CN102214975A - Cooling structure of linear motor - Google Patents
Cooling structure of linear motor Download PDFInfo
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- CN102214975A CN102214975A CN2010101436344A CN201010143634A CN102214975A CN 102214975 A CN102214975 A CN 102214975A CN 2010101436344 A CN2010101436344 A CN 2010101436344A CN 201010143634 A CN201010143634 A CN 201010143634A CN 102214975 A CN102214975 A CN 102214975A
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Abstract
The invention discloses a cooling structure of a linear motor. The cooling structure comprises a cooling assembly, a motor coil assembly, a first pipeline and a second pipeline, wherein the motor coil assembly is positioned at the inner side of the cooling assembly; the first pipeline and the second pipeline are arranged at the same side of the cooling assembly; and the motor coil temperature and the motor outer surface temperature are simultaneously subjected to temperature control by virtue of the cooling structure of the linear motor favorably, the coil temperature control of normal operation for the motor can be achieved, and simultaneously the heat influence of the cooling structure on the external environment is reduced to the minimum.
Description
Technical field
The present invention relates to the techniques of linear motor field, relate in particular to a kind of linear electric motors cooling structure.
Background technology
Linear motor accelerated degree is one of linear electric motors important indicator.Linear motor accelerated degree is increasing, requires by the electric current in the coil just greatly, and therefore, the caloric value of coil is just big.Excessive heating causes coil temperature to raise, and temperature is elevated to a certain degree, when surpassing the insulating barrier burning-point of parcel coil copper core, coil has just burnt out short circuit, therefore, and the linear electric motors cooling technology, the broad sense temperature control technology of saying so is the developing important topic of techniques of linear motor always.More than the said function that prevents that motor from burning out, the linear electric motors of can only saying so are to temperature controlled general requirement.New occasion in the linear electric motors application, as equipment such as photo-etching machine work-piece platform and mask platform, precision instrument calibration, spray printing platforms, its used linear electric motors cooling structure prevents the temperature controlled function that coil burns out except satisfying, also having a function of temperature control is exactly to control the heat radiation of motor to external environment, and these feasible linear electric motors that manufactured and designed by former thermal design principle can not satisfy the application demand of new occasion.
Patent CN 101009453A discloses a kind of dynamic coil linear motor, and wherein the cooling structure design is one of important claim of this patent.It is the circuitous straight tube of arranging in being close to two metal walls up and down of coil, divide two-layer cooling up and down, the single loop boiler water circulation is to the control coil temperature, effect is obvious, but the hull-skin temperature of motor is uncontrollable, and in fact, in this patented technology, the motor outer surface also becomes one of path of strengthening the coil heat radiation, therefore, in the application scenario of needs control motor to the external environment heat dissipation capacity itself, this patented technology is with powerless.
Patent CN 1327627A discloses a kind of coil assembly and manufacture method thereof of linear motor.One of patented technology emphasis is still the cooling structure design.Cooling water pipe is close to the outer surface of whole winding, the circulation of cold-producing medium single loop, manufacturing process is simple, and effective cooling motor coil temperature is because the employing of cold-producing medium also can reduce motor heat radiation to external world itself to a great extent, but hull-skin temperature is uncontrollable, the one, be presented as the uneven distribution of hull-skin temperature, the 2nd, be presented as that hull-skin temperature may to occur cold excessively, therefore, although the control of coil self-temperature effectively, and is still very big to the thermal impact of external environment.
The cooling system of patent CN200410036817.0 actuating type coil, a kind of coil cooling means is disclosed, its cooling purpose still is the control coil temperature and does not relate to the hull-skin temperature of motor self, can not deal with problems in this technology of occasion that heat radiation is had high request.
Therefore, design and a kind ofly implement temperature control simultaneously at coil temperature and motor hull-skin temperature, solve the coil temperature control that motor runs well, it is very necessary simultaneously self to be reduced to minimum linear electric motors cooling structure to the thermal impact of external environment, is one of techniques of linear motor field problem anxious to be solved at present.
Summary of the invention
The embodiment of the invention provides a kind of linear electric motors cooling structure of controllable motor surface temperature, comprise a cooling package, motor coil assembly, first pipeline and second pipeline, above-mentioned motor coil assembly is positioned at cold drawing assembly inboard, first pipeline and second pipeline are arranged at the same side of cooling package, this linear electric motors cooling structure is implemented temperature control simultaneously to coil temperature and motor hull-skin temperature preferably, solve the coil temperature control that motor runs well, simultaneously self is reduced to minimum to the thermal impact of external environment.
The embodiment of the invention provides following technical scheme:
A kind of linear electric motors cooling structure of controllable motor surface temperature, comprise a cooling package, motor coil assembly, first pipeline and second pipeline, above-mentioned motor coil assembly is positioned at cold drawing assembly inboard, and first pipeline and second pipeline are arranged at the same side of cooling package.
Preferably, above-mentioned cooling package is made of cold drawing and the afflux cover plate that confluxes, and above-mentioned cold drawing and the afflux cover plate that confluxes is connected by welding manner.
Preferably, an end of above-mentioned cold drawing assembly is provided with a bending.
Preferably, an end of above-mentioned cold drawing assembly further is provided with a fixing rear end cap, and the said fixing rear end cap can wrap up an end bending of cold drawing assembly.
Preferably, the depth-width ratio of above-mentioned cold drawing is greater than more than 1 to 5.
Preferably, the material of above-mentioned cold drawing is aluminium (as the aluminium alloy of trade mark LF21) or stainless steel.
Preferably, above-mentioned first pipeline and second pipeline are arranged on conflux the same side of cover plate of above-mentioned afflux.
Preferably, above-mentioned coil block encapsulates with epoxy resin.
Preferably, above-mentioned cooling package is the U type structure of sealing, and described cold drawing is the single channel cold drawing, and structure is a U type structure, and the shunting of cooling water and afflux are positioned at the lead-out wires of coil end of cooling package, seal the openend of U-shaped cold drawing simultaneously.
Preferably, directly push after the above-mentioned motor coil component package and have the cooling package that seals U type structure, the inboard coated with thermally conductive cream of described cooling package thin layer, two sides and other space epoxy sealing after the motor coil assembly pushes.
Preferably, the heat insulation layer of above-mentioned cooling package outer surface is that conductive coefficient is lower than the applied material of 0.03 (SI).
The linear electric motors cooling structure of a kind of controllable motor surface temperature provided by the invention, comprise a cooling package, motor coil assembly, first pipeline and second pipeline, above-mentioned motor coil assembly is positioned at cold drawing assembly inboard, first pipeline and second pipeline are arranged at the same side of cooling package, this linear electric motors cooling structure is implemented temperature control simultaneously to coil temperature and motor hull-skin temperature preferably, solve the coil temperature control that motor runs well, simultaneously self is reduced to minimum to the thermal impact of external environment.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of surface radiating thermal resistance and cooling duct thermal resistance;
Fig. 2 is the Temperature Distribution schematic diagram of the outer surface of motor for outer heat insulation layer;
Fig. 3 is the temperature gradient distribution simulation analysis figure of motor internal;
Fig. 4 is the motor cooling structure schematic perspective view of the embodiment of the invention;
Fig. 5 is the motor cooling structure three-view diagram of the embodiment of the invention;
Fig. 6 is motor cooling structure one cutaway view of the embodiment of the invention;
Fig. 7 is the assembly drawing of the motor cooling structure of the embodiment of the invention;
Fig. 8 is the bending schematic diagram of the motor cooling structure of the embodiment of the invention.
Embodiment
The cooling structure of the embodiment of the invention can be used for the linear electric motors of single and a plurality of coils, for making purpose of the present invention, technical scheme and advantage clearer, and the embodiment that develops simultaneously with reference to the accompanying drawings, the present invention is described in more detail.Particularly, the embodiment of the invention is an example with two coil controlled surface temperature linear electric motors cooling structures.
General cooling structure design than control line chart maximum temperaturerise, the embodiment of the invention can be controlled the motor surface temperature simultaneously and be wrapped in the coil maximum temperature of motor internal, in general cooling structure design, except using coolant, as water, take away outside most of burn-off of motor, the motor surface also is designed to an important heat radiation approach, but also usually the heat transfer property by strengthening surface increases heat radiation by the motor surface, and in embodiment of the invention application scenario in one's power, the surface radiating approach almost is under an embargo, because surface temperature must be controlled at lower temperature rise, as 0.5 ℃.The thinking that this means Cooling Design is different fully with method, the emphasis of design just is not to take away heat with coolant, and be accurately to distribute between heat that how heat radiation is taken away to coolant and the surperficial dissipated heat, how to design the thermal resistance of coolant guiding channel and the ratio between the surface radiating thermal resistance, surface temperature rise and coil temperature rise are met the demands simultaneously.
Describe in detail at two design focal points recited above below:
1, increases the design that coolant is taken away heat
Obviously, according to general knowledge, the flow that increases coolant (present embodiment is a water) can be taken away more heat, but true really not so.In high request linear electric motors application scenario, the coolant flow at high speed will be introduced vibration, therefore need the flowing velocity of limiter tube inner fluid, and big flow also corresponding big caliber, and turnover pipeline mechanical space often is an important restrictions, and caliber also is conditional like this, so flow is restricted, universal experience, as described in example, all can only provide the flow about 2 liters, according to the motor size ratio, can calculate and judge that flowing of water can only be in laminar condition, Reynolds number is between 500～600.According to the laminar flow heat transfer feature, 2 up-flow amounts and 10 liters are to increasing not influence of heat transfer efficiency, therefore in other words, can not adopt the method that increases flow, obviously, can only on other heat transfer efficiency influencing factor except that flow, consider that this factor is exactly the structure of cooling duct.The traditional Cooling Design that comprises aforementioned two referenced patent has all adopted pipe, the value that the heat transfer efficiency of pipe is represented with nusselt number is 4.4, and the laminar flow heat transfer efficient of the cooling duct of large ratio of height to width can reach 6.5 even 8, therefore the invention process has adopted 1 to 8 large ratio of height to width example cooling duct, heat transfer efficiency nusselt number value 6.5, pipe on year-on-year basis, heat exchange coefficient can improve 80%.This design has guaranteed that cooling structure cooling water under the flow of restriction can take away the ability of coil dissipation heat as much as possible.
2, the thermal resistance of coolant guiding channel and surface radiating thermal resistance partition equilibrium design
The purpose of thermal resistance balance is the control surface temperature rise, and the linear electric motors cooling structure of the embodiment of the invention will address this problem preferably.Surface radiating thermal resistance and cooling duct thermal resistance are relation in parallel, and be shown in Figure 1.R2 is the material thermal resistance, and R3 is a metal shell, and R4 is a heat-insulating material, and R5 is the air heat exchange thermal resistance, and R6 is a cooling water heat exchange thermal resistance, and R7 is an air temperature rise thermal resistance, and R8 is the cooling water temperature rise thermal resistance.
During machine operation, total hot-fluid is certain, therefore, the balance of thermal resistance mainly realizes that by increasing R4 in this example, heat insulation layer thickness is 0.6mm, flow 1.5L/min, less than 1% of the total heat dissipation of motor, the maximum temperaturerise on motor surface is 0.252 ℃ from motor surface dispersed heat, outer heat insulation layer be motor outer surface Temperature Distribution as shown in Figure 2.The size of R4 value is used for the balance of thermal resistance and then distributes heat flow, control surface temperature.
As shown in Figure 3, be the temperature gradient distribution simulation analysis figure of this motor internal, thermoisopleth is intensive more, the representation temperature gradient is big more, and hot-fluid is just big more, otherwise, sparse more, the representation temperature gradient is more little, and hot-fluid is also more little, can see, main big temperature gradient zone concentrates in the middle of cooling duct and the coil, hot-fluid is very little behind the cooling duct, represents that most of hot-fluid medium that is cooled absorbs, thereby makes hull-skin temperature be effectively controlled.
The embodiment of the invention provides a kind of linear electric motors cooling structure, comprise a cooling package 13, motor coil assembly 14, first pipeline 7 and second pipeline 8, above-mentioned motor coil assembly 14 is positioned at cooling package 13 inboards, and first pipeline and second pipeline are arranged at the same side of cooling package 13.
Particularly, above-mentioned cooling package 13 is made of cold drawing 1 and the afflux cover plate 9 that confluxes, and conflux cover plate 9 of above-mentioned cold drawing 1 and afflux is connected by welding manner.
Particularly, an end of above-mentioned cooling package 13 is provided with a bending 11.
Particularly, an end of above-mentioned cooling package 13 further is provided with a fixing rear end cap 10, and said fixing rear end cap 10 can wrap up an end bending 11 of cooling package 13.
Particularly, above-mentioned cold drawing 1 depth-width ratio be greater than more than 1 to 5, can be according to the different arbitrary combination of the motor lines number of turns, to improve heat exchange coefficient.
Particularly, the material of above-mentioned cold drawing 1 is aluminium (is the aluminium alloy of LF21 as the trade mark) or stainless steel.
Particularly, above-mentioned first pipeline 7 and second pipeline 8 are arranged on conflux the same side of cover plate 9 of above-mentioned afflux.
Particularly, above-mentioned coil block 14 usefulness epoxy resin 4 encapsulate.
Particularly, the U type structure of above-mentioned cooling package 13 for sealing, above-mentioned cold drawing 1 is the single channel cold drawing, and structure is a U type structure, and the shunting of cooling water and afflux are positioned at the lead-out wires of coil end of cooling package 13, seal the openend of U-shaped cold drawing simultaneously.
Particularly, the coolant in the invention process is a water.
Particularly, directly push after 14 encapsulation of above-mentioned motor coil assembly and have the U type structure cooling package 13 that seals, cooling package 13 inboard coated with thermally conductive cream thin layers 12, two sides after motor coil assembly 14 pushes and other space are with epoxy resin 4 sealings.
Particularly, heat insulation layer 5 is used to increase the surface radiating thermal resistance, and heat insulation layer 5 is lower than the applied material of 0.03 (SI) for conductive coefficient.
Particularly, the heat insulation layer of above-mentioned cooling package outer surface is that conductive coefficient is lower than the applied material of 0.03 (SI).
Particularly, the controlled surface temperature linear electric motors cooling structure of the embodiment of the invention such as Fig. 4 are to shown in Figure 8.What preferably corresponding every width of cloth figure was described above-mentioned cold drawing 1 is designed to the large ratio of height to width example, particularly be greater than more than 1 to 5, can be according to motor lines number of turns difference arbitrary combination, with the raising heat exchange coefficient.The material of cold drawing 1 is aluminium (as LF21) or stainless steel, and cold drawing 1 has bending 11 as shown in Figure 5, and cooled channel segments becomes U-shaped, the rear end by one fixedly rear end cap 10 cover.Four blocks of cold drawings 1 and the afflux cover plate 9 that confluxes is bolted together by the soldering welding, constitutes cooling package 13.The inner surface that cold drawing 1 contacts with coil scribbles heat-conducting cream, forms heat-conducting cream thin layer 12, can directly insert cooling package 13 with the motor coil assembly 14 of epoxy encapsulation, as shown in Figure 7.The assemblage gap of the bending 11 of cooling package 13 and 14 formation of motor coil assembly is filled with epoxy resin 4.Behind motor coil assembly 14 location, floating with epoxy resin 4 as the direction of arrow both sides of Fig. 7.Fixedly rear end cap 10, apply heat insulation layer 5 in both side surface, entered the cold drawing 1 of cooling package 13 during cooling by first pipeline 7, are diverted to four cooling ducts and are pooled to 8 outflows of second pipeline through the cooling duct of flowing through lower surface after the bending 11.
Method to the linear electric motors of multi-thread circle and the design of aforementioned two coil cooling structures is similar, increases the quantity of cold drawing successively, and the cold drawing overlay area all needs to cover the position of epoxy encapsulation layer 4 at least.
Except the temperature rise of control coil itself, can also control the external heat radiation of whole motor, promptly control the hull-skin temperature of whole motor, two functions realize simultaneously; In the embodiment of the invention, coolant is a water, the single loop circulation, but at the main heat-delivery surface of coil, then be a plurality of minim channel parallel connections, the surface temperature that makes whole motor externally export is more even; And prior art on same cooling surface all usefulness be series loop, temperature distributing disproportionation is even on the main radiating surface; The design of big depth-width ratio has been adopted in each cooling duct in parallel, the pipe cooling duct in compared to existing technology, and heat exchange efficiency can increase by 40%～80%; Then outer in each cooling duct all covers adiabatic thin layer, increases the heat transfer resistance of air side, thus control surface temperature rise better; Two small size end faces of coil all adopt insulating material, and are simultaneously corresponding with the cooling duct heat output, select the hull-skin temperature of low thermal conductivity material with the whole motor of balance; Each cooling duct independently becomes a single face cooled cold plate, leaves the gap between the cold drawing, causes deformation to avoid expanding with heat and contract with cold, and increases contact heat resistance.
In sum, the invention provides a kind of linear electric motors cooling structure, comprise a cooling package, motor coil assembly, first pipeline and second pipeline, above-mentioned motor coil assembly is positioned at cold drawing assembly inboard, first pipeline and second pipeline are arranged at the same side of cooling package, this linear electric motors cooling structure is implemented temperature control simultaneously to coil temperature and motor hull-skin temperature preferably, solves the coil temperature control that motor runs well, and simultaneously self is reduced to minimum to the thermal impact of external environment.
More than a kind of linear electric motors cooling structure provided by the present invention is described in detail, used specific case herein principle of the present invention and execution mode set forth, the explanation of above embodiment just is used for helping to understand the solution of the present invention; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that all can change in specific embodiments and applications, in sum, this description should not be construed as limitation of the present invention.
Claims (11)
1. a linear electric motors cooling structure comprises a cooling package, motor coil assembly, first pipeline and second pipeline, and described motor coil assembly is positioned at the cooling package inboard, and first pipeline and second pipeline are arranged at the same side of cooling package.
2. motor cooling structure according to claim 1 is characterized in that, described cooling package is made of cold drawing and the afflux cover plate that confluxes, and described cold drawing and the afflux cover plate that confluxes is connected by welding manner.
3. motor cooling structure according to claim 1 is characterized in that, an end of described cooling package is provided with a bending.
4. motor cooling structure according to claim 1 is characterized in that, an end of described cooling package further is provided with a fixing rear end cap, and described fixedly rear end cap can wrap up an end bending of cooling package.
5. motor cooling structure according to claim 2 is characterized in that, the depth-width ratio of described cold drawing is greater than more than 1 to 5.
6. motor cooling structure according to claim 2 is characterized in that, the material of described cold drawing is aluminium or stainless steel.
7. motor cooling structure according to claim 1 and 2 is characterized in that, described first pipeline and second pipeline are arranged on conflux the same side of cover plate of above-mentioned afflux.
8. motor cooling structure according to claim 1 is characterized in that, described motor coil assembly encapsulates with epoxy resin.
9. motor cooling structure according to claim 1 and 2, it is characterized in that, described cooling package is the U type structure of sealing, described cold drawing is the single channel cold drawing, structure is a U type structure, the shunting of cooling water and afflux are positioned at the lead-out wires of coil end of cooling package, seal the openend of U-shaped cold drawing simultaneously.
10. motor cooling structure according to claim 1, it is characterized in that, directly push after the described motor coil component package and have the cooling package that seals U type structure, the inboard coated with thermally conductive cream of described cooling package thin layer, two sides and other space epoxy sealing after the motor coil assembly pushes.
11. motor cooling structure according to claim 1 is characterized in that, the heat insulation layer of described cooling package outer surface is that conductive coefficient is lower than the applied material of 0.03 (SI).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010143634 CN102214975B (en) | 2010-04-09 | 2010-04-09 | Cooling structure of linear motor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010143634 CN102214975B (en) | 2010-04-09 | 2010-04-09 | Cooling structure of linear motor |
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| CN102214975A true CN102214975A (en) | 2011-10-12 |
| CN102214975B CN102214975B (en) | 2013-01-23 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102570651A (en) * | 2011-11-15 | 2012-07-11 | 太仓富田瑞兰得电机有限公司 | Liquid-cooled cooling device and motor with the same |
| CN105578838A (en) * | 2014-10-16 | 2016-05-11 | 中山大洋电机股份有限公司 | Motor controller |
| CN110637410A (en) * | 2017-05-26 | 2019-12-31 | Asml荷兰有限公司 | Actuator, linear motor and lithographic apparatus |
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| US6956308B2 (en) * | 2003-07-15 | 2005-10-18 | Nikon Corporation | Dual flow circulation system for a mover |
| CN1965459A (en) * | 2004-07-12 | 2007-05-16 | 住友重机械工业株式会社 | Linear motor and stage device using the linear motor |
| JP2007159286A (en) * | 2005-12-06 | 2007-06-21 | Yaskawa Electric Corp | Linear motor |
| CN101657956A (en) * | 2007-06-13 | 2010-02-24 | 株式会社安川电机 | canned linear motor armature and canned linear motor |
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2010
- 2010-04-09 CN CN 201010143634 patent/CN102214975B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6956308B2 (en) * | 2003-07-15 | 2005-10-18 | Nikon Corporation | Dual flow circulation system for a mover |
| CN1965459A (en) * | 2004-07-12 | 2007-05-16 | 住友重机械工业株式会社 | Linear motor and stage device using the linear motor |
| JP2007159286A (en) * | 2005-12-06 | 2007-06-21 | Yaskawa Electric Corp | Linear motor |
| CN101657956A (en) * | 2007-06-13 | 2010-02-24 | 株式会社安川电机 | canned linear motor armature and canned linear motor |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102570651A (en) * | 2011-11-15 | 2012-07-11 | 太仓富田瑞兰得电机有限公司 | Liquid-cooled cooling device and motor with the same |
| CN105578838A (en) * | 2014-10-16 | 2016-05-11 | 中山大洋电机股份有限公司 | Motor controller |
| CN105578838B (en) * | 2014-10-16 | 2018-01-05 | 中山大洋电机股份有限公司 | A kind of electric machine controller |
| CN110637410A (en) * | 2017-05-26 | 2019-12-31 | Asml荷兰有限公司 | Actuator, linear motor and lithographic apparatus |
| CN110637410B (en) * | 2017-05-26 | 2021-11-16 | Asml荷兰有限公司 | Actuator, linear motor and lithographic apparatus |
| US11539280B2 (en) | 2017-05-26 | 2022-12-27 | Asml Netherlands B.V. | Actuator, linear motor and lithographic apparatus |
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| CN102214975B (en) | 2013-01-23 |
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Address after: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |