CN102251979B - Magnetic levitation molecular pump unstability recovery control method - Google Patents
Magnetic levitation molecular pump unstability recovery control method Download PDFInfo
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- CN102251979B CN102251979B CN201110186730.1A CN201110186730A CN102251979B CN 102251979 B CN102251979 B CN 102251979B CN 201110186730 A CN201110186730 A CN 201110186730A CN 102251979 B CN102251979 B CN 102251979B
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- 238000000034 method Methods 0.000 title claims abstract description 55
- 238000005339 levitation Methods 0.000 title claims abstract description 24
- 230000005484 gravity Effects 0.000 claims abstract description 39
- 238000000605 extraction Methods 0.000 claims abstract description 11
- 239000000725 suspension Substances 0.000 claims description 119
- 238000009792 diffusion process Methods 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 18
- 230000000740 bleeding effect Effects 0.000 claims description 9
- 239000000523 sample Substances 0.000 claims description 7
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- 238000013459 approach Methods 0.000 description 2
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- 230000005540 biological transmission Effects 0.000 description 1
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Abstract
The invention discloses a magnetic levitation molecular pump unstability recovery control method. The method comprises the following steps of: after a rotator of a magnetic levitation molecular pump is destabilized, switching a controller of the magnetic levitation molecular pump to an unstability recovery controller, turning off a motor of the magnetic levitation molecular pump, closing an air extraction port of the magnetic levitation molecular pump and an air extraction valve of a preceding stage machinery pump, opening an air discharge valve of the magnetic levitation molecular pump to discharge air, and then closing the air discharge valve; according to the state of the gravity center position of the rotator, recovering the rotator to normally suspend upward in a lower radial direction or an upper radial direction; recovering the rotator to normally suspend in other radial direction and the axial direction sequentially; and continuously detecting whether the rotator can suspend normally in the axial direction in which the rotor can suspend to finally realize resuspension of the rotator. The technical problem that a large amount of test data is needed, and the unstability recovery system of the magnetic levitation molecular pump cannot be suitable for pumps of various types in the prior art is solved, and the magnetic levitation molecular pump unstability recovery control method is used for unstability condition recovery of various magnetic levitation molecular pumps, and is short in recovery time, and has a good effect.
Description
Technical field
The present invention relates to a kind of maglev molecular pump controlling method, specifically a kind of magnetic levitation molecular pump unstability recovery control method.
Background technique
Molecular pump be utilize High Rotation Speed rotor MOMENTUM TRANSMISSION to gas molecule, make it to obtain directed velocity, thus compressed, be driven to a kind of vacuum pump of taking away for prime after relief opening.Maglev molecular pump is to utilize magnetic bearing to produce electromagnetic force to make rotor suspension aloft, realizes a kind of novel high-performance molecular pump that the contact of machinery-free between rotor and stator and rotor-position can ACTIVE CONTROL.Because maglev molecular pump has without friction, without advantages such as lubricated, pollution-free, high-speed, life-span are long, therefore maglev molecular pump is widely used in the vacuum acquisition field of condition of high vacuum degree, high-cleanness, high.
Because maglev molecular pump is a kind of machinery of High Rotation Speed, it relies on magnetic bearing by its rotor suspension aloft.For in magnetic bearing power-off or the situation lower support rotor that cannot normally work of breaking down rotate, be provided with and radially protect bearing and axial protection bearing, radially protect bearing and axially protection bearing be all generally mechanical bearing.Because the working speed of maglev molecular pump turns above several ten thousand, if its rotor falls under working speed, rotor can drop on protection bearing, and protection bearing can be subject to enormous impact.Rotor random motion on protection bearing, can cause the heavy wear of protection bearing, if recover not in time the normal suspension of rotor, will make to protect bearing life greatly to shorten.After rotor drops on protection bearing, rotor enters nonlinear motion state, and common magnetic bearing control system cannot recover maglev molecular pump normally works, and therefore maglev molecular pump need to arrange unstability recovery control system.
A kind of maglev molecular pump unstability recovery device is disclosed in patent documentation EP2006556A1, this device utilizes position transducer and speed probe to measure and calculate displacement vector and the rotor line speed of rotor after unstability, then utilize control algorithm to select suitable restoring force, rotor is recovered from instability status.The method need to obtain by a large amount of tests the value of suitable restoring force, sets up restoring force table described in this patent, and after the power value that is restored, needs to select the first controller output described in suitable weight factor and this patent to superpose.Use this control system, if molecular pump model difference, or rotor falls situation not in predefined database, and in this controller, the parameter of storage possibly cannot realize its unstability restore funcitons.
Summary of the invention
For this reason, technical problem to be solved by this invention is that the unstability recovery system of maglev molecular pump of the prior art needs a large amount of survey data, has the restriction of data blind spot, unstability restore funcitons tested person data, thereby proposes a kind of maglev molecular pump unstability recovery control system and method without measuring in a large number, have better unstability recovery effects.
For solving the problems of the technologies described above, magnetic levitation molecular pump unstability recovery control method of the present invention, comprises following process:
(1) after the rotor unstability of maglev molecular pump, maglev molecular pump controller switching is to unstability recovery controller, and described unstability recovery controller is closed maglev molecular pump motor, and utilizes motor brake system to make the rapid reduction of speed of motor;
(2) described control instability device cuts out maglev molecular pump bleeding point and prime mechanical pump extraction valve, then opens maglev molecular pump bleed valve and puts into air, closes subsequently described maglev molecular pump bleed valve;
(3) according to described rotor c.g. location status, select first recover described rotor under radially or on footpath upwards normally suspend, then recover the normal suspension upwards in another footpath of described rotor, described rotor under radially and on radially all can normally suspend after, recover described rotor in axially normal suspension, thereby realize described rotor Eddy diffusion;
(4) after described rotor Eddy diffusion, maglev molecular pump controller switching is to normal working controller, opening prime mechanical pump extraction valve continues to bleed, restart maglev molecular pump motor, utilize vacuum measuring instrument to measure the degree of vacuum in the pump housing of molecular pump, when the degree of vacuum in the molecular pump pump housing reaches after requirement, open described maglev molecular pump bleeding point, recover described maglev molecular pump and normally work.
In described step (3), the center of gravity of described rotor is on described between radial direction magnetic bearing and described lower radial direction magnetic bearing, and the distance of establishing between radial direction magnetic bearing and lower radial direction magnetic bearing is L, and the possible state of the position of centre of gravity of described rotor is as follows:
A condition: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing be [0,0.25L);
B state: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing be [0.25L, 0.5L);
C state: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing is (0.5L, 0.75L);
D state: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing is [0.75L, L];
E state: the center of gravity of described rotor is midpoint between upper radial direction magnetic bearing and lower radial direction magnetic bearing, the distance between itself and upper radial direction magnetic bearing is 0.5L;
If when the position of centre of gravity of described rotor is A condition or C state, first recover described rotor at lower radial suspension, then recover described rotor at upper radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion;
If when the position of centre of gravity of described rotor is B state or D state, first recover described rotor at upper radial suspension, then recover described rotor at lower radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion;
If when the position of centre of gravity of described rotor is E state, can first recover described rotor at upper radial suspension, also can first recover described rotor at lower radial suspension, then recover described rotor at another radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion.
the position of centre of gravity of described rotor is under A or C state, and the process of described rotor Eddy diffusion is as follows:
step 1, recover described rotor at lower radial suspension, its process is as follows:
1.1, first described unstability recovery controller controls described upper radial direction magnetic bearing and the fixing magnetic force of described axial magnetic bearing output, suppress described rotor in upper radial and axial vibration, then utilize position transducer detect described rotor under radially whether can recover suspend, if recover suspend recover described rotor under radially locate suspend, go to step two; As do not recovered at lower radial suspension, control the fixing magnetic force of described lower radial direction magnetic bearing output, suppress described rotor under vibration radially, then carry out next step;
1.2, described unstability recovery controller utilizes speed detector to detect the rotating speed of rotor described in this moment, then select to be suitable for the control parameter of this rotating speed, utilize position transducer detect described rotor under radially whether can normally suspend, if recover suspend recover described rotor under radially locate suspend; The fixing magnetic force of lower radial direction magnetic bearing output as described in controlling as do not recovered, suppress described rotor under vibration radially, repeating step 1.2 until described rotor under radially locate to suspend;
step 2, recover described rotor at upper radial suspension, its process is as follows:
2.1, when described rotor under radially locate after normal suspension, described unstability recovery controller utilizes described speed detector to detect this moment rotor speed, then select the control parameter that is applicable to described rotating speed to recover radial direction magnetic bearing control, whether utilize described position transducer to detect described upper radial direction magnetic bearing place rotor can normally suspend, if described rotor can not recover normal suspension, control the fixing magnetic force of described upper radial direction magnetic bearing output, suppress described rotor in upper radial vibration, then repeat this step, until rotor can normally suspend upper radially locating,
2.2, when rotor upper radially recover to suspend after, described unstability recovery controller utilize described position transducer detect described rotor under whether still radially locate normally to suspend, if rotor under radially locate still normally to suspend, carry out step 3; If rotor under radially locate unstability, need again to make the fixing magnetic force of lower radial direction magnetic bearing output, suppress rotor under radially locate vibration, by adjustment control parameter again realize rotor under stable suspersion radially, realize rotor under after stable suspersion radially, unstability recovery controller utilizes position transducer detection rotor normally to suspend upper whether still radially locate, if rotor upper radially and under radially all can normally suspend, carry out step 3; If rotor can not normally suspend upper radially locating, need again to make the fixing magnetic force of radial direction magnetic bearing output, suppress described rotor in upper vibration radially, adjust control parameter and make rotor can recover normal suspension upper radially locating; So constantly repeated attempt, until rotor upper radially and under radially locate all can normally suspend;
step 3, recover the axial suspension of described rotor, its process is as follows:
3.1, when rotor upper radially and under while radially locating all can normally suspend, attempt recovering axial magnetic bearing control, first unstability recovery controller utilizes speed probe to detect the now rotating speed of described rotor, then select the control parameter that is applicable to described rotating speed to recover axial magnetic bearing control, utilize position transducer detection rotor axially whether can normally suspend, if rotor can not recover normal suspension, control the fixing magnetic force of axial magnetic bearing output, suppress described rotor in axial vibration, constantly repeated attempt, until can normally suspend at axial magnetic bearing place rotor,
3.2, until rotor after axially can normally suspending, utilize position transducer detection rotor under radially and on radially whether can normally suspend, if rotor under radially locate normally to suspend, by step 1.2 again realize rotor under suspension radially; If rotor cannot normally suspend upper radially locating, again realize rotor in upper suspension radially by step 2.1,2.2, constantly repeat above-mentioned steps, until upper radial direction magnetic bearing, lower radial direction magnetic bearing and axial magnetic bearing all recover normal work, rotor can normally suspend.
the position of centre of gravity of described rotor is under B or D state, and the process of described rotor Eddy diffusion is as follows:
step 1, recover described rotor at upper radial suspension, its process is as follows:
1.1, first described unstability recovery controller controls described lower radial direction magnetic bearing and the fixing magnetic force of described axial magnetic bearing output, suppress described rotor in lower radial and axial vibration, then utilizing position transducer to detect described rotor upper radially whether can recovery suspends, recover described rotor if recover to suspend and suspend upper radially locating, go to step two; As described in controlling as do not recovered, the fixing magnetic force of upper radial direction magnetic bearing output, suppresses described rotor in upper vibration radially, then carries out next step;
1.2, described unstability recovery controller utilizes speed detector to detect the rotating speed of rotor described in this moment, then select to be suitable for the control parameter of this rotating speed, utilize position transducer to detect described rotor and radially whether can normally suspend upper, suspend upper radially locating if recovery suspension recovers described rotor; As described in controlling as do not recovered, the fixing magnetic force of upper radial direction magnetic bearing output, suppresses described rotor in upper vibration radially, repeating step 1.2 until described rotor suspend upper radially locating;
step 2, recover described rotor at lower radial suspension, its process is as follows:
2.1, when described rotor is radially located after normal suspension upper, described unstability recovery controller utilizes described speed detector to detect this moment rotor speed, then select the control parameter that is applicable to described rotating speed to recover lower radial direction magnetic bearing control, whether utilize described position transducer to detect described lower radial direction magnetic bearing place rotor can normally suspend, if described rotor can not recover normal suspension, control the fixing magnetic force of described lower radial direction magnetic bearing output, suppress described rotor in lower radial vibration, then repeat this step, until rotor under radially locate normally to suspend,
2.2, when rotor under radially recover to suspend after, described unstability recovery controller is utilized described position transducer to detect described rotor and is normally suspended upper whether still radially locate, if rotor still normally suspends upper radially locating, carries out step 3; If rotor is in the upper unstability of radially locating, need again to make the fixing magnetic force of radial direction magnetic bearing output, suppressing rotor vibrates upper radially locating, control parameter by adjustment and again realize rotor at upper radially stable suspersion, realize rotor after upper stable suspersion radially, unstability recovery controller utilize position transducer detection rotor under whether still radially locate normally to suspend, if rotor upper radially and under radially all can normally suspend, carry out step 3; If rotor under radially locate normally to suspend, need again to make the fixing magnetic force of lower radial direction magnetic bearing output, suppress described rotor under vibration radially, adjust control parameter make rotor under radially locate to recover normal suspension; So constantly repeated attempt, until rotor upper radially and under radially locate all can normally suspend;
step 3, recover the axial suspension of described rotor, its process is as follows:
3.1, when rotor upper radially and under while radially locating all can normally suspend, attempt recovering axial magnetic bearing control, first unstability recovery controller utilizes speed probe to detect the now rotating speed of described rotor, then select the control parameter that is applicable to described rotating speed to recover axial magnetic bearing control, utilize position transducer detection rotor axially whether can normally suspend, if rotor can not recover normal suspension, control the fixing magnetic force of axial magnetic bearing output, suppress described rotor in axial vibration, constantly repeated attempt, until can normally suspend at axial magnetic bearing place rotor,
3.2, until rotor after axially can normally suspending, utilize position transducer detection rotor upper radially and under radially whether can normally suspend, if rotor cannot normally suspend upper radially locating, again realize rotor in upper suspension radially by step 1.2; If rotor under radially locate normally to suspend, by step 2.1,2.2 again realize rotor under suspension radially, constantly repeat above-mentioned steps, until upper radial direction magnetic bearing, lower radial direction magnetic bearing and axial magnetic bearing all recover normal work, rotor can normally suspend.
In described step (2), the speed of putting into air be 5sccm to 20sccm, the time of putting into air is that 10s is to 20s.
In described step (2), the speed of putting into air is 16sccm, and the time of putting into air is 12s.
Technique scheme of the present invention has the following advantages compared to existing technology,
(1) magnetic levitation molecular pump unstability recovery control method of the present invention, when after maglev molecular pump rotor unstability, controls it by unstability recovery controller and resumes work.First close maglev molecular pump motor, and utilize motor brake system to make the rapid reduction of speed of motor, described control instability device cuts out maglev molecular pump bleeding point and prime mechanical pump extraction valve, to prevent from destroying the degree of vacuum in user's container; For system is settled out as early as possible, in the pump housing, put into micro-air to increase system damping simultaneously, make rotor reduction of speed as early as possible; According to the position of centre of gravity difference of described rotor, select first to recover the normal suspension upwards of which footpath, and then recover the normal suspension upwards of another footpath, after recovering diametrically to suspend, then suspension on recovering axially, finally realize rotor Eddy diffusion; This unstability recovery control method; by upper radially, under radially, axially on successively normal suspension realize final recovery and normally suspend; undertaken by continuous trial; finally reach completely and recover; avoid existing in prior art data blind spot; the problem that cannot normally recover is in some cases the unstability recovery control method of the maglev molecular pump that a kind of Recovery time is short, recovery process is simple, restorability is good.
(2) state that described rotor c.g. position may exist is divided into A, B, C, D, five states of E, when rotor c.g. is during near upper radial direction magnetic bearing (B state), goes up radial direction magnetic bearing place rotor and easily recovers to suspend; When rotor c.g. near under radially time (C state), descend radial direction magnetic bearing place rotor easily to recover; But, when rotor c.g. too approaches radially time (A condition), descend the difficulty of radial suspension to increase, rotor is upper radially recover to suspend in the situation that, be difficult for recovering under suspension radially, therefore first trial realize rotor under suspension radially; If in like manner the center of gravity of rotor too approach under radially time (D state), first attempt recovering rotor in upper suspension radially; In the time that rotor c.g. is positioned at up and down neutral position radially (E state), all can first recover up and down radially, suitable recovery order is so set according to actual needs, make rotor normally suspension successively, improve resume speed, there is good unstability restorability.
(3) magnetic levitation molecular pump unstability recovery control method of the present invention, when rotor first recovers as required radial suspension in recovery process, first control described upper radial direction magnetic bearing and the fixing magnetic force of described axial magnetic bearing output, suppress described rotor in upper radial and axial vibration, then utilize position transducer detect described rotor under radially whether can recover suspend.If rotor under radially can not recover to suspend; control the fixing magnetic force of described lower radial direction magnetic bearing output, suppress described rotor under vibration radially, again attempt recovering, until radially realize normal suspension upper; Then attempt recovering lower radial suspension, lower radial suspension method and upper suspension process are radially similar.After lower radial suspension, more again detect upper and radially whether still can normally suspend, again recover again as can not be normally suspended, through such circulation, finally reach upper and lower radial suspension; Finally recover axial suspension, axially can normal suspension detect and upper and lowerly radially normally suspend, can not again recover, through circulating, recovery finally reaches radially, lower radial and axial suspension completely, the process that this circulation recovers has guaranteed that system finally can reach the state of stable suspersion, has improved the performance that system unstability is recovered.
(4) magnetic levitation molecular pump unstability recovery control method of the present invention, in described step (1), close after described maglev molecular pump motor, utilize motor brake system that rotor is slowed down rapidly, along with rotor speed declines, the vibratory output of rotor reduces, and can realize at short notice rotor Eddy diffusion.
(5) magnetic levitation molecular pump unstability recovery control method of the present invention, in described step (2), the speed of putting into air is that 5sccm is to 20sccm, preferably 16sccm, the time of putting into air is that 10s is to 20s, preferably 12s, discharge quantity needs strict control, because rotor is in the time of High Rotation Speed, if pass into air, impeller agitation air can cause the pump housing to generate heat rapidly, therefore need the air amount of putting into remain within the scope of this, avoided moment to put into large quantity of air, the situation that impeller bursts apart occurs.
Accompanying drawing explanation
For content of the present invention is more likely to be clearly understood, below according to a particular embodiment of the invention and by reference to the accompanying drawings, the present invention is further detailed explanation, wherein
Fig. 1 is that maglev molecular pump unstability of the present invention is recovered control gear schematic diagram;
Fig. 2, Fig. 3 are respectively the flow charts of the maglev molecular pump unstability recovery process of rotor c.g. of the present invention in the time of diverse location;
In figure, reference character is expressed as: 1-prime mechanical pump, 2-prime mechanical pump extraction valve, 3-maglev molecular pump bleed valve, the 4-magnetic bearing molecular pump pump housing, 5-maglev molecular pump bleeding point, on 6-, radially protect bearing, the upper radial position sensor of 7-, the upper radial direction magnetic bearing of 8-, 9-maglev molecular pump rotor, 10-maglev molecular pump impeller, 11-thrust disc, 12-maglev molecular pump motor, radial direction magnetic bearing under 13-, under 14-, radially protect bearing, radial position sensor under 15-, 16-axially protects bearing, 17-axial magnetic bearing, 18-axial position sensor, 19-speed detector, 20-position detecting device, 21-maglev molecular pump controller.
Embodiment
Provide a concrete mode of execution of the present invention below, the control gear of maglev molecular pump unstability recovery system as shown in Figure 1, comprises following part: prime mechanical pump 1, prime mechanical pump extraction valve 2, maglev molecular pump bleed valve 3, the magnetic bearing molecular pump pump housing 4, maglev molecular pump bleeding point 5, on radially protect bearing 6, upper radial position sensor 7, upper radial direction magnetic bearing 8, maglev molecular pump rotor 9, maglev molecular pump impeller 10, thrust disc 11, maglev molecular pump motor 12, lower radial direction magnetic bearing 13, under radially protect bearing 14, lower radial position sensor 15, axially protection bearing 16, axial magnetic bearing 17, axial position sensor 18, speed detector 19, position detecting device 20, maglev molecular pump controller 21, wherein maglev molecular pump controller 21 comprises normal working controller and unstability recovery controller, because under described maglev molecular pump rotor 9 normal states being vertically places, therefore by being radially called radially of its upper end, under being radially called of lower end radially.
Magnetic levitation molecular pump unstability recovery control method of the present invention is as follows:
(1) after rotor 9 unstabilitys of maglev molecular pump, maglev molecular pump controller 21 is switched to unstability recovery controller, and described unstability recovery controller is closed maglev molecular pump motor 12, and utilizes motor brake system to make the rapid reduction of speed of motor;
(2) described control instability device cuts out maglev molecular pump bleeding point 5 and prime mechanical pump extraction valve 2, then open maglev molecular pump bleed valve 3 and put into air, the speed of putting into air is that 16sccm(sccm is volume flowrate unit, English full name: standard-state cubic centimeter per minute, meaning is mark condition milliliter per minute), the time of putting into air is 12s(second), close subsequently described maglev molecular pump bleed valve 3;
(3) according to the location status of described maglev molecular pump rotor 9 centers of gravity, select first recover described rotor under radially or on footpath upwards normally suspend, then recover the normal suspension upwards in another footpath of described rotor, described rotor under radially and on radially all can normally suspend after, recover described rotor in axially normal suspension, thereby realize described rotor Eddy diffusion;
In this step, the position of described maglev molecular pump rotor 9 centers of gravity presets, the center of gravity of described rotor is on described between radial direction magnetic bearing 8 and described lower radial direction magnetic bearing 13, if the distance between upper radial direction magnetic bearing 8 and lower radial direction magnetic bearing 13 is L, the possible state of the position of centre of gravity of predefined described rotor is as follows:
A condition: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing is very near, for example rotor c.g. and upper radial direction magnetic bearing distance be [0,0.25L);
B state: the close together between the center of gravity of described rotor and upper radial direction magnetic bearing, for example rotor c.g. and upper radial direction magnetic bearing distance be [0.25L, 0.5L);
C state: the close together between the center of gravity of described rotor and lower radial direction magnetic bearing, for example rotor c.g. and upper radial direction magnetic bearing distance are (0.5L, 0.75L);
D state: the distance between the center of gravity of described rotor and lower radial direction magnetic bearing is very near, for example rotor c.g. and upper radial direction magnetic bearing distance are [0.75L, L];
E is at state: the center of gravity of described rotor is midpoint between upper radial direction magnetic bearing and lower radial direction magnetic bearing, and the distance between itself and upper radial direction magnetic bearing is 0.5L;
The border of above-mentioned threshold value can be adjusted as the case may be a little.
(1) if when the position of centre of gravity of described rotor is A condition or C state, first recover described rotor at lower radial suspension, then recover described rotor at upper radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion, detailed process is as follows, flow chart as shown in Figure 2:
step 1, recover described rotor at lower radial suspension, its process is as follows:
1.1, first described unstability recovery controller controls described upper radial direction magnetic bearing 8 and the fixing magnetic force of described axial magnetic bearing 17 output, suppress described rotor in upper radial and axial vibration, then utilize position transducer detect described rotor under radially whether can recover suspend, if recover suspend recover described rotor under radially locate suspend, go to step two; As do not recovered at lower radial suspension, control the fixing magnetic force of described lower radial direction magnetic bearing 13 output, suppress described rotor under vibration radially, then carry out next step;
1.2, described unstability recovery controller utilizes speed detector to detect the rotating speed of rotor described in this moment, then select to be suitable for the control parameter of this rotating speed, utilize position transducer detect described rotor under radially whether can normally suspend, can pre-storedly there is the data information of the suitable control parameter that rotating speed is corresponding with it herein, then according to the applicable control parameter of its correspondence of selection of speed of recording, if recover to suspend recover described rotor under radially locate to suspend; The fixing magnetic force of lower radial direction magnetic bearing 13 output as described in controlling as do not recovered, suppress described rotor under vibration radially, repeating step 1.2 until described rotor under radially locate to suspend;
step 2, recover described rotor at upper radial suspension, its process is as follows:
2.1, when described rotor under radially locate after normal suspension, described unstability recovery controller utilizes described speed detector to detect this moment rotor speed, then the control parameter of selecting to be applicable to described rotating speed is recovered radial direction magnetic bearing 8 and is controlled, whether utilize described position transducer to detect described upper radial direction magnetic bearing 8 place's rotors can normally suspend, if described rotor can not recover normal suspension, control the fixing magnetic force of described upper radial direction magnetic bearing 8 output, suppress described rotor in upper radial vibration, then repeat this step, until rotor can normally suspend upper radially locating,
2.2, when rotor upper radially recover to suspend after, described unstability recovery controller utilize described position transducer detect described rotor under whether still radially locate normally to suspend, if rotor under radially locate still normally to suspend, carry out step 3; If rotor under radially locate unstability, need again to make the fixing magnetic force of lower radial direction magnetic bearing 13 output, suppress rotor under radially locate vibration, by adjustment control parameter again realize rotor under stable suspersion radially, realize rotor under after stable suspersion radially, unstability recovery controller utilizes position transducer detection rotor normally to suspend upper whether still radially locate, if rotor upper radially and under radially all can normally suspend, carry out step 3; If rotor can not normally suspend upper radially locating, need again to make the fixing magnetic force of radial direction magnetic bearing 8 output, suppress described rotor in upper vibration radially, adjust control parameter and make rotor can recover normal suspension upper radially locating; So constantly repeated attempt, until rotor upper radially and under radially locate all can normally suspend;
step 3, recover the axial suspension of described rotor, its process is as follows:
3.1, when rotor upper radially and under while radially locating all can normally suspend, attempting recovering axial magnetic bearing 17 controls, first unstability recovery controller utilizes speed probe to detect the now rotating speed of described rotor, then selecting to be applicable to the control parameter of described rotating speed recovers axial magnetic bearing 17 and controls, utilize position transducer detection rotor axially whether can normally suspend, if rotor can not recover normal suspension, control the fixing magnetic force of axial magnetic bearing 17 output, suppress described rotor in axial vibration, constantly repeated attempt, until can normally suspend at axial magnetic bearing 17 place's rotors,
3.2, until rotor after axially can normally suspending, utilize position transducer detection rotor under radially and on radially whether can normally suspend, if rotor under radially locate normally to suspend, by step 1.2 again realize rotor under suspension radially; If rotor cannot normally suspend upper radially locating, again realize rotor in upper suspension radially by step 2.1,2.2, constantly repeat above-mentioned steps, until upper radial direction magnetic bearing 8, lower radial direction magnetic bearing 13 and axial magnetic bearing 17 all recover normal work, rotor can normally suspend.
(2) if when the position of centre of gravity of described rotor is B state or D state, first recover described rotor at upper radial suspension, then recover described rotor at lower radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion, its detailed process is as follows, flow chart as shown in Figure 3:
step 1, recover described rotor at upper radial suspension, its process is as follows:
1.1, first described unstability recovery controller controls described lower radial direction magnetic bearing 13 and the fixing magnetic force of described axial magnetic bearing 17 output, suppress described rotor in lower radial and axial vibration, then utilizing position transducer to detect described rotor upper radially whether can recovery suspends, recover described rotor if recover to suspend and suspend upper radially locating, go to step two; As described in controlling as do not recovered, the fixing magnetic force of upper radial direction magnetic bearing 8 output, suppresses described rotor in upper vibration radially, then carries out next step;
1.2, described unstability recovery controller utilizes speed detector to detect the rotating speed of rotor described in this moment, then select to be suitable for the control parameter of this rotating speed, utilize position transducer to detect described rotor and radially whether can normally suspend upper, suspend upper radially locating if recovery suspension recovers described rotor; As described in controlling as do not recovered, the fixing magnetic force of upper radial direction magnetic bearing 8 output, suppresses described rotor in upper vibration radially, repeating step 1.2 until described rotor suspend upper radially locating;
step 2, recover described rotor at lower radial suspension, its process is as follows:
2.1, when described rotor is radially located after normal suspension upper, described unstability recovery controller utilizes described speed detector to detect this moment rotor speed, then the control parameter of selecting to be applicable to described rotating speed is recovered lower radial direction magnetic bearing 13 and is controlled, whether utilize described position transducer to detect described lower radial direction magnetic bearing 13 place's rotors can normally suspend, if described rotor can not recover normal suspension, control the fixing magnetic force of described lower radial direction magnetic bearing 13 output, suppress described rotor in lower radial vibration, then repeat this step, until rotor under radially locate normally to suspend,
2.2, when rotor under radially recover to suspend after, described unstability recovery controller is utilized described position transducer to detect described rotor and is normally suspended upper whether still radially locate, if rotor still normally suspends upper radially locating, carries out step 3; If rotor is in the upper unstability of radially locating, need again to make the fixing magnetic force of radial direction magnetic bearing 8 output, suppressing rotor vibrates upper radially locating, control parameter by adjustment and again realize rotor at upper radially stable suspersion, realize rotor after upper stable suspersion radially, unstability recovery controller utilize position transducer detection rotor under whether still radially locate normally to suspend, if rotor upper radially and under radially all can normally suspend, carry out step 3; If rotor under radially locate normally to suspend, need again to make the fixing magnetic force of lower radial direction magnetic bearing 13 output, suppress described rotor under vibration radially, adjust control parameter make rotor under radially locate to recover normal suspension; So constantly repeated attempt, until rotor upper radially and under radially locate all can normally suspend;
step 3, recover the axial suspension of described rotor, its process is as follows:
3.1, when rotor upper radially and under while radially locating all can normally suspend, attempting recovering axial magnetic bearing 17 controls, first unstability recovery controller utilizes speed probe to detect the now rotating speed of described rotor, then selecting to be applicable to the control parameter of described rotating speed recovers axial magnetic bearing 17 and controls, utilize position transducer detection rotor axially whether can normally suspend, if rotor can not recover normal suspension, control the fixing magnetic force of axial magnetic bearing 17 output, suppress described rotor in axial vibration, constantly repeated attempt, until can normally suspend at axial magnetic bearing 17 place's rotors,
3.2, until rotor after axially can normally suspending, utilize position transducer detection rotor upper radially and under radially whether can normally suspend, if rotor cannot normally suspend upper radially locating, again realize rotor in upper suspension radially by step 1.2; If rotor under radially locate normally to suspend, by step 2.1,2.2 again realize rotor under suspension radially, constantly repeat above-mentioned steps, until upper radial direction magnetic bearing 8, lower radial direction magnetic bearing 13 and axial magnetic bearing 17 all recover normal work, rotor can normally suspend.
(3), if when the position of centre of gravity of described rotor is E state, can first recover described rotor at upper radial suspension, as described in above-mentioned (one); Also can first recover described rotor at lower radial suspension, as shown in above-mentioned (two), then recover described rotor at another radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion.
(4) after described rotor Eddy diffusion, maglev molecular pump controller 21 is switched to normal working controller, opening prime mechanical pump extraction valve 2 continues to bleed, restart maglev molecular pump motor 12, utilize vacuum measuring instrument to measure the degree of vacuum in the maglev molecular pump pump housing 4, when the degree of vacuum in the maglev molecular pump pump housing 4 reaches after requirement, open described maglev molecular pump bleeding point 5, recover described maglev molecular pump and normally work.
Normal working controller described above refers to when maglev molecular pump is normally worked, can guarantee the controller of the normal stable suspersion of rotor.In the present embodiment, (be Proportional-Integral-Derivative Controller with PID controller, PID Controller, is called again " proportional-integral derivative controller ") and notch filter controller to combine the controller obtaining be example.This controller can be realized and in each process of maglev molecular pump work, all can realize rotor stability and suspend, and can suppress each rank mode of system, thereby guaranteeing that rotor can be stablized forwards rated speed to, and can work continually and steadily.Described PID controller design reference " Schweitzer G., Traxler A., Bleuler H. work, Yu Lie, Yuan Chongjun translates, " active magnetic bearings basis, performance and application ", Beijing New Age Press, 1997:P26-37 "; Notch filter controller design reference document " Herzog R.; Buhler P.; Gahler C.; and R. Larsonneur, Unbalance Compensation Using Generalized Notch Filters in the Multivariable Feedback of Magnetic Bearings, IEEE Transactions on Control Systems Technology; Vol. 4; No. 5, September 1996, pp. 580-586. ".
Obviously, above-described embodiment is only for example is clearly described, and the not restriction to mode of execution.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here without also giving exhaustive to all mode of executions.And the apparent variation of being extended out thus or variation are still among the protection domain in the invention.
Claims (6)
1. a magnetic levitation molecular pump unstability recovery control method, is characterized in that, comprises following process:
(1) after the rotor unstability of maglev molecular pump, maglev molecular pump controller switching is to unstability recovery controller, and described unstability recovery controller is closed maglev molecular pump motor, and utilizes motor brake system to make the rapid reduction of speed of motor;
(2) described unstability recovery controller is closed maglev molecular pump bleeding point and prime mechanical pump extraction valve, then opens maglev molecular pump bleed valve and puts into air, closes subsequently described maglev molecular pump bleed valve;
(3) according to described rotor c.g. position difference, select first to recover described rotor under radially or on footpath upwards normally suspend, then recover the normal suspension upwards in another footpath of described rotor; Described rotor under radially and on radially all can normally suspend after, recover described rotor axial normal suspension, thereby realize described rotor Eddy diffusion;
(4) after described rotor Eddy diffusion, maglev molecular pump controller switching is to normal working controller, opening prime mechanical pump extraction valve continues to bleed, restart maglev molecular pump motor, utilize vacuum measuring instrument to measure the degree of vacuum in the pump housing of molecular pump, when the degree of vacuum in the molecular pump pump housing reaches after requirement, open described maglev molecular pump bleeding point, recover described maglev molecular pump and normally work.
2. magnetic levitation molecular pump unstability recovery control method according to claim 1, it is characterized in that: in described step (3), the center of gravity of described rotor is between upper radial direction magnetic bearing and lower radial direction magnetic bearing, if the distance between upper radial direction magnetic bearing and lower radial direction magnetic bearing is L, the possible state of the position of centre of gravity of described rotor is as follows:
A condition: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing be [0,0.25L);
B state: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing be [0.25L, 0.5L);
C state: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing is (0.5L, 0.75L);
D state: the distance between the center of gravity of described rotor and upper radial direction magnetic bearing is [0.75L, L];
E state: the center of gravity of described rotor is midpoint between upper radial direction magnetic bearing and lower radial direction magnetic bearing, the distance between itself and upper radial direction magnetic bearing is 0.5L;
If when the position of centre of gravity of described rotor is A condition or C state, first recover described rotor at lower radial suspension, then recover described rotor at upper radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion;
If when the position of centre of gravity of described rotor is B state or D state, first recover described rotor at upper radial suspension, then recover described rotor at lower radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion;
If when the position of centre of gravity of described rotor is E state, can first recover described rotor at upper radial suspension, also can first recover described rotor at lower radial suspension, then recover described rotor at another radial suspension, described rotor under radially and on radially all can normally suspend after, recover axial suspension, thereby realize rotor Eddy diffusion.
3. magnetic levitation molecular pump unstability recovery control method according to claim 2, is characterized in that:
the position of centre of gravity of described rotor is under A condition or C state, and the process of described rotor Eddy diffusion is as follows:
step 1, recover described rotor at lower radial suspension, its process is as follows:
1.1, first described unstability recovery controller controls described upper radial direction magnetic bearing and the fixing magnetic force of described axial magnetic bearing output, suppress described rotor in upper radial and axial vibration, then utilize position transducer detect described rotor under radially whether can recover suspend, if recover suspend recover described rotor under radially locate suspend, go to step two; As do not recovered at lower radial suspension, control the fixing magnetic force of described lower radial direction magnetic bearing output, suppress described rotor under vibration radially, then carry out next step;
1.2, described unstability recovery controller utilizes speed detector to detect the rotating speed of rotor described in this moment, then select to be suitable for the control parameter of this rotating speed, utilize position transducer detect described rotor under radially whether can normally suspend, if recover suspend recover described rotor under radially locate suspend; The fixing magnetic force of lower radial direction magnetic bearing output as described in controlling as do not recovered, suppress described rotor under vibration radially, repeating step 1.2 until described rotor under radially locate to recover normal suspension;
step 2, recover described rotor at upper radial suspension, its process is as follows:
2.1, when described rotor under radially locate after normal suspension, described unstability recovery controller utilizes described speed detector to detect this moment rotor speed, then select the control parameter that is applicable to described rotating speed to recover radial direction magnetic bearing control, whether utilize described position transducer to detect described upper radial direction magnetic bearing place rotor can normally suspend, if described rotor can not recover normal suspension, control the fixing magnetic force of described upper radial direction magnetic bearing output, suppress described rotor in upper radial vibration, then repeat this step, until rotor can normally suspend upper radially locating,
2.2, when rotor upper radially recover to suspend after, described unstability recovery controller utilize described position transducer detect described rotor under whether still radially locate normally to suspend, if rotor under radially locate still normally to suspend, carry out step 3; If rotor under radially locate unstability, need again to make the fixing magnetic force of lower radial direction magnetic bearing output, suppress rotor under radially locate vibration, by adjustment control parameter again realize rotor under stable suspersion radially, realize rotor under after stable suspersion radially, unstability recovery controller utilizes position transducer detection rotor normally to suspend upper whether still radially locate, if rotor upper radially and under radially all can normally suspend, carry out step 3; If rotor can not normally suspend upper radially locating, need again to make the fixing magnetic force of radial direction magnetic bearing output, suppress described rotor in upper vibration radially, adjust control parameter and make rotor can recover normal suspension upper radially locating; So constantly repeated attempt, until rotor upper radially and under radially locate all can normally suspend;
step 3, recover the axial suspension of described rotor, its process is as follows:
3.1, when rotor upper radially and under while radially locating all can normally suspend, attempt recovering axial magnetic bearing control, first unstability recovery controller utilizes speed probe to detect the now rotating speed of described rotor, then select the control parameter that is applicable to described rotating speed to recover axial magnetic bearing control, utilize position transducer detection rotor axially whether can normally suspend, if rotor can not recover normal suspension, control the fixing magnetic force of axial magnetic bearing output, suppress described rotor in axial vibration, constantly repeated attempt, until can normally suspend at axial magnetic bearing place rotor,
3.2, until rotor after axially can normally suspending, utilize position transducer detection rotor under radially and on radially whether can normally suspend, if rotor under radially locate normally to suspend, by step 1.2 again realize rotor under suspension radially; If rotor cannot normally suspend upper radially locating, again realize rotor in upper suspension radially by step 2.1,2.2, constantly repeat above-mentioned steps, until upper radial direction magnetic bearing, lower radial direction magnetic bearing and axial magnetic bearing all recover normal work, rotor can normally suspend.
4. magnetic levitation molecular pump unstability recovery control method according to claim 2, is characterized in that:
the position of centre of gravity of described rotor is under B state or D state, and the process of described rotor Eddy diffusion is as follows:
step 1, recover described rotor at upper radial suspension, its process is as follows:
1.1, first described unstability recovery controller controls described lower radial direction magnetic bearing and the fixing magnetic force of described axial magnetic bearing output, suppress described rotor in lower radial and axial vibration, then utilizing position transducer to detect described rotor upper radially whether can recovery suspends, recover described rotor if recover to suspend and suspend upper radially locating, go to step two; As described in controlling as do not recovered, the fixing magnetic force of upper radial direction magnetic bearing output, suppresses described rotor in upper vibration radially, then carries out next step;
1.2, described unstability recovery controller utilizes speed detector to detect the rotating speed of rotor described in this moment, then select to be suitable for the control parameter of this rotating speed, utilize position transducer to detect described rotor and radially whether can normally suspend upper, suspend upper radially locating if recovery suspension recovers described rotor; As described in controlling as do not recovered, the fixing magnetic force of upper radial direction magnetic bearing output, suppresses described rotor in upper vibration radially, repeating step 1.2 until described rotor suspend upper radially locating;
step 2, recover described rotor at lower radial suspension, its process is as follows:
2.1, when described rotor is radially located after normal suspension upper, described unstability recovery controller utilizes described speed detector to detect this moment rotor speed, then select the control parameter that is applicable to described rotating speed to recover lower radial direction magnetic bearing control, whether utilize described position transducer to detect described lower radial direction magnetic bearing place rotor can normally suspend, if described rotor can not recover normal suspension, control the fixing magnetic force of described lower radial direction magnetic bearing output, suppress described rotor in lower radial vibration, then repeat this step, until rotor under radially locate normally to suspend,
2.2, when rotor under radially recover to suspend after, described unstability recovery controller is utilized described position transducer to detect described rotor and is normally suspended upper whether still radially locate, if rotor still normally suspends upper radially locating, carries out step 3; If rotor is in the upper unstability of radially locating, need again to make the fixing magnetic force of radial direction magnetic bearing output, suppressing rotor vibrates upper radially locating, control parameter by adjustment and again realize rotor at upper radially stable suspersion, realize rotor after upper stable suspersion radially, unstability recovery controller utilize position transducer detection rotor under whether still radially locate normally to suspend, if rotor upper radially and under radially all can normally suspend, carry out step 3; If rotor under radially locate normally to suspend, need again to make the fixing magnetic force of lower radial direction magnetic bearing output, suppress described rotor under vibration radially, adjust control parameter make rotor under radially locate to recover normal suspension; So constantly repeated attempt, until rotor upper radially and under radially locate all can normally suspend;
step 3, recover the axial suspension of described rotor, its process is as follows:
3.1, when rotor upper radially and under while radially locating all can normally suspend, attempt recovering axial magnetic bearing control, first unstability recovery controller utilizes speed probe to detect the now rotating speed of described rotor, then select the control parameter that is applicable to described rotating speed to recover axial magnetic bearing control, utilize position transducer detection rotor axially whether can normally suspend, if rotor can not recover normal suspension, control the fixing magnetic force of axial magnetic bearing output, suppress described rotor in axial vibration, constantly repeated attempt, until can normally suspend at axial magnetic bearing place rotor,
3.2, until rotor after axially can normally suspending, utilize position transducer detection rotor upper radially and under radially whether can normally suspend, if rotor cannot normally suspend upper radially locating, again realize rotor in upper suspension radially by step 1.2; If rotor under radially locate normally to suspend, by step 2.1,2.2 again realize rotor under suspension radially, constantly repeat above-mentioned steps, until upper radial direction magnetic bearing, lower radial direction magnetic bearing and axial magnetic bearing all recover normal work, rotor can normally suspend.
5. according to the magnetic levitation molecular pump unstability recovery control method described in claim 1 or 2 or 3 or 4, it is characterized in that: in described step (2), the speed of putting into air be 5sccm to 20sccm, the time of putting into air is that 10s is to 20s.
6. magnetic levitation molecular pump unstability recovery control method according to claim 5, is characterized in that: in described step (2), the speed of putting into air is 16sccm, and the time of putting into air is 12s.
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| CN104590288B (en) * | 2014-11-28 | 2016-12-07 | 南车株洲电力机车有限公司 | The control method of low speed magnetic suspension train suspension unstability in a kind of reply |
| CN106402157B (en) * | 2016-11-16 | 2018-07-10 | 常州工学院 | The magnetic suspension bearing control system and its control method of settling flux are realized after unstability |
| CN110165824A (en) * | 2019-05-21 | 2019-08-23 | 深圳麦格动力技术有限公司 | Magnetic suspension motor |
| CN111735571B (en) * | 2020-07-20 | 2021-07-09 | 天津飞旋科技股份有限公司 | Molecular pump dynamic balance adjusting device and adjusting method |
| CN113266583A (en) * | 2021-06-08 | 2021-08-17 | 苏州中科科仪技术发展有限公司 | Magnetic suspension bearing structure and magnetic suspension molecular pump |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0819861A2 (en) * | 1996-07-18 | 1998-01-21 | Seiko Seiki Kabushiki Kaisha | Magnetic bearing devices |
| WO1998042985A1 (en) * | 1997-03-24 | 1998-10-01 | A/S De Smithske | Gear pump with magnetic coupling |
| CN101297123A (en) * | 2005-10-28 | 2008-10-29 | 株式会社易威奇 | Hybrid magnetic bearing |
| EP2006556A1 (en) * | 2007-06-18 | 2008-12-24 | Mecos Traxler AG | Recovery of impact in a magnetic bearing device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07238896A (en) * | 1994-02-28 | 1995-09-12 | Kyocera Corp | Magnet pump |
-
2011
- 2011-07-05 CN CN201110186730.1A patent/CN102251979B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0819861A2 (en) * | 1996-07-18 | 1998-01-21 | Seiko Seiki Kabushiki Kaisha | Magnetic bearing devices |
| WO1998042985A1 (en) * | 1997-03-24 | 1998-10-01 | A/S De Smithske | Gear pump with magnetic coupling |
| CN101297123A (en) * | 2005-10-28 | 2008-10-29 | 株式会社易威奇 | Hybrid magnetic bearing |
| EP2006556A1 (en) * | 2007-06-18 | 2008-12-24 | Mecos Traxler AG | Recovery of impact in a magnetic bearing device |
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