CN102288128A - Three-dimensional microscopic observing device for recording and synthesizing digital hologram through rotating polarizing state of linearly polarized light - Google Patents
Three-dimensional microscopic observing device for recording and synthesizing digital hologram through rotating polarizing state of linearly polarized light Download PDFInfo
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Abstract
The invention discloses a three-dimensional microscopic observing device for recording and synthesizing a digital hologram through rotating a polarizing state of linearly polarized light. After a light-splitting unit in the device splits received laser light into two beams of linearly polarized light, the two beams of linearly polarized light are respectively inputted into two spatial filters; one beam of linearly polarized light becomes reference light after sequentially passing through a plano-convex lens and a reflecting mirror and enters a depolarizing light-splitting prism; the other beam of linearly polarized light becomes illuminating light after sequentially passing through a plano-convex lens and a reflecting mirror; the illuminating light illuminates on an object to be observed and enters the depolarization light-splitting prism after the illuminating light is scattered. A polarizing light-splitting prism in the light-splitting unit is arranged between an A half-wave plate and a B half-wave plate and a C half-wave plate is arranged at a reflecting light position of the polarizing light-splitting prism. According to the device disclosed by the invention, through simultaneously changing polarizing directions of the linearly polarized reference light and the linearly polarized scattered light which contains profile information of the object and enabling the two light beams to be subjected to coherent superposition, a plurality of holograms with different information of the object can be obtained without changing an angle of the illuminating light and a relative position of the object and a camera; and on a third hand, the observing device can obtain three-dimensional information of the object to be observed in a non-contact and in-situ detecting manner.
Description
Technical field
The present invention relates to a kind of three-dimensional microscopic observation system, more particularly say, be meant a kind of by rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device.
Background technology
Digital Holography is to utilize CCD (Charge Coupled Device, charge-coupled image sensor), CMOS (Complementary Metal-Oxide Semiconductor, metal-oxide semiconductor (MOS)) etc. the photoelectronic imaging sensitive detection parts are as recording medium and with the digital form recorded hologram, utilize computer simulation to reproduce reference light and pass through the optical diffraction process of hologram with numerical approach reconstruct three-dimensional scattering light field, thereby obtain the amplitude of scattering light field and the information of phase place, its advantage comprises: (1) obtains object dimensional information in the noncontact mode, very little to the observation sample influence, advantages such as system architecture is simple; (2) record of digital hologram and reproduction process are all finished with digitized forms, therefore can and can carry out quantitative test to object dimensional information with re-constructed in digital form scattering light field; (3) in the digital reconstruction process, can use digital image processing techniques easily, the influence of rectification, compensate for optical aberrations and various noise and detector nonlinear effect etc.
But reproduce in the three-dimensionalreconstruction of picture at digital hologram, the various noises that digital hologram reproduces picture have very large influence.The existence of noise can make judges that with algorithm mistake appears in the focusing of picture, thereby makes the three-dimensionalreconstruction image distortion of acquisition.Reduce even eliminate the key point that various The noise are three-dimensionalreconstructions, the degree direct influence of noise removing is to the quality of three-dimensionalreconstruction picture.Speckle noise is the key factor that influences the Reconstructed Image Quality in Digital Holography amount, also is a kind of more unmanageable noise.It is because coherent light shines the surface emitting scattering of rough object, the surface of scatterer or near light field in form and observable a kind of random bright blackening line.The reproduction that is covered by speckle is difficult to distinguish one from the other as details, makes to reproduce as smudgy.It is significant to the quality that improves digital hologram reproduction picture to reduce laser speckle, also very crucial for the three-dimensionalreconstruction of realizing the reproduction picture.
Summary of the invention
The objective of the invention is to propose a kind of by rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device, this device adopts two bunch polarized lights on the one hand, wherein a branch of conduct is with reference to light, and the illumination light of observed objects is treated in another Shu Zuowei irradiation; By synchronous change linear polarization reference light and linear polarization scattering polarization state of light that includes object appearance information and interference stack, can under the situation that does not change irradiates light angle and object and camera relative position, obtain several and comprise the hologram of the different information of object on the other hand; This observation device of the third aspect can obtain the three-dimensional information for the treatment of observed objects with noncontact, in-situ investigation mode.
Of the present invention by rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device, this device includes light source, spectrophotometric unit, spatial filter, plano-convex lens, catoptron, depolarization Amici prism and CMOS camera.
Light source is used to the three-dimensional microscopic observation system of the present invention that optical information is provided.
Spectrophotometric unit is used for receiving from the light source emitting laser on the one hand, and spectrophotometric unit is divided into the laser that receives two bunch polarized lights on the other hand, and imports two spatial filters respectively.Polarization splitting prism places between A half-wave plate and the B half-wave plate, and the C wave plate places the reflected light position of polarization splitting prism.Wherein, described A half-wave plate is used to adjust the polarization direction of laser of light emitted and polarization splitting prism and cooperates and realize that transmitted light and catoptrical beam intensity ratio are adjustable continuously, and the B half-wave plate is used to adjust the polarization direction of the transmitted light of polarization splitting prism; Adopt the C wave plate to make the transmitted light and the polarization of reflected light attitude synchronous change of polarization splitting prism, realize the two-beam coherence stack, and obtain the digital hologram that multiframe comprises different polarization information.Can regulate total light intensity of two bunch polarized lights by regulating continuous adjustable attenuator simultaneously, make the intensity distributions of hologram be within the dynamic range of camera.
Continuous adjustable attenuator in the described spectrophotometric unit is used for adjusting continuously the intensity that receives laser, the A half-wave plate is used for laser with light emitted to carry out the adjustment of polarization direction and polarization splitting prism and cooperates and realize that transmitted light and catoptrical beam intensity ratio are adjustable continuously, and the B half-wave plate is used to adjust the polarization direction of the transmitted light of polarization splitting prism; Adopt the C half-wave plate can adjust the reflection ray polarized light of polarization splitting prism; Make inclined to one side transmitted light of line and polarization of reflected light attitude synchronous change by rotating B half-wave plate and C half-wave plate simultaneously, realize having the line polarisation coherence stack of different polarization states, obtain the digital hologram that multiframe comprises different linear polarization information; By adjusting the light intensity summation of continuous adjustable attenuator, make the intensity distributions of hologram be in the dynamic range of camera simultaneously, improve the signal to noise ratio (S/N ratio) of ginseng thing optical interference picture A linearly polarized light and B linearly polarized light.
Of the present invention a kind ofly be by rotational line polarized light polarization state record advantage with synthetic digital holographic three-dimensional microscopic observation device:
(1) spectrophotometric unit can be exported two bundle polarization states identical linearly polarized lights simultaneously, and accurately controls illumination light and with reference to polarization state of light, beam intensity ratio and total light intensity.
(2) the present invention is by changing linear polarization reference light and the polarization direction that includes the linear polarization scattered light of object appearance information simultaneously, and they are interfered, can be under the prerequisite of the relative position between the angle that does not change the illumination light irradiating object or object and the camera, the record multiframe comprises object information and the separate digital hologram of speckle noise, and then pass through the on average reproduction picture of the above-mentioned digital hologram of stack, obtain high resolving power, low noise object picture.
(3) adopt linear polarization reference light 4a and circular polarization scattered light 14a on the depolarization Amici prism, to close light, utilize the digital hologram record to obtain the three-dimensional information for the treatment of observed objects with reproducting method with object appearance information.
(4) observation device compact conformation of the present invention is easy to operate, is particularly useful for irradiating angle is had the microscopic observation of the object of specific (special) requirements.
Description of drawings
Fig. 1 is that the present invention is a kind of by the structured flowchart of rotational line polarized light polarization state record with the three-dimensional microscopic observation device that synthesizes.
Figure 1A is the light transmission mode structural drawing of spectrophotometric unit of the present invention.
Fig. 2 is the assembly structure figure of spectrophotometric unit of the present invention.
Among the figure: 1. light source 1a. laser 1b. transmitted light 1c. reflected light
2. spectrophotometric unit 201.A half-wave plate 202. polarization splitting prism 203.B half-wave plates
204. continuous adjustable attenuator 205.C wave plate 21.A linearly polarized light 22.B linearly polarized light
3A.A sky asks that wave filter 3B.A plano-convex lens 3C.B sky asks wave filter 3D.B plano-convex lens 4.A catoptron
4a. reference light 5. depolarization Amici prism 5a. combined light beam 6.CMOS cameras
7.B catoptron 7a. illumination light 14. treats that observed objects 14a. has the scattered light of object appearance information
201A.A lifting support 202A.B lifting support 203A.C lifting support
204A.D lifting support 05A.E lifting support 206. erecting beds
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
Shown in Fig. 1, Figure 1A, the present invention is a kind of by rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device, and this device includes light source 1, spectrophotometric unit 2, A spatial filter 3A, B spatial filter 3C, A plano-convex lens 3B, B plano-convex lens 3D, A catoptron 4, B catoptron 7, depolarization Amici prism 5 and CMOS camera 6.Spectrophotometric unit 2 receives light source 1 emitting laser, and exports two bunch polarized lights, and wherein, a branch of is that A linearly polarized light 21, another bundle are B linearly polarized light 22; A linearly polarized light 21 is incident on the depolarization Amici prism 5 behind A spatial filter 3A, A plano-convex lens 3B, A catoptron 4 in turn; B linearly polarized light 22 is in turn through B spatial filter 3C, B plano-convex lens 3D, B catoptron 7, be incident on the depolarization Amici prism 5 after treating observed objects 14; Gathered by CMOS camera 6 at last.
Referring to shown in Figure 2, cooperating of a plurality of lifting supports and an erecting bed adopted in the assembling of spectrophotometric unit 2, guaranteed the direction of light transmission in the spectrophotometric unit 2.Adjustable attenuator 204 is installed on the D lifting support 204A continuously, A half-wave plate 201 is installed on the A lifting support 201A, polarization splitting prism 202 is installed on the B lifting support, and B half-wave plate 203 is installed on the C lifting support 203C, and C wave plate 205 is installed on the E lifting support 205A.In the present invention, lifting support is for buying device, and only need guarantee can stretch on above-below direction gets final product.Evenly have threaded hole on the erecting bed 206, cooperating of screw and nut adopted in the installation of the favourable lifting support of this threaded hole, and the relative distance adjustment between the lifting support, lifting support and the installation of erecting bed 206.
The light path of the digital holographic three-dimensional microscopic observation device of the present invention's design is connected to:
The centre wavelength of light source 1 outgoing is that the laser 1a of 532nm passes on the continuous adjustable attenuator 204 of spectrophotometric unit 2 and the A half-wave plate 201 and is incident on the polarization splitting prism 202, exports transmitted light 1b and reflected light 1c respectively;
Transmitted light 1b passes B half-wave plate 203 output A linearly polarized lights 21, and reflected light 1c passes C half-wave plate 205 output B linearly polarized lights 22;
Behind spatial filter 3A, plano-convex lens 3B, 4 reflection output reference light 4a are incident to depolarization Amici prism 5 to A linearly polarized light 21 through catoptron in turn;
B linearly polarized light 22 shines through catoptron 7 reflection output illumination light 7a and to treat on the observed objects 14 in turn behind spatial filter 3C, plano-convex lens 3D;
Under the irradiation of illumination light 7a, treat that observed objects 14 reflects the linear polarization scattered light 14a with object appearance information and is incident to depolarization Amici prism 5;
The reference light 4a of 5 pairs of incidents of depolarization Amici prism, the linear polarization scattered light 14a with object appearance information close optical processing and obtain combined light beam 5a, and the interference hologram that this combined light beam 5a forms is caught by the photosurface of CMOS camera 6.
In the present invention, the linearly polarized light of being told by spectrophotometric unit 2 21 is behind spatial filter 3A, plano-convex lens 3B, catoptron 4, and the reference light 4a of formation is incident to depolarization Amici prism 5, and this road light path can be called reference path.
In the present invention, the B linearly polarized light of telling by spectrophotometric unit 2 22 through the illumination light 7a behind spatial filter 3C, plano-convex lens 3D, the catoptron 7 expose to treat on the observed objects 14 after, the scattered light 14a with object appearance information that reflection or transmission form is incident to depolarization Amici prism 5, and this road light path can be called thing light light path.
By rotating B half-wave plate 203 and C half-wave plate 205 in the spectrophotometric unit 2 simultaneously, can the synchronous change reference path in the polarization direction of linearly polarized light 22 in linearly polarized light 21 and the illumination path, thereby make CMOS camera 6 several digital holograms of record.Several digital hologram utilization numerical approach reconstruct of gathering then by CMOS camera 6, thus high resolving power, low noise object dimensional space image synthesized.
In the present invention, light source 1 is used to the three-dimensional microscopic observation system of the present invention that optical information is provided, and the centre wavelength that this light source 1 provides is the laser of 532nm.
It is the laser 1a of 532nm that spectrophotometric unit 2 is used to receive from the centre wavelength of light source 1 outgoing on the one hand, and controls its intensity by adjusting continuous adjustable attenuator 204; On the other hand the laser 1a that receives is divided into linearly polarized light 21 and 22, and difference input space wave filter 3A and spatial filter 3C.Polarization splitting prism 202 places between A half-wave plate 201 and the B half-wave plate 203, and C half-wave plate 205 places the reflected light position of polarization splitting prism 202.Wherein, described A half-wave plate 201 is used for adjustment and polarization splitting prism that laser 1a with light emitted carries out the polarization direction and cooperates the beam intensity ratio that realizes transmitted light 1b and reflected light 1c adjustable continuously, and B half-wave plate 203 is used to adjust the polarization direction of the transmitted light 1b of polarization splitting prism 202; C half-wave plate 205 is used to adjust the polarization direction of the reflected light 1c of polarization splitting prism 202; Make the polarization state synchronous change of inclined to one side transmitted light 1b of line and 1c by rotating B half-wave plate 203 and C half-wave plate 205 simultaneously, realize the reference light and the thing light coherence stack of different polarization direction, obtain the digital hologram that multiframe comprises different polarization information.Adjust total light intensity of linearly polarized light 21 and 22 simultaneously by continuous adjustable attenuator 204, make the intensity distributions of hologram be in the camera dynamic range, thereby improved the signal to noise ratio (S/N ratio) of ginseng thing optical interference picture.
In the present invention, A half-wave plate 201, B half-wave plate 203 and C half-wave plate 205 can change the polarization direction of incident ray polarized light, can choose the quartzy zero level half-wave plate of the GCL-060411 model of photoelectricity company of Beijing Daheng production.
In the present invention, polarization splitting prism 202 has and 1 bundle incident light is divided into the two bundle directions of propagation are vertical, the light of polarization direction quadrature.Can choose the polarization splitting prism of the GCC-401102 model of photoelectricity company of Beijing Daheng production.
In the present invention, continuously adjustable attenuator 204 can be according to the rotation of disk and the linear luminous power that changes the outgoing spatial light can be the circular adjustable attenuator/spectroscope of GCO-0704M that photoelectricity company of Beijing Daheng produces.
In the present invention, spatial filter 3A and 3C can carry out spatial filtering to the laser beam of a branch of incident, obtain uniform outgoing hot spot, choose the GCM-O1M type spatial filter that photoelectricity company of Beijing Daheng produces.
In the present invention, plano-convex lens 3B and 3D are used for spatial filter 3A and the approximate pointolite emergent light expansion of 3C bundle are the directional light of certain size.The GCL-010115 type K9 plano-convex lens of selecting for use photoelectricity company of Beijing Daheng to produce.Plano-convex lens 3B and 3D can be installed in GCM-2701381M model lens/mirror support that photoelectricity company of Beijing Daheng produces.
In the present invention, catoptron 4 and 7 can be chosen the GCC-102102 model catoptron that photoelectricity company of Beijing Daheng produces, and is installed in the GCM-082305M model two dimension adjustment rack that photoelectricity company of Beijing Daheng produces.
In the present invention, depolarization Amici prism 5 has the synthetic a branch of light of incident light that the two bundle directions of propagation are vertical.Choose the NT49-004 model depolarization Amici prism that Singapore Edmund Optics Singapore Pte Ltd. company produces.
In the present invention, CMOS camera 6 can choose that Canadian Lumenera company produces, model is that LU125M-WOIR, resolution are that 1280 * 1024 pixels, frame frequency are that to be of a size of 2/3 inch, signaling interface be USB2.O for 15fps, photosurface.Several that can obtain for CMOS camera 6 contain the hologram image of scattered light three-dimensional information, and eliminate the speckle that reproduces in the picture based on average method of superposition and make an uproar.
Claims (5)
1. one kind is passed through rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device, and it is characterized in that: this device includes light source (1), spectrophotometric unit (2), spatial filter (3A, 3C), plano-convex lens (3B, 3D), catoptron (4,7), depolarization Amici prism (5) and CMOS camera (6);
Spectrophotometric unit (2) includes continuous adjustable attenuator (204), A half-wave plate (201), polarization splitting prism (202), B half-wave plate (203) and C wave plate (205); Polarization splitting prism (202) places between A half-wave plate (201) and the B half-wave plate (203), and C wave plate (205) places the reflected light position of polarization splitting prism (202), and the forward direction of A half-wave plate (201) is provided with continuous adjustable attenuator (204);
Light source (1) emitting laser (1a) passes on the continuous adjustable attenuator (204) of spectrophotometric unit (2) and the A half-wave plate (201) and is incident on the polarization splitting prism (202), exports transmitted light (1b) and reflected light (1c) respectively; Transmitted light (1b) passes B half-wave plate (203) output A linearly polarized light 21, and reflected light (1c) passes C half-wave plate (205) output B linearly polarized light (22); This laser (1a) is exported A linearly polarized light (21) and B linearly polarized light (22) respectively after spectrophotometric unit (2) carries out light-splitting processing;
A linearly polarized light (21) behind spatial filter (3A), plano-convex lens (3B), is incident to depolarization Amici prism (5) through catoptron (4) reflection output reference light (4a) in turn;
Behind spatial filter (3C), plano-convex lens (3D), through catoptron (7) reflection output illumination light (7a), illumination light (7a) shines to be treated on the observed objects (14) B linearly polarized light (22) in turn;
Under the irradiation of illumination light (7a), treat that observed objects (14) reflects the linear polarization scattered light (14a) with object appearance information and is incident to depolarization Amici prism (5);
Depolarization Amici prism (5) closes optical processing to the reference light (4a) of incident, linear polarization scattered light (14a) with object appearance information and obtains combined light beam (5a), and the interference hologram that this combined light beam (5a) forms is caught by the photosurface of CMOS camera (6);
Continuous adjustable attenuator (204) in the described spectrophotometric unit (2) is used for adjusting continuously the intensity that receives laser (1a), A half-wave plate (201) is used for adjustment and polarization splitting prism that laser (1a) with light emitted carries out the polarization direction and cooperates the beam intensity ratio that realizes transmitted light (1b) and reflected light (1c) adjustable continuously, and B half-wave plate (203) is used to adjust the polarization direction of the transmitted light (1b) of polarization splitting prism (202); Adopt C half-wave plate (205) can adjust reflected light (1c) linearly polarized light (22) of polarization splitting prism (202); Make the polarization state synchronous change of inclined to one side transmitted light of line (1b) and reflected light (1c) by rotating B half-wave plate (203) and C half-wave plate (205) simultaneously, realization has the line polarisation coherence stack of different polarization states, obtains the digital hologram that multiframe comprises different linear polarization information; By adjusting the light intensity summation of continuous adjustable attenuator (204), make the intensity distributions of hologram be in the dynamic range of camera simultaneously, improve the signal to noise ratio (S/N ratio) of ginseng thing optical interference picture A linearly polarized light (21) and B linearly polarized light (22).
2. according to claim 1 by rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device, it is characterized in that: the centre wavelength of light source (1) emitting laser (1a) is 532nm.
3. according to claim 1 by rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device, it is characterized in that: the A linearly polarized light of being told by spectrophotometric unit (2) (21) is behind spatial filter (3A), plano-convex lens (3B), catoptron (4), the reference light (4a) that forms is incident to depolarization Amici prism (5), and this road light path is called reference path.
4. according to claim 1 by rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device, it is characterized in that: the B linearly polarized light of telling by spectrophotometric unit (2) (22) through spatial filter (3C), plano-convex lens (3D), catoptron (7) expose to treat that observed objects (14) goes up after, the linear polarization scattered light (14a) with object appearance information that reflection or transmission form is incident to depolarization Amici prism (5), and this road light path is called thing light light path.
5. according to claim 1 by rotational line polarized light polarization state record and synthetic digital holographic three-dimensional microscopic observation device, it is characterized in that: in spectrophotometric unit (2) by rotating B half-wave plate (203) and C half-wave plate (205) simultaneously, the polarization direction of linearly polarized light (21) and illumination path center line polarisation (22) in can the synchronous change reference path, thus make CMOS camera (6) write down several digital holograms.
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