CN102145913A - Preparation method of nano spherical yttrium oxide powder for thermal spraying - Google Patents

Preparation method of nano spherical yttrium oxide powder for thermal spraying Download PDF

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CN102145913A
CN102145913A CN 201110100222 CN201110100222A CN102145913A CN 102145913 A CN102145913 A CN 102145913A CN 201110100222 CN201110100222 CN 201110100222 CN 201110100222 A CN201110100222 A CN 201110100222A CN 102145913 A CN102145913 A CN 102145913A
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yttrium oxide
preparation
oxide powder
powder
nanometer
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于月光
曾克里
任先京
冀晓鹃
侯伟骜
章德铭
张鑫
沈婕
周恒�
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Beijing General Research Institute of Mining and Metallurgy
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Beijing General Research Institute of Mining and Metallurgy
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Abstract

A preparation method of nanometer spherical yttrium oxide powder for thermal spraying relates to a preparation method of spherical yttrium oxide powder agglomerated by high-purity nanometer crystal grains. The preparation method is characterized by comprising the following steps: (1) will Y2O3Adding nitric acid solution into the powder, adding ammonia water for precipitation, and performing aging treatment, filtering, washing and drying to obtain a powdery precursor; (2) y is treated by adopting a water-stable plasma spray gun2O3Precursor to prepare nano Y2O3Primary particles, and collecting by distilled water; (3) adding a binder and a dispersant for size mixing and ball milling; spray drying and granulating; (4) atmospheric plasma torchSintering treatment; (5) and (6) screening. The method solves the problems of low dehydration efficiency, difficult sintering densification of the aggregate, low yield and the like, has controllable powder purity and granularity, and is suitable for industrial mass production. The prepared yttrium oxide powder has high purity, good crystal grains, good adaptability of spraying process of fluidity and apparent density, great market potential and capability of creating obvious economic benefit.

Description

A kind of preparation method of used for hot spraying nanometer spherical yttrium oxide powder
Technical field
A kind of preparation method of used for hot spraying nanometer spherical yttrium oxide powder relates to a kind of preparation method of spherical yttrium oxide powder of being reunited by high-purity nm crystal grain.
Background technology
That yttrium oxide has is heat-resisting, corrosion-resistant, high-temperature stability is good, specific inductivity is high and a series of good physics and chemical property, is widely used in industries such as Aeronautics and Astronautics, electronics, nuclear power and high-performance ceramics mainly as functional materials.Wherein, nanometer Y 2O 3Powder shows the concern that excellent performance enjoys people because of it in fields such as light, electricity, physical-chemical reactions, market potential is huge.
For example, it is rapid prepare the technical development of ceramic layer replacement anodic oxidation aluminum coating with the method for thermospray on the surface of etching machine reaction chamber and electrostatic chuck in recent years.Because yttria coating has the performance of better plasma resistant erosion and longer work-ing life, has become the optimal selection of present known plasma etching machine internal reaction chamber aluminium matter part coating.Yet Japanese FUJIMI company has industrial large-scale production used for hot spraying high-purity nm Y at present 2O 3The single sourcing of powder, product cost and price are all very high, and it is at full stretch to supply.
Prepare nanometer Y at traditional presoma 2O 3Primary granule and further prepare fine and close Y 2O 3In the process of aggregate, also there be not suitable vacuum dewatering apparatus at present, so dewatering efficiency is very low owing to domestic; In addition, Y 2O 3The sintering densification temperature of aggregate is up to more than 1600 ℃, and general heating furnace is difficult to reach requirement; And in sintering process, exist the sintering between the particle, also need carry out fragmentation, classification behind the sintering, so productive rate is very low.Address the above problem for breaking through China high-purity spherical nano Y 2O 3The preparation of dusty material and the production domesticization of correlation technique are significant.
The plasma powder-making technique has characteristics such as equipment is simple, economic, efficient, and suitability is strong.By the high energy plasma flame flow that plasma gun produced, the desirable nanometer powder that purity, granularity are easy to control be can obtain easily, and the oven dry and the sintering processes of high energy consumption need not, effectively reduce production cost.With respect to air plasma spraying, as the spraying medium, cost is lower with deionized water for the steady plasma spraying of water; And energy density is higher, and flame stream is stable, and spray efficiency is very high, is particularly suited for the dystectic oxide ceramic powder of scale operation.
Summary of the invention
Purpose of the present invention is exactly in order to solve in traditional used for hot spraying nano yttrium oxide powdered preparation process, problems such as the primary particle dewatering efficiency is low, coacervate sintering densification difficulty and productive rate are low provide a kind of economy, environmental protection, are suitable for the preparation method of the used for hot spraying nanometer spherical yttrium oxide powder of industrial large-scale production.
The objective of the invention is to be achieved through the following technical solutions.
A kind of preparation method of used for hot spraying nanometer spherical yttrium oxide powder is characterized in that its preparation process step comprises:
(1) with Y 2O 3Powder adds salpeter solution, makes Y (NO 3) 3Solution; Make then Y (NO 3) 3Add ammoniacal liquor in the solution, and constantly stir until form white precipitate, carry out again ripening, more after filtration, absolute ethanol washing, vacuum drying, obtain fluffy white powder presoma;
(2) adopt the steady plasma gun of water to process Y 2O 3Presoma makes Y 2O 3The instantaneous decomposition of presoma, Dehydration get nanometer Y 2O 3Primary granule, and collect by distilled water;
(3) the nanometer Y that distilled water is collected 2O 3Primary granule solution carries out press filtration, adds then that binding agent, dispersant are sized mixing, ball milling; Spray-drying process obtains Y then 2O 3Aggregate;
(4) with Y 2O 3Aggregate carries out atmospheric plasma spray gun sintering processes;
(5) final sizing obtains fine and close high-purity spherical nano yttrium oxide powder.
The preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying of the present invention is characterized in that the Y in the step (1) 2O 3Powder is industrial high-purity Y 2O 3Powder, purity 〉=99.99%, particle size range is 1 ~ 20 μ m.
The preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying of the present invention is characterized in that the Y (NO that makes in the step (1) 3) 3Solution concentration is 0.4 ~ 0.6 mol/L, and adding ammoniacal liquor adjusting pH value is 8.5 ~ 9.5, digestion time 6 ~ 12 hours.
The preparation method of a kind of used for hot spraying nanometer spherical yttrium oxide powder of the present invention is characterized in that the vacuum-drying temperature range in the step (1) is 60 ~ 100 ℃, and be 2 ~ 6 hours time of drying.
The preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying of the present invention is characterized in that adopting in the step (2) the steady plasma gun of water to process Y 2O 3The working media of presoma process is deionized water, and gases used is air, and temperature is 10000 ~ 25000 ℃, and power is 140 ~ 180kW, and powder sending quantity is 30 ~ 50 kg/h.
The preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying of the present invention is characterized in that nanometer Y in the step (2) 2O 3The crystallite dimension of primary granule is less than 80 nm.
The preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying of the present invention is characterized in that the rear nanometer Y that sizes mixing in the step (3) 2O 3The mass ratio of primary granule and water is 1:1 ~ 2; Binding agent is polyvinyl alcohol or polyethylene pyrrole Lip river alkane ketone, and dispersant is ethanol or propane diols or polyethylene glycol, they and nanometer Y 2O 3The mass ratio of primary granule is 2:98 ~ 5:95.
The preparation method of a kind of used for hot spraying nanometer spherical yttrium oxide powder of the present invention, it is characterized in that the spray-drying process process in the step step (3) adopts centrifugal or press spray method, spray-dired inlet temperature is 150 ~ 350 ℃, and temperature out is 100 ~ 250 ℃.
The preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying of the present invention is characterized in that the Y in the step step (3) 2O 3The particle size range of aggregate is 10 ~ 100 μ m, is shaped as spherical or subsphaeroidal.
The preparation method of a kind of used for hot spraying nanometer spherical yttrium oxide powder of the present invention, it is characterized in that the working medium that carries out atmospheric plasma spray gun sintering processes process in the step step (4) is an argon gas, temperature is 8000 ~ 12000 ℃, and power is 30 ~ 60 kW, and powder sending quantity is 5 ~ 15 kg/h.
The preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying of the present invention is characterized in that the granularity preferable range of the high-purity spherical nano yttrium oxide powder after the screening in the step step (5) is 20 ~ 60 μ m, and it is by the high-purity Y of size less than 80 nm 2O 3Crystal grain forms.
The high energy plasma flame flow that method of the present invention produces by the steady plasma gun of water, Y 2O 3Presoma directly pyrolytic changes nanometer Y into 2O 3Primary granule, thus grain growth in the processes such as spray-drying post-drying avoided.In addition, adopt the air plasma spraying method to replace traditional sintering circuit, both can obtain fine and close high pure spherical Y 2O 3Powder has reduced again energy consumption and cost.
Method of the present invention, replace operations such as traditional spraying drying, high temperature sintering with the plasma powder-making technique, problem, energy-saving and cost-reducing, economical and efficient such as solved that dewatering efficiency is low, coacervate sintering densification difficulty and productive rate are low, powder purity and controllable granularity are suitable for industrial large-scale production.Yttrium oxide powder purity 〉=99.9% of preparation, grain-size≤80 nm, flowability<70 s/50g, loose density 〉=1.2 g/cm 3, spraying coating process adaptability is good, and market potential is huge, can create tangible economic benefit.
Embodiment
A kind of preparation method of used for hot spraying nanometer spherical yttrium oxide powder, preparation process comprises following steps:
(1) in concentrated nitric acid solution, adds a certain amount of Y 2O 3Powder is mixed with Y (NO 3) 3Solution; Use then ammoniacal liquor regulator solution pH value, and constantly stir until form white precipitate; With this precipitation ageing a few hours, after filtering by absolute ethanol washing 2 ~ 4 times; Carry out then vacuum drying, obtain fluffy white powder presoma.
(2) the high energy plasma flame flow that produces by the steady plasma gun of water makes Y 2O 3The instantaneous decomposition of presoma, dehydration are also collected by distilled water, obtain nanometer Y 2O 3Primary granule.
(3) to containing nanometer Y 2O 3The solution of primary granule carries out press filtration, regulates the ratio of water; Adding then a certain proportion of binding agent, dispersant etc. sizes mixing; Slip was carried out mechanical ball milling 2 ~ 4 hours; Spray-drying process obtains Y then 2O 3Aggregate.
(4) by the atmospheric plasma spray gun, make Y 2O 3The instantaneous sintering densification of aggregate, nodularization are also collected by powder collection device.
(5) final sizing obtains fine and close high-purity spherical nano yttrium oxide powder.
Y in the step (1) 2O 3Powder is industrial high-purity Y 2O 3Powder, purity 〉=99.99%, particle size range is 1 ~ 20 μ m.Y (NO 3) 3Solution concentration is 0.4 ~ 0.6 mol/L, regulates pH value to 8.5 ~ 9.5, digestion time 6 ~ 12 hours through ammoniacal liquor.The vacuum-drying temperature range is 60 ~ 100 ℃, soaking time 2 ~ 6 hours.
The working medium of the steady plasma treatment of water in the step (2) is a deionized water, and gases used is air, and temperature is 10000 ~ 25000 ℃, and power is 140 ~ 180 kW, and powder sending quantity is 30 ~ 50 kg/h.Nanometer Y 2O 3The crystallite dimension of primary granule is less than 80 nm.
Nanometer Y in the step (3) 2O 3The mass ratio of primary granule and water is 1:1 ~ 2; Binding agent is polyvinyl alcohol or polyethylene pyrrole Lip river alkane ketone, and dispersant is ethanol or propane diols or polyethylene glycol, they and nanometer Y 2O 3The mass ratio of primary granule is 2:98 ~ 5:95.Spray method is centrifugal or pressure type, and spray-dired inlet temperature is 150 ~ 350 ℃, and temperature out is 100 ~ 250 ℃.Y 2O 3The particle size range of aggregate is 10 ~ 100 μ m, is shaped as spherical or subsphaeroidal.
The groundwork medium that atmospheric plasma in the step (4) is handled is an argon gas, and temperature is 8000 ~ 12000 ℃, and power is 30 ~ 60 kW, and powder sending quantity is 5 ~ 15 kg/h.
The granularity preferable range of the high-purity spherical nano yttrium oxide powder in the step (5) after the screening is 20 ~ 60 μ m, and it is by the high-purity Y of size less than 80 nm 2O 3Crystal grain forms.
Embodiment 1
The step of preparation used for hot spraying high-purity spherical nano yttrium oxide powder is as follows:
(1) get 20 kg purity 〉=99.99%, particle mean size is industrial high-purity Y of 5 ~ 10 μ m 2O 3Powder material is dissolved in red fuming nitric acid (RFNA), and being mixed with concentration is the Y (NO of 0.5 mol/L 3) 3Solution; Be the ammoniacal liquor regulator solution pH value to 9 of 2 mol/L then with concentration, and constantly stir until form white precipitate; With this precipitation ageing 8 ~ 10 hours, pass through absolute ethanol washing 2 ~ 3 times after filtering, then in 80 ℃ of vacuum drying 4 hours, obtain fluffy white powder presoma.
(2) the high energy plasma flame flow that produces by the steady plasma gun of water makes Y 2O 3The instantaneous decomposition of presoma, dehydration are also collected by distilled water, obtain crystallite dimension less than the nanometer Y of 80 nm 2O 3Primary granule.The working medium of the steady plasma treatment of water is a deionized water, and gases used is air, and temperature is 12000 ~ 16000 ℃, and power is 150 kW, and powder sending quantity is 35 ~ 40 kg/h.
(3) to containing nanometer Y 2O 3The solution of primary granule carries out press filtration, regulates nanometer Y 2O 3The mass ratio of primary granule and water is 1:1.5; Add then polyvinyl alcohol adhesive, the polyethylene glycol dispersant is sized mixing, they and nanometer Y 2O 3The mass ratio of primary granule is 4:96; Slip was carried out mechanical ball milling 3 hours; Adopt centrifugal spray drying process to carry out spray-drying process, inlet temperature is 280 ℃, and outlet temperature is 150 ℃; Obtaining particle size range is 10 ~ 100 μ m, is shaped as spherical or subglobose Y 2O 3Aggregate.
(4) by the atmospheric plasma spray gun, make Y 2O 3The instantaneous sintering densification of aggregate, nodularization are also collected by powder collection device.The groundwork medium that atmospheric plasma is handled is an argon gas, and temperature is 8000 ~ 10000 ℃, and power is 40 kW, and powder sending quantity is 5 ~ 8 kg/h.
(5) final sizing obtains by the high-purity Y of size less than 80 nm 2O 3The particle size range that crystal grain forms is the fine and close high-purity spherical nano yttrium oxide powder of 20 ~ 60 μ m.
Embodiment 2
The step of preparation used for hot spraying high-purity spherical nano yttrium oxide powder is as follows:
(1) get 20 kg purity 〉=99.99%, particle mean size is industrial high-purity Y of 5 ~ 10 μ m 2O 3Powder material is dissolved in red fuming nitric acid (RFNA), and being mixed with concentration is the Y (NO of 0.5 mol/L 3) 3Solution; Be the ammoniacal liquor regulator solution pH value to 9 of 2 mol/L then with concentration, and constantly stir until form white precipitate; With this precipitation ageing 8 ~ 10 hours, pass through absolute ethanol washing 2 ~ 3 times after filtering, then in 80 ℃ of vacuum drying 4 hours, obtain fluffy white powder presoma.
(2) the high energy plasma flame flow that produces by the steady plasma gun of water makes Y 2O 3The instantaneous decomposition of presoma, dehydration are also collected by distilled water, obtain crystallite dimension less than the nanometer Y of 80 nm 2O 3Primary granule.The working medium of the steady plasma treatment of water is a deionized water, and gases used is air, and temperature is 15000 ~ 18000 ℃, and power is 160 kW, and powder sending quantity is 40 ~ 45 kg/h.
(3) to containing nanometer Y 2O 3The solution of primary granule carries out press filtration, regulates nanometer Y 2O 3The mass ratio of primary granule and water is 1:1.5; Add then polyethylene pyrrole Lip river alkane ketone binding agent, the polyethylene glycol dispersant is sized mixing, they and nanometer Y 2O 3The mass ratio of primary granule is 4:96; Slip was carried out mechanical ball milling 3 hours; Adopt centrifugal spray drying process to carry out spray-drying process, inlet temperature is 280 ℃, and outlet temperature is 150 ℃; Obtaining particle size range is 10 ~ 100 μ m, is shaped as spherical or subglobose Y 2O 3Aggregate.
(4) by the atmospheric plasma spray gun, make Y 2O 3The instantaneous sintering densification of aggregate, nodularization are also collected by powder collection device.The groundwork medium that atmospheric plasma is handled is an argon gas, and temperature is 8000 ~ 10000 ℃, and power is 40 kW, and powder sending quantity is 5 ~ 8 kg/h.
(5) final sizing obtains by the high-purity Y of size less than 80 nm 2O 3The particle size range that crystal grain forms is the fine and close high-purity spherical nano yttrium oxide powder of 20 ~ 60 μ m.
Embodiment 3
The step of preparation used for hot spraying high-purity spherical nano yttrium oxide powder is as follows:
(1) get 20 kg purity 〉=99.99%, particle mean size is industrial high-purity Y of 5 ~ 10 μ m 2O 3Powder material is dissolved in red fuming nitric acid (RFNA), and being mixed with concentration is the Y (NO of 0.5 mol/L 3) 3Solution; Be the ammoniacal liquor regulator solution pH value to 9 of 2 mol/L then with concentration, and constantly stir until form white precipitate; With this precipitation ageing 8 ~ 10 hours, pass through absolute ethanol washing 2 ~ 3 times after filtering, then in 80 ℃ of vacuum drying 4 hours, obtain fluffy white powder presoma.
(2) the high energy plasma flame flow that produces by the steady plasma gun of water makes Y 2O 3The instantaneous decomposition of presoma, dehydration are also collected by distilled water, obtain crystallite dimension less than the nanometer Y of 80 nm 2O 3Primary granule.The working medium of the steady plasma treatment of water is a deionized water, and gases used is air, and temperature is 15000 ~ 18000 ℃, and power is 160 kW, and powder sending quantity is 40 ~ 45 kg/h.
(3) to containing nanometer Y 2O 3The solution of primary granule carries out press filtration, regulates nanometer Y 2O 3The mass ratio of primary granule and water is 1:1.5; Add polyvinyl alcohol adhesive then, alcohol dispersant is sized mixing, they and nanometer Y 2O 3The mass ratio of primary granule is 4:96; Slip was carried out mechanical ball milling 3 hours; Adopt the press spray seasoning to carry out spray-drying process, inlet temperature is 250 ℃, and outlet temperature is 180 ℃; Obtaining particle size range is 10 ~ 100 μ m, is shaped as spherical or subglobose Y 2O 3Aggregate.
(4) by the atmospheric plasma spray gun, make Y 2O 3The instantaneous sintering densification of aggregate, nodularization are also collected by powder collection device.The groundwork medium that atmospheric plasma is handled is an argon gas, and temperature is 8000 ~ 10000 ℃, and power is 40 kW, and powder sending quantity is 5 ~ 8 kg/h.
(5) final sizing obtains by the high-purity Y of size less than 80 nm 2O 3The particle size range that crystal grain forms is the fine and close high-purity spherical nano yttrium oxide powder of 20 ~ 60 μ m.
Embodiment 4
The step of preparation used for hot spraying high-purity spherical nano yttrium oxide powder is as follows:
(1) get 20 kg purity 〉=99.99%, particle mean size is industrial high-purity Y of 5 ~ 10 μ m 2O 3Powder material is dissolved in red fuming nitric acid (RFNA), and being mixed with concentration is the Y (NO of 0.5 mol/L 3) 3Solution; Be the ammoniacal liquor regulator solution pH value to 9 of 2 mol/L then with concentration, and constantly stir until form white precipitate; With this precipitation ageing 8 ~ 10 hours, pass through absolute ethanol washing 2 ~ 3 times after filtering, then in 80 ℃ of vacuum drying 4 hours, obtain fluffy white powder presoma.
(2) the high energy plasma flame flow that produces by the steady plasma gun of water makes Y 2O 3The instantaneous decomposition of presoma, dehydration are also collected by distilled water, obtain crystallite dimension less than the nanometer Y of 80 nm 2O 3Primary granule.The working medium of the steady plasma treatment of water is a deionized water, and gases used is air, and temperature is 15000 ~ 18000 ℃, and power is 160 kW, and powder sending quantity is 40 ~ 45 kg/h.
(3) to containing nanometer Y 2O 3The solution of primary granule carries out press filtration, regulates nanometer Y 2O 3The mass ratio of primary granule and water is 1:1.5; Add then polyethylene pyrrole Lip river alkane ketone binding agent, the propane diols dispersant is sized mixing, they and nanometer Y 2O 3The mass ratio of primary granule is 4:96; Slip was carried out mechanical ball milling 3 hours; Adopt the press spray seasoning to carry out spray-drying process, inlet temperature is 250 ℃, and outlet temperature is 180 ℃; Obtaining particle size range is 10 ~ 100 μ m, is shaped as spherical or subglobose Y 2O 3Aggregate.
(4) by the atmospheric plasma spray gun, make Y 2O 3The instantaneous sintering densification of aggregate, nodularization are also collected by powder collection device.The groundwork medium that atmospheric plasma is handled is an argon gas, and temperature is 10000 ~ 12000 ℃, and power is 50 kW, and powder sending quantity is 8 ~ 12 kg/h.
(5) final sizing obtains by the high-purity Y of size less than 80 nm 2O 3The particle size range that crystal grain forms is the fine and close high-purity spherical nano yttrium oxide powder of 20 ~ 60 μ m.

Claims (11)

1. the preparation method of a used for hot spraying nanometer spherical yttrium oxide powder is characterized in that its preparation process step comprises:
(1) with Y 2O 3Powder adds salpeter solution, makes Y (NO 3) 3Solution; Make then Y (NO 3) 3Add ammoniacal liquor in the solution, and constantly stir until form white precipitate, carry out again ripening, more after filtration, absolute ethanol washing, vacuum drying, obtain fluffy white powder presoma;
(2) adopt the steady plasma gun of water to process Y 2O 3Presoma makes Y 2O 3The instantaneous decomposition of presoma, Dehydration get nanometer Y 2O 3Primary granule, and collect by distilled water;
(3) the nanometer Y that distilled water is collected 2O 3Primary granule solution carries out press filtration, adds then that binding agent, dispersant are sized mixing, ball milling; Spray-drying process obtains Y then 2O 3Aggregate;
(4) with Y 2O 3Aggregate carries out atmospheric plasma spray gun sintering processes;
(5) final sizing obtains fine and close high-purity spherical nano yttrium oxide powder.
2. the preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying according to claim 1 is characterized in that the Y in the step (1) 2O 3Powder is industrial high-purity Y 2O 3Powder, purity 〉=99.99%, particle size range is 1 ~ 20 μ m.
3. the preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying according to claim 1 is characterized in that the Y (NO that makes in the step (1) 3) 3Solution concentration is 0.4 ~ 0.6 mol/L, and adding ammoniacal liquor adjusting pH value is 8.5 ~ 9.5, digestion time 6 ~ 12 hours.
4. the preparation method of a kind of used for hot spraying nanometer spherical yttrium oxide powder according to claim 1 is characterized in that the vacuum-drying temperature range in the step (1) is 60 ~ 100 ℃, and be 2 ~ 6 hours time of drying.
5. the preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying according to claim 1 is characterized in that adopting in the step (2) the steady plasma gun of water to process Y 2O 3The working media of presoma process is deionized water, and gases used is air, and temperature is 10000 ~ 25000 ℃, and power is 140 ~ 180 kW, and powder sending quantity is 30 ~ 50 kg/h.
6. the preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying according to claim 1 is characterized in that nanometer Y in the step (2) 2O 3The crystallite dimension of primary granule is less than 80 nm.
7. the preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying according to claim 1 is characterized in that the rear nanometer Y that sizes mixing in the step (3) 2O 3The mass ratio of primary granule and water is 1:1 ~ 2; Binding agent is polyvinyl alcohol or polyethylene pyrrole Lip river alkane ketone, and dispersant is ethanol or propane diols or polyethylene glycol, they and nanometer Y 2O 3The mass ratio of primary granule is 2:98 ~ 5:95.
8. the preparation method of a kind of used for hot spraying nanometer spherical yttrium oxide powder according to claim 1, it is characterized in that the spray-drying process process in the step step (3) adopts centrifugal or press spray method, spray-dired inlet temperature is 150 ~ 350 ℃, and temperature out is 100 ~ 250 ℃.
9. the preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying according to claim 1 is characterized in that the Y in the step step (3) 2O 3The particle size range of aggregate is 10 ~ 100 μ m, is shaped as spherical or subsphaeroidal.
10. the preparation method of a kind of used for hot spraying nanometer spherical yttrium oxide powder according to claim 1, it is characterized in that the working medium that carries out atmospheric plasma spray gun sintering processes process in the step step (4) is an argon gas, temperature is 8000 ~ 12000 ℃, power is 30 ~ 60 kW, and powder sending quantity is 5 ~ 15 kg/h.
11. the preparation method of a kind of nano spherical yttrium oxide powder for thermal spraying according to claim 1, the granularity preferable range that it is characterized in that the high-purity spherical nano yttrium oxide powder after the screening in the step step (5) is 20 ~ 60 μ m, and it is by the high-purity Y of size less than 80 nm 2O 3Crystal grain forms.
CN 201110100222 2011-04-21 2011-04-21 Preparation method of nano spherical yttrium oxide powder for thermal spraying Pending CN102145913A (en)

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CN103184400A (en) * 2011-12-27 2013-07-03 上海宝钢设备检修有限公司 Nano-ceramic composite spraying powder and preparation method for same
CN104357785A (en) * 2014-11-14 2015-02-18 北京矿冶研究总院 Method for rapidly preparing high-purity yttrium oxide coating for plasma etching machine
CN107188214A (en) * 2017-01-24 2017-09-22 江苏师范大学 A kind of preparation method of yttrium oxide nano-powder and nanostructured
CN104752135B (en) * 2013-12-30 2018-01-23 中微半导体设备(上海)有限公司 The preparation method of plasma processing apparatus and electrostatic chuck and electrostatic chuck
CN108455649A (en) * 2018-01-09 2018-08-28 佛山优维士光电科技有限公司 A kind of production method of ball shaped nano yttrium oxide powder for quartz burner
CN111644612A (en) * 2020-06-19 2020-09-11 安徽省春谷3D打印智能装备产业技术研究院有限公司 Preparation method of plasma sintering agglomerated metal ceramic thermal spraying composite powder
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CN112209420A (en) * 2020-11-05 2021-01-12 袁蕾 Preparation method of nano-scale yttrium oxide powder
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CN113603485A (en) * 2021-08-24 2021-11-05 湖南威斯康新材料科技有限公司 Preparation method of yttrium oxide grinding beads
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Application publication date: 20110810