CN102270698B - Texturing system for solar silicon wafer - Google Patents
Texturing system for solar silicon wafer Download PDFInfo
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- CN102270698B CN102270698B CN2011101997911A CN201110199791A CN102270698B CN 102270698 B CN102270698 B CN 102270698B CN 2011101997911 A CN2011101997911 A CN 2011101997911A CN 201110199791 A CN201110199791 A CN 201110199791A CN 102270698 B CN102270698 B CN 102270698B
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- loading frame
- collecting tank
- walking mechanism
- crane
- hook joint
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention provides a texturing system for a solar silicon wafer. The texturing system comprises a shield, a fluid-collecting tank, two transport shelves and a loading frame, wherein multiple fluid storage cavities are arranged in the fluid-collecting tank, each transport shelf comprises a lifting shelf and a beam which are linked together, the outside of the fluid-collecting tank is provided with a walking mechanism, the lifting shelf is vertically connected with the walking mechanism, the beam stretches into the upper side of the fluid-collecting tank in a horizontal direction, two inserted bars which are in parallel with the lifting shelf are arranged on the beam, the lower end part of each inserted bar is provided with a hooking rod which is connected with the inserted bar as a whole, the hooking rods of the inserted bars on the two transport shelves stretch out in opposite directions; the two opposite end sides of the loading frame are respectively provided with two connecting rods arranged at intervals, the inserted bars hook the connecting rods in the interval between the two connecting rods; and a linkage mechanism is arranged on the walking mechanism and is used for changing the distance between the two transport shelves. The texturing system provided by the invention can be used for conveniently and fast realizing the connection between the transport shelves and the loading frame, and has high working efficiency and good connection stability between the transport shelves and the loading frame.
Description
Technical field
The present invention relates to a kind of for solar silicon wafers is carried out etching system
Background technology
Solar energy is widely used just day by day as a kind of clean energy resource.Silicon chip is of paramount importance element in the solar energy industry, and silicon chip needs in production procedure through the multiple tracks treatment process, in order to guarantee the photoelectric conversion result of silicon chip.The making herbs into wool operation of silicon chip surface is immersed in process in acid bath and the alkali lye pond to silicon chip exactly, and the silicon chip surface of processing through making herbs into wool can form microstructural crystal structure, has both increased the area of silicon chip surface, has also reduced the reflectivity of silicon chip to sunlight.When solar silicon wafers being carried out the making herbs into wool processing, solar silicon wafers is placed in the loading frame in advance, and loading frame is placed in the loading frame.Transfer carriage and loading frame phase hook joint, transfer carriage is realized transhipment to loading frame between the different liquid storage cylinder in collecting tank.The structure of the transfer carriage in the existing solar silicon wafers etching system comprises crane, and the upper end of crane is provided with overarm, and lower end and walking mechanism link, and overarm is provided with hook.Itself has elevating function crane, is used for loading frame is immersed in the liquid pool, or loading frame is enhanced in liquid pool.The walking mechanism that is connected with transfer carriage impels the crane integral level to move, thereby realizes that loading frame is mobile between different liquid pools.Crane in the existing transfer carriage and overarm are single, realize that loading frame and hook in the overarm link, and need to just can be achieved by means of operative employee's help, and operating speed is slow, and between hook and the loading frame to connect stability bad.
Summary of the invention
For overcoming defects, the objective of the invention is: a kind of solar silicon wafers etching system is provided, and connecting between transfer carriage and the loading frame in this device is convenient, and the good stability after connecting.
The present invention reaches the technical scheme that described purpose is taked: the solar silicon wafers etching system, comprise guard shield and be located at the interior collecting tank of guard shield, transfer carriage, loading frame, be provided with a plurality of liquid storage cylinders separated from one another in the collecting tank, be provided with container cavity in the loading frame, transfer carriage comprises crane and the overarm that links together, the outside at collecting tank is provided with walking mechanism, crane is connected on the walking mechanism vertically, the length of crane can change in the course of the work, overarm extend into the top of collecting tank with horizontal direction, overarm is provided with the two piece inserted links parallel with crane, the bottom of inserted link is provided with the hook joint bar that is connected as a single entity with it, described transfer carriage is two covers, and the hook joint bar of two cover transfer carriage upper plungers stretches out towards the outside the other way around; The opposite end side of described loading frame vertically is provided with respectively two connecting rods, has the interval between two connecting rods; Hook joint is lived connecting rod in the interval of inserted link between two connecting rods; Be provided with the link gear that the distance between the two cover transfer carriages is changed in walking mechanism.
When realizing connecting between this rotating turret and the loading frame, two transfer carriages are together adjacent in advance, transfer carriage run to loading frame above, or loading frame is when sliding into the below of transfer carriage, two pairs of inserted links in two overarms insert in the interval of connecting rod respectively, under the effect of link gear, the distance between two transfer carriages becomes large, the hook joint bar on each inserted link respectively stably hook joint on connecting rod.In the crane screw-type elevating mechanism can be set, or cylinder type lifting mechanism, under the effect of elevating mechanism, the height of crane can change, and transfer carriage can be immersed in loading frame in the corresponding liquid storage cylinder, or loading frame is sling in liquid storage cylinder.
The medium position place of described connecting rod outer peripheral face is provided with annular groove, and described hook joint bar hook joint is in groove.This can improve the stability that connects between hook joint bar and the connecting rod well.
The truncation surface of described groove is curved, and the upper surface of described hook joint bar is cancave cambered surface.Thereby further improved the stability that connects between hook joint bar and the connecting rod.
The two ends of container cavity are the opening shape in the described loading frame, are provided with some parallel dividing plates in container cavity, and partition becomes a plurality of tanks holding interior separation, is provided with some penetrating open-works on the wall body of loading frame and the dividing plate.Tank is the loading frame that is mounted with silicon chip for placement, and loading frame is provided with the interface arrangment that is connected to the tank oral area, and under the restriction effect of tank, loading frame has good positional stability in loading frame.Loading frame is bottomless, in addition set through hole on the loading frame, and after loading frame entered in the liquid storage cylinder, the solution in the liquid storage cylinder can be realized contacting with silicon chip surface rapidly, thus but Effective Raise operating efficiency.
Has the interval between adjacent two described tanks.Namely each tank is corresponding to two plate bodys, and this has made things convenient for places loading frame in the past tank, can not touch between the interface arrangment on adjacent two row's loading frames, has improved the positional stability of loading frame in tank.
Be provided with collector pipe in parallel in overarm, be arranged at intervals with some water spouts along its length direction on collector pipe, water spout communicates with collector pipe inside, and collector pipe communicates with water-supply-pipe.Water-supply-pipe communicates with water pump, in a liquid storage cylinder, hung out the process that is immersed in another liquid storage cylinder at loading frame, can the manual control pump working, water pump also can be to be automatically controlled, and in this course, water pump is in running order, thereby water spout can be sprayed water to silicon chip, so that silicon chip surface is moistening, reduce silicon chip surface because of the air-dry spot that is difficult for removal that produces, effectively guarantee the photoelectric conversion efficiency of silicon chip.
Described water spout is arranged on the collector pipe obliquely, and the angle on the two cover transfer carriages between the water spout is between 40 to 70 degree.The water spray circuit of these water spouts is relatively long, and the current that water spout sprays on two collector pipes intersect, and current can further reduce the spray blind area to silicon chip under mutual interference effect.
The outside at collecting tank is provided with guide rail, and described walking mechanism is slidably disposed on the guide rail, and number and position at the guide rail position place corresponding to liquid storage cylinder are provided with some position transducers, and position transducer is connected with drive motors in the walking mechanism.Be provided with the concave surface road wheel in the walking mechanism, road wheel is positioned on the guide rail, by cooperating of road wheel and guide rail, has improved the linearity of transfer carriage in moving process.In walking mechanism position transducer is done the time spent, position transducer can impel the drive motors in the walking mechanism to quit work, thereby make transfer carriage be parked in the front of corresponding liquid storage cylinder, so that transfer carriage is dipped into loading frame in this liquid storage cylinder, and loading frame is sling in this liquid storage cylinder.
Be provided with the tooth bar with guide rail parallel in the outside of collecting tank, be provided with the gear that is connected with drive motors in walking mechanism, wheel and rack is meshed.Provide comparatively mild power by the rolling of gear on tooth bar for the walking of walking mechanism, when drive motors stops operating under the effect of position transducer, tooth bar makes walking mechanism be in static shape one-tenth by gear, thereby has guaranteed transfer carriage positional accuracy in the course of the work.
Be provided with some penetrating pores at the guard shield dorsal part, be provided with extractor fan in the guard shield outside in the position of described pore.Extractor fan pumps to the pernicious gas that produces in the making herbs into wool process in the external world.
Beneficial effect of the present invention: in this etching system, connecting between transfer carriage and the loading frame, can realize the operating type of automation fully, need to be by means of operative employee's help, operating speed is fast, and can reduce the pernicious gas that produces in the making herbs into wool process to operative employee's infringement.Inserted link in two overarms can stably realize with loading frame between connect, connect good stability between rotating turret and the loading frame.
Description of drawings
Fig. 1 is the structural representation of transfer carriage in this solar silicon wafers etching system.
Fig. 2 is the structural representation when transfer carriage and loading frame link together in this solar silicon wafers etching system.
Fig. 3 is the structural representation of inserted sheet in this solar silicon wafers etching system.
Fig. 4 is the structural representation of this solar silicon wafers etching system.
Fig. 5 is the structural representation of loading frame in this solar silicon wafers etching system.
Embodiment
The structure of this solar silicon wafers making herbs into wool rotary device comprises collecting tank 22, transfer carriage 21, loading frame 16.The injury that the gas that produces in the making herbs into wool process for minimizing causes operative employee's health, loading frame 16 in described collecting tank 22, transfer carriage 21 and the course of work all is positioned at guard shield 19, have movable window at guard shield 19, so that the operative employee processes the certain situation that occurs in the making herbs into wool process.The dorsal part of guard shield 19 is provided with some penetrating pores 20, is provided with extractor fan in the outside of guard shield 19 in the position of pore 20, in order to the pernicious gas that produces in the making herbs into wool process is pumped in the external world.
Be provided with a plurality of liquid storage cylinders separated from one another in the collecting tank 22, liquid storage cylinder is uncovered, has contained successively respectively hydrofluoric acid and nitric acid mixed solution, clear water, sodium hydroxide solution, clear water in these liquid storage cylinders.Be provided with container cavity in the loading frame 16, be used for placing the loading frame that is mounted with silicon chip.Transfer carriage 21 comprises crane 5 and the overarm 9 that links together, be provided with walking mechanism 4 in the outside of collecting tank 22, crane 5 is connected on the walking mechanism 1 vertically, overarm 9 extend into the top of collecting tank 22 with horizontal direction, overarm is fixed with the two piece inserted links 7 parallel with crane 5 on 9, and inserted link 7 is parallel to crane 5, and inserted link 7 stretches to collecting tank 22, also be provided with the fixed lever 14 of fixing both between two inserted links 7, the bottom of inserted link 7 is provided with the hook joint bar 6 that is connected as a single entity with it.
The opposite end side of above-mentioned loading frame 16 vertically is provided with respectively two connecting rods 15, has the interval between these two connecting rods 15.When transfer carriage 21 linked with loading frame 16, hook joint bar 6 hook joints on the inserted link 7 in the transfer carriage 21 were on connecting rod 15.Realize hook joint bar 6 and connecting rod 15 phase hook joints, two overarms 9 are together adjacent in advance, this moment, a pair of hook joint bar 6 can be inserted in two intervals between the connecting rod 15, after inserted link 7 insertions put in place, under the effect of above-mentioned link gear, the distance of two overarms between 9 becomes large, thus make hook joint bar 6 can with connecting rod 15 phase hook joints.Medium position place at connecting rod 15 outer peripheral faces is provided with annular groove 26, the truncation surface of groove 26 is cambered surface, the upper surface of hook joint bar 6 is cancave cambered surface, hook joint bar 6 is with connecting rod 15 phase hook joints together the time, the upper surface of hook joint bar 6 contacts with the bottom surface of groove 26, connects good stability between hook joint bar 6 and the connecting rod 15.
Be provided with link gear in walking mechanism 4, during link gear work, two distances between the crane 5 changed.Described link gear can be screw body, also can be air cylinder structure.When being screw body, its structure comprises screw rod, and screw rod can be threaded with the bottom of a crane 5, also can be threaded simultaneously with the bottom of two cranes 5.When screw rod was threaded with a crane 5, the hand of spiral of screw thread did not require between screw rod and the crane 5, was relative fixing between another crane 5 and the walking mechanism 4 of this moment.When screw rod was threaded simultaneously with two cranes 5, the set externally threaded hand of spiral in screw rod both sides was opposite, and according to the different rotation directions of screw rod, two cranes 5 can be to move in opposite directions, or mobile round about.On the link gear of screw-type, generally transducer need to be set, to control the work range of this link gear, thereby limit the largest interval distances of two covers between the transfer carriages 21, and this largest interval distance generally is slightly less than on the loading frame 16 interval between two connecting rods that are set together 15.
Be provided with the connection part 8 that is connected as a single entity with it in the upper end of inserted link 7, connection part 8 is hollow, and connection part 8 is socketed in the periphery of overarm 9.Connection part 8 is generally non-circle between 9 with overarm and cooperates, like this can Effective Raise inserted link 7 and the positional stability between 9 of hanging oneself from a beam.Overarm 9 generally is rectangle, correspondingly also is provided with rectangular opening 18 in the described connection part 8, and this rectangular opening 18 is socketed in the overarm 9.For ease of the assembling between realization inserted link 7 and the overarm 9, and being convenient to the position of mobile inserted link 7 in overarm 9, is matched in clearance between rectangular opening 18 and the overarm 9.At connection part 8 screw 10 that has been threaded, screw 10 runs through the wall body of connection part 8, and the inner end top of screw 10 is pressed on the outer peripheral face of overarm 9.
After transfer carriage 21 links with loading frame 16, transfer carriage 21 can be immersed in loading frame 16 in the liquid storage cylinder in the collecting tank 22, or loading frame 16 hung out, and can move to another liquid storage cylinder position to loading frame 16 from a liquid storage cylinder position in liquid storage cylinder.When realizing loading frame 16 translation, because the Air Flow in the guard shield 19 is relatively anxious, silicon chip might be by air-dry in translation Surface During part, chemical analysis in the last liquid storage cylinder easily accumulates in the air-dry position of silicon chip surface and forms stain, this class spot is difficult for being removed by the solution in the liquid storage cylinder of downstream, thereby can have influence on the photoelectric conversion efficiency of silicon chip.Therefore, in this etching system, two overarms 9 be respectively arranged with one with the 9 parallel collector pipes 11 of hanging oneself from a beam, collector pipe 11 communicates with water-supply-pipe 13, length direction at collector pipe 11 is arranged at intervals with some water spouts 12, and water-supply-pipe 13 is used for being connected with water pump.Water spout 12 is arranged on the collector pipe 13 obliquely, and this refers to that the water outlet direction of water spout 12 is not in the vertical direction, and the angle between the water spout 12 on two collector pipes 13 is between 40 to 70 degree, and their angle is preferably 60 degree.Loading frame 16 by the translation process in, the silicon chips water spray of these water spouts 12 in the loading frame 16.The work of water pump can be automation control, can be by at crane 5 or guard shield 19 transducer being set, meeting trigger sensor work when crane 5 rises to a certain position, transducer is connected with water pump, after transducer is triggered, make the power turn-on of water pump, water pump is the water pump water that of water spout 12.When crane 5 drops to a certain position, crane 5 reverse trigger sensors, this transducer makes the dump of water pump, and water pump stops to water spout 12 pump water.
Two ends at loading frame 16 interior container cavities are the opening shape, and loading frame 16 is bottomless.Be provided with some parallel dividing plates 27 along its length direction in this container cavity, these dividing plates 27 are separated into a plurality of tanks 25 to described container cavity, are used for placing the loading frame that is mounted with silicon chip in the tank 25.Each tank 25 is interior can place a plurality of loading frames, is respectively equipped with the interface arrangment of protrusion on the two opposite outer face of loading frame, and interface arrangment is connected to the oral area of tank 25.For ease of placing loading frame, have the interval between adjacent two tanks 25, loading frame be placed into tank 25 interior after, can not touch between adjacent two row's loading frames.The wall body of loading frame 16, and be provided with penetrating open-work 17 on the dividing plate 27, these open-works 17 are towards tank 25.For increasing the intensity of dividing plate 27, be provided with connecting plate 28 in the interval between adjacent two tanks 25, the both ends of connecting plate 28 are connected to respectively on the side of two dividing plates 27.
Claims (10)
1. solar silicon wafers etching system, comprise guard shield and be located at the interior collecting tank of guard shield, transfer carriage, loading frame, be provided with a plurality of liquid storage cylinders separated from one another in the collecting tank, be provided with container cavity in the loading frame, transfer carriage comprises crane and the overarm that links together, the outside at collecting tank is provided with walking mechanism, crane is connected on the walking mechanism vertically, the length of crane can change in the course of the work, overarm extend into the top of collecting tank with horizontal direction, overarm is provided with the two piece inserted links parallel with crane, the bottom of inserted link is provided with the hook joint bar that is connected as a single entity with it, it is characterized in that: described transfer carriage is two covers, and the hook joint bar of two cover transfer carriage upper plungers stretches out towards the outside the other way around; The opposite end side of described loading frame vertically is provided with respectively two connecting rods, has the interval between two connecting rods; Hook joint is lived connecting rod in the interval of inserted link between two connecting rods; Be provided with the link gear that the distance between the two cover transfer carriages is changed in walking mechanism.
2. by etching system claimed in claim 1, it is characterized in that: the medium position place of described connecting rod outer peripheral face is provided with annular groove, and described hook joint bar hook joint is in groove.
3. by etching system claimed in claim 2, it is characterized in that: the truncation surface of described groove is curved, and the upper surface of described hook joint bar is cancave cambered surface.
4. by claim 1,2 or 3 described etching systems, it is characterized in that: the two ends of container cavity are the opening shape in the described loading frame, in container cavity, be provided with some parallel dividing plates, partition becomes a plurality of tanks holding interior separation, is provided with some penetrating open-works on the wall body of loading frame and the dividing plate.
5. by etching system claimed in claim 4, it is characterized in that: have the interval between adjacent two described tanks.
6. by claim 1,2 or 3 described etching systems, it is characterized in that: be provided with collector pipe in parallel in overarm, be arranged at intervals with some water spouts along its length direction on collector pipe, water spout communicates with collector pipe inside, and collector pipe communicates with water-supply-pipe.
7. by etching system claimed in claim 6, it is characterized in that: described water spout is arranged on the collector pipe obliquely, and the angle on the two cover transfer carriages between the water spout is between 40 to 70 degree.
8. by claim 1,2 or 3 described etching systems, it is characterized in that: the outside at collecting tank is provided with guide rail, described walking mechanism is slidably disposed on the guide rail, number and position at the guide rail position place corresponding to liquid storage cylinder are provided with some position transducers, and position transducer is connected with drive motors in the walking mechanism.
9. by etching system claimed in claim 8, it is characterized in that: be provided with the tooth bar with guide rail parallel in the outside of collecting tank, be provided with the gear that is connected with drive motors in walking mechanism, wheel and rack is meshed.
10. by claim 1,2 or 3 described etching systems, it is characterized in that: be provided with some penetrating pores at the guard shield dorsal part, be provided with extractor fan in the guard shield outside in the position of described pore.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101997911A CN102270698B (en) | 2011-07-18 | 2011-07-18 | Texturing system for solar silicon wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101997911A CN102270698B (en) | 2011-07-18 | 2011-07-18 | Texturing system for solar silicon wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102270698A CN102270698A (en) | 2011-12-07 |
| CN102270698B true CN102270698B (en) | 2013-01-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101997911A Expired - Fee Related CN102270698B (en) | 2011-07-18 | 2011-07-18 | Texturing system for solar silicon wafer |
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| CN (1) | CN102270698B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103985791B (en) * | 2014-06-04 | 2016-03-30 | 江苏汇景薄膜科技有限公司 | A kind of full-automatic immersion type nesa coating etching device |
| CN104826825A (en) * | 2015-05-13 | 2015-08-12 | 白峻光 | Surface cleaning device for solar cell module |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003086554A (en) * | 2001-09-11 | 2003-03-20 | Mitsubishi Heavy Ind Ltd | Semiconductor substrate manufacturing apparatus and method therefor |
| JP4273016B2 (en) * | 2004-02-10 | 2009-06-03 | キヤノン株式会社 | Method for manufacturing liquid discharge head |
| CN101097971B (en) * | 2007-06-30 | 2010-08-25 | 常州亿晶光电科技有限公司 | Monocrystaline silicon solar battery texture etching tank |
| KR20110023026A (en) * | 2009-08-28 | 2011-03-08 | (유)에스엔티 | Cassette transfer apparatus for solar cell wafer and wafer texturing apparatus for solar cell using the same |
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2011
- 2011-07-18 CN CN2011101997911A patent/CN102270698B/en not_active Expired - Fee Related
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| CN102270698A (en) | 2011-12-07 |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
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| CB02 | Change of applicant information |
Address after: Luqiao District of Taizhou city in Zhejiang province 318050 Tyrone Street No. 358 Applicant after: SOPRAY ENERGY CO., LTD. Address before: Luqiao District of Taizhou city in Zhejiang province 318050 Tyrone Street No. 358 Applicant before: Zhejiang Sopray Photoelectric Technology Co.,Ltd. |
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Free format text: CORRECT: APPLICANT; FROM: ZHEJIANG SOPRAY OPTOELECTRONIC TECHNOLOGY CO., LTD. TO: SOPRAY ENERGY CO., LTD. |
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| CB03 | Change of inventor or designer information |
Inventor after: Yu Yanjian Inventor before: Wu Shuiping |
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| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: WU SHUIPING TO: YU YANJIAN |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130130 Termination date: 20170718 |
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| CF01 | Termination of patent right due to non-payment of annual fee |