CN102234836B - 直拉硅单晶炉装置及硅单晶拉制方法 - Google Patents
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CN104593863B (zh) * | 2015-01-05 | 2017-05-10 | 英利集团有限公司 | 单晶炉 |
CN106894082B (zh) * | 2015-12-17 | 2019-04-19 | 上海超硅半导体有限公司 | 单晶硅生长炉 |
CN107227488B (zh) * | 2016-03-25 | 2019-10-25 | 隆基绿能科技股份有限公司 | 单晶炉用热场及单晶炉 |
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CN1990918A (zh) * | 2005-12-26 | 2007-07-04 | 北京有色金属研究总院 | 一种提高直拉硅单晶炉热场部件寿命的方法及单晶炉 |
CN101040068A (zh) * | 2004-10-13 | 2007-09-19 | 信越半导体股份有限公司 | 单结晶制造装置 |
CN101148777A (zh) * | 2007-07-19 | 2008-03-26 | 任丙彦 | 直拉法生长掺镓硅单晶的方法和装置 |
CN201648562U (zh) * | 2010-05-07 | 2010-11-24 | 内蒙古晟纳吉光伏材料有限公司 | 直拉硅单晶炉装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN101040068A (zh) * | 2004-10-13 | 2007-09-19 | 信越半导体股份有限公司 | 单结晶制造装置 |
CN1990918A (zh) * | 2005-12-26 | 2007-07-04 | 北京有色金属研究总院 | 一种提高直拉硅单晶炉热场部件寿命的方法及单晶炉 |
CN101148777A (zh) * | 2007-07-19 | 2008-03-26 | 任丙彦 | 直拉法生长掺镓硅单晶的方法和装置 |
CN201648562U (zh) * | 2010-05-07 | 2010-11-24 | 内蒙古晟纳吉光伏材料有限公司 | 直拉硅单晶炉装置 |
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