CN102154685B - 一种基于隔板升降的晶体生长界面控制方法 - Google Patents
一种基于隔板升降的晶体生长界面控制方法 Download PDFInfo
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- CN102154685B CN102154685B CN2011100619323A CN201110061932A CN102154685B CN 102154685 B CN102154685 B CN 102154685B CN 2011100619323 A CN2011100619323 A CN 2011100619323A CN 201110061932 A CN201110061932 A CN 201110061932A CN 102154685 B CN102154685 B CN 102154685B
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CN2011100619323A CN102154685B (zh) | 2011-03-15 | 2011-03-15 | 一种基于隔板升降的晶体生长界面控制方法 |
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CN2011100619323A CN102154685B (zh) | 2011-03-15 | 2011-03-15 | 一种基于隔板升降的晶体生长界面控制方法 |
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CN102154685A CN102154685A (zh) | 2011-08-17 |
CN102154685B true CN102154685B (zh) | 2012-08-15 |
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WO2012171308A1 (zh) * | 2011-06-15 | 2012-12-20 | 安阳市凤凰光伏科技有限公司 | 铸造法生产类似单晶硅的方法 |
CN103194789B (zh) * | 2012-01-04 | 2015-12-02 | 宁波大学 | 带有炉口温场维护机构的布里奇曼法单晶生长装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5248377A (en) * | 1989-12-01 | 1993-09-28 | Grumman Aerospace Corporation | Crystal-growth furnace for interface curvature control |
CN1737216A (zh) * | 2004-06-07 | 2006-02-22 | Memc电子材料有限公司 | 通过控制熔-固界面形状生长硅晶体的方法和装置 |
CN1932087A (zh) * | 2005-09-14 | 2007-03-21 | 宁波大学 | 新型闪烁晶体LaCl3:Ce3+的坩埚下降法生长工艺 |
CN201138138Y (zh) * | 2007-12-12 | 2008-10-22 | 上海普罗新能源有限公司 | 一种无需移动部件的多晶硅分凝铸锭炉 |
CN201506708U (zh) * | 2009-09-29 | 2010-06-16 | 常州天合光能有限公司 | 一种多晶硅铸锭炉的热场结构 |
Family Cites Families (2)
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JPH1129398A (ja) * | 1997-07-07 | 1999-02-02 | Hitachi Cable Ltd | 化合物半導体単結晶の製造装置 |
JP2001031491A (ja) * | 1999-07-21 | 2001-02-06 | Hitachi Cable Ltd | 半導体結晶の製造方法および製造装置 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5248377A (en) * | 1989-12-01 | 1993-09-28 | Grumman Aerospace Corporation | Crystal-growth furnace for interface curvature control |
CN1737216A (zh) * | 2004-06-07 | 2006-02-22 | Memc电子材料有限公司 | 通过控制熔-固界面形状生长硅晶体的方法和装置 |
CN1932087A (zh) * | 2005-09-14 | 2007-03-21 | 宁波大学 | 新型闪烁晶体LaCl3:Ce3+的坩埚下降法生长工艺 |
CN201138138Y (zh) * | 2007-12-12 | 2008-10-22 | 上海普罗新能源有限公司 | 一种无需移动部件的多晶硅分凝铸锭炉 |
CN201506708U (zh) * | 2009-09-29 | 2010-06-16 | 常州天合光能有限公司 | 一种多晶硅铸锭炉的热场结构 |
Non-Patent Citations (2)
Title |
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JP特开2001-31491A 2001.02.06 |
JP特开平11-29398A 1999.02.02 |
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Effective date of registration: 20160418 Address after: 312030 Zhejiang city of Shaoxing province Jianhu road Keqiao District No. 1809 Patentee after: Zhejiang Jinggong Science & Technology Co., Ltd. Address before: 310018, No. 2, No. 9, No. 17, Hangzhou economic and Technological Development Zone, Hangzhou, Zhejiang, Jianggan District Province, fourth floors Patentee before: Hangzhou Jinggong Mechanical & Electrical Research Institute Co., Ltd. |
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