CN1021390C - Glow-discharge tube for analysis - Google Patents
Glow-discharge tube for analysis Download PDFInfo
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- CN1021390C CN1021390C CN 85101374 CN85101374A CN1021390C CN 1021390 C CN1021390 C CN 1021390C CN 85101374 CN85101374 CN 85101374 CN 85101374 A CN85101374 A CN 85101374A CN 1021390 C CN1021390 C CN 1021390C
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- tube
- anode
- test portion
- glow
- discharge
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Abstract
The present invention relates to a glow discharge tube used as the excitation source of a test material of lightening spectroanalysis, etc., which is characterized in that air exhaust is carried out by surrounding narrow gaps on the surfaces of an insulation tube of an anode tube and the test material to keep a certain pressure in the anode tube, and glow discharge can be carried out between the anode tube and the test material. Compared with the anode tube, the insulation tube is more protrudent towards one side of the test material, and thus, even if test material vapour is attached to an air exhaust passage, a short circuit is not generated between an anode and a cathode. The test material can be analyzed in high efficiency.
Description
The invention relates to the device that comes the contained composition of analysis of material with glow discharge, particularly about the improvement of glow discharge tube.
Utilize the driving source of glow discharge as analysis of material composition.Test portion is placed on negative electrode one side, makes between itself and the anode and produces glow discharge, because cathodic sputtering, the test portion material disperses in region of discharge and is energized and luminous, takes out this light by spectroscopic assay, can analysis of material.The glow discharge tube that above-mentioned emission spectroanalysis is used is known, for example No. 760451 (special public clear No. 4921680) specification of Japan Patent.
What Fig. 3 represented is the pattern of former glow discharge tube, and anode tube T wears in the past and gets light and extend in the hollow space of cathode K with anode bodies A empty in the middle of the window W, and test portion S is set, and blocks the hollow space of cathode K.Insulate by insulation board 1 between cathode K and the anode bodies A.Inertia discharge gass such as argon feed from air supply opening IN, the exhaust outlet 02 that exhaust outlet of opening from anode bodies 01 and cathode K open, these two local discharges.Like this, the space in anode tube T forms the glow discharge zone.In this region of discharge, because the test portion material that disperses of cathodic sputtering is with vapor state adrift, excited target and luminous.
Existing this glow discharge tube as mentioned above, inserts anode tube T in the hollow space of cathode K, leave clearance G
4, place test portion at an end of this hollow space with the form of shutoff, like this, and cathode K keep forming between idiostatic test portion and the anode tube glow discharge zone.In order to keep normal glow discharge, the discharging gap G between anode tube end face and test portion
3Should be in accordance with regulations distance be provided with, simultaneously this region of discharge heart must keep appropriate vacuum (2～20Torr), for this reason will be to above-mentioned region of discharge, one side is from anode tube periphery forced exhaust, one side is discharged.
In above-mentioned existing glow discharge tube, the steam of test portion thing can be attached to clearance G with exhaust airstream
3, G
4The two sides on, bridging anode tube T and test portion S and cathode K, this causes short circuit easily.In order to prevent such fault, must take off test portion S and cathode K from anode bodies A, to clearance G
3, G
4The surface repeatedly clean, for the many test portions of sputter amounts such as galvanized steel plain sheet, in fact almost each returns to analyze and all will once clean.And when this cleaning back assembling discharge tube, anode tube T can not contact with cathode K, especially note.This cleaning work needs 15 minutes time, and be 1-3 minute real analysis time, and the time of actual usefulness is wanted just can finish more than 5 times, for the quality management of making electroplating steel plate etc., just becomes big obstacle and impairment in the time of must analyzing continuously.And, because dismounting, assembly working can make clearance G at every turn
3, G
4Size change, become the reason that the repeatability of analysis result degenerates.
In addition, the clearance G of test portion S and anode tube end face
3, along with the difference of the material of test portion, applied voltage, analysis purpose is also done some variations,, obtain normal glow discharge for fear of being short-circuited, wish to maintain the degree of 0.3～0.5mm.Owing to must keep suitable pressure in the region of discharge, its vacuum degree is in the degree of 2～20Torr, so clearance G simultaneously
3Should be narrow as far as possible, wish to have big exhaust resistance.
In the structure of existing discharge tube, because this clearance G
3Stipulate to make according to discharging gap, so in order to strengthen the exhaust resistance of region of discharge, keep desirable vacuum degree, the exhaust path of navigation G of anode tube periphery
4Do not only narrowly but also long.Its result becomes the reason that causes short circuit owing to test portion as mentioned above adhering to of evaporant.
The objective of the invention is to eliminate the shortcoming that above-mentioned existing glow discharge tube exists.In the present invention, be to load onto insulated tube around anode tube, the end edge portion of this insulated tube is more side-prominent to test portion one than anode tube, forms the gap between this insulated tube and test portion face, the exhaust channel that the constituent ratio discharging gap is narrow, drag effect is played to exhaust airstream in this gap.Anode tube has than the inner ora terminalis part of insulated tube of surrounding it, and test portion between produce glow discharge.Therefore, though the steam of test portion material with the two sides of the air-flow of discharging attached to the gap, bridge gap can not form electric short circuit yet.
What Fig. 1 represented is the examples of implementation (profile) of emission spectroanalysis of the present invention with glow discharge tube.What Fig. 2 represented is another examples of implementation (profile) of glow discharge tube of the present invention.What Fig. 3 represented is the ideograph of existing emission spectroanalysis with glow discharge tube.
Below with reference to the accompanying drawings the present invention is elaborated.Fig. 1 is the examples of implementation of the emission spectroanalysis that adopts of the present invention with glow discharge tube.In Fig. 1, the anode tube 2 that connects on the anode bodies 1 is surrounded by insulated tube 8, and the end edge portion proportion by subtraction anode tube 2 of insulated tube 8 is more side-prominent to test portion 4 one.Test portion 4 is supported seat 5 and resilient test portion pressing plate 6 by the conductivity test portion, compacted and be supported on the overcoat part 3 and the ora terminalis of anode tube opposed.Overcoat part 3 is insulating components, towards clearance G
2(exhaust path of navigation) be partially submerged into electric conductor 9.The 7th, the collector lens of exciting light guiding optical splitter, the 13rd, the support member of lens 7.14, the 15, the 16th, set bolt, the 17,18, the 19th, the sealing ring of partition extraneous air.Positive voltage is supplied with anode tube 2 by anode bodies 1, and negative voltage supports seat 5 to supply with test portion 4 by test portion.For example test portion 4 is electroplating steel plates and has the steel plate that semiconductor etc. is analyzed object.Discharge gas (argon) feeds from air inlet 10, from exhaust outlet 11,12 to the vacuum pump exhaust.
In the structure of existing glow discharge tube, exhaust resistance partly is by the head portion of anode tube and the gap between the test portion surface to region of discharge as mentioned above, the discharging gap decision of just setting.One of feature of the present invention just is, can separate with discharging gap, sets the exhaust resistance to region of discharge.That is to say, owing to can allow anode tube 2 discharge separately,, can be set at the degree of 0.3～0.5mm, thereby the short circuit that causes because of adhering to of test portion material can not take place corresponding to analytic target and target with the distance of test portion 4.On the other hand owing to can apply the ora terminalis part of insulated tube 8 and the clearance G of test portion 4 to the resistance of exhaust airstream by insulated tube 8
1Than discharging gap G
0The degree of narrow 0.2mm.Insulated tube 8 usefulness thickness are the pipe of 2mm in present embodiment, and to keeping the suitable pressure of region of discharge, very necessary exhaust resistance can be by clearance G
1Provide.In Fig. 1, insulated tube 8 usefulness screw threads are fixed on the anode tube 2, in the axial direction can minute movement.24 expression screw thread bound fractions.
In above Fig. 1 embodiment, anode tube and 2 inside keep the only pressure of glow discharge, produce same cathodic sputtering at the circular portion relative with anode tube 2 of test portion 4.The test portion steam that produces passes through clearance G
1, G
2Be discharged from, even attached to clearance G
1, G
2Circumferential surface form bridge joint, anode and negative electrode are not short-circuited yet, and also do not have influence to measuring light.Because bridge joint only produces on the part in gap, can not cause exhaust failure, analysis can connect to be carried out.Have, a part of not expressing on the figure is arranged on anode bodies 1, overcoat part 3, test portion and supports seat 5 inside, the flowing water path that is used to cool off again.Besides, if adopt in the inner form that anode tube is installed of insulated tube.The shape of outer surface also can be different from Fig. 1 such.
Because clearance G
2The surface of (exhaust path of navigation) all is an insulator, and the voltage between negative electrode and the anode produces unsettled change, makes the analysis precision variation, so in Fig. 1 electric conductor 9 is embedded overcoat part 3.Same reason is forming clearance G
2Face on when being attached with ion because attachment surface is an insulator, electric charge is local to be existed, it is inhomogeneous that Potential distribution becomes, and produces discharge because this discharge, voltage is affected between the anode negative electrode.But because conductor 9 Potential distribution homogenizing one have been arranged, can prevent above-mentioned variation in voltage, moreover electric conductor 9 is not connected directly with anode and negative electrode.
Fig. 2 is another embodiment of the present invention.Fig. 2 is also the same with Fig. 1, is the emission spectroanalysis glow discharge tube, and the part identical with Fig. 1 marks with same symbol.The place different with Fig. 1 is that the overcoat part 21 of pushing test portion 4 is electroconductive member, is installed on the anode bodies 1 by the insulating properties connecting bolt by isolated listrium 22.Negative voltage is supplied with test portion 4 by overcoat part 21, and overcoat part 21 and test portion 4 constitute negative electrode.But negative voltage also can support seat 5 to supply with test portion 4 from test portion.The examples of implementation of this Fig. 2 also have same effect with Fig. 1 example.
With regard to above-mentioned Fig. 1, Fig. 2, even because in clearance G
2In (exhaust path of navigation), what the test portion material was arranged adheres to the generation bridge joint, does not also produce the short circuit on electric, thus once assemble glow discharge tube, afterwards over a long time in (almost being for good and all) needn't be to exhaust path of navigation G
2The two sides do dismounting cleaning and use continuously.In addition, even because clearance G
1Last generation bridge joint does not produce the short circuit on electric yet, will be suitable for glow discharge most so only consider the air pressure in the anode tube, adjusts G
1The gap.In fact, insulator 8 and anode tube 2 usefulness are threaded G
1The interval also can regulate.
Other effects of the present invention are, even because the close distortion of atmospheric pressure test portion generation anode pipe, but by the supporting role of insulated tube 8, can not produce the short circuit on electric.Therefore, even thin material does not worry producing short circuit yet, can analyze, practicality significantly improves.
More than embodiment when being used for emission spectroanalysis be illustrated, but the invention is not restricted on emission spectroanalysis, for example quality analysis also can be suitable for.For the situation of quality analysis, shorten anode bodies and anode tube, take out the test portion ion that produces, import to the mass analyzer of using electromagnetic field.
Glow discharge tube of the present invention as previously discussed is applicable to as test portion driving sources such as emission spectroanalysis and quality analyses, also is applicable to simultaneously on the analytical equipment of various material compositions such as analyzing electroplating steel plate and wafer.
Claims (3)
1, glow-discharge tube for analysis is characterized in that:
Ora terminalis part in relative anode tube, between across the regulation discharging gap, be configured to constitute the test portion of negative electrode, the outside by anode tube ora terminalis part, in the glow discharge tube of discharging gap part exhaust, at anode tube peripheral unit insulated tube, an end of this insulated tube is more side-prominent to test portion one than the ora terminalis part of sun level pipe, makes the exhaust channel of region of discharge between anode one negative electrode narrower than above-mentioned discharging gap in fact; And have the overcoat part, be used for and anode tube on form the exhaust path of navigation between the insulated tube outer surface adorned, raise solidating in predetermined gap simultaneously and decide test portion.
2, glow-discharge tube for analysis according to claim 2, above-mentioned overcoat partly are to have and anode and all unconnected electric conductor insulating component of negative electrode with the embedding of exhaust path of navigation contact portion.
3, glow-discharge tube for analysis according to claim 1, the insulated tube of its anode tube peripheral unit are to be fixed on the anode tube with screw thread, make it in the axial direction can minute movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 85101374 CN1021390C (en) | 1985-04-01 | 1985-04-01 | Glow-discharge tube for analysis |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 85101374 CN1021390C (en) | 1985-04-01 | 1985-04-01 | Glow-discharge tube for analysis |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85101374A CN85101374A (en) | 1987-01-31 |
| CN1021390C true CN1021390C (en) | 1993-06-23 |
Family
ID=4791805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 85101374 Expired - Fee Related CN1021390C (en) | 1985-04-01 | 1985-04-01 | Glow-discharge tube for analysis |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1021390C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5186599B2 (en) * | 2009-09-18 | 2013-04-17 | 株式会社アルバック | Electron gun, vacuum processing equipment |
| CN102829732B (en) * | 2011-06-15 | 2016-07-06 | 钢研纳克检测技术有限公司 | A kind of twin-laser On-line sampling system device and method for glow-discharge sputtering depth survey |
-
1985
- 1985-04-01 CN CN 85101374 patent/CN1021390C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN85101374A (en) | 1987-01-31 |
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