; fibre-optical splice 3 is positioned on the focus of collimation lens 4; after passing through collimation lens 4 then; light becomes the directional light that is parallel to protective casing 5 axis; enter then and will be divided into ordinary light o light and extraordinary ray e light after Glan Taylor prism 7 is polarized, polarized light o light and the e light of generation enter sapphire right-angle prism 6.The interface of sapphire right-angle prism 6 is isosceles right triangle, and existing reflex is also used as temperature element.The light that reflects from sapphire right-angle prism 6 carries out analyzing through Glan Taylor prism 7 again, to produce interference light, enter fibre-optical splice 3 again through collimation lens 4 afterwards, after coming out, fibre-optical splice 3 enters spectrometer 9 through optical fiber 8, detected spectrum interference fringe data enter data processor 10, data processor 10 adopts certain demodulating algorithm signal that 9 inputs are come in to spectrometer to carry out demodulation, obtain optical path difference OPD, try to achieve temperature according to formula (4), enter demonstration output device 11 then and carry out scene demonstration or long-range output.
Realize polarization of incident light and effect that the reflected light that reflects from sapphire right-angle prism 6 is interfered by Glan Taylor prism 7 in the present embodiment.Glan Taylor prism 7, collimation lens 4 all are cylindrical, their axis point-blank, have only the beam projecting end of fibre-optical splice 3 to be positioned on the lens focus, light becomes directional light after by collimation lens 4, and Glan Taylor prism 7 is positioned at after the collimation lens 4.The advantage of Glan Taylor prism is exactly transmitance height, the polarisation purity height of light, so just can reduce loss, the raising measuring accuracy of light.
Consider the needs of actual thermometric, adopted principle of reflection in the light path of the present invention, sapphire right-angle prism 6 has the effect of reflection again concurrently both as temperature-sensing element, thereby the structure of a both-end is become a single-ended structure, solved the difficult problem that realizes of light receiving end in the practical application.This kind design both simplified the structure, and was convenient to application in practice, had saved cost again.As shown in Figure 2, incident ray 13 and incident ray 14 are any two-beam line, the reflection ray in sapphire right-angle prism 6 of the two correspondence is respectively emergent ray 13` and emergent ray 14`, can draw the geometric distance that incident ray 13 and incident ray 14 propagate by geometric knowledge in sapphire right-angle prism 6 and equate.Incident ray 13 or incident ray 14 reflect in sapphire prism 6, because incident angle is 45 °, and the cirtical angle of total reflection of sapphire right-angle prism 6 is about 34.7 °, because incident angle is greater than critical angle, therefore in sapphire right-angle prism 6 total reflection will take place, do not have reflection loss.The sapphire right-angle prism plays the effect that changes light path among the present invention, and making only needs a polarizer in light path, when the light that reflects is played the effect of analyzer through out-of-date by interference from the other direction of the polarizer, saves device, and is simultaneously easy for installation.
In this instructions, the present invention is described with reference to its certain embodiments, still, still can make various modifications and conversion obviously and does not deviate from the spirit and scope of the present invention.Therefore, instructions of the present invention and accompanying drawing are considered to illustrative and nonrestrictive.
Claims (10)
1. white light interference high temperature measurement sensor, it is characterized in that, comprise: protective casing, the incident optical that is spaced setting successively that is positioned at protective casing, reception optical fiber, collimation lens, the polarizer, sapphire right-angle prism, wherein the sapphire right-angle prism is positioned at the front end of protective casing, and the sapphire right-angle prism is as temperature-sensing element; The end face of incident optical is positioned at the focus place of collimation lens, the axle center of collimation lens, the polarizer, sapphire right-angle prism and the axle center of protective casing are point-blank, collimation lens becomes directional light after the incident white light is collimated, the polarizer will be polarized from the incident directional light that the collimation lens collimation comes, be divided into o light and e light, and be transferred to the sapphire right-angle prism; The sapphire right-angle prism will reflect through its o light and e light, the o light that reflects and e light interfere through the polarizer from the other direction of the described polarizer, interference light converges to reception optical fiber through behind the collimation lens, by detecting the measurement that optical path difference OPD realizes temperature, and try to achieve temperature T according to following formula: T=-0.3465* (OPD)
3+ 71.443* (OPD)
2-4994.4696* (OPD)+118524.1127.
2. white light interference high temperature measurement sensor as claimed in claim 1 is characterized in that, described sapphire right-angle prism is made for the monocrystalline sapphire crystal.
3. white light interference high temperature measurement sensor as claimed in claim 1 is characterized in that, described sapphire right-angle prism is isosceles right-angle prism.
4. white light interference high temperature measurement sensor as claimed in claim 1, it is characterized in that, the described polarizer is the Glan Taylor prism, when the incident white light enters the Glan Taylor prism, the Glan Taylor prism plays the polarizer light is carried out polarization spectro, when reflected light returns when entering the Glan Taylor prism, it plays analyzer interferes light.
5. white light interference high temperature measurement sensor as claimed in claim 1, it is characterized in that described incident optical and reception optical fiber constitute a fibre-optical splice, it is positioned at the rear end of protective casing, described incident optical is positioned at the centre of fibre-optical splice, and is positioned at the focus place of collimation lens; Receive optical fiber and be many, be evenly distributed in the periphery of incident optical, incident optical is used for transmitting the incident white light to collimation lens, receives the interference light that optical fiber acceptance reflects from collimation lens.
6. white light interference high temperature measurement sensor as claimed in claim 5 is characterized in that, the optical fiber of described fibre-optical splice is multimode optical fiber.
7. white light interference high temperature measurement sensor as claimed in claim 1 is characterized in that, the front end of protective casing is circular-arc for sealing.
8. white light interference high temperature measurement sensor as claimed in claim 7 is characterized in that, protective casing is resistant to elevated temperatures alundum tube, refractory ceramics pipe or water-cooled or air cool metal sleeve pipe.
9. white light interference high temperature measurement device, it is characterized in that, comprise: each described white light interference high temperature measurement sensor among the claim 1-8, white light source, spectrometer, data processor, wherein, white light source sends light enters described white light interference high temperature measurement sensor through incident optical collimation lens, the polarizer carries out entering behind the polarisation sapphire right-angle prism and reflects again by the sapphire right-angle prism and interfere through the polarizer, after enter collimation lens and be converged onto reception optical fiber, receiving optical fiber from one comes out, enter spectrometer, spectrometer carries out bar detection to interference light, detected spectrum interference fringe data are entered data processor, data processor is handled the spectrum interference fringe data that spectrometer sends, and calculates temperature.
10. white light interference high temperature measurement device as claimed in claim 9, it is characterized in that, also comprise the demonstration output device, the signal that described data processor is imported into spectrometer carries out demodulation, obtain optical path difference OPD, the temperature of trying to achieve is through showing that output device shows.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4598996A (en) * | 1981-05-07 | 1986-07-08 | Matsushita Electric Industrial Co., Ltd. | Temperature detector |
| CN2173394Y (en) * | 1993-10-29 | 1994-08-03 | 清华大学 | Reflection type optic fibre two-refraction temp. measuring probe |
| CN101226082A (en) * | 2007-01-18 | 2008-07-23 | 武汉晟思高新技术有限公司 | Photoelectric temperature sensing device based on interference |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100343637C (en) * | 2003-11-10 | 2007-10-17 | 北京航空航天大学 | Optical fibre temperature sensing method and sensor based on SAGNAC interferometer |
| CN101881672B (en) * | 2010-06-25 | 2011-11-23 | 浙江工业大学 | Reflection-type optical fiber temperature sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4598996A (en) * | 1981-05-07 | 1986-07-08 | Matsushita Electric Industrial Co., Ltd. | Temperature detector |
| CN2173394Y (en) * | 1993-10-29 | 1994-08-03 | 清华大学 | Reflection type optic fibre two-refraction temp. measuring probe |
| CN101226082A (en) * | 2007-01-18 | 2008-07-23 | 武汉晟思高新技术有限公司 | Photoelectric temperature sensing device based on interference |
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