CN102221361B - 一种电容式微机械陀螺 - Google Patents
一种电容式微机械陀螺 Download PDFInfo
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- CN102221361B CN102221361B CN 201110133079 CN201110133079A CN102221361B CN 102221361 B CN102221361 B CN 102221361B CN 201110133079 CN201110133079 CN 201110133079 CN 201110133079 A CN201110133079 A CN 201110133079A CN 102221361 B CN102221361 B CN 102221361B
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CN 201110133079 CN102221361B (zh) | 2011-05-20 | 2011-05-20 | 一种电容式微机械陀螺 |
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CN 201110133079 CN102221361B (zh) | 2011-05-20 | 2011-05-20 | 一种电容式微机械陀螺 |
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CN102221361A CN102221361A (zh) | 2011-10-19 |
CN102221361B true CN102221361B (zh) | 2013-04-03 |
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CN 201110133079 Expired - Fee Related CN102221361B (zh) | 2011-05-20 | 2011-05-20 | 一种电容式微机械陀螺 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103528577B (zh) * | 2013-10-12 | 2016-06-01 | 深迪半导体(上海)有限公司 | 一种z轴mems电容式陀螺仪 |
CN105698781B (zh) * | 2014-11-26 | 2019-01-04 | 安徽康力节能电器科技有限公司 | 径向支撑体声波硅微陀螺仪 |
US10330471B2 (en) | 2014-11-27 | 2019-06-25 | Goertek, Inc. | Triaxial micro-electromechanical gyroscope |
CN105737810B (zh) * | 2014-12-10 | 2018-09-14 | 安徽康力节能电器科技有限公司 | 高灵敏度盘状体声波硅微陀螺仪 |
CN110307833B (zh) * | 2019-06-27 | 2020-12-01 | 深迪半导体(上海)有限公司 | 一种高精度z轴陀螺仪 |
CN110307832B (zh) * | 2019-06-28 | 2021-04-09 | 北京理工大学 | 一种基于杠杆效应位移放大音叉式微机械陀螺仪 |
CN110926445B (zh) * | 2019-12-06 | 2022-03-08 | 深迪半导体(绍兴)有限公司 | 一种三轴mems陀螺仪 |
CN112113553B (zh) * | 2020-09-15 | 2022-06-21 | 浙江大学 | 一种陀螺全匹配调谐电极 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1749693A (zh) * | 2005-10-24 | 2006-03-22 | 西北工业大学 | 电容式微机械陀螺 |
CN101746708A (zh) * | 2009-12-25 | 2010-06-23 | 紫光股份有限公司 | 一种全解耦电容式微机械陀螺 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1749693A (zh) * | 2005-10-24 | 2006-03-22 | 西北工业大学 | 电容式微机械陀螺 |
CN101746708A (zh) * | 2009-12-25 | 2010-06-23 | 紫光股份有限公司 | 一种全解耦电容式微机械陀螺 |
Non-Patent Citations (2)
Title |
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常洪龙,苑伟政.《音叉电容式微机械陀螺的误差源分析与消除》.《西北工业大学学报》.2004,第22卷(第6期),第679-683页. * |
蒋庆华,苑伟政,常洪龙,崔金强.《一种改进的振动式微机械陀螺驱动电路》.《传感技术学报》.2008,第21卷(第3期),第536-538页. * |
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CN102221361A (zh) | 2011-10-19 |
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