CN102175142A - Lens Center Error Interferometry System - Google Patents
Lens Center Error Interferometry System Download PDFInfo
- Publication number
- CN102175142A CN102175142A CN 201110036678 CN201110036678A CN102175142A CN 102175142 A CN102175142 A CN 102175142A CN 201110036678 CN201110036678 CN 201110036678 CN 201110036678 A CN201110036678 A CN 201110036678A CN 102175142 A CN102175142 A CN 102175142A
- Authority
- CN
- China
- Prior art keywords
- mirror
- lens
- dazzling screen
- wave plates
- spectroscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005305 interferometry Methods 0.000 title abstract 2
- 238000003384 imaging method Methods 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims description 20
- 230000002452 interceptive effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 14
- 230000003287 optical effect Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 5
- 238000000386 microscopy Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 102000016751 Fringe-like Human genes 0.000 description 1
- 108050006300 Fringe-like Proteins 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A lens center error interferometry system, comprising: the device comprises a laser, a collimating mirror, a polarizer, a first spectroscope, a second spectroscope, a first lambda/4 wave plate, a reference reflector, an upper adjustable reflector, a lower fixed reflector, an upper fixed reflector, a second lambda/4 wave plate, an analyzer, an upper light shield, a lower light shield, an imaging lens, a CCD camera, a computer and a precision rotary worktable. The invention can measure the center errors of the front surface and the rear surface of the spherical and axisymmetric aspheric lens in one clamping process, and has high measuring efficiency and simple operation.
Description
Technical field
The present invention relates to a kind of lens center error interferometer measuration system, be used for sphere and axisymmetric aspheric surface lens front and rear surfaces errors of centration are measured, belong to field of optical measuring technologies.
Background technology
Each discrete component of optical system heart quality is directly connected to the final image quality of total system, it is one of high quality optical imaging system subject matter that need solve.
The measurement means of present optical centre error is still based on optical measurement.Mainly contain alignment measurement and interference and compare and measure two big class measuring methods.Interfere comparative measurement method based on principle of interference, the measuring beam and the reference beam that utilize the measured lens surface to be reflected produce interference, situation of change by observation and recording interference fringe obtains the relation of errors of centration and moving interference fringes number, thereby measures the errors of centration of lens.Compare to the alignment measurement method, interfere to compare and measure advantages such as method has fast, high precision.
Always debuging that Changchun optical precision optical machinery and physical study are designed promptly is based on the errors of centration that principle of interference is measured sphere and axisymmetric aspheric surface lens surface to heart interferometer, and the measuring principle of this instrument as shown in Figure 1.The light that light source (laser instrument) sends is through focusing collimating mirror, polaroid, catoptron and half pentaprism, incide on the polarization beam splitter prism, on the beam-splitting surface of polarization beam splitter prism, the reflection of part transmittance another part light, thereby the formation two-beam, this two-beam is inciding mirror M behind more than half pentaprisms and λ/4 wave plates
1And M
2On, to adjust catoptron light is impinged perpendicularly on by the surface of microscopy, light beam returns by former road.Light beam passes through λ/4 wave plates twice, and 90 ° of change of polarized direction, the two-beam that reflects are combined into a branch of light again behind polarization beam splitter prism, interfere through analyzer, receive this interference fringe with ccd video camera, observe change of interference fringes on monitor.During measurement, be placed on the precise rotating platform by microscopy, interferometer is placed on the portal frame of turntable top.If do not overlapped with the rotating shaft of precise rotating platform by the microscopy optical axis, then when turntable rotates, had relative displacement by two luminous point places of microscopy, can be observed striped on monitor is moved, note the mobile number of striped, calculate the relative shift at two luminous point places, and then as can be known by the offset of microscopy.
This instrument has the following disadvantages: in clamping process, can only measure the errors of centration on the single surface of lens, efficiency of measurement is not high; In single measured surface errors of centration measuring process, need two catoptrons of twice adjustment so that measuring beam is vertical with measured surface, complex operation; In measuring process, also need to know the distance between two measuring beams and the lens surface intersection, and the measurement of this distance value is directly perceived inadequately and degree of accuracy is not high yet; This instrument is mainly used the measurement of heavy caliber (Φ 200mm～Φ 500mm) lens center error.
Summary of the invention
Technical matters of the present invention: overcome the deficiencies in the prior art, a kind of lens center error interferometer measuration system is provided, can in a clamping process, measure sphere and axisymmetric aspheric surface lens front and rear surfaces errors of centration, the efficiency of measurement height, and simple to operate.
The scheme that the present invention solves the problems of the technologies described above is: lens center error interferometer measuration system comprises: laser instrument 1, collimating mirror 2, the polarizer 3, first spectroscope 4, a λ/4 wave plates 5, reference mirror 6, second spectroscope 7, go up anti-dazzling screen 8, go up adjustable mirror 9, adjustable mirror 10, stationary mirror 11, anti-dazzling screen 12, the 2nd λ/4 wave plates 13, analyzer 14, imaging lens 15, CCD camera 16, computing machine 17 and micro swivel 18 down down; The laser beam that laser instrument 1 sends is after collimating mirror 2 expands bundle, become linearly polarized light through the polarizer 3, this light beam is divided into reference beam and measuring beam through first spectroscope 4 with incident beam, described reference beam is through a λ/4 wave plates 5, incide on the reference mirror 6, and reflected by reference mirror 6, reference beam retrodeviates positive dirction by a λ/4 wave plates 5 twice and changes 90 °; Described measuring beam is divided into two bundle measuring beams up and down through the 2nd λ/4 wave plates 13 and second spectroscope 7, is respectively applied for the measurement of measured lens 19 upper and lower surface errors of centrations; When closing down anti-dazzling screen 12 when opening anti-dazzling screen 8, last measuring beam impinges perpendicularly on the upper surface of measured lens 19 and returns along former road through last adjustable mirror 9, twice of last measuring beam changes 90 ° by the 2nd λ/4 wave plates, 13 rear polarizer directions, and converges with reference beam and interfere; When closing down anti-dazzling screen 12 when opening anti-dazzling screen 8, following measuring beam impinges perpendicularly on the lower surface of measured lens 19 and returns along former road through stationary mirror 11 and following adjustable mirror 10, twice of following measuring beam changes 90 ° by the 2nd λ/4 wave plates, 13 rear polarizer directions, and converges with reference beam and interfere; Aforementioned interfering beam obtains corresponding interference fringe behind analyzer 14, after imaging lens 15 imagings, interference fringe is received by CCD camera 16, rotate micro swivel 18 then, computing machine 17 shows and the change of interference fringes of record by observing, and calculates the measurement result of lens front and rear surfaces errors of centration; Wherein go up anti-dazzling screen 8 and following anti-dazzling screen 12 and be used for the selection of measuring beam.
Principle of the present invention: the laser beam that laser instrument is sent is divided into reference beam and measuring beam, make measuring beam impinge perpendicularly on the measured lens surface and returned by former road and interfere by adjusting adjustable mirror with reference beam, when there is errors of centration in the measured lens surface, at lens in the rotating process of precise rotating platform axis, thereby the variation that can cause optical path difference between reference beam and the measuring beam causes moving of interference fringe, by observing the direction and the variation of number that moves with recording interference fringe, pass through mathematical computations again and can obtain optical path difference, relation between measured lens centre of surface error and the moving interference fringes number three.
Errors of centration computing method of the present invention: as shown in Figure 3, α represents to impinge perpendicularly on the measuring beam on measured lens surface and the angle of surface level, θ represents the angle of measuring beam and surface level, L represents that the measured point arrives the distance of micro swivel axis, R represents the radius-of-curvature on measured lens surface, H is illustrated in the precise rotating platform turning course, the variation of measured point height, Δ is illustrated in the process that micro swivel circles for 18 times, and the center on measured lens surface is along micro swivel 18 maximum displacement radially.Can get by relation among the figure: α=π-2 θ, at Δ O
1O
2Utilize the cosine law to have among the A:
(R+H)
2＝R
2+Δ
2-2RΔcos(π-α)＝R
2+Δ
2-2RΔcos?2θ
Because Δ is indivisible, so omit Δ
2, can solve:
Because 2R＞＞H, so can omit H
2, thereby have:
The relation that moves number by optical path difference and striped can get again: 2H=K λ, and the substitution following formula can get:
So measured lens centre of surface error C is:
K represents the number of lens moving interference fringes in turning course, and λ represents the operation wavelength of the laser instrument that adopted.
From following formula as can be known, the errors of centration of lens and measured point have nothing to do to the distance at work table rotation center and the radius-of-curvature of tested sphere.
The angle deviator γ that can calculate the lens center error according to the lens center margin of error C that is calculated is:
The present invention has following advantage compared with prior art:
(1) in the errors of centration measuring process on the single surface of lens, only needs to adjust a catoptron, thereby make measuring operation obtain simplifying.
(2) can select tested sphere by selecting measuring beam.
(3) can in a clamping process, realize the measurement of two centre of surface errors of lens, thereby improve the efficient of measuring.
(4) corner with the measuring beam catoptron replaces the measurement of measured point to the distance of work table rotation axis, compares with the latter easier corner to be measured accurately.
(5) can adapt to the measurement of small-bore optical element errors of centration by collimating mirror to the diameter of laser beam with to the adjustment of regulating reflection mirror angle up and down, thereby enlarge measurement range.
(6) each light beam catadioptric number of times in this system is less in this measuring system, helps reducing the loss of luminous energy, the contrast of high interference fringe like this.Simultaneously the relative positional accuracy between each optical element is less demanding, thus the designing requirement that helps lowering apparatus with bring convenience for making and debuging.
Description of drawings
Fig. 1 is the optical schematic diagram of prior art;
Fig. 2 is an optical system schematic diagram of the present invention;
Fig. 3 is an errors of centration schematic diagram calculation of the present invention;
Fig. 4 is a measuring process synoptic diagram of the present invention;
The synoptic diagram of Fig. 5 for concerning between moving interference fringes direction of the present invention and number and the micro swivel corner.
Embodiment
As shown in Figure 2, lens center of the present invention error interferometer measuration system comprises: laser instrument 1, collimating mirror 2, the polarizer 3, first spectroscope 4, a λ/4 wave plates 5, reference mirror 6, second spectroscope 7, go up anti-dazzling screen 8, go up adjustable mirror 9, adjustable mirror 10, stationary mirror 11, anti-dazzling screen 12, the 2nd λ/4 wave plates 13, analyzer 14, imaging lens 15, CCD camera 16, computing machine 17 and micro swivel 18 down down.
The laser beam that laser instrument 1 sends is after collimating mirror 2 expands bundle, become linearly polarized light through the polarizer 3, this light beam is divided into reference beam and measuring beam through first spectroscope 4 with incident beam, described reference beam incides on the reference mirror 6 through a λ/4 wave plates 5, and reflected by reference mirror 6, reference beam retrodeviates positive dirction by a λ/4 wave plates 5 twice and changes 90 °; Described measuring beam is divided into two bundle measuring beams up and down through the 2nd λ/4 wave plates 13 and second spectroscope 7, is respectively applied for by the then measurement of lens 19 upper and lower surface errors of centrations; When closing down anti-dazzling screen 12 when opening anti-dazzling screen 8, last measuring beam impinges perpendicularly on the upper surface of measured lens 19 and returns along former road through last adjustable mirror 9, twice of last measuring beam changes 90 ° by the 2nd λ/4 wave plates, 13 rear polarizer directions, and converges with reference beam and interfere; When closing down anti-dazzling screen 12 when opening anti-dazzling screen 8, following measuring beam impinges perpendicularly on the lower surface of measured lens 19 and returns along former road through stationary mirror 11 and following adjustable mirror 10, twice of following measuring beam changes 90 ° by the 2nd λ/4 wave plates, 13 rear polarizer directions, and converges with reference beam and interfere; Aforementioned interfering beam obtains corresponding interference fringe behind analyzer 14, after imaging lens 15 imagings, interference fringe is received by CCD camera 16, rotate micro swivel 18 then, computing machine 17 shows and the change of interference fringes of record by observing, and utilizes corresponding software to calculate the measurement result of lens front and rear surfaces errors of centration; Wherein go up anti-dazzling screen 8 and play anti-dazzling screen 12 and be used for the selection of measuring beam, with the measured surface of selection lens.
Measuring process of the present invention is as follows:
(1), adjusts the diameter of laser beam by collimating mirror 2 according to the diameter of measured lens 17.
(2) adjustable mirror in the adjustment, adjustable mirror is so that measuring beam impinges perpendicularly on lens surface to be measured down.
(3) rotate micro swivel, observe the change of interference fringes that computing machine shows and writes down.Some stripeds that relate to do not have tangible moving, and illustrate that then measured lens surface curvature center overlaps with the precision stage centre of gyration.Some stripeds that relate to change with micro swivel centre of gyration angle of revolution, illustrate that then measured lens surface curvature center does not have and the micro swivel centre of gyration overlaps, and promptly have errors of centration.As shown in Figure 4, the A point is a measurement point, and O is the centre of gyration of precision stage, and O ' is the center of curvature on measured lens surface.When precision stage when the O point turns round, O ' can be successively twice by straight line AO, and meet at an O ' respectively
1, O '
2, these 2 respectively corresponding maximum and minimum light path differences, thus also corresponding with two extreme points on Fig. 5 curve.According in the micro swivel turning course, the maximum variation delta K of number of interference fringes purpose
Max, and utilize aforesaid formula (1), (2) to calculate the measurement result of the angle deviator of lens front and rear surfaces errors of centration and lens center error.
The non-elaborated part of the present invention belongs to techniques well known.
Claims (1)
1. lens center error interferometer measuration system is characterized in that comprising: laser instrument (1), collimating mirror (2), the polarizer (3), first spectroscope (4), a λ/4 wave plates (5), reference mirror (6), second spectroscope (7), go up anti-dazzling screen (8), go up adjustable mirror (9), adjustable mirror (10), stationary mirror (11), anti-dazzling screen (12), the 2nd λ/4 wave plates (13), analyzer (14), imaging lens (15), CCD camera (16), computing machine (17) and micro swivel (18) down down; The laser beam that laser instrument (1) sends is after collimating mirror (2) expands bundle, become linearly polarized light through the polarizer (3), this light beam is divided into reference beam and measuring beam through first spectroscope (4) with incident beam, described reference beam is through a λ/4 wave plates (5), incide on the reference mirror (6), and by reference mirror (6) reflection, reference beam retrodeviates positive dirction by a λ/4 wave plates (5) twice and changes 90 °; Described measuring beam is divided into two bundle measuring beams up and down through the 2nd λ/4 wave plates (13) and second spectroscope (7), is respectively applied for the measurement of measured lens (19) upper and lower surface errors of centration; When closing down anti-dazzling screen (12) when opening anti-dazzling screen (8), last measuring beam impinges perpendicularly on the upper surface of measured lens (19) and returns along former road through last adjustable mirror (9), twice of last measuring beam changes 90 ° by the 2nd λ/4 wave plates (13) rear polarizer direction, and converges with reference beam and interfere; When closing down anti-dazzling screen (12) when opening anti-dazzling screen (8), following measuring beam impinges perpendicularly on the lower surface of measured lens (19) and returns along former road through stationary mirror (11) and following adjustable mirror (10), twice of following measuring beam changes 90 ° by the 2nd λ/4 wave plates (13) rear polarizer direction, and converges with reference beam and interfere; Aforementioned interfering beam obtains corresponding interference fringe behind analyzer (14), after imaging lens (15) imaging, interference fringe is received by CCD camera (16), rotate micro swivel (18) then, computing machine (17) shows and the change of interference fringes of record by observing, and calculates the measurement result of lens front and rear surfaces errors of centration; Wherein go up anti-dazzling screen (8) and following anti-dazzling screen (12) and be used for the selection of measuring beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100366781A CN102175142B (en) | 2011-02-12 | 2011-02-12 | Lens Center Error Interferometry System |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100366781A CN102175142B (en) | 2011-02-12 | 2011-02-12 | Lens Center Error Interferometry System |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102175142A true CN102175142A (en) | 2011-09-07 |
| CN102175142B CN102175142B (en) | 2012-10-31 |
Family
ID=44518352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100366781A Expired - Fee Related CN102175142B (en) | 2011-02-12 | 2011-02-12 | Lens Center Error Interferometry System |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102175142B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104567752A (en) * | 2015-01-19 | 2015-04-29 | 复旦大学 | Stray light elimination dual-optical-path optical centering instrument |
| CN105738078A (en) * | 2014-12-24 | 2016-07-06 | 全欧光学有限公司 | Measurement of the positions of curvature midpoints of optical areas of a single or multi-lens optical system |
| CN106017306A (en) * | 2016-05-09 | 2016-10-12 | 南京理工大学 | Interference standard component error separation method based on least square rotation coupling |
| CN106060351A (en) * | 2016-06-29 | 2016-10-26 | 联想(北京)有限公司 | Image processing device and image processing method |
| CN108318800A (en) * | 2017-12-30 | 2018-07-24 | 北京工业大学 | A kind of GaN base semiconductor laser chip detection device and method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1834606A (en) * | 2005-03-18 | 2006-09-20 | 佳能株式会社 | Method of measuring decentering of lens |
| CN101275826A (en) * | 2007-03-29 | 2008-10-01 | 富士能株式会社 | Surface offset measuring method and device for non-spherical lens |
-
2011
- 2011-02-12 CN CN2011100366781A patent/CN102175142B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1834606A (en) * | 2005-03-18 | 2006-09-20 | 佳能株式会社 | Method of measuring decentering of lens |
| CN101275826A (en) * | 2007-03-29 | 2008-10-01 | 富士能株式会社 | Surface offset measuring method and device for non-spherical lens |
Non-Patent Citations (2)
| Title |
|---|
| 《光学仪器》 20070430 董桂梅，林玉池，黄银国，牛轶杰 影像法测量透镜中心误差的研究 6-11 1 第29卷, 第2期 * |
| 《电子测量技术》 20051231 牛轶杰，林玉池，黄银国，赵美蓉，周欣 透镜中心误差测量*** 5-6 1 , 第五期 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105738078A (en) * | 2014-12-24 | 2016-07-06 | 全欧光学有限公司 | Measurement of the positions of curvature midpoints of optical areas of a single or multi-lens optical system |
| CN105738078B (en) * | 2014-12-24 | 2019-10-08 | 全欧光学有限公司 | The measurement of the position of the center of curvature of simple lens or the optical surface of poly-lens optical system |
| CN104567752A (en) * | 2015-01-19 | 2015-04-29 | 复旦大学 | Stray light elimination dual-optical-path optical centering instrument |
| CN106017306A (en) * | 2016-05-09 | 2016-10-12 | 南京理工大学 | Interference standard component error separation method based on least square rotation coupling |
| CN106017306B (en) * | 2016-05-09 | 2018-07-06 | 南京理工大学 | Interference standard component error separating method based on least square rotation matching |
| CN106060351A (en) * | 2016-06-29 | 2016-10-26 | 联想(北京)有限公司 | Image processing device and image processing method |
| CN108318800A (en) * | 2017-12-30 | 2018-07-24 | 北京工业大学 | A kind of GaN base semiconductor laser chip detection device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102175142B (en) | 2012-10-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102175433B (en) | Lens center error measuring system based on interference principle | |
| CN102175189B (en) | Double-beam interference lens center error measuring system | |
| CN102589416B (en) | Wavelength scanning interferometer and method for aspheric measurement | |
| CN103335610B (en) | Detection system for large-caliber high-order convex aspheric surface | |
| CN102788563B (en) | Device and method for adjusting inclination of measured mirror in planar subaperture splicing measurement | |
| CN101865670B (en) | Plane surface shape measurement method of optical fiber point-diffraction phase-shifting interferometer | |
| CN102175142B (en) | Lens Center Error Interferometry System | |
| CN204479017U (en) | Spiral phase shift interference instrument apparatus | |
| US12018930B2 (en) | Transient digital moire phase-shifting interferometric measuring device and method for the surface shape of an optical element | |
| CN105066910B (en) | Electro-optic crystal Z axis deviate angle measuring device and measuring method | |
| CN101949691A (en) | Method for detecting nonzero digit compensation light-degree optical aspheric surface profile | |
| CN103196361A (en) | Short coherence instantaneous phase-shifting interferometer and measuring method for microsphere surface morphology rapid detection | |
| CN101324421A (en) | Synchronous phase-shifting Fizeau interferometer | |
| CN104713489B (en) | A kind of three-dimensional moire interferometer and material surface measuring method | |
| CN103968779A (en) | Super-resolution three-dimensional measurement microscope | |
| CN101614523B (en) | Multi-beam long-rail interferometer for detecting grazing tubular off-axis aspheric mirror | |
| CN104317030A (en) | Optical device capable of achieving quick centering assistance by means of axial chromatic aberration | |
| CN103162616A (en) | Instantaneous phase shifting interferometer for detecting microsphere surface morphology and measuring method of microsphere surface morphology using same | |
| CN107869965A (en) | Flat mirror shape detection method and device | |
| CN102401630B (en) | Spatial phase shift Fizeau spherical interferometer | |
| CN204479018U (en) | Based on the aspheric surface interference checking device of stitching interferometry and calculation holographic method | |
| CN107990838A (en) | Axicon lens and cylindrical mirror surface shape measurement device and measuring method | |
| CN116379961B (en) | Phase measurement system and method | |
| CN106370625A (en) | V-prism refractometer based on autocollimation and CCD (Charge Coupled Device) visual technology | |
| CN104154868A (en) | Bifocal lens-based non-contact lens central thickness measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121031 Termination date: 20150212 |
|
| EXPY | Termination of patent right or utility model |