CN102211445A - Screen printing system and screen printing method - Google Patents
Screen printing system and screen printing method Download PDFInfo
- Publication number
- CN102211445A CN102211445A CN2010102720013A CN201010272001A CN102211445A CN 102211445 A CN102211445 A CN 102211445A CN 2010102720013 A CN2010102720013 A CN 2010102720013A CN 201010272001 A CN201010272001 A CN 201010272001A CN 102211445 A CN102211445 A CN 102211445A
- Authority
- CN
- China
- Prior art keywords
- substrate
- workbench
- screen painting
- half tone
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Screen Printers (AREA)
Abstract
The invention discloses a screen printing system and a screen printing method. The system comprises a conveyor belt for conveying substrates; a work station arranged below the conveyor belt for supporting the substrates; an aligning inductor unit for detecting the substrate on the work station; a work station elevating unit for moving the work station up and down; a screen assembly arranged above the work station and equipped with a screen for correcting positions according to the alignment of the substrate. A gap is arranged between the work station and the screen assembly; and a screen elevating unit for moving the screen assembly up and down.
Description
Technical field
The present invention is relevant for a kind of screen painting system and half-tone screen printing method.
Background technology
In making the solar cell process, use the device that prints electrode to come wafer that load is transferred and the position that calculates wafer, so that accurately on wafer, form as fine patterns such as front electrode and backplates.The print system that known technology uses, by using camera to detect the position that is transferred wafer, to carry out the position correction of wafer, fix a workbench, by making wafer move to level, vertically reaching rotation direction it is positioned on this workbench, and carry half tone to stationary work-table, print to use scraper plate.
Yet known technology need increase the number that wafer is located superincumbent workbench and comprised the production line of screen cloth, to improve output.Not only manufacturing cost can be increased, but also the shared space of screen painting system can be increased.
Therefore, a kind ofly can significantly not increase under the condition of cost in exploitation, can improve in the novel screen painting system of output and space efficiency has very big demand.
Summary of the invention
The purpose of this invention is to provide a kind of screen painting system and half-tone screen printing method, can significantly not increase under the condition of cost, improve output and space efficiency, to solve the problems referred to above that prior art exists.
According to a form of the present invention, a kind of screen painting system is provided, it comprises a conveyer belt in order to conveying substrate; One is arranged at the conveyer belt below is transferred substrate in order to supporting workbench; One aligning sensor unit in order to the alignment of the substrate of detection and location on workbench; One usefulness is so that the worktable lifting unit that workbench moves up and down; One half tone assembly, it is positioned at the workbench top, and leaves the gap between the workbench, and comprises a half tone, and its position is revised according to the alignment of substrate; And a usefulness is so that the half tone lifting unit that half tone moves up and down.
Wherein, workbench has can provide negative pressure, produces the negative pressure hole of any displacement to prevent substrate on workbench.
Can form groove on workbench top, so that conveyer belt is embedded.
It is configurable in the workbench below to aim at sensor unit, and workbench can have a transparent region, for aiming at the alignment that sensor unit detects substrate.Aim at sensor unit and can comprise one in order to detect first inductor of substrate back; One in order to detect second inductor of substrate side surfaces; And the 3rd inductor in order to the rotary state that detects substrate.First, second and third inductor can have a lighting device and a camera respectively.
Moreover the half tone assembly can comprise a underframe, has one first perforate at core, and wherein half tone is fixed in the underframe below; One upper frame is disposed at the underframe top and has second perforate corresponding to first perforate; A pair of guide unit is disposed at the top of upper frame, across second perforate toward each other; One support bar, its two ends are supported guide unit by this, can move along the longitudinal direction of guide unit; And a scraper component, combine with support bar, pass first perforate and second perforate, and the thickener that will be distributed on the half tone is printed on the substrate.
Guide unit can be a conveyer belt, and support bar can be moved by the servo motor driven guide unit.
The half tone lifting unit can comprise a plurality of half tone feets, and its edge along underframe separates, and supports underframe and can extend up and down; Reach one by the motor that uses a gear that the half tone feet is moved up and down.
Conveyer belt and workbench are configurable on a Working gantry, and Working gantry can have the perforate that can supply the half tone feet to pass.
Conveyer belt can combine with a tape holder, and the worktable lifting unit can comprise a plurality of workbench feets, and it separates along the work edge of table, support table and can extending up and down; And a usefulness is so that the cylinder that tape holder moves up and down.
This screen painting system can further comprise a substrate and detect inductor, and it is disposed at workbench the place ahead, to detect the operation of transporting and control conveyer belt of substrate, substrate is stopped on the workbench.
According to another form of the present invention, a kind of screen painting system is provided, it comprises: one defines the housing of inner space; One first screen painting unit and one second screen painting unit are arranged in the inner space, and comprise a conveyer belt respectively, and wherein the conveyer belt of the conveyer belt of the first screen painting unit and the second screen painting unit is arranged side by side; Reach this control module of control to the operation of screen painting unit.
The first screen painting unit and the second screen painting unit can comprise respectively: a conveyer belt in order to conveying substrate; One is arranged at the conveyer belt below is transferred substrate in order to supporting workbench; One aligning sensor unit in order to the alignment of the substrate of detection and location on workbench; One usefulness is so that the worktable lifting unit that workbench moves up and down; One half tone assembly, it is positioned at the workbench top, and leaves the gap between the workbench, and comprises a half tone, and its position system is revised according to the alignment of substrate; And a usefulness is so that the half tone lifting unit that the half tone assembly moves up and down.
The half tone assembly of the half tone assembly of the first screen painting unit and the second screen painting unit can be in the diagonal angle setting.
One detecting unit can be arranged at the workbench back side, whether bad with the substrate behind the detection screen painting.
One calibration tape can be arranged on the detecting unit below, with the supporting substrate two ends and carry this substrate, and be provided with one and withdraw from band between calibration tape, it is operated to become crisscross with the moving direction of calibration tape, utilizing detecting unit to detect with eliminating is underproof substrate.
Workbench can have can provide negative pressure, preventing the negative pressure hole of substrate at the workbench superior displacement, and can form groove on workbench top, so that conveyer belt is embedded.
It is configurable in the workbench below to aim at sensor unit, and a transparent region can be set on workbench, for aiming at the alignment that sensor unit detects substrate.
Aiming at sensor unit can comprise: one in order to detect first inductor of substrate back; One in order to detect second inductor of substrate side surfaces; And the 3rd inductor in order to the rotary state that detects substrate.First, second and third inductor can have a lighting device and a camera respectively.
The half tone assembly can comprise: a underframe, have one first perforate at core, and wherein half tone is fixed in the underframe below; One upper frame is disposed at the underframe top and has second perforate corresponding to first perforate; A pair of guide unit is disposed on the upper frame, across second perforate toward each other; One support bar, its two ends are supported guide unit by this, can move along the longitudinal direction of guide unit; And a scraper component, combine with support bar, pass first perforate and second perforate, and the thickener that will be distributed on the half tone is printed on the substrate.
Guide unit can be a conveyer belt, and support bar can be moved by the servo motor driven guide unit.
The half tone lifting unit can comprise: a plurality of half tone feets, and its edge along underframe separates, and supports underframe and can extend up and down; Reach one by the motor that uses a gear train that the half tone feet is moved up and down.Conveyer belt and workbench are configurable on a Working gantry, and Working gantry can have the perforate that can supply the half tone feet to pass.
Conveyer belt can combine with a tape holder, and the worktable lifting unit can comprise a plurality of workbench feets, and it separates along the work edge of table, support table and can extending up and down; And a usefulness is so that the cylinder that tape holder moves up and down.
This screen painting system can further comprise a substrate and detect inductor, and it is disposed at workbench the place ahead, to detect the operation of transporting and control conveyer belt of substrate, substrate is stopped on the workbench.
According to another form of the present invention, a kind of half-tone screen printing method is provided, it comprises: a substrate is provided; With substrate orientation on a workbench; Detection is positioned at the alignment of the substrate on the workbench; The superincumbent workbench of substrate orientation is raise; According to the alignment of substrate, correction is positioned on the workbench, and leaves the position of a half tone in gap between the workbench; Half tone is descended, allow half tone be positioned at the top of substrate; And use scraper plate and thickener, pattern is printed on the surface of substrate.
Workbench can have negative pressure hole, and this method further comprises and provide negative pressure to substrate, and substrate is fixed on the workbench.
The step that detection is positioned at the alignment of the substrate on the workbench can comprise: illuminating board; And the photo of shooting substrate end portion.
The step that detection is positioned at the alignment of the substrate on the workbench can comprise: the back portion that detects this substrate; Detect the lateral parts of substrate; And the rotary state of detection substrate.
Provide the step of a substrate to be undertaken by system in the line with a conveyer belt.
Description of drawings
Fig. 1 is the decomposition diagram of the screen painting system of the present invention's one specific embodiment.
Fig. 2 is the side view of the screen painting system of the present invention's one specific embodiment.
Fig. 3 is the plane of the conveying assembly of the screen painting system of the present invention's one specific embodiment.
Fig. 4 is the perspective view of the table assembly of the screen painting system of the present invention's one specific embodiment.
Fig. 5 is the plane that the 4th figure does not contain workbench.
Fig. 6 is the side view of the table assembly of the screen painting system of the present invention's one specific embodiment.
Fig. 7 is the plane of the half tone assembly of the screen painting system of the present invention's one specific embodiment.
Fig. 8 is the perspective view of the screen painting system outside of another specific embodiment of the present invention.
Fig. 9 is the plane of the screen painting internal system of another specific embodiment of the present invention.
Figure 10 is the decomposition diagram of the screen painting unit of the screen painting system of another specific embodiment of the present invention.
Figure 11 is the plane of the conveying assembly of the screen painting system of another specific embodiment of the present invention.
Figure 12 is the plane of the printing conveyer belt of the screen painting system of another specific embodiment of the present invention.
Figure 13 is the perspective view of the detecting unit of the screen painting system of another specific embodiment of the present invention.
Figure 14 is the cutaway view of the detecting unit of the screen painting system of another specific embodiment of the present invention.
Figure 15 is the flow chart of the half-tone screen printing method of another specific embodiment of the present invention.
Among the figure:
1000: housing
2000A, 2000B: screen painting unit
2112: workbench
2113-1,2113-2,2113-3: transparent region
2115: negative pressure hole
2118: the worktable lifting unit
2119-1,2119-2,2119-3: aim at sensor unit
2122: the substrate detecting unit
2200,2200A, 2000B: half tone assembly
2210: underframe
2220: upper frame
2221-1,2221-2: guide unit
2222: support bar
2223: scraper component
2230: half tone
2300,2300A: half tone lifting unit
2310: the half tone feet
3000A, 3000B: thickener feed unit
4000A, 4000B: detecting unit
4100-1,4100-2: calibration tape
4200-1,4200-2: withdraw from band
5000: control module
The specific embodiment
Although be illustrated the present invention according to certain specific embodiments, yet should be appreciated that being familiar with this operator can not depart from spirit of the present invention and category, as claim define and equivalent person's situation under, carry out various variations and modification.Among whole specification of the present invention, when judging that certain technology of explanation is not viewpoint of the present invention, omit its relevant detailed description.
Although " first " and " second " waits this class term can be used for describing various elements, this class component must not be limited to above-mentioned term.Above-mentioned term is only in order to distinguish certain element and another element.
Employed term is not in order to restriction the present invention just for certain specific embodiments is described in the specification.Unless have in addition outside the use clearly, otherwise the statement of odd number also comprises many implications.In this manual, for example " comprise (comprising) " or " by ... form (consisting of) " statement be in order to show that a characteristic, a quantity, a step, an operation, an element, a part or its make up, and should not be considered as getting rid of any existence or the possibility of one or more other characteristics, quantity, step, operation, element, part or its combination.
Followingly illustrate in greater detail the screen painting system and the half-tone screen printing method of certain specific embodiments of the present invention with reference to accompanying drawing, no matter wherein figure number why, identical or reciprocity element system gives identical Ref. No., and omits unnecessary explanation.
Fig. 1 is the decomposition diagram of the screen painting system 2000 of the present invention's one specific embodiment, and Fig. 2 is the side view of the screen painting system 2000 of the present invention's one specific embodiment, and Fig. 3 is the plane of conveying assembly 2100.In addition, Fig. 4 is the perspective view of table assembly 2110, and Fig. 5 is the plane that Fig. 4 does not contain workbench (2112 among Fig. 4), and Fig. 6 is the side view of table assembly 2110.Fig. 7 is the plane of half tone assembly 2200.
The screen painting system of the present invention's one specific embodiment can be used to conductive paste is printed on the front and/or the back side of substrate (for example wafer), to form electrode.As shown in Figure 1, this screen painting system is made of a half tone assembly 2200, a conveying assembly 2100 and a half tone lifting unit 2300.
Conveying assembly 2100 is provided with a substrate, and it lies in supporting substrates in the screen painting processing procedure, and behind the screen painting processing procedure, substrate is transported to next processing procedure.Fig. 1 and Fig. 3 diagram is disposed at preceding conveyer belt unit 2120 on the Working gantry 2140, a table assembly 2110, a rear carrier unit 2130 etc. as a tabular Working gantry 2140, of conveying assembly.
Preceding conveyer belt unit 2120 provides substrate to table assembly 2110, and rear carrier unit 2130 then after screen painting is finished, is transported to next processing procedure with substrate.Table assembly 2110 is supporting substrates in the screen painting processing procedure.Details are as follows for each element and function.
According to a specific embodiment of the present invention, use the interior system of a line and use conveyer belt 2111-1,2111-2 (Fig. 4) to come conveying substrate.System's tolerable is processed continuously in this class line, to improve productive rate.Conveyer belt in order to conveying substrate can be a pair of band 2111-1, the 2111-2 that separates each other.
As shown in Figure 4, conveyer belt 2111-1,2111-2 can combine with a tape holder 2116 that comprises roller 2117 etc.
Specific location below conveyer belt 2111-1,2111-2 is provided with workbench 2112, the substrate that is transferred with supporting.Workbench 2112 places in the mobile route of conveyer belt 2111-1,2111-2 institute substrate conveying, and supports the substrate that is transferred.The screen painting that forms electrode lies on the substrate that workbench 2112 supported and carries out.The screen painting that is undertaken by half tone assembly 2200 hereinafter will be described.
As shown in Figure 3, it is configurable in workbench 2112 the place aheads that substrate detects inductor 2122, for example on the top of preceding conveyer belt unit 2120, to detect transporting of substrate.Substrate detects inductor 2122 and detects and be transported to the substrate of workbench 2112, and substrate is stopped and accurately by the position on workbench 2112.For reaching this purpose, substrate detects inductor 2122 can behind appropriate time (for example about 1.5 seconds), stop the operation of conveyer belt 2111-1,2111-2 when conveying substrate.
Can on workbench 2112, form the negative pressure hole 2115 that negative pressure can be provided, to prevent to be positioned at the substrate displacement on the workbench 2112.When using pump (not shown) to see through negative pressure hole 2115 to provide negative pressure on workbench 2112, the substrate that is positioned on the workbench 2112 closely is attached on the workbench 2112, even when therefore workbench 2112 moves, its alignment is also unaffected.
Can form the groove 2114 among Fig. 4, conveyer belt 2111-1,2111-2 are embedded on the upper surface of workbench 2112.This class groove 2114 can prevent that substrate from except leaving the gap, not staying the gap in other places on workbench 2112, therefore makes workbench 2112 supporting substrates more firmly.
Aligning sensor unit 2119-1 among Fig. 5,2119-2,2119-3 (hereinafter referred to as " 2119 ") detect the alignment that is positioned at the substrate on the workbench 2112.In other words, those aim at the alignment that sensor unit detects substrate, the position of substrate and half tone 2330 are matched (seeing also Fig. 2), to carry out screen painting.This class is aimed at sensor unit 2119 can comprise a camera and a lighting device that is disposed at workbench 2112 belows.Transparent region 2113-1, the 2113-2 of Fig. 4,2113-3 (hereinafter referred to as " 2113 ") are arranged on the workbench, for aiming at sensor unit 2119, particularly camera, detect the alignment of substrate.At this and do not mean that transparent region 2113 is fully transparent.Should be appreciated that this transparent region can comprise the translucent person of the alignment that is enough to the optical detection substrate.The transparent region 2113 of the present invention's one specific embodiment is made by quartz.
Aim at sensor unit 2119 and can comprise one in order to detect the first inductor 2119-1 of substrate back; One in order to detect the second inductor 2119-2 of substrate side surfaces; And the 3rd an inductor 2119-3 in order to the rotary state that detects substrate.The first inductor 2119-1 and the second inductor 2119-2 detect the front and the side of substrate respectively, to obtain the alignment error on the X and Y coordinates direction.Alignment error on the direction of rotation is obtained by the 3rd inductor 2119-3.
After the alignment that detects substrate, workbench 2112 and the substrate that is positioned on the workbench 2112 are raise by the worktable lifting unit 2118 among Fig. 4.Worktable lifting unit 2118 makes the mobile up and down certain height of workbench 2112.Worktable lifting unit 2118 can separate along the edge of workbench 2112, with support table 2112, and can comprise a plurality of workbench feet 2118a that can extend up and down, and a usefulness is so that the cylinder 2118b that tape holder 2116 moves up and down.Each workbench feet 2118a can be bonded to a support 2118c respectively to reach better combination.In addition, also can use other power transmissions, for example linear actuators (not shown) and gear train (not shown).
As depicted in figs. 1 and 2, the half tone assembly 2200 (Fig. 2) that will comprise a half tone 2230 is configured in the top of workbench 2112, to carry out screen painting.At this, the alignment of substrate is sent to half tone 2230 by control module 5000 (Fig. 9), so this alignment can be used for the position correction of half tone 2230.Owing to revise the position of half tone 2230 according to the information of base plate alignment, so can obtain the result that the position matches between half tone 2230 and the substrate.At this, can use a plurality of servo motor 2211-1,2211-2,2211-3 (Fig. 7).Each servo motor turns round respectively, and half tone 2230 is moved, and with the information according to base plate alignment the position of half tone and substrate is matched.
As shown in Figure 7, half tone assembly 2200 can comprise a underframe, has one first perforate at core; One upper frame is disposed at the underframe top; A pair of guide unit is disposed at upper frame top; One support bar, its two ends are supported guide unit by this, can move along the longitudinal direction of guide unit; And a scraper component, combine with support bar, and the thickener that will be coated on the half tone is printed on the substrate.
A pair of guide unit is set on upper frame 2220, makes it toward each other across this second perforate 2225.The bootable scraper component 2223 of guide unit 2221-1,2221-2, particularly support bar 2222, rectilinear motion, its action will illustrate as after.Can use conveyer belt as guide unit 2221-1,2221-2.At this, guide unit 2221-1,2221-2 can be driven by servo motor 2224.
The two ends of support bar 2222 are supported by guide unit 2221-1,2221-2.Therefore, support bar 2222 passes first perforate 2213 and second perforate 2225.As mentioned above, when using conveyer belt 1210-1,1210-2, can carry support bar 2222 to come the rectilinear motion of guide support bar 2222 by driving conveyer belt 1210-1,1210-2 as guide unit 2221-1,2221-2.
The scraper component 2223 that is used for screen painting is to combine with support bar 2222.Scraper component 2223 hangs on certain position of support bar 2222, and is configured on the half tone 2230 by first perforate 2213 and second perforate 2225 that is respectively formed on underframe 2210 and the upper frame 2220.This scraper component can be moved to directions X and move to the Y direction by the lengthwise movement of support bar 2222 by the motion of support bar 2222.When thickener by thickener feed unit 3000A, when 3000B (Fig. 9) is coated on the top of support bar 2222, scraper component 2223, particularly the scraper plate 2223S (Fig. 2) of scraper component end portion can closely be attached to the top of half tone 2230, and moves on the direction of X and/or Y coordinate.Therefore, can be printed on the surface of substrate corresponding to the specific pattern that is formed on the pattern (not shown) on the half tone 2230.
The half tone assembly 2200 that comprises half tone 2230 can move up and down by half tone lifting unit 2300.As depicted in figs. 1 and 2, half tone lifting unit 2300 can comprise a plurality of half tone feets 2310, and its edge along underframe 2210 separates, to support underframe 2210 and can extend up and down; And a usefulness is so that the motor 2320 that half tone feet 2310 moves up and down.Can the half tone 2230 that match with substrate position be moved downward on the substrate that is positioned on the workbench 2112 by half tone lifting unit 2300, then carry out screen painting with scraper component 2223.
As shown in figures 1 and 3, when conveyer belt 2111-1,2111-2 and workbench 2112 were configured on the Working gantry 2140, Working gantry 2140 can have the perforate 2141 that half tone feet 2310 can pass.At this, gripper shoe 2311 can be comprised, in the appropriate position of half tone feet 2310 with the bottom side of support works stand 2140.Fig. 2 illustrates feet top and passes Working gantry 2140, supports underframe 2210.
A specific embodiment of the present invention provides the half tone lifting unit 2300 with said structure, but can use other power transmissions, for example hydraulic cylinder etc.
When finishing printing, half tone assembly 2200 moves up and gets back to original position, and workbench 2112 then moves down gets back to original position.When workbench 2112 moves down when getting back to original position, conveyer belt 2111-1,2111-2 turn round once more, see through rear side conveyer belt 2130, and substrate is transported to next production line.
The screen painting system of another specific embodiment of the present invention can be used to conductive paste is printed on the front and/or the back side of substrate (for example wafer), to form electrode.The appearance system of screen painting system forms housing 1000, as shown in Figure 8.Can form outlet 1130 in a side of housing 1000,, can form display 1110 and an input block 1120 in order to manual input operation instruction, for example a touch-control screen in order to check mode of operation in the front of housing 1000 to send the substrate behind the screen painting.
See also Fig. 9, the screen painting system of the present invention's one specific embodiment can comprise a plurality of screen paintings unit 2000A, 2000B in the inner space of housing, to operate a plurality of substrates simultaneously.
As shown in Figure 9, transport substrate from left to right.Thickener feed unit 3000A, 3000B are set in housing, make thickener be supplied to each screen painting unit 2000A, 2000B, rearmost end (rightmost) at housing is provided with detecting unit 4000A, 4000B, carries out the substrate behind the screen painting to detect by screen painting unit 2000A, 2000B.In addition, control module 5000 is set in housing 1000, with the operation of the screen painting system of control the present invention one specific embodiment.
Figure 10 illustrates screen painting unit 2000A.Because screen painting unit 2000A is similar to the screen painting unit 2000 among Fig. 1, therefore omit the unnecessary explanation identical with above-mentioned explanation.Though Figure 10 only is shown in the screen painting unit 2000A (hereinafter referred to as the first screen painting unit) of front end, still has corresponding structure with the first screen painting unit 2000A at the screen painting unit of rear end 2000B (hereinafter referred to as the second screen painting unit).Therefore, only the first screen painting unit 2000A is elaborated.In a specific embodiment of the present invention, screen painting unit 2000A comprises a half tone assembly 2200A, a conveying assembly 2100A, and a half tone lifting unit 2300A, as shown in figure 10, but not as limit.
Conveying assembly 2100A is provided with a substrate, and it is supporting substrates in the screen painting processing procedure, and behind the screen painting processing procedure, substrate is transported to next processing procedure.The conveying assembly 2100A of the present invention's one specific embodiment comprises a tabular Working gantry 2140, is set parallel to each other the printing conveyer belt unit (seeing also 2100A-1, the 2100B-1 of Figure 11) on Working gantry 2140, and transports conveyer belt unit (seeing also 2100A-2, the 2100B-2 of Figure 11).
Printing conveyer belt unit 2100A-1,2100B-1 carry out the screen painting processing procedure by half tone assembly (seeing also the 2200A of Figure 10).As shown in figure 12, printing conveyer belt unit 2100A-1 comprises a preceding conveyer belt unit 2120, a table assembly 2110 and the rear carrier unit 2130 that series connection is provided with.Preceding conveyer belt unit 2120 provides substrate to table assembly 2110, and rear carrier unit 2130 then after screen painting is finished, is transported to next processing procedure with substrate.Table assembly 2110 is supporting substrates in the screen painting processing procedure.
As shown in figure 11, compare with the second conveying assembly 2100B, the conveyer belt unit 2100A-2 that transports that is included among the first conveying assembly 2100A relatively is configured in the front, provides to carry out the substrate that screen painting is handled at the second conveying assembly 2100B.In other words, the conveyer belt unit 2100A-2 that transports that is configured on the first conveying assembly 2100A does not carry out screen painting, but only substrate is transported to the second conveying assembly 2100B.
Similarly, the substrate of conveyer belt unit 2100B-2 after with screen painting that transport at the second conveying assembly 2100B is transported to next processing procedure from the first conveying assembly 2100A.
For the actual utilization of screen painting system space, adjacent two conveying assembly 2100A, 2100B, particularly adjacent two Working gantries 2140 are provided with in the mode of mutual skew.In other words, the part of two conveying assembly 2100A, 2100B sides adjacent toward each other.Print conveyer belt unit 2100A-1,2100B-1 and transport conveyer belt unit 2100A-2,2100B-2 system and be disposed at subtend portion.More specifically, the printing conveyer belt unit 2100A-1 of the first conveying assembly 2100A with the second conveying assembly 2100B transport the conveyer belt unit 2100B-2 setting of connecting, and transport the conveyer belt unit 2100A-2 setting of connecting with printing conveyer belt unit 2100B-1 at the second conveying assembly 2100B at the first conveying assembly 2100A.
As shown in figure 10, half tone assembly 2200A is disposed on the conveying assembly 2100A, particularly on table assembly 2110, carries out the screen painting processing procedure on substrate surface.Half tone lifting unit 2300A moves half tone 2200A up and down.As shown in Figure 9, two half tone assemblies of two half tone assemblies in the present invention's one specific embodiment and this also are provided with as the mode of conveying assembly with skew.
As mentioned above, aim at the alignment of sensor unit 2119-1,2119-2,2119-3 (seeing also Fig. 5) substrate of detection and location on workbench 2112 hereinafter referred to as " 2119 ".Detected base plate alignment is sent to half tone 2230 by control module 5000 (seeing also Fig. 9), and is used for revising the position of half tone 2230.In other words, revise the position of half tone 2230, the half tone 2230 and the position of substrate are matched according to the information of base plate alignment.
According to a specific embodiment of the present invention, even use a plurality of screen paintings unit 2000A, 2000B, still, therefore not only significantly reduce the manufacturing cost of system, and can also reduce the shared space of system as long as a control module 5000 just can be controlled its operation.
As shown in Figure 9, detecting unit 4000A, 4000B are configured in the back side of the second screen painting unit 2000B, carry out the substrate behind the screen painting to detect by screen painting unit 2000A, 2000B.Below consult Fig. 9, Figure 13 and Figure 14, the 26S Proteasome Structure and Function of detecting unit 4000A, 4000B is described.
According to a specific embodiment of the present invention, two detecting unit 4000A, 4000B are set, whether bad to detect the two substrates that two screen painting unit 2000A, 2000B carry out behind the screen painting.According to Fig. 9, checkout gear 4000A (hereinafter referred to as " first detecting unit ") is configured in the position on relative top, whether its substrate that detects after the first screen painting unit 2000A carries out screen painting is bad, and detecting unit is (not shown in Figure 13, in Figure 14 4000B, hereinafter referred to as " second detecting unit ") be configured in the position of relative bottom, whether its substrate that detects after the second screen painting unit 2000B carries out screen painting is bad.The 26S Proteasome Structure and Function of the first detecting unit 4000A below is described.Because therefore the structure of the second detecting unit 4000B and merit system only elaborate at the first detecting unit 4000A corresponding to the first detecting unit 4000A.
Whether the conveying of transporting conveyer belt unit 2100B-2 of the printing state of first detecting unit 4000A detection substrate, the printing conveyer belt unit 2100A-1 of the first screen painting unit 2100A and the second screen painting unit 2100B is bad.Can be by the calibration tape that is configured in the first detecting unit 4000A bottom substrate of desiring to offer the first detecting unit 4000A without interruption.
The first detecting unit 4000A is configured in the top of calibration tape 4100-1,4100-2 core, and the substrate that desire detects is transported to the bottom of the first detecting unit 4000A, by calibration tape 4100-1,4100-2 substrate is stopped.For reaching this purpose, an inductor 4600 can be set in the front of calibration tape 4100-1,4100-2.This inductor 4600 can make substrate stop at the bottom of the first detecting unit 4000A by detecting the described identical mode of inductor 2122 (Fig. 5) with substrate.
When substrate is transported to the first detecting unit 4000A, the first detecting unit 4000A optical check substrate surface, and the information of the information of audit by comparison gained and input (specification).When gained information biased error permissible range, this substrate is judged to be bad.On the other hand, when the gained information was in the error permissible range, this substrate was judged to be well.
Being judged to be bad substrate should get rid of from production line, and does not deliver to next processing procedure.For reaching this purpose, between a pair of calibration tape 4100-1,4100-2, be provided with and withdraw from band 4200-1,4200-2, it is operated to become crisscross with calibration tape 4100-1,4100 moving direction.
Calibration tape 4100-1,4100-2 are configurable in the position that is lower than calibration tape 4100-1,4100-2 usually, and not transporting of substrate can be interrupted.Yet, when judging that substrate is bad, make and withdraw from band 4200-1,4200-2 and rise to the position higher than calibration tape 4100-1,4100-2, be transported to different directions and substrate is got rid of by moving direction from calibration tape 4100-1,4100-2.As shown in figure 13, the framework 4500 that can use cylinder 4400 to make supporting withdraw from band 4200-1,4200-2 raises, and withdraws from band 4200-1,4200-2 with rising.
One withdraw device 4300 can be set, so that guide the substrate that is excluded in the place ahead of the moving direction that withdraws from band 4200-1,4200-2.This withdraw device 4300 can be as Figure 13 and shown in Figure 14 downward-sloping.
On the other hand, when judging that substrate is good, the calibration tape 4100-1, the 4100-2 that stop turn round once more, and substrate is transported to next processing procedure.
The screen painting system of the present invention's one specific embodiment below is described.
Use conveyer belt 2111-1,2111-2 to provide substrate on workbench 2112.More specifically, the substrate that the printing conveyer belt unit 2100A-1 of the first conveying assembly 2100A is provided and the first conveying assembly 2100A transport the substrate that conveyer belt unit 2100A-2 is provided, in by after the first conveying assembly 2100A, be configured on the workbench of the second conveying assembly 2100B 2112.
Specific location configuration effort platform 2112 below conveyer belt 2111-1,2111-2, the substrate that is transferred with supporting.
When substrate orientation is on workbench 2112, detect the alignment of substrate, the position of substrate and half tone 2230 is matched, to carry out screen painting.The first inductor 2119-1 and the second inductor 2119-2 detect the front and the side of substrate respectively, to obtain the alignment error on the X and Y coordinates direction.Alignment error on the direction of rotation is obtained by the 3rd inductor 2119-3.
Then the superincumbent workbench 2112 of substrate orientation is raise.Detected base plate alignment is sent to half tone assembly 2200A by control module 5000 (referring to Fig. 2), and revises the position of half tone 2230 according to the alignment of substrate.Owing to revise the position of half tone 2230 according to the information of base plate alignment, so can obtain the result that the position matches between half tone 2230 and the substrate.
When finishing printing, half tone assembly 2200 can rise and get back to original position, and rolls back original position under workbench 2112 meetings, and wherein substrate then transports detecting unit to.
When the substrate that is formed pattern by the screen painting processing procedure in the above is transported to detecting unit, detecting unit 4000A, 4000B detect substrate surface and therefrom obtain information, more resulting then information and the information of importing in advance (specification), whether bad to judge substrate.
When judging that substrate is good, substrate is transported to next processing procedure.On the other hand, when judging that substrate is bad, make and withdraw from band 4200-1,4200-2 and rise, withdraw from band 4200-1,4200-2 and will be judged to be bad substrate and be rejected to and become another crisscross direction with moving direction by what raise.
Consult Figure 15, it is for the flow chart of the half-tone screen printing method of another specific embodiment of the present invention, so that the half-tone screen printing method of another form of the present invention to be described.Following half-tone screen printing method can be had with the screen painting system same structure of above-mentioned specific embodiment or the screen painting system of similar structures by use to be realized.For understanding that can be more deep, see also Fig. 1 to screen painting system shown in Figure 7.
One substrate (S100) is provided, and wherein this substrate is the material that is used to make solar cell, wafer for example, and be used for the other materials of screen painting.Provide the step of a substrate to use conveyer belt 2111-1,2111-2 to carry out by system in the line.During system, tolerable is processed continuously, to improve productive rate in using line.
Then the substrate orientation that will be provided is on a workbench 2112 (S200).Specific location configuration effort platform 2112 in conveyer belt 2111-1,2111-2 bottom, the substrate that is transferred with supporting.
Can on workbench 2112, form the negative pressure hole 2115 that negative pressure can be provided, to prevent to be positioned at the substrate displacement on the workbench 2112.When using pump (not shown) to see through negative pressure hole 2115 to provide negative pressure on workbench 2112, the substrate that is positioned on the workbench 2112 closely is attached on the workbench 2112, even when therefore workbench 2112 moves, its alignment is also unaffected.
The alignment (S300) of the substrate of detection and location on workbench 2112 matches the position of substrate and half tone 2230, to carry out screen painting then.The first inductor 2119-1 and the second inductor 2119-2 detect the front and the side of substrate respectively, to obtain the alignment error on the X and Y coordinates direction.Alignment error on the direction of rotation is obtained by the 3rd inductor 2119-3.
With the superincumbent workbench rising of substrate orientation (S400).
With the information of base plate alignment be sent to be disposed at workbench 2112 tops and and workbench between leave the half tone 2230 in gap, revise the position of half tone 2230 according to the information of base plate alignment.Owing to revise the position of half tone 2230 according to the information of base plate alignment, so can obtain the result that the position matches between half tone 2230 and the substrate.
When finishing printing, half tone assembly 2200 can rise and get back to original position, and rolls back original position under workbench 2112 meetings, and wherein substrate then transports next bar production line to.
But the above-mentioned specific embodiment is exemplary, is to be the restriction that this patent is comprised scope in order better to make those skilled in the art can understand this patent, can not to be interpreted as; So long as according to spirit that this patent discloses done anyly be equal to change or modify, all fall into the scope that this patent comprises.
Claims (33)
1. screen painting system is characterized in that: comprise:
One conveyer belt is in order to carry a substrate;
One workbench is arranged at described conveyer belt below, the described substrate that is transferred in order to supporting;
One aims at sensor unit, is positioned at the alignment of the described substrate on the described workbench in order to detection;
One worktable lifting unit is used so that described workbench moves up and down;
One half tone assembly is arranged on the described workbench and comprises a half tone, and this half tone assembly separates with described workbench, revises the position of this half tone according to the alignment of described substrate; And
One half tone lifting unit, it moves described half tone assembly up and down.
2. screen painting as claimed in claim 1 system, it is characterized in that: described workbench has the negative pressure hole that negative pressure can be provided, to prevent that described substrate is at described workbench superior displacement.
3. screen painting as claimed in claim 1 system is characterized in that: groove is formed at described workbench top, so that described conveyer belt is embedded.
4. screen painting system according to claim 1, it is characterized in that: described aligning sensor unit is positioned at described workbench below, and a transparent region is set in described workbench, detects the alignment of described substrate for described aligning sensor unit.
5. screen painting as claimed in claim 4 system, it is characterized in that: described aligning sensor unit comprises:
One first inductor is to detect described substrate back;
One second inductor is to detect described substrate side surfaces; And
One the 3rd inductor is to detect the rotary state of described substrate.
6. screen painting as claimed in claim 5 system, it is characterized in that: described first, second and third inductor has a lighting device and a camera respectively.
7. screen painting as claimed in claim 1 system, it is characterized in that: described half tone assembly comprises:
One underframe has one first perforate at core, and wherein said half tone is fixed in the bottom of this underframe;
One upper frame is positioned at described underframe top and has second perforate corresponding to described first perforate;
A pair of guide unit is positioned at the top of described upper frame, across described second perforate toward each other;
One support bar, its two ends are supported guide unit by described, can move along this longitudinal direction to guide unit; And
One scraper component combines with described support bar, passes described first perforate and second perforate, and the thickener that will be distributed on the described half tone is printed on the described substrate.
8. screen painting as claimed in claim 7 system, it is characterized in that: described guide unit is a conveyer belt, and described support bar is moved by the described guide unit of servo motor driven.
9. screen painting as claimed in claim 7 system, it is characterized in that: described half tone lifting unit comprises: a plurality of half tone feets, its edge along described underframe separates, and supports described underframe and can extend up and down; And
One motor is by using a gear that described half tone feet is moved up and down.
10. screen painting as claimed in claim 9 system, it is characterized in that: described conveyer belt and workbench are positioned on the Working gantry, and this Working gantry has the perforate that can pass for described half tone feet.
11. screen painting as claimed in claim 1 system, it is characterized in that: described conveyer belt combines with a tape holder, and described worktable lifting unit comprises:
A plurality of workbench feets, it separates along described work edge of table, supports described workbench and can extend up and down; And
One cylinder moves described tape holder up and down.
12. screen painting as claimed in claim 1 system, it is characterized in that: further comprise a substrate and detect inductor, be positioned at described workbench the place ahead,, described substrate stopped on the described workbench to detect the operation of transporting and control described conveyer belt of described substrate.
13. a screen painting system is characterized in that: comprise:
One housing, it defines the inner space;
One first screen painting unit and one second screen painting unit are arranged in the described inner space, and comprise a conveyer belt respectively, and wherein the conveyer belt of the conveyer belt of this first screen painting unit and this second screen painting unit is arranged side by side; And
One control module, it controls the operation of the described first screen painting unit and the second screen painting unit.
14. screen painting as claimed in claim 13 system, it is characterized in that: the described first screen painting unit and the second screen painting unit comprise respectively:
One conveyer belt is in order to carry a substrate;
One workbench is arranged at described conveyer belt below, the described substrate that is transferred in order to supporting;
One aims at sensor unit, in order to the alignment of the described substrate of detection and location on described workbench;
One worktable lifting unit is used so that described workbench moves up and down;
One half tone assembly is arranged on the described workbench and comprises a half tone, and this half tone assembly separates with described workbench, revises the position of this half tone according to the alignment of described substrate; And
One half tone lifting unit, it moves described half tone assembly up and down.
15. screen painting as claimed in claim 14 system, it is characterized in that: the half tone assembly of the half tone assembly of the described first screen painting unit and the second screen painting unit is in the diagonal angle setting.
Whether 16. screen painting as claimed in claim 14 system, it is characterized in that: further comprise a detecting unit, it is positioned at the described workbench back side, bad with the substrate that detects behind the described screen painting.
17. screen painting as claimed in claim 16 system is characterized in that: described detecting unit below is provided with a calibration tape, supporting described substrate two ends and to carry this substrate, and
Being provided with one and withdrawing from band between this calibration tape, it is operated to become crisscross with the moving direction of this calibration tape, is underproof substrate to get rid of by described detecting unit detection.
18. screen painting as claimed in claim 14 system, it is characterized in that: described workbench has the negative pressure hole that negative pressure can be provided, to prevent that described substrate is at described workbench superior displacement.
19. screen painting as claimed in claim 14 system is characterized in that: groove is formed at described workbench top, so that described conveyer belt is embedded.
20. screen painting as claimed in claim 14 system is characterized in that: described aligning sensor unit is positioned at described workbench below, and
One transparent region is set in described workbench, detects the alignment of described substrate for described aligning sensor unit.
21. screen painting as claimed in claim 20 system, it is characterized in that: described aligning sensor unit comprises:
One first inductor is to detect described substrate back;
One second inductor is to detect described substrate side surfaces; And
One the 3rd inductor is to detect the rotary state of described substrate.
22. screen painting as claimed in claim 21 system, it is characterized in that: described first, second and third inductor has a lighting device and a camera respectively.
23. screen painting as claimed in claim 14 system, it is characterized in that: described half tone assembly comprises:
One underframe has one first perforate at core, and wherein said half tone is fixed in the bottom of this underframe;
One upper frame is positioned at described underframe top and has second perforate corresponding to described first perforate;
A pair of guide unit is positioned on the described upper frame, across described second perforate toward each other;
One support bar, its two ends are supported guide unit by described, can move along this longitudinal direction to guide unit; And
One scraper component combines with described support bar, passes described first perforate and second perforate, and the thickener that will be distributed on the described half tone is printed on the described substrate.
24. screen painting as claimed in claim 23 system, it is characterized in that: described guide unit is a conveyer belt, and described support bar is moved by the described guide unit of servo motor driven.
25. screen painting as claimed in claim 23 system, it is characterized in that: described half tone lifting unit comprises:
A plurality of half tone feets, its edge along described underframe separates, and supports this underframe and can extend up and down; And
One motor is by using a gear that described half tone feet is moved up and down.
26. screen painting as claimed in claim 25 system, it is characterized in that: described conveyer belt and workbench are positioned on the Working gantry, and this Working gantry has the perforate that can pass for described half tone feet.
27. screen painting as claimed in claim 14 system, it is characterized in that: described conveyer belt combines with a tape holder, and described worktable lifting unit comprises:
A plurality of workbench feets, it separates along described work edge of table, supports described workbench and can extend up and down; And
One cylinder, it moves described tape holder up and down.
28. screen painting as claimed in claim 14 system, it is characterized in that: further comprise a substrate and detect inductor, be positioned at described workbench the place ahead,, described substrate stopped on the described workbench to detect the operation of transporting and control described conveyer belt of described substrate.
29. one kind is applied to half-tone screen printing method, it is characterized in that: comprise the following step:
One substrate is provided;
With described substrate orientation on a workbench;
Detection is positioned at the alignment of the described substrate on the described workbench;
The superincumbent workbench of described substrate orientation is raise;
According to the alignment of described substrate, revise above the described workbench and and workbench between leave the position of a half tone in gap;
The described half tone that descends makes this half tone be positioned the top of described substrate; And
Use scraper plate and thickener, pattern is printed on the surface of described substrate.
30. half-tone screen printing method as claimed in claim 29 is characterized in that: described workbench has negative pressure hole, and this method further comprises and provide negative pressure to described substrate, and described substrate is fixed on this workbench.
31. half-tone screen printing method as claimed in claim 29 is characterized in that: the step that described detection is positioned at the alignment of the substrate on the described workbench comprises:
Described substrate throws light on; And
Take the photo of described substrate end portion.
32. half-tone screen printing method as claimed in claim 31 is characterized in that: the step that described detection is positioned at the alignment of the substrate on the described workbench comprises:
Detect the back portion of described substrate;
Detect the lateral parts of described substrate; And
Detect the rotary state of described substrate.
33. half-tone screen printing method as claimed in claim 29 is characterized in that: the described step of a substrate that provides is undertaken by system in the line with a conveyer belt.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020100032328A KR101144769B1 (en) | 2010-04-08 | 2010-04-08 | Screen printing system |
| KR10-2010-0032318 | 2010-04-08 | ||
| KR10-2010-0032328 | 2010-04-08 | ||
| KR1020100032318A KR101144766B1 (en) | 2010-04-08 | 2010-04-08 | Screen printing system and screen printing method for substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102211445A true CN102211445A (en) | 2011-10-12 |
Family
ID=44743085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102720013A Pending CN102211445A (en) | 2010-04-08 | 2010-09-03 | Screen printing system and screen printing method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102211445A (en) |
| TW (1) | TW201134672A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106081601A (en) * | 2016-08-11 | 2016-11-09 | 桐城运城制版有限公司 | A kind of plain net plate-making off line device of online |
| CN107031172A (en) * | 2016-12-09 | 2017-08-11 | 苏州工业园区天势科技有限公司 | A kind of electrodynamic type plane screen-printing machine |
| CN108116033A (en) * | 2018-01-30 | 2018-06-05 | 鹤山市泰利诺电子有限公司 | A kind of screen printer movable working platform with conveyer belt |
| CN112018014A (en) * | 2014-12-02 | 2020-12-01 | 应用材料意大利有限公司 | Device for printing on a substrate for producing solar cells and method for transporting said substrate |
| CN112654171A (en) * | 2020-11-09 | 2021-04-13 | 龙南骏亚柔性智能科技有限公司 | Solder mask screen printing method for printed circuit board |
| CN113799478A (en) * | 2020-06-17 | 2021-12-17 | 菱铁（厦门）机械有限公司 | Film printing system |
| CN114987075A (en) * | 2022-06-30 | 2022-09-02 | 无锡尚德太阳能电力有限公司 | Solar cell screen printing process |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5622108A (en) * | 1996-01-30 | 1997-04-22 | Universal Screenprinting Systems, Inc. | Screen printing machine |
| CN201109227Y (en) * | 2007-11-20 | 2008-09-03 | 赵金明 | Full-automatic platen moving printer |
| KR100899348B1 (en) * | 2008-10-27 | 2009-05-26 | 라인시스템(주) | Screen printing machine for solar cell |
| CN201415513Y (en) * | 2009-06-22 | 2010-03-03 | 太仓市黄发记机械模具制造有限公司 | Fully-automatic printing machine with four color processes |
-
2010
- 2010-08-16 TW TW99127237A patent/TW201134672A/en unknown
- 2010-09-03 CN CN2010102720013A patent/CN102211445A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5622108A (en) * | 1996-01-30 | 1997-04-22 | Universal Screenprinting Systems, Inc. | Screen printing machine |
| CN201109227Y (en) * | 2007-11-20 | 2008-09-03 | 赵金明 | Full-automatic platen moving printer |
| KR100899348B1 (en) * | 2008-10-27 | 2009-05-26 | 라인시스템(주) | Screen printing machine for solar cell |
| CN201415513Y (en) * | 2009-06-22 | 2010-03-03 | 太仓市黄发记机械模具制造有限公司 | Fully-automatic printing machine with four color processes |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112018014A (en) * | 2014-12-02 | 2020-12-01 | 应用材料意大利有限公司 | Device for printing on a substrate for producing solar cells and method for transporting said substrate |
| CN106081601A (en) * | 2016-08-11 | 2016-11-09 | 桐城运城制版有限公司 | A kind of plain net plate-making off line device of online |
| CN107031172A (en) * | 2016-12-09 | 2017-08-11 | 苏州工业园区天势科技有限公司 | A kind of electrodynamic type plane screen-printing machine |
| CN108116033A (en) * | 2018-01-30 | 2018-06-05 | 鹤山市泰利诺电子有限公司 | A kind of screen printer movable working platform with conveyer belt |
| CN113799478A (en) * | 2020-06-17 | 2021-12-17 | 菱铁（厦门）机械有限公司 | Film printing system |
| CN113799478B (en) * | 2020-06-17 | 2023-09-12 | 菱铁（厦门）机械有限公司 | Film printing system |
| CN112654171A (en) * | 2020-11-09 | 2021-04-13 | 龙南骏亚柔性智能科技有限公司 | Solder mask screen printing method for printed circuit board |
| CN114987075A (en) * | 2022-06-30 | 2022-09-02 | 无锡尚德太阳能电力有限公司 | Solar cell screen printing process |
| CN114987075B (en) * | 2022-06-30 | 2023-09-01 | 无锡尚德太阳能电力有限公司 | Screen printing process for solar cell |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201134672A (en) | 2011-10-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102211445A (en) | Screen printing system and screen printing method | |
| KR20190087998A (en) | An apparatus for automatically detecting substrate dimensions, a substrate detection line, and a method of detecting the substrate | |
| CN105644128A (en) | Backlight source product assembling device | |
| JP2019147693A (en) | Article transfer device, article inspection device, article transfer method and article inspection method | |
| CN107655897B (en) | Product appearance automatic checkout device | |
| CN202805899U (en) | Full-automatic visual silicon chip printing device with double platforms | |
| CN204078958U (en) | PCB board loading and unloading structure | |
| CN110238553A (en) | A kind of skylight Splicing welding machine | |
| JP4694983B2 (en) | Surface mount machine | |
| CN213675539U (en) | Automatic paster pressing machine | |
| CN209775803U (en) | Multi-substrate alignment printing machine | |
| CN104607356A (en) | Dispensing apparatus | |
| CN109671809B (en) | Typesetting mechanism and solar cell welding machine | |
| US11370215B2 (en) | Printing device | |
| CN207431671U (en) | A kind of backlight module assembling double-station automatic charging machinery hand | |
| JP5053926B2 (en) | Substrate processing equipment | |
| CN216188827U (en) | Substrate processing system | |
| CN106104819A (en) | In the device producing printing on solar cell substrate and the method transmitting this substrate | |
| CN102136525B (en) | Laminating method for solar battery component panel manufacturing process | |
| KR101525923B1 (en) | Device for detecting align mark of exposure apparatus for printed circuit board | |
| CN211072494U (en) | Automatic dress foot machine | |
| JPWO2016114178A1 (en) | Exposure equipment | |
| CN112198769A (en) | Parallel light source non-contact single-side automatic photoetching machine | |
| US20160021801A1 (en) | Substrate conveyance mechanism and component mounting method | |
| CN202491510U (en) | Working platform capable of displacing in fore-and-aft and left-and-right and rotation directions |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20111012 |