CN102175434A - Three-dimensional adjustment measuring platform capable of automatically loading large-diameter optical lens - Google Patents
Three-dimensional adjustment measuring platform capable of automatically loading large-diameter optical lens Download PDFInfo
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- CN102175434A CN102175434A CN2011100452113A CN201110045211A CN102175434A CN 102175434 A CN102175434 A CN 102175434A CN 2011100452113 A CN2011100452113 A CN 2011100452113A CN 201110045211 A CN201110045211 A CN 201110045211A CN 102175434 A CN102175434 A CN 102175434A
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Abstract
The invention discloses a three-dimensional adjustment measuring platform capable of automatically loading a large-diameter optical lens, mainly consisting of a multi-station balancing table, a conveying mechanism and a three-dimensional adjustment mechanism, wherein a transmission table assembly in the three-dimensional adjustment mechanism can automatically convey a workpiece holder which clamps the large-diameter optical lens to the center of the adjustment measuring platform so as to align an interference system; and the three-dimensional gesture of the large-diameter optical lens can be conveniently adjusted by a precisely-lifting component, a pitching adjustment assembly and a turntable assembly which are located in the three-dimensional adjustment mechanism, so that the full automatic work of loading and aligning an object to be measured is realized before measuring. The components of the three-dimensional adjustment measuring platform are convenient to manufacture, steady and flexible in work and high in reliability; simultaneously, the measuring efficiency of the three-dimensional adjustment measuring platform is high, the height adjustment range of the large-diameter optical lens to be tested is up to 100-150 mm, the adjusting accuracy of the pitching and leveling rotation can be up to 0.02 sec, thus the requirement of pipelining type automatic measuring is realized. The three-dimensional adjustment measuring platform capable of automatically loading the large-diameter optical lens can be widely applied to automatic loading and precise measuring of the large-diameter optical lens.
Description
Technical field
The invention belongs to the accurate detection of large-aperture optical, experimental provision, the particularly a kind of three-dimensional that can load the large-aperture optical eyeglass is automatically adjusted test desk.
Background technology
In large-scale optical engineering, need a large amount of various large-aperture optical eyeglasses that use bore to surpass 400mm, surpass the above optical element of 10,000 Φ 400mm as using in " refreshing light " project.These optical elements of large caliber all must carry out very heavy face shape error by interference system before use and detect.Temperature and stress equilibrium time are longer when considering optical elements of large caliber detection faces shape, in order to improve detection efficiency, existing method such as U.S. Zygo company adopt a multistation balancer, it can place the optical element more than 8 simultaneously, during detection, by the work rest that manually lifts tested optical elements of large caliber it is suspended on the load-bearing hook of a three-dimensional trim holder, and realizes detected element is carried out three-dimensional (promptly around the Y-axis pitching by the manual adjustment device on the three-dimensional trim holder, around the X-axis rotation that tilts, rotation on a large scale around X-axis, along moving on a large scale of Y direction, along moving up and down of X-direction) attitude detection.The greatest drawback of this pick-up unit is the automatic loading that can't accomplish tested optical elements of large caliber, waste time and energy, detection efficiency is very low, and its three-dimensional trim holder all is that armrest wage adjustment joint does not have automatically controlled adjusting gear, less stable during measurement, degree of regulation is low, therefore can't realize line production and measurement automatically.
Summary of the invention
The purpose of this invention is to provide a kind of can the realization and load tested optical elements of large caliber automatically, and can realize that the robotization of accurate adjustment of 3 d pose and pipeline system detects the three-dimensional adjustment test desk that can load the large-aperture optical eyeglass automatically that requires.
The present invention seeks to realize by following technical solution: the three-dimensional that can load the large-aperture optical eyeglass is automatically adjusted test desk, it comprises multistation balancer and the three-dimension adjusting mechanism that is used to place large-aperture optical eyeglass work rest to be measured, it is characterized in that also having a connecting gear that is used for large-aperture optical eyeglass to be measured is delivered to three-dimension adjusting mechanism between multistation balancer and the three-dimension adjusting mechanism; Three-dimension adjusting mechanism is by transmission platform assembly, pitch regulation assembly and universal stage assembly are formed, wherein transmission platform assembly constitutes with vertical transmission gear group by transmission stylobate seat and by the horizontal transmission gear set of electrical equipment control, have the mirror holder groove on the transmission stylobate seat, the mirror holder groove bottom has the horizontal rail groove that is symmetrically distributed with respect to the center, the horizontal transmission gear set is installed in respectively in the horizontal rail groove, vertical transmission gear group is installed in the two inboard and perpendicular to the bottom level rail groove of mirror holder groove, the mirror holder groove shape and the standard optical elements of large caliber work rest base profile of installing after horizontal transmission gear set and the vertical transmission gear group are complementary the notch end face on the transmission stylobate seat on the left of the mirror holder groove and the central shaft conllinear of universal stage assembly; The pitch regulation assembly is led platform and is formed by horizontal supporting plate, fulcrum pedestal, roller cylinder, inclined-plane, one end of horizontal supporting plate is connected with the fulcrum pedestal by hinge axis, other end bottom surface have with transmission platform assembly in the parallel cylinder groove of horizontal transmission gear set, inlay the roller cylinder in the groove, the tangent connection of inclined-plane of platform led on the bottom of roller cylinder and inclined-plane, and the roller cylinder is led on the inclined-plane on the inclined-plane of platform and can be slided up and down; The universal stage assembly is by movable base plate, the positioning of rotating piece, the test desk pedestal, the center pylon, the zanjon bearing, loose collar, set collar, spline ring and fine setting worm and gear are formed, the center pylon is between movable base plate and test desk pedestal, and and the test desk pedestal of its lower surface between relative fixed and common central shaft, the outside of center pylon is with concentrical zanjon bearing successively, loose collar, set collar and spline ring, zanjon bearing relative fixed respectively and between center pylon and the loose collar, loose collar is fixedlyed connected with the movable base plate above it, set collar is fixed on the test desk pedestal, the spline ring can rotate freely around set collar, the fine setting worm and gear passes the screw of fine setting projection piece on the spline ring, its bulb is placed in the hemisphere chute on the positioning of rotating piece, and can make in the hemisphere chute of bulb on the positioning of rotating piece mobile by the rotation of fine setting worm and gear, the positioning of rotating piece is arranged between movable base plate and the test desk pedestal, and fixedlys connected with movable base plate; An end level of an end of horizontal transmission gear set and connecting gear is tangent in the transmission platform assembly, transmission stylobate seat is connected on the horizontal supporting plate in the pitch regulation assembly by accurate Lift Part in the transmission platform assembly, and make transmission platform assembly on the pitch regulation assembly, do the oscilaltion campaign by the turn of accurate Lift Part, fulcrum pedestal in the pitch regulation assembly is fixedly connected on the movable base plate of universal stage assembly, the inclined-plane of pitch regulation assembly is led platform and is positioned on the universal stage assembly movable base plate, and can do moving horizontally perpendicular to horizontal transmission gear set direction thereon.
The present invention is that a kind of three-dimensional that can load the large-aperture optical eyeglass is automatically adjusted test desk, it can make the work rest of optical elements of large caliber be loaded on the test desk automatically by the gear transmission, before the test, the pre-set three-dimensional measuring position, center of adjusting test desk, be loaded in large-aperture optical eyeglass to be measured on the work rest respectively, a plurality of work rests that the large-aperture optical eyeglass is housed are placed on respectively on each station of multistation balancer, and at first carry out temperature and stress equilibrium, the work rest that will carry the large-aperture optical eyeglass by the feed belt on the multistation balancer is sent on the connecting gear one by one then, by the feed belt on the connecting gear large-aperture optical lens hanger is delivered on the transmission platform assembly in the three-dimension adjusting mechanism in proper order again, the horizontal transmission gear set of transmission platform assembly and the automatic interlock work rest of vertical transmission gear group energy, the center that the optical elements of large caliber work rest is sent to predetermined three-dimension adjusting mechanism is the measuring position.After the large-aperture optical eyeglass puts in place, on the pitch regulation assembly, do the oscilaltion campaign by the optical elements of large caliber that the accurate Lift Part in the turn three-dimension adjusting mechanism can make transmission platform assembly drive above it, finish the up-down adjustment of optical elements of large caliber.The pitch regulation of optical elements of large caliber is to fall from power by the inclined-plane to move horizontally on the movable base plate in the universal stage assembly, slide on the inclined-plane that the roller cylinder that makes horizontal supporting plate one end in the pitch regulation assembly is fallen from power on the inclined-plane, and be that turning axle makes horizontal supporting plate be rotated motion with the hinge axis of the other end, drive the luffing that follows suit of transmission platform assembly on it, finish the pitch regulation of optical elements of large caliber.It is to do vertically around the center line of himself by the universal stage assembly to rotatablely move that the horizontally rotating of optical elements of large caliber regulated, promptly movable base plate relative center important actor and test desk pedestal are rotated by the zanjon bearing, the pitch regulation assembly and the transmission platform assembly that drive on the movable base plate are all followed rotation, because the notch end face in mirror holder groove left side and the central shaft conllinear of universal stage assembly on the transmission stylobate seat, promptly make with transmission stylobate seat on the center line done with himself of the front surface of optical elements of large caliber of notch end face in mirror holder groove left side be the spinning motion of axle, thereby finish the adjusting that horizontally rotates of optical elements of large caliber on the transmission platform assembly, in the time need finely tuning to horizontally rotating of optical elements of large caliber, at first with screw thereby the banding piece of spline ring being screwed the radius of a circle that makes the spline ring reduces to make itself and set collar firmly to kill, can't realize originally freely rotating, and then make the movable base plate that links to each other with the spline ring also can't realize original rotation, turn fine setting turbine and worm makes it do stretching motion in the fine setting projection piece of spline ring then, drive in the hemisphere chute of its bulb on the positioning of rotating piece and do slip, then the positioning of rotating piece will be around run business into particular one among a small circle the rotation of pylon center, center, realize the rotation of tiny scope that all follows suit of connected movable base plate and pitch regulation assembly and transmission platform assembly, thereby finish the fine setting that horizontally rotates of optical elements of large caliber on the transmission platform assembly.By three-dimension adjusting mechanism to about the large-aperture optical eyeglass on it, the adjustment of pitching, horizontal rotatio direction make its tested surface normal just in time along the optical axis direction of interferometer, promptly the optical element tested surface is over against interferometer.Cycling successively just can be finished automatic loading and three-dimensional adjustment the to the large-aperture optical eyeglass, realizes the preceding alignment work of full-automatic measured piece test.
The present invention compared with prior art, its remarkable advantage is: 1) test desk of the present invention is to be loaded into the gear transmission of large-aperture optical eyeglass to be measured by automatically controlled rotation on the test desk automatically, transmission gear is the interlock work rest automatically, realize that automatic transmission of optical elements of large caliber is loaded into adjustment test desk center and aims at interference system, improved the efficient that detects, save artificial lift to move, realized the high-efficiency stream detection; 2) transmission platform assembly, pitch regulation assembly and the universal stage assembly that is provided with on the three-dimension adjusting mechanism can be realized the 3 d pose adjustment to the large-aperture optical eyeglass easily and flexibly, make its measuring center fine registration interference system center, its height range of adjustment reaches 100mm～150mm, pitching and the adjustment precision that horizontally rotates can reach 0.02 ", satisfy the accuracy requirement of interference testing fully; 3) the present invention can be equipped with electrical equipment easily 3 d pose is controlled adjustment, when guaranteeing operation flexibility, stability and reliability, has realized that the robotization of pipeline system detects requirement, has reduced cost.Can be widely used in the automatic loading and accurate detection of optical elements of large caliber.
Below in conjunction with accompanying drawing the present invention is described in further detail.
Description of drawings
Fig. 1 is a general structure synoptic diagram of adjusting test desk according to the three-dimensional that can load the large-aperture optical eyeglass automatically of the present invention.
Fig. 2 is a three-dimension adjusting mechanism structural representation among the present invention.
Fig. 3 is a three-dimension adjusting mechanism structure partial diagrammatic cross-section.
Fig. 4 is a three-dimension adjusting mechanism structure vertical view.
Fig. 5 is that the universal stage assembly is ended change 22 planform synoptic diagram.
Fig. 6 horizontally rotates the trimming part structural representation in the universal stage assembly.
Fig. 7 is accurate Lift Part 12 structural representations.
Embodiment
Below in conjunction with accompanying drawing, concrete structure of the present invention is described in further detail.
Referring to Fig. 1, the three-dimensional that can load the large-aperture optical eyeglass automatically of making according to the present invention is adjusted test desk, it mainly is made up of multistation balancer 1, connecting gear 2, three-dimension adjusting mechanism 3, a plurality of large-aperture optical eyeglass work rests 5 are set on the multistation balancer 1, three-dimension adjusting mechanism 3 is connected with multistation balancer 1 by connecting gear 2, and the optical element tested surface of three-dimension adjusting mechanism 3 is over against interferometer 4.Referring to Fig. 2, Fig. 3, three-dimension adjusting mechanism 3 is formed by transmitting the transmission platform assembly 6, pitch regulation assembly 7 and the universal stage assembly 8 that load optical elements of large caliber automatically; Wherein transmission platform assembly 6 is made up of transmission stylobate seat 9, horizontal transmission gear set 10, vertical transmission gear group 11; Pitch regulation assembly 7 is led platform 29 by horizontal supporting plate 13, fulcrum pedestal 15, roller cylinder 30 and inclined-plane and is formed; Universal stage assembly 8 is made up of movable base plate 28, positioning of rotating piece 23, test desk pedestal 25, center pylon 16, zanjon bearing 18, interior loose collar 20, set collar 21, spline ring 22 and fine setting worm and gear 26.
In the above-mentioned transmission platform assembly 6, have the mirror holder groove on the transmission stylobate seat 9, the mirror holder groove bottom has the horizontal rail groove that is symmetrically distributed with respect to the center, horizontal transmission gear set 10 is installed in respectively in the horizontal rail groove, vertical transmission gear group 11 is installed in the two inboard and perpendicular to the bottom level rail groove of mirror holder groove, the mirror holder groove shape and the standard optical elements of large caliber work rest 5 base profiles of installing after horizontal transmission gear set 10 and the vertical transmission gear group 11 are complementary,, its opening is free to make optical elements of large caliber work rest 5 to slip on the transmission stylobate seat 9.On the transmission stylobate seat 9 the notch end face in mirror holder groove left side should with the central shaft conllinear of universal stage assembly 8, to guarantee that be to be rotation center with the lens front surface to the test board upper big mouth when directly optical element horizontally rotates, guarantee that promptly tested optical elements of large caliber is rotation.Transmission platform assembly 6 is to be connected with horizontal supporting plate 13 in the pitch regulation assembly 7 by accurate Lift Part 12 on the both sides of transmission stylobate seat 9; Referring to Fig. 7, the accurate Lift Part 12 that connects transmission stylobate seat 9 and horizontal supporting plate 13 is to be made of screw 33 and two nuts 34, screw 33 is fixed on the horizontal supporting plate 13 after passing the connecting hole of transmission stylobate seat 9, and two nuts 34 are screwed in respectively on the screw 33 of transmission stylobate seat 9 upper and lower end faces.When in the turn during lower nut 34, because screw 33 maintains static,, nut 34 moves up and down along screw 33 so promoting transmission stylobate seats 9, realize up-down adjustment to its upper big mouth footpath optical mirror slip, this routine up-down adjustment is apart from being 150mm.One end of horizontal supporting plate 13 is hinged by a hinge axis 14 and fulcrum pedestal 15, fulcrum pedestal 15 is connected with movable base plate 28 in the universal stage assembly 8 by screw 32 again, the other end bottom surface of horizontal supporting plate 13 has the cylinder groove parallel with horizontal transmission gear set 10 in the transmission platform assembly 6, inlay roller cylinder 30 in the groove, the tangent connection of inclined-plane of platform 29 led on the bottom of roller cylinder 30 and inclined-plane, roller cylinder 30 can be led platform 29 inclined-planes on the inclined-plane and be slided up and down, the tangent position, inclined-plane that platform 29 is led on roller cylinder 30 bottoms and inclined-plane normally slides into the inclined-plane when leading platform 29 centers, large-aperture optical eyeglass on the transmission component 6 is positioned at perpendicular to horizontal level, and the inclined-plane is led the bevel angle of platform 29 and can be set according to pitch regulation scope needs; The inclined-plane is led platform 29 and is positioned on the movable base plate 28 in universal stage assembly 8, and can move as horizontal direction by manual or automatically controlled on movable base plate 28, realizes the pitch regulation function to the large-aperture optical eyeglass.
The center pylon 16 of universal stage assembly 8 is between movable base plate 28 and test desk pedestal 25, and and the test desk pedestal 25 of its lower surface between relative fixed and common central shaft, the outside of center pylon 16 is with the zanjon bearing 18 of common central shaft successively, loose collar 20, set collar 21 and spline ring 22, the relative fixed of zanjon bearing 18 and center pylon 16 is to be fixed by the pressuring action of an interior hold-down ring 17 of pylon 16 upper ends, the center that is screwed at zanjon bearing 18 tops and the step under the center pylon 16, and zanjon bearing 18 is by a pressuring action that is screwed in the external compression ring 19 of loose collar 20 upper ends the step under zanjon bearing 18 and the loose collar 20 to be fixed with the relative fixed of loose collar 20.Loose collar 20 is fixedlyed connected with the movable base plate 28 above it by screw 32, and set collar 21 is fixed on the test desk pedestal 25 by screw 35.Referring to Fig. 5, have fine setting projection piece 24 and banding piece 27 on the spline ring 22, have screw on the fine setting projection piece 24, spline ring 22 can rotate freely around set collar 21; Fine setting worm and gear 26 passes the screw of fine setting projection piece 24 on the spline ring 22, its bulb is placed in the hemisphere chute on the positioning of rotating piece 23, and can make in the hemisphere chute of bulb on positioning of rotating piece 23 by the rotation of fine setting worm and gear 26 and move, see shown in Figure 6; Positioning of rotating piece 23 is fixedly connected on movable base plate 28 times.
An end level of an end of horizontal transmission gear set 10 and connecting gear 2 is tangent in the transmission platform assembly 6, and the operation of test desk of the present invention all can be controlled by appliance controller.A plurality of as shown in Figure 1 large-aperture optical eyeglass work rests 5 are placed on multistation balancer 1 enterprising trip temperature and stress equilibrium, feed belt during measurement on the multistation balancer 1 is sent to connecting gear 2 with large-aperture optical eyeglass work rest 5, by the feed belt on the connecting gear 2 large-aperture optical eyeglass work rest 5 is sent to three-dimension adjusting mechanism 3 again, at this moment appliance controller carries out transmission with regard to controlling level transmission gear group 10 with vertical transmission gear group 11 the measured optical unit work rest 5 is brought into three-dimension adjusting mechanism 3.Before transmitting, appliance controller analyzes the total length of the work rest that will transmit according to the work rest parameter of input.When work rest one touches first gear of horizontal transmission gear set 10, the pressure transducer that is positioned at the gear below sends start signal to appliance controller, appliance controller goes out the number of turns that horizontal transmission gear set 10 and vertical transmission gear group 11 needs turn over according to the length computation of diameter, ratio of gear and the work rest of gear then, accurately with 5 transmission of the measured optical unit work rest and stay in three-dimension adjusting mechanism 3 centers.Because the general assembly (TW) of the measured optical unit work rest 5 surpasses 100 kilograms usually, so need that horizontal transmission is vertical with the position, side to transmit both in conjunction with coming distributed power that work rest easily is loaded on the three-dimension adjusting mechanism 3.In addition, the testing staff can come the rotation of accurate controlling level transmission gear group 10 and vertical transmission gear group 11 by electrical equipment control, the measured optical unit work rest 5 is moved to required any detection position, realize adjusting requirement on a large scale along the three-dimensional that moves of horizontal transmission gear set 10 directions.
Pitch regulation assembly 7 is led platform 29 by the inclined-plane and is horizontally slipped along movable base plate 28 and realize that horizontal supporting plate 13 is the rotation at center around hinge axis 14, thereby finishes the pitch regulation of the measured optical unit work rest 5.When the roller cylinder 30 in the pitch regulation assembly 7 was positioned at the inclined-plane and leads center, platform 29 inclined-plane, then to be positioned at horizontal level be that to be positioned at perpendicular to its normal of position base be the interference system optical axis direction to the measured optical unit work rest to horizontal supporting plate 13.When roller cylinder 30 is led platform 29 inclined-planes when scrolling up along the inclined-plane, then to overlook downwards be that its normal becomes negative angle with the interference system optical axis to the measured optical unit work rest 5.Otherwise when roller cylinder 30 is led platform 29 inclined-planes when rolling downwards along the inclined-plane, then upwards to look up be that its normal becomes positive-angle with the interference system optical axis to the measured optical unit work rest 5.The gradient that platform 29 is led on this routine inclined-plane is 16 degree, and its move left and right scope is ± 55.75mm, and then horizontal supporting plate 13 can be done around hinge axis 14 ± 5.31 ° rotation adjustment.This routine inclined-plane is led platform 29 and can be linked to each other with high-accuracy driving motor, its displacement resolution is 0.058um, then the angular resolution of pitch regulation is 0.02 "; this just can adjust to test under 0 striation with the interferogram of measured piece and the generation of interference system standard mirror; satisfy the interference testing accuracy requirement, and can satisfy the requirement of electronic control pitch regulation.
The fine setting that horizontally rotates of tested optical elements of large caliber work rest is to do in the hemisphere chute on positioning of rotating piece 23 under the screw action of worm screw by the bulb of fine setting worm and gear 26 to realize along being free to slide of horizontal transmission gear set 10 directions.As shown in Figure 6, individual 3/4 spherical chute 31 is arranged on the positioning of rotating piece 23, the bulb of fine setting worm and gear 26 is placed in this chute 31.After spline ring 22 is by the screw banding, rotation in whole measured piece all can't be done on a large scale, at this moment as long as by the turn in the fine setting projection piece 24 of spline ring 22 of step motor control fine setting worm and gear 26, because the fine setting projection piece 24 of spline ring 22 has been fixed and has then finely tuned worm and gear 26 and will do and advance or drawback movement, promptly finely tune to do in the chute 31 of bulb on positioning of rotating piece 23 of worm and gear 26 and promote or retract motion.At this moment positioning of rotating piece 23 is because the promotion of the bulb of fine setting worm and gear 26 or retract and will do horizontally rotating of trace around the central shaft of center pylon 16, and promptly tested optical elements of large caliber work rest 5 is around the fine setting of pylon central horizontal rotation.Fine setting worm and gear 26 promotion positioning of rotating pieces 23 are 0.02 around the resolution of the central shaft rotation of center pylon 16 ", it is by the stroke resolution decision of worm screw, can satisfy the requirement of interference system 0 striped test, the angular range of whole adjustment is ± 5 °.Whole measured piece horizontally rotates trim process and can be finished by the automatic control of electrical equipment.
In the said modules, pitch regulation assembly 7 can be linked to each other with a precision drive motor and realize the automatically controlled adjustment of pitching; Universal stage assembly 8 linked to each other with a precision drive gear motor realize the automatically controlled adjustment of work rest in the accurate trickle rotation of surface level.
Claims (4)
1. the three-dimensional that can load the large-aperture optical eyeglass is automatically adjusted test desk, it comprises multistation balancer [1] and the three-dimension adjusting mechanism [3] that is used to place large-aperture optical eyeglass work rest to be measured [5], it is characterized in that also having a connecting gear [2] that is used for large-aperture optical eyeglass to be measured is delivered to three-dimension adjusting mechanism [3] between multistation balancer [1] and the three-dimension adjusting mechanism [3]; Three-dimension adjusting mechanism [3] is by transmission platform assembly [6], pitch regulation assembly [7] and universal stage assembly [8] are formed, wherein transmission platform assembly [6] constitutes with vertical transmission gear group [11] by transmission stylobate seat [9] and by the horizontal transmission gear set [10] of electrical equipment control, have the mirror holder groove on the transmission stylobate seat [9], the mirror holder groove bottom has the horizontal rail groove that is symmetrically distributed with respect to the center, horizontal transmission gear set [10] is installed in respectively in the horizontal rail groove, vertical transmission gear group [11] is installed in the two inboard and perpendicular to the bottom level rail groove of mirror holder groove, the mirror holder groove shape and standard optical elements of large caliber work rest [5] the base profile of installing after horizontal transmission gear set [10] and the vertical transmission gear group [11] are complementary the notch end face on the transmission stylobate seat [9] on the left of the mirror holder groove and the central shaft conllinear of universal stage assembly [8]; Pitch regulation assembly [7] is led platform [29] by horizontal supporting plate [13], fulcrum pedestal [15], roller cylinder [30], inclined-plane and is formed, one end of horizontal supporting plate [13] is connected with fulcrum pedestal [15] by hinge axis [14], other end bottom surface has and the middle parallel cylinder groove of horizontal transmission gear set [10] of transmission platform assembly [6], inlay roller cylinder [30] in the groove, the tangent connection of inclined-plane of platform [29] led on the bottom of roller cylinder [30] and inclined-plane, and roller cylinder [30] is led on the inclined-plane on the inclined-plane of platform [29] and can be slided up and down; Universal stage assembly [8] is by movable base plate [28], positioning of rotating piece [23], test desk pedestal [25], center pylon [16], zanjon bearing [18], loose collar [20], set collar [21], spline ring [22] and fine setting worm and gear [26] are formed, center pylon [16] is positioned between movable base plate [28] and the test desk pedestal [25], and and the test desk pedestal [25] of its lower surface between relative fixed and common central shaft, the outside of center pylon [16] is with the zanjon bearing [18] of common central shaft successively, loose collar [20], set collar [21] and spline ring [22], zanjon bearing [18] relative fixed respectively and between center pylon [16] and the loose collar [20], loose collar [20] is fixedlyed connected with the movable base plate [28] above it, set collar [21] is fixed on the test desk pedestal [25], spline ring [22] can rotate freely around set collar [21], fine setting worm and gear [26] passes the screw that spline ring [22] is gone up fine setting projection piece [24], its bulb is placed in the hemisphere chute on the positioning of rotating piece [23], and can make in the hemisphere chute [31] of bulb on positioning of rotating piece [23] mobile by the rotation of fine setting worm and gear [26], positioning of rotating piece [23] is arranged between movable base plate [28] and the test desk pedestal [25], and fixedlys connected with movable base plate [28]; An end level of an end of horizontal transmission gear set [10] and connecting gear [2] is tangent in the transmission platform assembly [6], transmission stylobate seat [9] is connected on the horizontal supporting plate [13] in the pitch regulation assembly [7] by accurate Lift Part [12] in the transmission platform assembly [6], and make transmission platform assembly [6] on pitch regulation assembly [7], do the oscilaltion campaign by the turn of accurate Lift Part [12], fulcrum pedestal [15] in the pitch regulation assembly [7] is fixedly connected on the movable base plate [28] of universal stage assembly [8], the inclined-plane of pitch regulation assembly [7] is led platform [29] and is positioned on the movable base plate [28] in the universal stage assembly [8], and can do moving horizontally perpendicular to horizontal transmission gear set [10] direction thereon.
2. the three-dimensional that can load the large-aperture optical eyeglass automatically according to claim 1 is adjusted test desk, the accurate Lift Part [12] that it is characterized in that above-mentioned connection transmission stylobate seat [9] and horizontal supporting plate [13] is to be made of screw [33] and two nuts [34], screw [33] is fixed on the horizontal supporting plate [13] after passing the connecting hole of transmission stylobate seat [9], and two nuts [34] are screwed in respectively on the screw [33] of transmission stylobate seat [9] upper and lower end face.
3. the three-dimensional that can load the large-aperture optical eyeglass automatically according to claim 1 is adjusted test desk, it is characterized in that the middle zanjon bearing [18] of universal stage assembly [8] and the relative fixed of center pylon [16] are to be fixed by the pressuring action of the interior hold-down ring [17] on the center that the is screwed in pylon [16] at zanjon bearing [18] top and the step under the center pylon [16], zanjon bearing [18] is by a pressuring action that is screwed in the external compression ring [19] of loose collar [20] upper end the step under zanjon bearing [18] and the loose collar [20] to be fixed with the relative fixed of loose collar [20].
4. the three-dimensional that can load the large-aperture optical eyeglass automatically according to claim 1 is adjusted test desk, when it is characterized in that roller cylinder [30] in the pitch regulation assembly [7] is positioned at the inclined-plane and leads platform [29] center, inclined-plane, then horizontal supporting plate [13] is to be positioned at horizontal level, be that the measured optical unit work rest [5] is positioned at perpendicular to position base, its normal is interferometer [a 4] optical axis direction.
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| CN 201110045211 CN102175434B (en) | 2011-02-25 | 2011-02-25 | Three-dimensional adjustment measuring platform capable of automatically loading large-diameter optical lens |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110045211 CN102175434B (en) | 2011-02-25 | 2011-02-25 | Three-dimensional adjustment measuring platform capable of automatically loading large-diameter optical lens |
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| CN102175434A true CN102175434A (en) | 2011-09-07 |
| CN102175434B CN102175434B (en) | 2013-05-08 |
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| CN106500966A (en) * | 2016-10-20 | 2017-03-15 | 中国科学院上海光学精密机械研究所 | Optical elements of large caliber interferes mechanical automation detection auxiliary equipment |
| CN106500966B (en) * | 2016-10-20 | 2018-10-02 | 中国科学院上海光学精密机械研究所 | Optical elements of large caliber interferes mechanical automation to detect ancillary equipment |
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| CN110954016A (en) * | 2019-11-12 | 2020-04-03 | 中国工程物理研究院激光聚变研究中心 | Clamping device in interference detection of high-precision optical element |
| CN111751083A (en) * | 2020-07-15 | 2020-10-09 | 中科院南京天文仪器有限公司 | Adjusting and overturning equipment for detecting large-caliber optical element |
| CN114646452A (en) * | 2020-12-21 | 2022-06-21 | 无锡中科光电技术有限公司 | Novel three-dimensional rotatory height-adjusting device |
| CN112881007A (en) * | 2021-01-18 | 2021-06-01 | 重庆交通大学 | Adjustable gear transmission test experiment table |
| CN114646453A (en) * | 2022-05-23 | 2022-06-21 | 江苏浩纳光电股份有限公司 | Vertical spherical interference splicing measuring device and adjusting method thereof |
| CN117961849A (en) * | 2024-03-28 | 2024-05-03 | 成都菲奥姆光学有限公司 | Device for detecting surface shape error of large-caliber optical mirror surface |
| CN117961849B (en) * | 2024-03-28 | 2024-06-04 | 成都菲奥姆光学有限公司 | Device for detecting surface shape error of large-caliber optical mirror surface |
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