CN102269802B - Optical fiber interference type magnetic sensor probe - Google Patents
Optical fiber interference type magnetic sensor probe Download PDFInfo
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- CN102269802B CN102269802B CN 201110195865 CN201110195865A CN102269802B CN 102269802 B CN102269802 B CN 102269802B CN 201110195865 CN201110195865 CN 201110195865 CN 201110195865 A CN201110195865 A CN 201110195865A CN 102269802 B CN102269802 B CN 102269802B
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Abstract
The invention provides an optical fiber interference type magnetic sensor probe, which comprises an interferometer sensing arm, an interferometer referring arm, input polarization maintaining optical fibers, a Y waveguide integrated optical device, a polarization-maintaining optical fiber coupler, two paths of output polarization-maintaining optical fibers and a runway type framework. The interferometer sensing arm is formed by alternately connecting a plurality of multi-layer film structure sections and a plurality of bare optical fiber sections at intervals. The multi-layer film structure sections are the film-plated polarization-maintaining optical fibers, and a magnetostrictive material film layer, an insulating material film layer and a spiral coil layer is sequentially formed outside a fiber core of the polarization-maintaining optical fiber. The bare optical fiber sections are the polarization-maintaining optical fiber. Coils of adjacent two sections of multilayer file structure sections are connected in series in the bar optical fiber sections. The interferometer referring arm is made of polarization-maintaining optical fibers. The interferometer sensing arm and the interferometer referring arm are wounded in parallel and are fixed on the runway type framework. The runway type framework is internally provided with a cavity for accommodating the Y waveguide integrated optical device and the polarization-maintaining optical fiber coupler. The magnetic sensor probe provided by the invention has the beneficial effects that: the flexibility is improved, the volume is reduced and the consumed power is low.
Description
Technical field
The invention belongs to sensing and technical field of measurement and test, specifically, is a kind of sandwich construction optical fiber interference type magnetic sensing probe based on magnetostrictive effect for weak magnetic survey.
Background technology
Weak magnetic survey is widely used in military, national economy field.The method of measuring at present low-intensity magnetic field has a variety of, and main method comprises fluxgate method, magneto-optic pump method, proton method, superconductive quantum interference method and fiber senor method etc., and the magnetometer characteristics of utilizing the ultimate principle of these methods to make are different.Wherein, the fluxgate method is at first developed weak magnetic survey method, and the resolution of flux-gate magnetometer is generally 0.1nT～10nT, but volume is larger, and generally about Φ 85mm * 55mm, price is higher and temperature characterisitic is poor for its probe size; The optically pumped magnetometer precision is very high, but the probe size that is made of optical system and air chamber is larger, need to guarantee with strict method its stability, and generally about Φ 50mm * 200mm, the instrument volume is about 200mm * 100mm * 44mm for its probe size; The resolution 0.1nT of proton magnetometer, its volume are suitable for measuring the stationary magnetic field about 690mm * 270mm * 200mm, but are not suitable for measuring changing magnetic field; The Superconducting Quantum magnetometer is also the most expensive weak magnetic survey instrument of precision ceiling price now, and complex structure is bulky, working environment is required very high, mostly is applied at present medical treatment and magnetism of material research field.
Professor Ya Lifu of the U.S. in 1980 proposes to utilize magnetostriction materials that the method for Weak magentic-field is surveyed in the change of fiber phase first, and predicts that theoretically minimum detectable magnetic field can reach 10-16T; After this fiber optic weak magnetic field sensor has obtained major progress.The interference-type optical fiber Magnetic Sensor is a kind of of fiber optic weak magnetic field sensor, and its sonde configuration is very large on the sensitivity impact of sensor.Usually, the probe form of interference-type optical fiber Magnetic Sensor is: interferometer pickup arm optical fiber adopts adhesive type (perhaps sandwich style, right cylinder formula, clad type) and magnetostriction materials to combine, and tightly is wrapped on racetrack or the cylindrical skeleton; Then skeleton is placed in the solenoid coil.
Through existing technical literature retrieval is found, USN had once applied for American National patent (U.S. Patent number 5305075, on April 19th, 1994, a kind of magneto strictive sensors probe with adhesive type optical fiber magnetostrictive transducer of three winding Mach Zehnder interference instrument).
Shanghai Communications University had once applied for China national patent (China Patent No. on February 26th, 200510029291.8,2006, magnetic deformation optical fiber interference type magnetic sensing probe).
The problem that above-mentioned two patents of invention exist is: (1) because magnetostriction materials are combined not closely with optical fiber, the distortion of optical fiber under magnetic fields is insufficient, the sensitivity that causes popping one's head in is on the low side; (2) in order to measure direct current or AC magnetic field, must be probe placement in solenoid coil, utilize solenoid coil to produce to exchange or D.C. magnetic field to being modulated by measuring magnetic field, thereby cause that probe size is bigger than normal, coil power dissipation is large.
Summary of the invention
The present invention is directed to the problem that existing fiber interference type magnetic sensing probe volume is large, magnetostriction materials are combined with optical fiber not closely, consumed power is large, proposed a kind of sandwich construction optical fiber interference type magnetic sensing probe based on magnetostrictive effect.
The present invention will provide a kind of optical fiber interference type magnetic sensing probe, comprise: interferometer pickup arm, interferometer reference arm, input polarization maintaining optical fibre, Y waveguide integrated optical device, polarization-maintaining fiber coupler, two-way output polarization maintaining optical fibre and racetrack skeleton.
Described interferometer pickup arm is by some multi-layer film structure sections and some bare fibre sections space, alternately connect and compose.Each section of multi-layer film structure section is identical, all is the polarization maintaining optical fibre of plated film; The multi-layer film structure section is magnetostriction materials rete, insulating material rete and spiral wire ring layer from the polarization maintaining optical fibre fibre core outward successively; The spiral wire ring layer is the coil that the high conductivity metal material is made, the spiral fashion precession opposite direction of the coil of adjacent two sections multi-layer film structure sections.The bare fibre section is polarization maintaining optical fibre, and each section is identical.The coil of adjacent two sections multi-layer film structure sections connects in the serial connection mode in the bare fibre section.The two ends lead-in wire of coil lays respectively at the two ends of interferometer pickup arm.The input/output terminal of interferometer pickup arm namely is mutually the connect input/output terminal of a polarization maintaining optical fibre forming of the polarization maintaining optical fibre fibre core of multi-layer film structure section and bare fibre section.
Described interferometer reference arm is made by polarization maintaining optical fibre, and length equates with the interferometer pickup arm.Interferometer pickup arm and interferometer reference arm are twined side by side and are fixed on the racetrack skeleton.During winding, the multi-layer film structure section of interferometer pickup arm is positioned at the straightaway part of racetrack skeleton, and the bare fibre section is positioned at the bend part of racetrack skeleton.
Described racetrack skeleton adopts the insulation nonmagnetic substance to make, in have cavity, be used for placing Y waveguide integrated optical device and polarization-maintaining fiber coupler.
One end of input polarization maintaining optical fibre is connected to the input end of Y waveguide integrated optical device.Two output terminals of Y waveguide integrated optical device connect respectively an end of interferometer pickup arm and interferometer reference arm, and an other end of interferometer pickup arm and interferometer reference arm is connected to two input ends of polarization-maintaining fiber coupler.One end of two output polarization maintaining optical fibres connects respectively two output terminals of polarization-maintaining fiber coupler.
As a further improvement on the present invention, the skeleton of racetrack described in the present invention, its straight line place runway is arch slightly outwards.
During use, the external unit that is connected with optical fiber interference type magnetic sensing probe of the present invention comprises: laser instrument, photodetector, alternating-current voltage source (or current source) and control voltage.Connected mode is: the input polarization maintaining optical fibre is connected to the output of laser instrument; Two-way output polarization maintaining optical fibre connects respectively two photodetectors; Y waveguide integrated optical device electrode is connected with the control voltage of outside; The coil lead of interferometer pickup arm connects with the alternating-current voltage source of being connected or current source.
The invention has the beneficial effects as follows: adopt optical fiber and magnetostriction materials plated film mode, it is more tight that magnetostriction materials are combined with optical fiber, and the distortion of optical fiber under magnetic fields is abundant, and probe sensitivity is improved; Employing is made the spiral wire ring layer at optical fiber and is replaced existing solenoid coil, produce exchange or D.C. magnetic field to being modulated by measuring magnetic field, make that probe size reduces, coil power dissipation reduces.
Description of drawings
Fig. 1 is the optical fiber interference type magnetic sensing probe structural representation that a certain embodiment of the present invention provides;
Fig. 2 is the optical fiber interference type magnetic sensing probe structural representation that a certain embodiment of further improvement of the present invention provides;
Fig. 3 is interferometer pickup arm structural representation in a certain embodiment of the present invention;
Fig. 4 is the schematic cross-section of interferometer pickup arm plated film section in a certain embodiment of the present invention.
1-racetrack skeleton, the 2-Y wave-guide integrated optics device, the 3-polarization-maintaining fiber coupler, 4-inputs polarization maintaining optical fibre, 5-Y wave-guide integrated optics device contact conductor, 6-interferometer pickup arm, 7-interferometer reference arm, 8-interferometer pickup arm coil lead, 9-exports polarization maintaining optical fibre, 10-interferometer pickup arm multi-layer film structure section, 11-interferometer pickup arm bare fibre section, 12-interferometer pickup arm spiral coil, 13-polarization maintaining optical fibre fibre core, 14-magnetostriction materials rete, 15-insulating material rete, 16-spiral wire ring layer.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
Fig. 1 is the optical fiber interference type magnetic sensing probe structural representation that a certain embodiment of the present invention provides.As shown in the figure, this embodiment comprises racetrack skeleton 1, Y waveguide integrated optical device 2, polarization-maintaining fiber coupler 3, input polarization maintaining optical fibre 4, interferometer pickup arm 6, interferometer reference arm 7, output polarization maintaining optical fibre 9.Racetrack skeleton 1 adopts insulation nonmagnetic substance (nylon, teflon etc.) to make, and its shape is that the cross section is the cylinder of racetrack.Interferometer pickup arm 6 and interferometer reference arm 7 are wrapped in the outside surface of racetrack skeleton 1.The center of racetrack skeleton 1 has two cavitys, and a cavity is placed Y waveguide integrated optical device 2, and another cavity is placed polarization-maintaining fiber coupler 3.One end of input polarization maintaining optical fibre 4 is connected to the input end of Y waveguide integrated optical device 2, and the other end connects external laser.The end that interferometer pickup arm 6 is connected with interferometer reference arm connects respectively two output terminals of Y waveguide integrated optical device 2, interferometer pickup arm 6 and interferometer reference arm 7 are through after being wrapped in racetrack skeleton 1, and an other end connects respectively two input ends of polarization-maintaining fiber coupler 3.One end of two output polarization maintaining optical fibres 9 is connected to the output terminal of polarization-maintaining fiber coupler 3, and the other end connects respectively external photodetector.
Fig. 2 is the optical fiber interference type magnetic sensing probe structural representation that a certain embodiment of further improvement of the present invention provides.As shown in the figure, this embodiment comprises racetrack skeleton 1, Y waveguide integrated optical device 2, polarization-maintaining fiber coupler 3, input polarization maintaining optical fibre 4, Y waveguide integrated optical device contact conductor 5, interferometer pickup arm 6, interferometer reference arm 7, interferometer pickup arm coil lead 8, output polarization maintaining optical fibre 9.Racetrack skeleton 1 adopts the nonmagnetic substance (nylon, teflon etc.) of insulation to make, and racetrack skeleton 1 its straightaway is arch slightly outwards, so that the pickup arm distortion.Interferometer pickup arm 6 and interferometer reference arm 7 are wrapped in the outside surface of racetrack skeleton 1.The center of racetrack skeleton 1 has two cavitys, and a cavity is placed Y waveguide integrated optical device 2, and another cavity is placed polarization-maintaining fiber coupler 3.One end of input polarization maintaining optical fibre 4 is connected to the input end of Y waveguide integrated optical device 2, and the other end connects external laser.One end of interferometer pickup arm 6 and interferometer reference arm 7 is connected to two output terminals of Y waveguide integrated optical device 2, and an other end of interferometer pickup arm 6 and interferometer reference arm 7 is connected to two input ends of polarization-maintaining fiber coupler 3.One end of two output polarization maintaining optical fibres 9 is connected to the output terminal of polarization-maintaining fiber coupler 3, and the other end connects respectively external photodetector.
Fig. 3 is interferometer pickup arm structural representation in a certain embodiment of the present invention.As shown in the figure, comprise interferometer pickup arm multi-layer film structure section 10, interferometer pickup arm bare fibre section 11.Interferometer pickup arm multi-layer film structure section 10 is magnetostriction materials rete, insulating material rete from the polarization maintaining optical fibre fibre core outward successively, spiral coil 12.Interferometer pickup arm multi-layer film structure section 10 is spaced with interferometer pickup arm bare fibre section 11, the length of interferometer pickup arm multi-layer film structure section 10 equates that with the straight way section of racetrack skeleton 1 length of interferometer pickup arm bare fibre section 11 equates with the bend section of racetrack skeleton 1.The precession opposite direction of the spiral coil 12 of two adjacent interferometer pickup arm multi-layer film structure sections 10, and adjacent spiral coil 12 connects with series system through bare fibre section 11.
Fig. 4 is the schematic cross-section of interferometer pickup arm multi-layer film structure section in a certain embodiment of the present invention.As shown in the figure: the cross section of interferometer pickup arm multi-layer film structure section 10 from inside to outside is followed successively by: polarization maintaining optical fibre fibre core 13, magnetostriction materials rete 14, insulating material rete 15, spiral wire ring layer 16.
Can adopt following step to make the present invention.
The first step: select nylon, the insulation such as teflon nonmagnetic substance is made racetrack skeleton 1, and the outside surface polishing is made two rectangular cavitys in column body;
Second step: the polarization maintaining optical fibre of interferometer pickup arm 6 is placed in the organic solution, removes the coat of optical fiber surface, and fully dry in dryer; Equal the aluminium-foil paper of racetrack skeleton 1 bend length with length with bare fibre segmentation parcel, every spacer segment racetrack skeleton 1 straight way length;
The 3rd step: adopt magnetically controlled sputter method to have the soft magnetic material thin film of Magnetostriction in the optical fiber preparation of treated interferometer pickup arm 6;
The 4th step: remove the aluminium foil that covers on the interferometer pickup arm 6, adopt vacuum evaporation or magnetically controlled sputter method again to prepare insulating material (monox, silicon nitride etc.) film at the optical fiber of interferometer pickup arm 6;
The 5th step: adopt vacuum evaporation or magnetically controlled sputter method again to prepare good high conductivity metal material (silver, copper etc.) film at the optical fiber of interferometer pickup arm 6;
The 6th step: adopt laser ablation technique in the face of cylinder spiral coil of the interferometer pickup arm multi-layer film structure section 10 preparation micron order pitch that prepared, adjacent two sections keep the wide metallic film of micron order as the wire that connects two sections, and helical precession opposite direction; 6 preparations of interferometer pickup arm are finished;
The 7th step: the optical fiber of the same type of intercepting and interferometer pickup arm 6 equal length, consist of interferometer reference arm 7, interferometer reference arm 7 and interferometer pickup arm 6 are wrapped on the racetrack skeleton side by side, during winding, the multi-layer film structure section of interferometer pickup arm 7 is positioned at the straightaway part of racetrack skeleton 1, and the bare fibre section is positioned at the bend part of racetrack skeleton 1.Bend place at racetrack skeleton 1 is bonded at interferometer reference arm 7 and interferometer pickup arm 6 on the skeleton 1 with glue (such as 502 glue etc.).
The 8th step: interferometer pickup arm 6 and an end of interferometer reference arm 7 are connected to the output terminal of Y waveguide integrated optical device 2, and the other end is connected to the input end of polarization-maintaining fiber coupler 3;
The 9th step: an end of input polarization maintaining optical fibre 4 is connected to the input end of Y waveguide integrated optical device 2, and an end is placed on racetrack skeleton 1 outside;
The tenth step: output polarization maintaining optical fibre 9 one ends are connected to the output terminal of polarization-maintaining fiber coupler 3, and the other end is placed on racetrack skeleton 1 outside;
The 11 step: the end of interferometer pickup arm coil lead 8 is placed racetrack skeleton 1 outside; The end of Y waveguide integrated optical device contact conductor 5 is placed on racetrack skeleton 1 outside, and structure fabrication of the present invention is complete.
Claims (2)
1. optical fiber interference type magnetic sensing probe, comprise: interferometer reference arm (7), input polarization maintaining optical fibre (4), Y waveguide integrated optical device (2), polarization-maintaining fiber coupler (3), two-way output polarization maintaining optical fibre (9) and racetrack skeleton (1), it is characterized in that, also comprise interferometer pickup arm (6); Described interferometer pickup arm (6) is by some multi-layer film structure sections (10) and some bare fibre sections (11) space, alternately connect and compose; Each section of multi-layer film structure section (10) is identical, all is the polarization maintaining optical fibre of plated film; Multi-layer film structure section (10) is magnetostriction materials rete (14), insulating material rete (15) and spiral wire ring layer (16) from polarization maintaining optical fibre fibre core (13) outward successively; The coil that spiral wire ring layer (16) is made for the high conductivity metal material, the spiral fashion precession opposite direction of the coil of adjacent two sections multi-layer film structure sections (10); Bare fibre section (11) is polarization maintaining optical fibre, and each section is identical; The coil of adjacent two sections multi-layer film structure sections (10) connects in the serial connection mode in bare fibre section (11); The two ends lead-in wire of coil lays respectively at the two ends of interferometer pickup arm (6); The input/output terminal of interferometer pickup arm (6) namely is mutually the connect input/output terminal of a polarization maintaining optical fibre forming of the polarization maintaining optical fibre fibre core (13) of multi-layer film structure section (10) and bare fibre section; Described interferometer reference arm (7) is made by polarization maintaining optical fibre, and length equates with interferometer pickup arm (6); Interferometer pickup arm (6) twines side by side and is fixed on the racetrack skeleton (1) with interferometer reference arm (7); During winding, the multi-layer film structure section (10) of interferometer pickup arm (6) is positioned at the straightaway part of racetrack skeleton (1), and bare fibre section (11) is positioned at the bend part of racetrack skeleton; Described racetrack skeleton (1) adopts the insulation nonmagnetic substance to make, in have cavity, be used for placing Y waveguide integrated optical device (2) and polarization-maintaining fiber coupler (3); One end of input polarization maintaining optical fibre (4) is connected to the input end of Y waveguide integrated optical device (2); Two output terminals of Y waveguide integrated optical device (2) connect respectively an end of interferometer pickup arm (6) and interferometer reference arm (7), and an other end of interferometer pickup arm (6) and interferometer reference arm (7) is connected to two input ends of polarization-maintaining fiber coupler (3); One end of two output polarization maintaining optical fibres (9) connects respectively two output terminals of polarization-maintaining fiber coupler (3).
2. a kind of optical fiber interference type magnetic sensing probe according to claim 1 is characterized in that described racetrack skeleton (1), and its straight line place runway is arch slightly outwards.
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| CN 201110195865 CN102269802B (en) | 2011-07-13 | 2011-07-13 | Optical fiber interference type magnetic sensor probe |
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| CN 201110195865 CN102269802B (en) | 2011-07-13 | 2011-07-13 | Optical fiber interference type magnetic sensor probe |
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| CN102269802B true CN102269802B (en) | 2013-05-01 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104913839B (en) * | 2015-06-23 | 2017-08-29 | 哈尔滨工业大学 | A kind of pulsation sensors based on optical fiber M Z interferometers |
| US11674899B2 (en) * | 2017-09-01 | 2023-06-13 | Meep Bv | Photonic interferometer based sensing |
| CN109814048A (en) * | 2019-02-01 | 2019-05-28 | 北京交通大学 | For measuring the optical-electronic oscillator and its measurement method in magnetic field |
| CN111896896B (en) * | 2019-05-06 | 2021-09-07 | 上海交通大学 | Giant magneto-impedance magnetic sensor based on magneto-electric double-resonance mode |
| CN112763945B (en) * | 2020-12-21 | 2022-05-27 | 浙江大学 | Double-spiral planar waveguide magnetic field sensor and manufacturing method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4687993A (en) * | 1986-01-23 | 1987-08-18 | Geo-Centers, Inc. | Fiber optic magnetic field sensing transducer having a resonant structure |
| US5305075A (en) * | 1993-01-29 | 1994-04-19 | The United States Of America As Represented By The Secretary Of The Navy | Magnetostrictive transducer system having a three dual-strip fiber optic magnetostrictive transducers bonded into a single fiber mach-zehnder interferometer |
| CN1737602A (en) * | 2005-09-01 | 2006-02-22 | 上海交通大学 | Magnetic deformation optical fiber interference type magnetic sensing probe |
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2011
- 2011-07-13 CN CN 201110195865 patent/CN102269802B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4687993A (en) * | 1986-01-23 | 1987-08-18 | Geo-Centers, Inc. | Fiber optic magnetic field sensing transducer having a resonant structure |
| US5305075A (en) * | 1993-01-29 | 1994-04-19 | The United States Of America As Represented By The Secretary Of The Navy | Magnetostrictive transducer system having a three dual-strip fiber optic magnetostrictive transducers bonded into a single fiber mach-zehnder interferometer |
| CN1737602A (en) * | 2005-09-01 | 2006-02-22 | 上海交通大学 | Magnetic deformation optical fiber interference type magnetic sensing probe |
Non-Patent Citations (3)
| Title |
|---|
| 全保偏M-Z型光纤磁场传感***实验研究;李智忠等;《光电子•激光》;20041031;第15卷(第10期);第1158-1161页：引言第1-3段，实验结果及数据分析第1段，图1 * |
| 李智忠等.全保偏M-Z型光纤磁场传感***实验研究.《光电子• |
| 激光》.2004,第15卷(第10期),第1158-1161页：引言第1-3段，实验结果及数据分析第1段，图1. |
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