CN102145265A

CN102145265A - Piezoelectric microfluidic mixer

Info

Publication number: CN102145265A
Application number: CN201110091097.8A
Authority: CN
Inventors: 何秀华; 李富; 禚洪彩
Original assignee: Jiangsu University
Current assignee: Jiangsu University
Priority date: 2011-04-12
Filing date: 2011-04-12
Publication date: 2011-08-10
Anticipated expiration: 2031-04-12
Also published as: CN102145265B

Abstract

The invention discloses a piezoelectric microfluidic mixer, which is characterized in that: a deformation mixing pipe is communicated between two pump inlets and a pump cavity, and between a pump outlet and the pump cavity respectively, the deformation part of the deformation mixing pipe is composed of seven pipelines in a communicating way, a third pipeline is parallel to a first pipeline and the third pipeline, a semicircular second pipeline and a conical seventh pipeline are connected in parallel between the right end of the first pipeline and the left end of the third pipeline, the large end of the conical seventh pipeline is connected with the first pipeline and the second pipeline while the small end of the conical seventh pipeline is connected to the side part of the third pipeline; a semicircular sixth pipeline and a conical fourth pipeline are connected in parallel between the left end of a fifth pipeline and the right end of a third pipeline, and the large end of the conical fourth pipeline is connected with the right end of the third pipeline and the sixth pipeline respectively while the small end of the conical fourth pipeline is connected to the sidewall of the fifth pipeline; two fluids to be mixed flow, through the inlets, into the deformation mixing pipe at the left side for preliminary mixing, then enter the pump cavity for sufficient mixing and finally flow out of the outlet through the mixing pipe at the right side, so satisfactory effect can be achieved by sufficiently mixing the fluids three times, and simultaneously, pumping and mixing are realized.

Description

A kind of piezoelectric micromotor flow mixer

Technical field

The present invention relates to the micro-fluid pump technical field in the microfluid machinery, relate in particular to a kind of piezoelectric micromotor flow mixer that micro liquid mixes, flow direction is controlled that carries out.

Background technology

Microfluid mixer is formed by connecting by micro fluid batcher, Micropump, little valve and microchannel etc., is used for the abundant mixing of the preceding all ingredients of biochemical reaction, is the important component part in the micro-fluid chip.Microfluid mixer is compared with the mixing arrangement of macro-size, size is dwindled, reduce energy consumption in the running system and sample, reagent dosage greatly, and response speed is fast, therefore the accuracy height has a wide range of applications in fields such as chemical analysis, biology and chemical sensitisation, molecular separation, nucleic acid ordering and analysis, environmental monitorings.

According to having or not external power source, micro-mixer roughly can be divided into two kinds of passive microfluid mixer and active mode mixer for microflow, and passive microfluid mixer mainly contains bending channel formula, separating-closing type, reflux cycle formula, staggered herringbone fashion, shunting/shutoff type etc.; Active mode mixer for microflow divides by action principle and can be divided into that electrodynamometer type, magnetomotive formula, ultrasonic type, branch are pouring-in, piezoelectric type, mangneto formula, jetting type, mechanical type etc.At present, the size of the microchannel in the microfluid mixer arrives in the scope of hundreds of micron about tens greatly, there is not eddy current to produce to such an extent as to the Reynolds number of liquid is very little in the microchannel, mixing between liquid is based on molecular diffusion, make incorporation time compare that macroscopical situation prolongs greatly and the mixed effect variation, therefore must take special mode to increase the little contact area between liquid or strengthen convection current, improve mixing efficiency.

Summary of the invention

The object of the present invention is to provide a kind of piezoelectric micromotor flow mixer of realizing pumping and mixed function, response speed is fast, accuracy height, good mixing effect.

The technical solution used in the present invention is: have the last matrix on the pump housing and top thereof, two pump inlets, a pump discharge and a pump chamber are arranged on the last matrix, pump chamber is positioned at the matrix middle, and pump inlet and pump discharge lay respectively at the pump chamber both sides; Snout cavity and outlet plenum are arranged on the pump housing, snout cavity is communicated with two pump inlets, outlet plenum is communicated with pump discharge, directly over the pump chamber and be positioned at matrix and be provided with piezoelectric vibrator, between two pump inlets and pump chamber, all be communicated with a distortion mixing tube between pump discharge and the pump chamber, distortion mixing tube two ends are non-crushed elements, the centre is a crushed element, described crushed element is communicated with by seven pipelines and forms, first pipeline and the 5th pipeline are communicated with the non-crushed element at distortion mixing tube two ends and both center lines respectively on same straight line, the 3rd pipeline and first, the 3rd pipeline is parallel, be connected semicircle second pipeline and taper the 7th pipeline in parallel between the first pipeline right-hand member and the 3rd pipeline left end, semicircle second pipeline and the 3rd pipeline left end are tangent, and the big end of taper the 7th pipeline connects first, second pipeline, small end is connected in the 3rd pipeline sidepiece; Be connected semicircle the 6th pipeline and taper the 4th pipeline in parallel between the 5th pipeline left end and the 3rd pipeline right-hand member, the big end of taper the 4th pipeline connects the 3rd pipeline right-hand member respectively and the 6th pipeline, small end are connected in the 5th pipe side wall; Semicircle the 6th pipeline and the 3rd pipeline right-hand member are tangent; The 6th pipeline geometry size is identical with second pipeline, and the geometry size of the 7th pipeline is identical with the 4th pipeline.

The invention has the beneficial effects as follows:

1, the distortion mixing tube in two kinds of fluids process imports inflow left sides to be mixed enters fully mixing in the pump chamber after preliminary the mixing in pipe, and the mixing tube through the right side flows out from exporting again, fully mixes through three times to reach desirable effect.

2, moving up and down by piezoelectric vibrator, make the pump chamber internal pressure constantly change, thereby the convection current that increases fluid mixes, further promoted fluid to realize mixing rapidly and uniformly, can realize pumping and mixed function simultaneously, response speed is fast, the accuracy height, good mixing effect can reach even mixing after 0.4 second.

Description of drawings

Fig. 1 looks cutaway view for the master of structure of the present invention;

Fig. 2 is an A-A upwarding cutaway view among Fig. 1;

Fig. 3 is the structural representation of distortion mixing tube 6 among Fig. 2;

Fig. 4 is the enlarged diagram that distortion mixing tube 6 is located in the I part among Fig. 2;

Fig. 5 is the structure enlarged drawing of piezoelectric vibrator 3 among Fig. 1;

Among the figure: 1. go up matrix; 2. pump inlet; 3. piezoelectric vibrator; 4. pump discharge; 5. the pump housing; 6. distortion mixing tube; 7. pump chamber; 8. the first mixing tube import; 9. the second mixing tube import; 10. mixing tube outlet; 11. piezoelectric ceramics; 12. electrode layer; 13. adhesive; 14. elastic substrates; 61,62,63,64,65,66,67. the first, second, third, fourth, the 5th, the 6th, the 7th pipelines.

The specific embodiment

As Fig. 1-2, the present invention has the pump housing 5, and the material of the pump housing 5 is a silicon chip, and the pump housing 5 tops are to go up matrix 1, and the pump housing 5 is glass with the material of last matrix 1, and the pump housing 5 combines by anode linkage technology with last matrix 1.Utilize Laser Processing to go out two pump inlets 2, a pump discharge 4 and a pump chamber 7 on last matrix 1, wherein pump chamber 7 is positioned at the middle of matrix 1, and pump inlet 2 and pump discharge 4 lay respectively at pump chamber 7 both sides.The radius of pump chamber 7 is 1500, and the height of pump chamber 7 is 130.Process snout cavity and outlet plenum with dry etch process on the pump housing 5, snout cavity is communicated with pump inlet 2 on the last matrix 1, and outlet plenum is communicated with pump discharge 4 on the last matrix 1.Between two pump inlets 2 and pump chamber 7 and between pump discharge 4 and the pump chamber 7, all be communicated with a distortion mixing tube 6.Directly over pump chamber 7, and be positioned at piezoelectric vibrator 3 is set on the matrix 1.

As Fig. 3, distortion mixing tube 6 two ends are non-crushed elements, the intermediate connection crushed element.The non-crushed element of distortion mixing tube 6 left ends between two pump inlets 2 and the pump chamber 7 has first, second

mixing tube import

8,9, and this first, second

mixing tube import

8,9 is communicated with two pump inlets 2 respectively, the non-crushed element of right-hand member is communicated with pump chamber 7.Pump discharge 4 is communicated with pump chamber 7, its right-hand member with the non-crushed element of distortion mixing tube 6 left ends between the pump chamber 7 non-crushed element has mixing tube outlet 10, and mixing tube outlet 10 is communicated with pump discharge 4.First, second

mixing tube import

8,9 is respectively the import of two kinds of liquid to be mixed.

As shown in Figure 4, the crushed element of distortion mixing tube 6 is made up of 61,62,63,64,65,66,67 connections of the first, second, third, fourth, the 5th, the 6th, the 7th pipeline.Wherein, first pipeline 61 and the 5th pipeline 65 are straight pipelines, the cross section all is squares, both center lines are on same straight line, first pipeline 61 is communicated with the non-crushed element that is out of shape mixing tube 6 two ends respectively with the 5th pipeline 65, the 3rd pipeline 63 also is a straight pipeline, and is parallel with the first, the 3rd pipeline 61,63.Semicircle second pipeline 62 and taper the 7th pipeline 67 are attempted by between first pipeline, 61 right-hand members and the 3rd pipeline 63 left ends, and semicircle second pipeline 62 and the 3rd pipeline 63 left ends are tangent.The big end of taper the 7th pipeline 67 connects first,

second pipeline

61,62, and the small end of taper the 7th pipeline 67 is connected in the sidepiece of the 3rd pipeline 63.Taper the 7th pipeline 67 is incident upon the level projection length on the 3rd pipeline 63, and the perpendicular projection height that taper the 7th pipeline 67 is incident upon on second pipeline 62 is

=130.The square sectional length of side of taper the 7th pipeline 67 small ends is.Semicircle the 6th pipeline 66 and taper the 4th pipeline 64 are attempted by between the 5th pipeline 65 left ends and the 3rd pipeline 63 right-hand members, the big end of taper the 4th pipeline 64 connects the 3rd pipeline 63 right-hand members and the 6th pipeline 66 respectively, and the small end of taper the 4th pipeline 64 is connected in the sidewall of the 5th pipeline 65.Semicircle the 6th pipeline 66 and the 3rd pipeline 63 right-hand members are tangent.The big end distance of taper the 4th pipeline 64 from the distance of the 7th pipeline 67 small ends is.The cross section of first pipeline 61, the 3rd pipeline 63, the 5th pipeline 65 is the identical square of the length of side, and its length of side all is

=130.The cross section of second pipeline 62 also is a square, its length of side

=130, with

Identical.The 6th pipeline 66 geometry sizes are identical with second pipeline 62, and the geometry size of the 7th pipeline 67 is identical with the 4th pipeline 64.

As shown in Figure 5, piezoelectric vibrator 3 is circular composite structured, comprises piezoelectric ceramics 11, electrode layer 12, adhesive 13 and elastic substrates 14, and elastic substrates 14 materials are brass, and elastic substrates 14 is fixed with periphery, is positioned at the center position on matrix 1 top.Piezoelectric ceramics 11 is arranged at elastic substrates 14 tops, is one deck adhesive 13 between piezoelectric ceramics 11 and elastic substrates 14, and adhesive 13 is made for conductive epoxy resin, by adhesive 13 piezoelectric ceramics 11 and elastic substrates 14 fixedly is bonded together.On piezoelectric ceramics 11, be provided with the very thin electrode layer of one deck 12.Piezoelectric ceramics 11 radius Rs 1 are 1130, and elastic substrates 14 radius Rs 2 are 1500.

Piezoelectric vibrator 3 is driving elements of the present invention, adopts 50V or 130V sinusoidal voltage, and frequency is 130Hz, and vibration mode adopts the radial expansion vibration.

When the present invention worked, two pump inlets 2 were as the import of two kinds of different fluid, and fluid can be realized mixing after through distortion mixing tube 6 and pump chamber 7, and pump discharge 4 is as the outlet of mixture.Load alternating voltage at piezoelectric vibrator 3 two ends, piezoelectric vibrator 3 can produce flexural deformations and along with the electric voltage frequency up-down vibration, this vibration drives pump chamber 7 fluid movement, the motion of piezoelectric vibrator 3 can be divided into to top offset and downward displacement movement, then flow process relatively just are divided into suction process and discharge process in the pump chamber 7.When piezoelectric vibrator 3 moved upward, pump chamber 7 volumes increased, and fluid flows into pump chamber 7 through the distortion mixing tube 6 of pump chamber 7 both sides, and at this moment, micro-mixer is in suction condition; On the contrary, when piezoelectric vibrator 3 moves downward, fluid flows out pump chambers 7 through the distortion mixing tube 6 of pump chamber 7 both sides, and micro-mixer is in the state of pumping.Two distortion mixing tubes 6 are equivalent to anemostat and collapsible tube, when being in suction condition, because the left side of pump inlet 2(Fig. 2) flow resistance is than the right side of pump discharge 4(Fig. 2) flow resistance is little, the fluid that flows into from pump inlet 2 is than pump discharge more than 4, and be in when pumping state when it, because the flow resistance of pump inlet 2 is bigger than pump discharge 4, the fluid that pump discharge 4 flows out is than pump inlet more than 2, flow into from pump inlet 2 so micro-mixer presents fluid, flow out from pump discharge 4.

Claims

1. piezoelectric micromotor flow mixer, last matrix (1) with the pump housing (5) and top thereof, two pump inlets (2), a pump discharge (4) and a pump chamber (7) are arranged on the last matrix (1), pump chamber (7) is positioned at matrix (1) middle, and two pump inlets (2) and pump discharge (4) lay respectively at pump chamber (7) both sides; The pump housing has snout cavity and outlet plenum on (5), snout cavity is communicated with two pump inlets (2), outlet plenum is communicated with pump discharge (4), directly over the pump chamber (7) and be positioned at matrix (1) and be provided with piezoelectric vibrator (3), it is characterized in that: between two pump inlets (2) and pump chamber (7), all be communicated with a distortion mixing tube (6) between pump discharge (4) and the pump chamber (7), distortion mixing tube (6) two ends are non-crushed elements, the centre is a crushed element, described crushed element is by seven pipelines (61,62,63,64,65,66,67) be communicated with composition, first pipeline (61) and the 5th pipeline (65) are communicated with the non-crushed element at distortion mixing tube (6) two ends and both center lines respectively on same straight line, the 3rd pipeline (63) and first, the 3rd pipeline (61,63) parallel, be connected semicircle second pipeline (62) and taper the 7th pipeline (67) in parallel between first pipeline (61) right-hand member and the 3rd pipeline (63) left end, semicircle second pipeline (62) is tangent with the 3rd pipeline (63) left end, and the big end of taper the 7th pipeline (67) connects first, second pipeline (61,62), small end is connected in the 3rd pipeline (63) sidepiece; Be connected semicircle the 6th pipeline (66) and taper the 4th pipeline (64) in parallel between the 5th pipeline (65) left end and the 3rd pipeline (63) right-hand member, taper the 4th pipeline (64) end greatly connects the 3rd pipeline (63) right-hand member respectively and the 6th pipeline (66), small end are connected in the 5th pipeline (65) sidewall; Semicircle the 6th pipeline (66) is tangent with the 3rd pipeline (63) right-hand member; The 6th pipeline (66) geometry size is identical with second pipeline (62), and the geometry size of the 7th pipeline (67) is identical with the 4th pipeline (64).

2. a kind of piezoelectric micromotor flow mixer according to claim 1, it is characterized in that: the first, the 3rd, the 5th pipeline (61,63,65) is a straight pipeline, and the cross section all is that the length of side is 130 square; Taper the 7th pipeline (67) is incident upon the level projection length on the 3rd pipeline (63), the perpendicular projection height that is incident upon on second pipeline (62) is

=130; The little end section of taper the 7th pipeline (67) is the square of the length of side, and the big end distance of taper the 4th pipeline (64) is from the 7th pipeline (67) Long-toe-short-heel.

3. a kind of piezoelectric micromotor flow mixer according to claim 1, it is characterized in that: piezoelectric vibrator (3) is for circular composite structured, comprise piezoelectric ceramics (11), electrode layer (12), adhesive (13) and elastic substrates (14), elastic substrates (14) is positioned at matrix (1) top center position; Piezoelectric ceramics (11) is arranged at elastic substrates (14) top, is one deck adhesive (13) between piezoelectric ceramics (11) and elastic substrates (14), is provided with one deck electrode layer (12) above the piezoelectric ceramics (11); Piezoelectric ceramics (11) radius is 1130, and elastic substrates (14) radius is 1500; Pump chamber (7) radius is 1500, highly be 130.