CN102184878B - 一种用于晶圆对准的模板图像质量反馈方法 - Google Patents
一种用于晶圆对准的模板图像质量反馈方法 Download PDFInfo
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Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5587921B2 (ja) * | 2012-01-31 | 2014-09-10 | 富士フイルム株式会社 | 画像評価装置、画像評価方法及びプログラム |
CN105097578B (zh) * | 2014-05-05 | 2018-02-06 | 中芯国际集成电路制造(上海)有限公司 | 一种缺陷扫描机台对准***的改进方法 |
CN105428291B (zh) * | 2014-06-18 | 2019-06-28 | 上海华力微电子有限公司 | 一种晶圆横向水平对准的方法 |
CN104362120B (zh) * | 2014-10-30 | 2017-04-19 | 深圳市大能智造科技有限公司 | 晶片拾取设备的视觉定位***的相机位置调节方法 |
CN106356310B (zh) * | 2015-07-14 | 2019-07-09 | 睿励科学仪器(上海)有限公司 | 一种对晶圆中的低对比度定标区域实施定标的方法 |
CN108074853A (zh) * | 2017-04-27 | 2018-05-25 | 深圳市东飞凌科技有限公司 | 晶片校准方法及装置 |
CN109559294B (zh) * | 2017-09-26 | 2021-01-26 | 凌云光技术股份有限公司 | 一种吊牌圆孔质量的检测方法及装置 |
CN108022850A (zh) * | 2017-11-30 | 2018-05-11 | 上海华力微电子有限公司 | 一种扫描程式建立方法、扫描机台及扫描方法 |
CN107958454A (zh) * | 2017-12-04 | 2018-04-24 | 江苏维普光电科技有限公司 | 基于精密平台进行掩膜版图像的快速匹配方法及*** |
CN110111842B (zh) * | 2018-01-29 | 2021-06-29 | 深圳华大智造科技股份有限公司 | 图像清晰度分析及对焦方法、测序仪、***与存储介质 |
CN109782103B (zh) * | 2019-03-11 | 2021-07-30 | 镇江宏祥自动化科技有限公司 | 探针与电子器件引脚的对准方法及*** |
CN112289726B (zh) * | 2020-10-29 | 2023-06-09 | 上海精测半导体技术有限公司 | 晶圆对准模板图像生成方法 |
CN113507611B (zh) * | 2021-09-09 | 2021-12-31 | 深圳思谋信息科技有限公司 | 图像存储方法、装置、计算机设备和存储介质 |
CN117557619B (zh) * | 2023-10-20 | 2024-06-04 | 广州明毅智能科技有限公司 | 晶片图像尺寸的确定方法、装置、计算机设备及存储介质 |
Citations (4)
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US6198535B1 (en) * | 1998-08-20 | 2001-03-06 | United Integrated Circuits Corp. | Wafer alignment system |
CN1722001A (zh) * | 2004-07-08 | 2006-01-18 | Asml荷兰有限公司 | 光刻投射装置及使用这种光刻投射装置的器件制造方法 |
CN101286010A (zh) * | 2008-04-25 | 2008-10-15 | 上海微电子装备有限公司 | 用于光刻设备的对准***及其对准方法和光刻设备 |
CN101996398A (zh) * | 2009-08-12 | 2011-03-30 | 睿励科学仪器(上海)有限公司 | 用于晶圆对准的图像匹配方法及设备 |
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JP2008053624A (ja) * | 2006-08-28 | 2008-03-06 | Matsushita Electric Ind Co Ltd | アライメント装置 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6198535B1 (en) * | 1998-08-20 | 2001-03-06 | United Integrated Circuits Corp. | Wafer alignment system |
CN1722001A (zh) * | 2004-07-08 | 2006-01-18 | Asml荷兰有限公司 | 光刻投射装置及使用这种光刻投射装置的器件制造方法 |
CN101286010A (zh) * | 2008-04-25 | 2008-10-15 | 上海微电子装备有限公司 | 用于光刻设备的对准***及其对准方法和光刻设备 |
CN101996398A (zh) * | 2009-08-12 | 2011-03-30 | 睿励科学仪器(上海)有限公司 | 用于晶圆对准的图像匹配方法及设备 |
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JP特开2008-53624A 2008.03.06 |
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